公开(公告)号：US20250112124A1

公开(公告)日：2025-04-03

申请号：US18374555

申请日：2023-09-28

Applicant: Intel Corporation

Inventor： Jeremy Ecton ,  Aleksandar Aleksov ,  Leonel Arana ,  Gang Duan ,  Benjamin Duong ,  Hongxia Feng ,  Tarek Ibrahim ,  Brandon C. Marin ,  Tchefor Ndukum ,  Bai Nie ,  Srinivas Pietambaram ,  Bohan Shan ,  Matthew Tingey

IPC: H01L23/482 ,  H01L23/00 ,  H01L23/31 ,  H01L23/498 ,  H01L25/065

Abstract: DEEP CAVITY ARRANGEMENTS ON INTEGRATED CIRCUIT PACKAGING An electronic package, comprises a substrate core; dielectric material of one or more dielectric material layers over the substrate core, and having a plurality of metallization layers comprising an upper-most metallization layer; and an integrated circuit (IC) die embedded within the dielectric material and below the upper-most metallization layer. The package also has a metallization pattern within the dielectric material and below the IC die; and a gap within the dielectric material and extending around the metallization pattern.

公开(公告)号：US11817349B2

公开(公告)日：2023-11-14

申请号：US16809905

申请日：2020-03-05

Applicant: INTEL CORPORATION

Inventor： Jeremy Ecton ,  Brandon C. Marin ,  Leonel Arana ,  Matthew Tingey ,  Oscar Ojeda ,  Hsin-Wei Wang ,  Suddhasattwa Nad ,  Srinivas Pietambaram ,  Gang Duan

IPC: H01L21/768 ,  H01L23/528 ,  H01L23/532 ,  H01L21/3213

CPC classification number: H01L21/76885 ,  H01L21/7685 ,  H01L21/76834 ,  H01L21/76852 ,  H01L23/528 ,  H01L23/53238 ,  H01L21/32134

Abstract: A conductive route for an integrated circuit assembly may be formed using a sequence of etching and passivation steps through layers of conductive material, wherein the resulting structure may include a first route portion having a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, an etch stop structure on the first route portion, a second route portion on the etch stop layer, wherein the second route portion has a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, and a passivating layer abutting the at least one side surface of the second route portion.

公开(公告)号：US12033930B2

公开(公告)日：2024-07-09

申请号：US17033392

申请日：2020-09-25

Applicant: Intel Corporation

Inventor： Jieying Kong ,  Yiyang Zhou ,  Suddhasattwa Nad ,  Jeremy Ecton ,  Hongxia Feng ,  Tarek Ibrahim ,  Brandon Marin ,  Zhiguo Qian ,  Sarah Blythe ,  Bohan Shan ,  Jason Steill ,  Sri Chaitra Jyotsna Chavali ,  Leonel Arana ,  Dingying Xu ,  Marcel Wall

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49838 ,  H01L21/485 ,  H01L23/49827

Abstract: An integrated circuit (IC) package substrate, comprising a metallization level within a dielectric material. The metallization level comprises a plurality of conductive features, each having a top surface and a sidewall surface. The top surface of a first conductive feature of the plurality of conductive features has a first average surface roughness, and the sidewall surface of a second conductive feature of the plurality of conductive features has a second average surface roughness that is less than the first average surface roughness.

公开(公告)号：US20240222283A1

公开(公告)日：2024-07-04

申请号：US18147487

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Hongxia Feng ,  Bohan Shan ,  Bai Nie ,  Xiaoxuan Sun ,  Holly Sawyer ,  Tarek Ibrahim ,  Adwait Telang ,  Dingying Xu ,  Leonel Arana ,  Xiaoying Guo ,  Ashay Dani ,  Sairam Agraharam ,  Haobo Chen ,  Srinivas Pietambaram ,  Gang Duan

IPC: H01L23/538 ,  H01L23/00 ,  H01L23/498 ,  H01L25/065

CPC classification number: H01L23/5386 ,  H01L23/49816 ,  H01L24/16 ,  H01L25/0655 ,  H01L2224/16227 ,  H01L2924/15311

Abstract: Methods and apparatus to prevent over-etch in semiconductor packages are disclosed. A disclosed example semiconductor package includes at least one dielectric layer, an interconnect extending at least partially through or from the at least one dielectric layer, and a material on at least a portion of the interconnect, wherein the material comprises at least one of silicon or titanium.

公开(公告)号：US20240222259A1

公开(公告)日：2024-07-04

申请号：US18147535

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Haobo Chen ,  Bohan Shan ,  Xiyu Hu ,  Rhonda Jack ,  Catherine Mau ,  Hongxia Feng ,  Xiao Liu ,  Wei Wei ,  Srinivas Pietambaram ,  Gang Duan ,  Xiaoying Guo ,  Dingying Xu ,  Kyle Arrington ,  Ziyin Lin ,  Hiroki Tanaka ,  Leonel Arana

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/29 ,  H01L23/31

CPC classification number: H01L23/49894 ,  H01L21/481 ,  H01L23/291 ,  H01L23/3192 ,  H01L24/16

Abstract: Methods, systems, apparatus, and articles of manufacture to produce integrated circuit (IC) packages having silicon nitride adhesion promoters are disclosed. An example IC package disclosed herein includes a metal layer on a substrate, a layer on the metal layer, the layer including silicon and nitrogen, and solder resist on the layer.

公开(公告)号：US12027466B2

公开(公告)日：2024-07-02

申请号：US17026703

申请日：2020-09-21

Applicant: Intel Corporation

Inventor： Jeremy D. Ecton ,  Aleksandar Aleksov ,  Brandon C. Marin ,  Yonggang Li ,  Leonel Arana ,  Suddhasattwa Nad ,  Haobo Chen ,  Tarek Ibrahim

IPC: H01L23/538 ,  H01L21/768 ,  H05K1/11

CPC classification number: H01L23/5386 ,  H01L21/76838 ,  H01L23/5385 ,  H05K1/11

Abstract: Conductive routes for an electronic substrate may be fabricated by forming an opening in a material, using existing laser drilling or lithography tools and materials, followed by selectively plating a metal on the sidewalls of the opening. The processes of the present description may result in significantly higher patterning resolution or feature scaling (up to 2× improvement in patterning density/resolution). In addition to improved patterning resolution, the embodiments of the present description may also result in higher aspect ratios of the conductive routes, which can result in improved signaling, reduced latency, and improved yield.

公开(公告)号：US20230097624A1

公开(公告)日：2023-03-30

申请号：US17484486

申请日：2021-09-24

Applicant: Intel Corporation

Inventor： Kyle McElhinny ,  Onur Ozkan ,  Ali Lehaf ,  Xiaoying Guo ,  Steve Cho ,  Leonel Arana ,  Jung Kyu Han ,  Srinivas Pietambaram ,  Sashi Kandanur ,  Alexander Aguinaga

IPC: H01L23/498 ,  H01L23/00 ,  H01L23/12 ,  H01L25/065 ,  H01L21/48 ,  H01L21/50

Abstract: Methods and apparatus to reduce defects in interconnects between semiconductor dies and package substrates are disclosed. An apparatus includes a substrate and a semiconductor die mounted to the substrate. The apparatus further includes an array of bumps to electrically couple the die to the substrate. Each of the bumps have a corresponding base. Different ones of the bases have different widths that vary spatially across the array of bumps.

公开(公告)号：US11506982B2

公开(公告)日：2022-11-22

申请号：US16143206

申请日：2018-09-26

Applicant: Intel Corporation

Inventor： Vahidreza Parichehreh ,  Keith J. Martin ,  Changhua Liu ,  Leonel Arana

IPC: G03F7/20 ,  H01L21/027 ,  G02B5/04 ,  H01L21/3213

Abstract: Embodiments disclosed herein include a lithographic patterning system and methods of using such a system to form a microelectronic device. The lithographic patterning system includes an actinic radiation source, a stage having a surface for supporting a substrate with a resist layer, and a prism with a first surface over the stage, where the first surface has a masked layer and is substantially parallel to the surface of the stage. The prism may have a second surface that is substantially parallel to the first surface. The first and second surfaces are flat surfaces. The prism is a monolithic prism-mask, where an optical path passes through the system and exits the first surface of the prism through the mask layer. The system may include a layer disposed between the mask and resist layers. The mask layer of the prism may pattern the resist layer without an isolated mask layer.

公开(公告)号：US20220102259A1

公开(公告)日：2022-03-31

申请号：US17033392

申请日：2020-09-25

Applicant: Intel Corporation

Inventor： Jieying Kong ,  Yiyang Zhou ,  Suddhasattwa Nad ,  Jeremy Ecton ,  Hongxia Feng ,  Tarek Ibrahim ,  Brandon Marin ,  Zhiguo Qian ,  Sarah Blythe ,  Bohan Shan ,  Jason Steill ,  Sri Chaitra Jyotsna Chavali ,  Leonel Arana ,  Dingying Xu ,  Marcel Wall

IPC: H01L23/498 ,  H01L21/48

Abstract: An integrated circuit (IC) package substrate, comprising a metallization level within a dielectric material. The metallization level comprises a plurality of conductive features, each having a top surface and a sidewall surface. The top surface of a first conductive feature of the plurality of conductive features has a first average surface roughness, and the sidewall surface of a second conductive feature of the plurality of conductive features has a second average surface roughness that is less than the first average surface roughness.

公开(公告)号：US12255130B2

公开(公告)日：2025-03-18

申请号：US16884452

申请日：2020-05-27

Applicant: INTEL CORPORATION

Inventor： Hongxia Feng ,  Jeremy Ecton ,  Aleksandar Aleksov ,  Haobo Chen ,  Xiaoying Guo ,  Brandon C. Marin ,  Zhiguo Qian ,  Daryl Purcell ,  Leonel Arana ,  Matthew Tingey

IPC: H01L23/522 ,  H01L23/66

Abstract: Processes and structures resulting therefrom for the improvement of high speed signaling integrity in electronic substrates of integrated circuit packages, which is achieved with the formation of airgap structures within dielectric material(s) between adjacent conductive routes that transmit/receive electrical signals, wherein the airgap structures decrease the capacitance and/or decrease the insertion losses in the dielectric material used to form the electronic substrates.