OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION
    2.
    发明申请
    OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION 审中-公开
    使用短波辐射测量样品的光学系统

    公开(公告)号:WO2004049016A3

    公开(公告)日:2004-12-09

    申请号:PCT/US0337939

    申请日:2003-11-25

    CPC classification number: G01N21/9501 G01N21/8806

    Abstract: In an optical system (20) measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation (34) used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system (20). In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample (42) does not need to be placed in a vacuum, thereby enhancing system throughput.

    Abstract translation: 在测量样品特性的光学系统(20)中,通过减少在测量中使用的真空紫外(VUV)辐射(34)所经历的照明和检测路径的至少一部分中存在的环境吸收气体或气体和水分的量 可以减少这种波长成分的衰减。 这种还原可以通过一种方法来实现,而不需要从测量系统(20)排出所有的气体和水分。 在一个实施例中,可以通过置换至少一部分测量路径中的吸收气体和水分中的至少一些来实现还原,以便减少VUV辐射的衰减。 以这种方式,样品(42)不需要放置在真空中,从而提高系统生产量。

    OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION
    3.
    发明申请
    OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION 审中-公开
    用于测量使用短波辐射的样品的光学系统

    公开(公告)号:WO2004049016A9

    公开(公告)日:2004-09-02

    申请号:PCT/US0337939

    申请日:2003-11-25

    CPC classification number: G01N21/9501 G01N21/8806

    Abstract: In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.

    Abstract translation: 在测量样品特性的光学系统中,通过减少在测量过程中使用的真空紫外线(VUV)辐射所经历的照明和检测路径的至少一部分中存在的环境吸收气体或气体和水分的量, 可以减少波长分量。 这种还原可以通过一种方法来实现,而不需要从测量系统排出所有的气体和水分。 在一个实施例中,可以通过置换至少部分测量路径中的至少一些吸收气体和水分来实现还原,以便减少VUV辐射的衰减。 以这种方式,样品不需要放置在真空中,从而提高系统产量。

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