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    DISCRETE POLARIZATION SCATTEROMETRY
    1.
    发明申请
    DISCRETE POLARIZATION SCATTEROMETRY 审中-公开
    离散极化分析

    公开(公告)号：WO2011159725A3

    公开(公告)日：2012-04-26

    申请号：PCT/US2011040389

    申请日：2011-06-14

    Applicant: KLA TENCOR CORP ,  HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

    Inventor： HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

    IPC: H01L21/027 ,  H01L21/66

    CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

    Abstract: Systems and methods for discrete polarization scatterometry are provided. One embodiment relates to an optical subsystem of a scatterometer. The optical subsystem includes one or more light sources configured to produce light having different polarizations. The optical subsystem also includes a polarizing beam splitter configured to separate the light into two different light beams having orthogonal and mutually exclusive polarizations. The optical subsystem further includes one or more second optical elements configured to control which one of the two different light beams illuminates the wafer during measurements. The optical subsystem also includes a detection subsystem configured to separately detect two different scattered light beams resulting from illumination of the wafer. The two different scattered light beams have orthogonal and mutually exclusive polarizations. All optical surfaces of the optical subsystem used for the measurements are stationary during the measurements.

    Abstract translation: 提供了离散极化散射法的系统和方法。 一个实施例涉及一种散射仪的光学子系统。 光学子系统包括被配置为产生具有不同偏振的光的一个或多个光源。 光学子系统还包括偏振分束器，其被配置为将光分离成具有正交和相互排斥的极化的两个不同光束。 光学子系统还包括一个或多个第二光学元件，其被配置为在测量期间控制两个不同光束中的哪一个照射晶片。 光学子系统还包括被配置为分别检测由晶片的照明产生的两个不同散射光束的检测子系统。 两个不同的散射光束具有正交和相互排斥的偏振。 用于测量的光学子系统的所有光学表面在测量期间是静止的。

    SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION
    2.
    发明申请
    SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION 审中-公开
    用于执行光热测量和放松补偿的系统和方法

    公开(公告)号：WO2011008478A2

    公开(公告)日：2011-01-20

    申请号：PCT/US2010040063

    申请日：2010-06-25

    Applicant: KLA TENCOR CORP ,  ROTTER LAWRENCE D ,  WANG DAVID Y ,  SHAUGHNESSY DERRICK ,  SENKO MARK

    Inventor： ROTTER LAWRENCE D ,  WANG DAVID Y ,  SHAUGHNESSY DERRICK ,  SENKO MARK

    IPC: G01N25/72 ,  G01N21/63 ,  H01L21/66

    CPC classification number: G01N21/1717 ,  G01N2021/1731 ,  G01N2021/1761

    Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.

    Abstract translation: 公开了一种用于对样品进行光热测量和松弛补偿的装置和方法。 该装置可以包括探测光束源，泵浦光束源，样本和检测器阵列。 方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量 样品上的位置，用于周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

    MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS
    5.
    发明公开
    MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS 审中-公开
    HALBLEITERMETROLOGIESYSTEME MIT MEHREREN EINFALLSWINKELN UND VERFAHREN

    公开(公告)号：EP3047520A4

    公开(公告)日：2017-07-12

    申请号：EP14843577

    申请日：2014-09-15

    Applicant: KLA-TENCOR CORP

    Inventor： WANG DAVID Y ,  FLOCK KLAUS ,  ROTTER LAWRENCE D ,  KRISHNAN SHANKAR ,  DE VEER JOHANNES D ,  FILIP CATALIN ,  BRADY GREGORY ,  ARAIN MUZAMMIL ,  SHCHEGROV ANDREI

    IPC: H01L21/66 ,  G01B11/00 ,  G01B11/06 ,  G01N21/21 ,  G01N21/88 ,  G01N21/95

    CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01N21/8806 ,  G01N21/9501 ,  H01L22/12

    Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

    Abstract translation: 一种设备包括：（i）用于提供可选范围从深紫外波长到红外波长的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合朝向样品 （AOI）或方位角（AZ）以及偏振态来提供光谱椭圆偏振法，其中所述照明光学器件包括用于在所述可选AOI / AZ集合中的每一个处控制所述样本上的所述照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和来自基于输出光束生成输出信号或图像的检测器的偏振状态的来自样本的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

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