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    ELECTRONIC DEVICE COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES
    1.
    发明申请
    ELECTRONIC DEVICE COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES 审中-公开
    包含差分传感器MEMS器件和钻孔基板的电子器件

    公开(公告)号：WO2008089969A3

    公开(公告)日：2008-12-31

    申请号：PCT/EP2008000495

    申请日：2008-01-23

    Applicant: ST MICROELECTRONICS SRL ,  BALDO LORENZO ,  COMBI CHANTAL ,  CORTESE MARIO FRANCESCO

    Inventor： BALDO LORENZO ,  COMBI CHANTAL ,  CORTESE MARIO FRANCESCO

    IPC: B81B7/00 ,  G01D11/24 ,  G01L9/00 ,  G01L13/02

    CPC classification number: B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81C2203/0154 ,  G01L19/141 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

    Abstract: Electronic device (1, 1a, 1b, 1c, 1d, 1e) which comprises: a substrate (2) provided with at least one passing opening (5), a MEMS device (7) with function of differential sensor provided with a first and a second surface (9, 10) and of the type comprising at least one portion (11) sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface (11a, 11b) thereof, the first surface (9) of the MEMS device (7) leaving the first active surface (11a) exposed and the second surface (10) being provided with a further opening (12) which exposes said second opposed active surface (11b), the electronic device (1, 1d, 1e) being characterised in that the first surface (9) of the MEMS device (7) faces the substrate (2) and is spaced therefrom by a predetermined distance, the sensitive portion (11) being aligned to the passing opening (5) of the substrate (2), and in that it also comprises: a protective package (14, 14a, 14b), which incorporates at least partially the MEMS device (7) and the substrate (2) so as to leave the first and second opposed active surfaces (11a, 11b) exposed respectively through the passing opening (5) of the substrate (2) and the further opening (12) of the second surface (10).

    Abstract translation: 电子设备（1,1a，1b，1c，1d，1e）包括：设置有至少一个通过开口（5）的基板（2），具有差动传感器功能的MEMS装置（7） 第二表面（9,10），并且包括对与其第一和第二相对的有效表面（11a，11b）相对应存在的流体的化学和/或物理变化敏感的至少一个部分（11）的类型， 离开第一有源表面（11a）的MEMS器件（7）的第一表面（9）暴露，并且第二表面（10）设置有暴露所述第二相对的有效表面（11b）的另外的开口（12），电子 其特征在于，所述MEMS器件（7）的所述第一表面（9）面向所述基板（2）并且与所述第一表面（9）隔开预定距离，所述敏感部分（11）与所述基板 通过基板（2）的开口（5），并且还包括：保护封装（14,14a，14b），其中 至少部分地将MEMS器件（7）和衬底（2）并入，以使得分别暴露于衬底（2）的通过开口（5）的第一和第二相对的有效表面（11a，11b）和 进一步打开第二表面（10）的开口（12）。

    PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS
    2.
    发明申请
    PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS 审中-公开
    具有非平面运动停止结构的平面微电子设备

    公开(公告)号：WO2008012846A8

    公开(公告)日：2009-01-08

    申请号：PCT/IT2006000576

    申请日：2006-07-26

    Applicant: ST MICROELECTRONICS SRL ,  MERASSI ANGELO ,  CORTESE MARIO FRANCESCO ,  VIOLA FULVIO ,  SIMONI BARBARA ,  RUSCONI CLERICI BELTRAMI ANDRE

    Inventor： MERASSI ANGELO ,  CORTESE MARIO FRANCESCO ,  VIOLA FULVIO ,  SIMONI BARBARA ,  RUSCONI CLERICI BELTRAMI ANDRE

    IPC: B81B7/00 ,  G01P15/08

    CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0828

    Abstract: Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).

    Abstract translation: 这里描述的是具有响应于外部事件在第一方向（z）上经历移动，特别是杂散运动的移动质量块（12）的微机电装置（10）。 该装置还具有构造成停止所述杂散运动的止动结构（14,20）。 特别地，止动元件（20）固定地联接到移动质量块（12），并且被配置为响应于伪运动而抵靠止动块（14），从而停止它。 详细地说，止动元件（20）相对于杂散运动的方向设置在止动块（14）的相对侧上，从可移动质量块（12）所占据的空间突出，并在占据的空间 通过止动块在第一方向（z）上。

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