TERMINAL PART OF POWER STAGE OF MONOLITHIC SEMICONDUCTOR DEVICE AND RELATED MANUFACTURING PROCESS

    公开(公告)号:JPH0653510A

    公开(公告)日:1994-02-25

    申请号:JP15092991

    申请日:1991-05-28

    Abstract: PURPOSE: To maximize the breakdown voltage, without compromising the series resistance of a power stage and reliability of the device by making the min. distance of a structure junction from an embedded drain region shorter than or equal to that of this region from the junction of the peripheral region. CONSTITUTION: In a possible embodiment for the terminal of a power stage, a min. distance d1 between an embedded drain region 6 and this insulation region 9 is made smaller than that d2 between the buried drain region 9 from a junction 10, lying between a substrate and drain. In creating a device region 15, a substrate-drain junction 10 of an MOS power transistor must be connected to the region 9, as described above. The terminal length given from the region 9 is equal to the sum of the side face diffusions of the insulation regions, its photo-masked opening and error layout allowance. Its structure can maximize the operating voltage, without changing the series resistance of the power stage.

    EDGE TERMINATION OF HIGH-VOLTAGE SEMICONDUCTOR DEVICE BY RESISTOR-TYPE VOLTAGE DIVIDER

    公开(公告)号:JP2000357796A

    公开(公告)日:2000-12-26

    申请号:JP2000150927

    申请日:2000-05-23

    Abstract: PROBLEM TO BE SOLVED: To resist the high operating voltage whereto a device is subjected, by providing a voltage divider wherein an edge termination includes a plurality of MOS transistors connected in series with each other, and by providing connectively the edge termination between the terminals of a power constituting element whose drivings are impossible. SOLUTION: A device 1 comprises a MOSFET power transistor 21 connected with an edge termination 100. The power transistor 21 is connected in parallel with the series circuit comprising a diode 41 plus the series circuit comprising PMOS parasitic transistors 31, 32, 33, 34. To allow the current flowing from a source terminal S4 of the fourth PMOS parasitic transistor 34 to a source S of the MOSFET power transistor 21, these PMOS parasitic transistors 31-34 are switched on respectively when their respective sources overcome the respective threshold voltages of the PMOS parasitic transistors 31-34. Therefore, there is obtained a limit to the high operating voltage whereto the device 1 is subjected.

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