公开(公告)号：US20090087191A1

公开(公告)日：2009-04-02

申请号：US11863001

申请日：2007-09-27

Applicant: Francis Lawrence Leard ,  Nelson D. Sheppard ,  Patrick J. Delaney, III ,  Shaun Paul Hentchel

Inventor： Francis Lawrence Leard ,  Nelson D. Sheppard ,  Patrick J. Delaney, III ,  Shaun Paul Hentchel

IPC: H04B10/00

CPC classification number: G01J3/02 ,  G01J3/0224 ,  G01J3/0264 ,  G01J3/447 ,  G01J3/50 ,  G01J3/501 ,  G01J3/51 ,  G01N21/21 ,  G01N21/25

Abstract: Embodiments include n apparatus including a color sensor including a transmitter portion and a receiver portion, the transmitter portion including a light source operable to generate and transmit a light having a particular range of wavelengths, the receiver portion including a first detector operable to receive a first portion of the light emitted from the transmitter portion and to measure a luminance of the received first portion of the emitted light, and a second detector including a polarization filter, the second detector operable to receive a second portion of the light emitted from the transmitter after the second portion has passed through the polarization filter, and operable to measure a pure color of the received second portion of transmitted light.

Abstract translation: 实施例包括包括发射器部分和接收器部分的颜色传感器的n装置，所述发射器部分包括可操作以产生和发射具有特定波长范围的光的光源，所述接收器部分包括第一检测器，所述第一检测器可操作以接收第一 从所述发射器部分发射的光的一部分并且测量所接收的所述发射光的第一部分的亮度;以及第二检测器，其包括偏振滤光器，所述第二检测器可操作以接收从所述发射器发射的光的第二部分，所述第二部分 第二部分已经通过偏振滤光器，并且可操作以测量所接收的第二部分透射光的纯色。

公开(公告)号：US07456956B2

公开(公告)日：2008-11-25

申请号：US11601344

申请日：2006-11-17

Applicant: Eric Jiang ,  Francis J. Deck

Inventor： Eric Jiang ,  Francis J. Deck

IPC: G01J3/28 ,  G01J3/447

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/447 ,  G01N21/19

Abstract: A spectrometer generates Vibrational Circular Dichroism (VCD) measurements having an exceedingly high signal-to-noise ratio, as well as a greater wavelength range over which measurements may be accurately provided. This is achieved by utilizing reflective optics (preferably solely reflective optics, i.e., no refractive elements) to supply a concentrated and collimated input light beam to a sample within a sample cell, and similarly collecting the light output from the sample cell via reflective optics for supply to a detector.

Abstract translation: 光谱仪产生具有非常高的信噪比的振动圆二色性（VCD）测量，以及可以准确地提供测量的更大的波长范围。 这通过利用反射光学器件（优选地仅反射光学器件，即没有折射元件）来实现，以将集中和准直的输入光束提供给样品池内的样品，并且类似地通过反射光学器件收集来自样品池的光输出，用于 供应到检测器。

公开(公告)号：US07420681B1

公开(公告)日：2008-09-02

申请号：US11457524

申请日：2006-07-14

Applicant: Ning-Yi Wang ,  Ching-Ling Meng ,  Anthony Tang

Inventor： Ning-Yi Wang ,  Ching-Ling Meng ,  Anthony Tang

IPC: G01N21/00 ,  G01J4/00

CPC classification number: G01N21/211 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0286 ,  G01J3/447 ,  G01J4/00 ,  G01N21/15 ,  G01N21/8422 ,  G01N2021/151 ,  G01N2021/213

Abstract: Gas purge systems and methods and a spectroscopic ellipsometer are disclosed. A purge gas system may include an input beam optics housing, a collection optics housing and a gas purge manifold. The input beam optics housing may include a first gas flow path between a first gas inlet and an aperture in a first nose cone proximate a measurement position. The collection optics housing may include a second gas flow path between a second gas inlet and an aperture in a second nose cone proximate the measurement position. The gas purge manifold may be disposed between the input beam optics housing and the collection optics housing. The gas purge manifold has a third gas flow path between a third gas inlet and an aperture in the gas manifold proximate the measurement position. The ellipsometer may include input beam optics in the input beam optics housing and collection optics in the collection optics housing. First, second, and third flows of purge gas may be supplied through the input beam optics housing, collection optics housing and gas purge manifold respectively. The purge gas is delivered directly to a measurement position of a surface of a substrate through the gas purge manifold, the first nosecone and the second nose cone.

Abstract translation: 公开了气体吹扫系统和方法以及分光椭偏仪。 吹扫气体系统可以包括输入光束光学器件壳体，收集光学器件壳体和气体吹扫歧管。 输入光束光学器件壳体可以包括在第一气体入口和靠近测量位置的第一鼻锥中的孔之间的第一气体流动路径。 收集光学器件壳体可以包括在第二气体入口和靠近测量位置的第二鼻锥中的孔之间的第二气体流动路径。 气体吹扫歧管可以设置在输入光束光学器件壳体和收集光学器件壳体之间。 气体吹扫歧管在靠近测量位置的第三气体入口和气体歧管中的孔之间具有第三气体流动路径。 椭偏仪可以包括输入光束光学器件中的输入光束，并且在收集光学器件壳体中收集光学元件。 吹扫气体的第一，第二和第三流动可以分别通过输入光束光学器件壳体，收集光学器件壳体和气体吹扫歧管提供。 净化气体通过气体净化歧管，第一鼻锥和第二鼻锥直接输送到衬底的表面的测量位置。

公开(公告)号：US20080035834A1

公开(公告)日：2008-02-14

申请号：US11809778

申请日：2007-06-01

Applicant: Anthony Gleckler

Inventor： Anthony Gleckler

IPC: H01L27/00

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/2889 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01J9/00 ,  G01J11/00 ,  G01N21/21 ,  G01N21/31 ,  G01N21/6408 ,  G01N21/6456 ,  G01N2021/1793 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01S7/481 ,  G01S7/4817 ,  G01S17/89 ,  G04F13/02 ,  G04F13/026 ,  H01J43/00

Abstract: Plural electronic or optical images are provided in a streak optical system, as for instance by use of plural slits instead of the conventional single slit, to obtain a third, fourth etc. dimension—rather than only the conventional two, namely range or time and azimuth. Such additional dimension or dimensions are thereby incorporated into the optical information that is to be streaked and thereby time resolved. The added dimensions may take any of an extremely broad range of forms, including wavelength, polarization state, or one or more spatial dimensions—or indeed virtually any optical parameter that can be impressed upon a probe beam. Resulting capabilities remarkably include several new forms of lidar spectroscopy, fluorescence analysis, polarimetry, spectropolarimetry, and combinations of these.

Abstract translation: 例如通过使用多个狭缝而不是传统的单个狭缝，在条纹光学系统中提供多个电子或光学图像，以获得第三，第四等尺寸，而不仅仅是传统的两个，即范围或时间和 方位角 因此，这样的附加尺寸或尺寸被并入要划线的光学信息中，从而被时间分辨。 增加的尺寸可以采取非常宽的范围的范围，包括波长，偏振状态或一个或多个空间维度，或者实际上实际上可以施加到探测光束上的任何光学参数。 所产生的功能显着地包括几种新形式的激光雷达光谱，荧光分析，偏振光谱法，分光光度法，以及它们的组合。

公开(公告)号：US07221454B2

公开(公告)日：2007-05-22

申请号：US10504796

申请日：2003-02-13

Applicant: D. Scott Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Scott Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US20070004975A1

公开(公告)日：2007-01-04

申请号：US11172648

申请日：2005-06-30

Applicant: Anis Zribi ,  Peter Codella ,  Min-Yi Shih ,  Ganesh Gangadharan ,  Rui Chen

Inventor： Anis Zribi ,  Peter Codella ,  Min-Yi Shih ,  Ganesh Gangadharan ,  Rui Chen

IPC: A61B5/00

CPC classification number: A61B5/14546 ,  A61B5/14532 ,  A61B5/14558 ,  G01J3/44 ,  G01J3/447 ,  G01N21/21 ,  G01N21/65

Abstract: A method for determining analyte concentration levels is provided. The method includes acquiring radiation scattered off or transmitted by a target, analyzing at least a first portion of the radiation via a first technique to generate a first measurement of analyte concentration levels, and analyzing at least a second portion of the radiation via a second technique to generate a second measurement of analyte concentration levels. The method further determines analyte concentration levels based on at least one of the first measurement or the second measurement. In addition, a system for implementing the method and a probe for measuring and monitoring the analyte concentration levels is provided.

Abstract translation: 提供了一种用于确定分析物浓度水平的方法。 该方法包括获取由目标散射或透射的辐射，经由第一技术分析辐射的至少第一部分以产生分析物浓度水平的第一测量，以及通过第二技术分析辐射的至少第二部分 以产生分析物浓度水平的第二次测量。 该方法还基于第一测量或第二测量中的至少一个来确定分析物浓度水平。 另外，提供了用于实现该方法的系统和用于测量和监测分析物浓度水平的探针。

公开(公告)号：US20060132806A1

公开(公告)日：2006-06-22

申请号：US11343478

申请日：2006-01-30

Applicant: Andrei Shchegrov ,  Anatoly Fabrikant ,  Mehrdad Nikoonahad

Inventor： Andrei Shchegrov ,  Anatoly Fabrikant ,  Mehrdad Nikoonahad

IPC: G01B11/14

CPC classification number: H01L22/20 ,  G01J3/447 ,  G01J4/04 ,  G01N21/211

Abstract: A gallery of seed profiles is constructed and the initial parameter values associated with the profiles are selected using manufacturing process knowledge of semiconductor devices. Manufacturing process knowledge may also be used to select the best seed profile and the best set of initial parameter values as the starting point of an optimization process whereby data associated with parameter values of the profile predicted by a model is compared to measured data in order to arrive at values of the parameters. Film layers over or under the periodic structure may also be taken into account. Different radiation parameters such as the reflectivities Rs, Rp and ellipsometric parameters may be used in measuring the diffracting structures and the associated films. Some of the radiation parameters may be more sensitive to a change in the parameter value of the profile or of the films then other radiation parameters. One or more radiation parameters that are more sensitive to such changes may be selected in the above-described optimization process to arrive at a more accurate measurement. The above-described techniques may be supplied to a track/stepper and etcher to control the lithographic and etching processes in order to compensate for any errors in the profile parameters.

Abstract translation: 构建种子轮廓的画廊，并且使用半导体器件的制造工艺知识来选择与轮廓相关联的初始参数值。 也可以使用制造过程知识来选择最佳种子轮廓和最佳初始参数值集合作为优化过程的起始点，由此将与模型预测的轮廓的参数值相关联的数据与测量数据进行比较，以便 达到参数的值。 也可以考虑在周期性结构之上或之下的膜层。 不同的辐射参数，例如反射率R S，R P和椭偏参数可用于测量衍射结构和相关膜。 一些辐射参数可能对轮廓或膜的参数值的变化对其他辐射参数更敏感。 可以在上述优化过程中选择对这种变化更敏感的一个或多个辐射参数，以获得更准确的测量。 可以将上述技术提供给轨道/步进器和蚀刻器以控制光刻和蚀刻工艺，以便补偿轮廓参数中的任何误差。

公开(公告)号：US20060100490A1

公开(公告)日：2006-05-11

申请号：US11244418

申请日：2005-10-04

Applicant: Feiling Wang ,  Xiao-Li Li ,  Peter Norris

Inventor： Feiling Wang ,  Xiao-Li Li ,  Peter Norris

IPC: A61B5/00

CPC classification number: G01N21/4795 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/441 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/10 ,  G01J3/42 ,  G01J3/4338 ,  G01J3/447 ,  G01J3/453 ,  G01N21/39

Abstract: Designs, implementations, and techniques for optically measuring a sample to obtain spectral absorbance map of the sample. Light at different wavelength bands may be used to detect different absorption features in the sample. Multiple light sources may be used including tunable lasers.

公开(公告)号：US07023546B1

公开(公告)日：2006-04-04

申请号：US10693844

申请日：2003-10-21

Applicant: Robert W. McMillan

Inventor： Robert W. McMillan

IPC: G01N4/00

CPC classification number: G01J3/2823 ,  G01J3/447 ,  G01J4/04

Abstract: An imaging spectropolarimeter for measuring the polarization and spectral content and the spatial signature of a target scene. The imaging spectropolarimeter includes an objective optic for receiving an electromagnetic signal and a modulator for modulating the electromagnetic signal The amplitude of each frequency component of the resulting modulated electromagnetic signal is a function of the particular polarization state of each frequency component of the electromagnetic signal. A linear polarizer passes a single polarization of the modulated electromagnetic signal to a tunable filter, which is tunable through a frequency spectrum. The tunable filter outputs a plurality of electromagnetic signal samples at predetermined frequency increments. A focal plane array receives each electromagnetic signal sample and outputs a spectrum signal and a processor applies Fourier transformation to the spectrum signal to obtain at least one Stokes polarization vector component for each pixel within the scene.

Abstract translation: 用于测量目标场景的极化和光谱含量和空间特征的成像分光偏振计。 成像分光偏振计包括用于接收电磁信号的物镜和用于调制电磁信号的调制器。所得到的调制电磁信号的每个频率分量的振幅是电磁信号的每个频率分量的特定极化状态的函数。 线性偏振器将调制的电磁信号的单个极化通过可调谐滤波器，其可通过频谱调节。 可调谐滤波器以预定的频率增量输出多个电磁信号采样。 焦平面阵列接收每个电磁信号采样并输出频谱信号，并且处理器对频谱信号进行傅里叶变换，以获得场景内每个像素的至少一个斯托克斯极化矢量分量。

公开(公告)号：US20050018189A1

公开(公告)日：2005-01-27

申请号：US10504796

申请日：2003-02-13

Applicant: D. Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J3/447 ,  G01J4/04 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。