公开(公告)号：US20050263712A1

公开(公告)日：2005-12-01

申请号：US11174916

申请日：2005-07-01

Applicant: Sang Choi ,  Dae Kim

Inventor： Sang Choi ,  Dae Kim

IPC: G02B3/00 ,  H01J1/02 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J37/12 ,  H01J3/26

CPC classification number: H01J9/02 ,  H01J3/18 ,  H01J9/14 ,  H01J37/12 ,  H01J2237/1205 ,  H01J2237/3175 ,  H01J2237/31754 ,  Y10T29/49117

Abstract: Provided is an electron beam lens for a micro-column electron beam apparatus and a method of manufacturing the same. A photosensitive glass substrate is used as a base isolation substrate and a thin metal film is grown by a plating method. Holes through which electron beam passes are formed by a lift off method after forming a resist pattern shaped as a hole on a seed metal layer and plating the thin metal film.

Abstract translation: 本发明提供一种用于微柱电子束装置的电子束透镜及其制造方法。 使用感光性玻璃基板作为基底隔离基板，通过电镀法生长金属薄膜。 在种子金属层上形成形成为孔的抗蚀剂图案并镀覆薄金属膜之后，通过剥离法形成电子束通过的孔。

公开(公告)号：US06958576B2

公开(公告)日：2005-10-25

申请号：US10371240

申请日：2003-02-21

Applicant: Zvi Yaniv ,  Ronald Charles Robinder

Inventor： Zvi Yaniv ,  Ronald Charles Robinder

IPC: H01J3/30 ,  H01J1/304 ,  H01J1/316 ,  H01J3/02 ,  H01J3/08 ,  H01J3/18 ,  H01J29/04 ,  H01J29/46 ,  H01J29/52 ,  H01J29/62 ,  H01J29/74 ,  H01J31/12 ,  H01J1/62

CPC classification number: H01J29/467 ,  H01J3/021 ,  H01J3/022 ,  H01J29/04 ,  H01J2329/00

Abstract: A plurality of field emission device cathodes each generate emission of electrons, which are then controlled and focused using various electrodes to produce an electron beam. Horizontal and vertical deflection techniques, similar to those used within a cathode ray tube, operate to scan the individual electron beams onto portions of a phosphor screen in order to generate images. The use of the plurality of field emission cathodes provides for a flatter screen depth than possible with a typical cathode ray tube.

Abstract translation: 多个场发射器件阴极各自产生电子的发射，然后使用各种电极来控制和聚焦电子以产生电子束。 水平和垂直偏转技术类似于在阴极射线管内使用的技术，其操作是将各个电子束扫描到荧光屏的部分上以产生图像。 使用多个场致发射阴极提供比通常的阴极射线管更可能的屏幕深度。

公开(公告)号：US20050087696A1

公开(公告)日：2005-04-28

申请号：US10817779

申请日：2004-04-02

Applicant: Sang Choi ,  Dae Kim

Inventor： Sang Choi ,  Dae Kim

IPC: G02B3/00 ,  H01J1/02 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J37/12 ,  H01J3/14 ,  G21K1/08

CPC classification number: H01J9/02 ,  H01J3/18 ,  H01J9/14 ,  H01J37/12 ,  H01J2237/1205 ,  H01J2237/3175 ,  H01J2237/31754 ,  Y10T29/49117

Abstract: Provided is an electron beam lens for a micro-column electron beam apparatus and a method of manufacturing the same. A photosensitive glass substrate is used as a base isolation substrate and a thin metal film is grown by a plating method. Holes through which electron beam passes are formed by a lift off method after forming a resist pattern shaped as a hole on a seed metal layer and plating the thin metal film.

公开(公告)号：US6028317A

公开(公告)日：2000-02-22

申请号：US5640

申请日：1998-01-12

Applicant: Ken-ichi Murooka ,  Munehiro Ogasawara ,  Hitoshi Sunaoshi

Inventor： Ken-ichi Murooka ,  Munehiro Ogasawara ,  Hitoshi Sunaoshi

IPC: G21K1/087 ,  G21K1/093 ,  H01J3/18 ,  H01J37/12 ,  H01J37/14 ,  H01J37/305 ,  H01L21/027 ,  G21K1/08 ,  H01J3/14

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G21K1/087 ,  H01J3/18 ,  H01J37/12 ,  H01J2237/121 ,  H01J2237/151 ,  H01J2237/153 ,  H01J2237/3175

Abstract: An optical element includes two electrodes 1 and 2 arranged at a distance to oppose each other and configured to converge an electron beam. The opposing surfaces of the electrodes 1 and 2 are so formed as to be cylindrically symmetrical along the beam passing direction and to form curves obtained by deforming hyperbolas in a direction perpendicular to the beam passing direction, in order that an electric field whose effective part except for an arbitrary constant of the field potential is given by.phi.=(k/2)r.sup.2 -.alpha.lnr-kz.sup.2is spatially partially formed in a cylindrical coordinate system defined by (r, z, .theta.).

Abstract translation: 光学元件包括两个彼此相对配置的距离并配置成会聚电子束的电极1和2。 电极1和2的相对表面被形成为沿着光束通过方向为圆柱对称，并且形成通过使垂直于光束通过方向的方向使双曲线变形而获得的曲线，以便将有效部分除外 对于场电位的任意常数由phi =（k / 2）给出，r2-α1nr-kz2在空间上部分地形成在由（r，z，θ）定义的圆柱坐标系中。

公开(公告)号：US5977719A

公开(公告)日：1999-11-02

申请号：US937615

申请日：1997-09-25

Applicant: Hideo Makishima

Inventor： Hideo Makishima

IPC: H01J23/06 ,  H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H05B37/02

CPC classification number: H01J3/022

Abstract: In a field emission cathode type electron gun, a plurality of cathode segments and a plurality of gate control circuits are provided. Each of the gate control circuits is connected to one of the cathode segments. Each of the cathode segments includes a cathode electrode, a gate electrode, an insulating layer therebetween, and a plurality of cone-shaped emitters formed within openings perforated in the gate electrode and the insulating layer. Each of the gate control circuits detects a current flowing through one of the cathode segments and controls a voltage of the gate electrode of the respective cathode segments in accordance with the detected current, so that the detected current is brought close to a definite value.

Abstract translation: 在场发射阴极型电子枪中，设置有多个阴极段和多个栅极控制电路。 每个栅极控制电路连接到一个阴极段。 每个阴极段包括阴极电极，栅电极，其间的绝缘层，以及形成在栅电极和绝缘层中穿孔的开口内的多个锥形发射体。 每个栅极控制电路检测流过一个阴极段的电流，并且根据检测到的电流来控制各个阴极段的栅电极的电压，使得检测到的电流接近确定的值。

公开(公告)号：US5929557A

公开(公告)日：1999-07-27

申请号：US962874

申请日：1997-11-03

Applicant: Hideo Makishima ,  Masaaki Takahashi

Inventor： Hideo Makishima ,  Masaaki Takahashi

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J23/06 ,  H01J1/02

CPC classification number: H01J3/022 ,  H01J23/06 ,  H01J2223/04

Abstract: A field-emission cold cathode has a conductive cold-cathode substrate on which a plurality of conical emitters and a base insulator layer are formed. A ring-shaped gate electrode, a plate-shaped inner electrode, and a ring-shaped outer electrode are formed on the base insulator layer with the ring-shaped gate electrode disposed between the plate-shaped inner electrode and the ring-shaped outer electrode. A voltage supplying unit supplies the ring-shaped gate electrode, the plate-shaped inner electrode, and the ring-shaped outer electrode with a gate voltage, an inner electrode voltage, and an outer electrode voltage, each referenced to a substrate potential of the conductive cold-cathode substrate, wherein the gate voltage is higher than each of the inner electrode voltage and the outer electrode voltage.

Abstract translation: 场发射冷阴极具有形成有多个锥形发射体和基极绝缘体层的导电性冷阴极基板。 环状栅电极，板状内电极和环状外电极形成在基绝缘体层上，环形栅电极设置在板状内电极和环状外电极之间 。 电压供给单元以栅极电压，内部电极电压和外部电极电压供给环状的栅电极，板状的内部电极和环状的外部电极，各自以基板电位为基准 导电性的冷阴极基板，其中栅极电压高于内部电极电压和外部电极电压中的每一个。

公开(公告)号：US5717275A

公开(公告)日：1998-02-10

申请号：US606415

申请日：1996-02-23

Applicant: Hisashi Takemura

Inventor： Hisashi Takemura

IPC: H01J3/18 ,  H01J1/304 ,  H01J3/02 ,  H01J1/02 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J3/022

Abstract: In a multi-emitter electron gun of a field-emission type constructed by the integrated circuit technique, each emitter comprising an emission electrode having an emissive point, an extracting gate electrode, and a focusing electrode, the focusing electrode in a peripheral zone of the multi-emitter electron gun is brought to a lower electric potential as compared with that in a central zone so that the emitter in the peripheral zone has a beam convergence higher than that of the emitter in the central zone. Instead, the focusing electrode in the peripheral zone has a greater thickness as compared with that in the central zone. Alternatively, the focusing electrode in the peripheral zone has a smaller aperture as compared with that in the central zone. Alternatively, the interval between the extracting gate electrode and the focusing electrode is wider in the emitter in the central zone as compared with that in the peripheral zone. Alternatively, the emitter in the peripheral zone alone comprises the focusing electrode of two layers with an upper-layer focusing electrode kept at an electric potential lower than that of a lower-layer focusing electrode. Alternatively, the emitter in the central zone alone further comprises an electrode located between the extracting gate electrode and the focusing electrode and brought to an electric potential substantially equal to that of the extracting gate electrode.

Abstract translation: 在通过集成电路技术构成的场致发射型多射极电子枪中，每个发射器包括具有发射点的发射电极，提取栅电极和聚焦电极，聚焦电极在 与中心区域相比，多射极电子枪的电位降低，使得周边区域中的发射极具有比中心区域的发射极更高的光束会聚。 相反，周边区域中的聚焦电极与中心区域相比具有更大的厚度。 或者，周边区域中的聚焦电极与中心区域相比具有较小的孔径。 或者，与外围区域相比，中央区域的发射极之间的提取栅电极和聚焦电极之间的间隔较宽。 或者，外围区域中的发射极单独包括两层聚焦电极，上层聚焦电极的电位低于下层聚焦电极的电位。 或者，中心区域中的发射极单独进一步包括位于提取栅电极和聚焦电极之间的电极，并使电位基本上等于提取栅电极的电位。

公开(公告)号：US5581146A

公开(公告)日：1996-12-03

申请号：US458821

申请日：1995-06-02

Applicant: Didier Pribat ,  Binh V. Thien ,  Pierre Legagneux

Inventor： Didier Pribat ,  Binh V. Thien ,  Pierre Legagneux

IPC: H01J3/18 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J1/02

CPC classification number: H01J9/025 ,  H01J3/022

Abstract: Electron source made notably in the form of a micropoint cathode electrode in which a microcathode is located in a cavity (CA) of a dielectric (3). A first gate electrode (VG1) surrounds the cavity (CA) and a second gate electrode (VG2) surrounds the first gate electrode (VG1). The different electrodes are carried to potentials such that the first gate electrode (VG1) acts as an extraction electrode and the second gate electrode acts as a focusing electrode.

Abstract translation: 特别是以微点阴极电极的形式形成的电子源，其中微电极位于电介质（3）的空腔（CA）中。 第一栅电极（VG1）包围空腔（CA），第二栅电极（VG2）围绕第一栅电极（VG1）。 不同的电极被携带到电位，使得第一栅电极（VG1）用作引出电极，第二栅电极用作聚焦电极。

公开(公告)号：US5528103A

公开(公告)日：1996-06-18

申请号：US188855

申请日：1994-01-31

Applicant: Christopher J. Spindt ,  Patrick A. Corcoran

Inventor： Christopher J. Spindt ,  Patrick A. Corcoran

IPC: H01J29/04 ,  H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J29/08 ,  H01J29/62 ,  H01J31/12

CPC classification number: H01J3/022 ,  H01J29/085 ,  H01J31/127

Abstract: A gated field-emission structure contains a emitter electrode (46), an overlying electrically insulating layer (48, and one or more electron-emissive elements (52) situated in one or more apertures extending through the insulating layer. A patterned gate electrode (50) through which each electron-emissive element is exposed overlies the insulating layer. Focusing ridges (54) are situated on the insulating layer on opposite sides of the gate electrode. The focusing ridges, which normally extend to a considerably greater height than the gate electrode, cause emitted electrons to converge into a narrow band.

Abstract translation: 门控场致发射结构包含发射极电极（46），覆盖电绝缘层（48）和位于延伸穿过绝缘层的一个或多个孔隙中的一个或多个电子发射元件（52） 每个电子发射元件通过其暴露在绝缘层上方，聚焦脊（54）位于栅电极相对侧上的绝缘层上，该聚焦脊通常延伸到比栅极大得多的高度 电极，使发射的电子收敛成窄带。

公开(公告)号：US5315207A

公开(公告)日：1994-05-24

申请号：US505308

申请日：1990-04-04

Applicant: Arthur M. E. Hoeberechts ,  Nicolaas Lambert ,  Gerardus G. P. Van Gorkom

Inventor： Arthur M. E. Hoeberechts ,  Nicolaas Lambert ,  Gerardus G. P. Van Gorkom

IPC: H01J1/304 ,  H01J1/308 ,  H01J3/02 ,  H01J3/18 ,  H01J29/48 ,  H01J29/62 ,  H01J31/12 ,  H01J29/04

CPC classification number: H01J1/308 ,  H01J29/485 ,  H01J3/027

Abstract: A planar electron-optical lens is obtained on a semiconductor cathode surface by providing an extra electrode (16) around the gate electrode (14). Dependent on the applied voltage, this configuration operates, for example, as a positive lens which supplies parallel beams without dispersion, suitable for thin, flat display devices. A large positioning tolerance is obtained due to the inherent magnification of the beam diameter in the semiconductor device, while a grid can be dispensed with.

Abstract translation: 通过在栅电极（14）周围设置多余的电极（16），在半导体阴极表面上获得平面电子 - 光学透镜。 取决于所施加的电压，该配置例如作为提供平行光束而不分散的正透镜，适用于薄的平面显示装置。 由于半导体器件中的光束直径的固有放大，可以获得大的定位公差，而可以省略格栅。