公开(公告)号：US07573045B2

公开(公告)日：2009-08-11

申请号：US11798554

申请日：2007-05-15

Applicant: Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

Inventor： Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

IPC: H01J3/30

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  H01J25/00

Abstract: Nanoantennas are formed on a substrate (e.g., silicon) and generate light via interactions with a charged particle beam, where the frequency of the generated light is based in large part on the periodicity of the “fingers” that make up the nanoantennas. Each finger has typical dimensions of less than 100 nm on the shorter side and typically less than 500 nm on the longer, but the size of the optimal longer side is determined by the electron velocity. The charged particle may be an electron beam or any other source of charged particles. By utilizing fine-line lithography on the surface of the substrate, the nanoantennas can be formed without the need for complicated silicon devices.

Abstract translation: 纳米天线形成在基底（例如硅）上，并且通过与带电粒子束的相互作用产生光，其中所产生的光的频率大部分基于构成纳米天线的“手指”的周期性。 每个手指在较短的侧面具有小于100nm的典型尺寸，并且通常在较长的时间上通常小于500nm，但是最佳长边的尺寸由电子速度确定。 带电粒子可以是电子束或任何其他带电粒子源。 通过在基板的表面上利用细线光刻，可以形成纳米天线，而不需要复杂的硅器件。

公开(公告)号：US5321707A

公开(公告)日：1994-06-14

申请号：US919920

申请日：1992-07-27

Applicant: David R. Huber

Inventor： David R. Huber

IPC: H01S3/094 ,  H04B10/17 ,  H01J3/30

CPC classification number: H04B10/291 ,  H01S3/094003 ,  H04B10/2912

Abstract: Optical amplifiers and other active optical components along a signal distribution path are remotely pumped by a common pump laser. The pump energy can be transmitted over the signal path or over a separate pump path. Pumping of rare earth doped optical fiber amplifiers, such as erbium doped fiber amplifiers is illustrated. The pump energy can be provided at about 1480 nanometers to take advantage of reduced attenuation at this wavelength along the fiber path.

Abstract translation: 沿着信号分配路径的光放大器和其它有源光学元件被普通泵激光器远程泵浦。 泵浦能量可以通过信号路径或单独的泵路径传输。 示出了掺杂稀土光纤放大器的泵浦，例如掺铒光纤放大器。 可以在约1480纳米处提供泵浦能量，以利用沿该光纤路径在该波长处减小的衰减。

公开(公告)号：US5191217A

公开(公告)日：1993-03-02

申请号：US796980

申请日：1991-11-25

Applicant: Robert C. Kane ,  Norman W. Parker

Inventor： Robert C. Kane ,  Norman W. Parker

IPC: H01J19/24 ,  H01J1/304 ,  H01J3/02 ,  H01J3/30 ,  H01J21/10

CPC classification number: H01J3/022

Abstract: A FED with integrally formed deflection electrode coupled to the electron emitter such that any variation of electron emitter operating voltage is coincidentally impressed on the deflection electrode so as to effectively minimize variations in the emitted electron beam cross-section. In image display devices including FEDs with voltage variations induced at the electron emitter to provide image information, integrally formed deflection electrodes are connected to follow the electron emitter variations so that pixel cross-sections remain substantially invariant under device operation.

公开(公告)号：US20110133079A1

公开(公告)日：2011-06-09

申请号：US12958797

申请日：2010-12-02

Applicant: Lisa Cousins ,  Gholamreza Javahery ,  Ilia Tomski

Inventor： Lisa Cousins ,  Gholamreza Javahery ,  Ilia Tomski

IPC: H01J3/30 ,  H01J49/28

CPC classification number: H01J49/063

Abstract: An ion guide includes a plurality of rods, arranged about an axis that extends lengthwise from one end to the other of the guide. The rods guide ions in a guide region along and about the axis. A conductive casing surrounds the rods. The casing and the rods are geometrically arranged to produce an axial electric field along the axis. Specifically, the geometry is such that a first constant applied DC voltage (UDC), applied to the rods, and a second constant applied DC voltage (UCASE) applied to the casing, produce a voltage gradient between said casing and said axis that has a different magnitude at different positions along said axis.

Abstract translation: 离子导向器包括多个杆，其围绕从引导件的一端到另一端纵向延伸的轴线布置。 杆沿引导区域沿轴线引导离子。 导电套管围绕着棒。 壳体和杆几何地布置成沿轴线产生轴向电场。 具体地，几何形状使得施加到杆的第一恒定施加的DC电压（UDC）和施加到壳体的第二恒定施加的DC电压（UCASE）在所述壳体和所述轴线之间产生电压梯度，所述电压梯度具有 沿着所述轴的不同位置处的不同大小。

公开(公告)号：US07829864B2

公开(公告)日：2010-11-09

申请号：US12082452

申请日：2008-04-11

Applicant: Rosemary Smith ,  Scott Collins ,  Brian G. Frederick ,  Lawrence J. LeGore

Inventor： Rosemary Smith ,  Scott Collins ,  Brian G. Frederick ,  Lawrence J. LeGore

IPC: H01J3/30

CPC classification number: H01J9/14 ,  H01J49/0018 ,  H01J49/061 ,  H01L2924/0002 ,  Y10S438/977 ,  H01L2924/00

Abstract: A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.

Abstract translation: 一种网格结构及其制造方法。 栅格用于在某些类型的粒子测量仪器（例如离子迁移光谱仪等）中选通带电粒子流。 这些方法包括用于在硅衬底上蚀刻和/或沉积栅格结构材料的各种微细加工技术。

公开(公告)号：US20100276606A1

公开(公告)日：2010-11-04

申请号：US12769712

申请日：2010-04-29

Applicant: Norman Hendrikus Rudolf BAARS ,  Gerardus Fernandus Ten Berge ,  Stijn Willem Herman Karel Steenbrink

Inventor： Norman Hendrikus Rudolf BAARS ,  Gerardus Fernandus Ten Berge ,  Stijn Willem Herman Karel Steenbrink

IPC: H01J37/147 ,  H01J3/30 ,  H01J37/30

CPC classification number: H01J37/09 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/22 ,  H01J37/317 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/0453 ,  H01J2237/1504 ,  H01J2237/151 ,  H01J2237/2482

Abstract: A charged particle optical system comprising a beamlet generator for generating a plurality of beamlets of charged particles and an electrostatic deflector for deflecting the beamlets. The electrostatic deflector comprises first and second electrodes adapted for connection to a voltage for generating an electric field between the electrodes for deflection of the beamlets, the electrodes being at least partially freestanding in an active area of the electrostatic deflector. The electrodes define at least one passing window for passage of at least a portion of the beamlets between the electrodes, the passing window having a length in a first direction and a width in a transverse direction. The system is adapted to arrange the beamlets in at least one row and to direct a single row of the beamlets through the passing window of the electrostatic deflector, the beamlets of the row extending in the first direction. A substantial part of the electrostatic deflector extends beyond the passing window in the first direction.

Abstract translation: 一种带电粒子光学系统，包括用于产生多个带电粒子束的子束发生器和用于偏转子束的静电偏转器。 静电偏转器包括适于连接到用于在电极之间产生电场以用于偏转子束的电压的电压的第一和第二电极，电极至少部分地独立于静电偏转器的有效区域。 电极限定至少一个通过的窗口，用于在电极之间通过至少一部分子束，通过窗口具有在第一方向上的长度和在横向上的宽度。 该系统适于将子束排列在至少一排中，并且通过静电偏转器的通过窗口（该行的子束在第一方向上延伸）引导单排的子束。 静电偏转器的主要部分在第一方向上延伸超过通过的窗口。

公开(公告)号：US5336973A

公开(公告)日：1994-08-09

申请号：US999227

申请日：1992-12-31

Applicant: Thierry Leroux ,  Christophe Py

Inventor： Thierry Leroux ,  Christophe Py

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J3/30 ,  H01J29/46

CPC classification number: H01J3/022 ,  H01J3/029

Abstract: A system for controlling the shape of a charged particle beam. The particle beam is emitted from a source (58) of the said particles. Said source is associated with a collecting electrode which collects the particles. The system comprises at least one resistive zone (56) and at least two control electrodes (52, 54). The resistive zone and the control electrodes are arranged substantially at the same level as the source. The control electrodes are also placed on either side of the resistive zone and serve to polarize the latter. The electrical resistance profile of the resistive zone is chosen in such a way that it has the potential distribution so that it is possible to obtain the desired shape of the beam from the source when the control electrodes are appropriately polarized.

Abstract translation: 一种用于控制带电粒子束形状的系统。 粒子束从所述粒子的源（58）发射。 所述源与收集颗粒的收集电极相关联。 该系统包括至少一个电阻区（56）和至少两个控制电极（52,54）。 电阻区和控制电极基本上设置在与源相同的水平。 控制电极也放置在电阻区的两侧，并用于使电极区域极化。 电阻区域的电阻分布以这样一种方式选择，使得其具有电势分布，使得当控制电极被适当地极化时，可以从源获得期望的光束形状。

公开(公告)号：US4956578A

公开(公告)日：1990-09-11

申请号：US224912

申请日：1988-07-27

Applicant: Akira Shimizu ,  Hidetoshi Suzuki ,  Masahiko Okunuki ,  Haruhito Ono ,  Ichiro Nomura ,  Yoshikazu Banno ,  Toshihiko Takeda ,  Tetsuya Kaneko

Inventor： Akira Shimizu ,  Hidetoshi Suzuki ,  Masahiko Okunuki ,  Haruhito Ono ,  Ichiro Nomura ,  Yoshikazu Banno ,  Toshihiko Takeda ,  Tetsuya Kaneko

IPC: H01J3/10 ,  H01J1/316 ,  H01J3/18 ,  H01J3/30

CPC classification number: H01J1/316 ,  H01J2201/3165

Abstract: A surface conduction electron-emitting device includes a high-potential electrode provided on a substrate surface, an electron-emitting region provided in contact with the periphery of an exposed part of the high-potential electrode, and a low-potential electrode in contact with the periphery of the electron-emitting region. The low-potential electrode may project upward in the thickness direction of the substrate to a higher level than the high-potential electrode. A device for applying a voltage may further provided between the high-potential electrode and low-potential electrode. The low-potential electrode may be divided into plural numbers and potential may be applied to each of the low-potential electrodes independently.

公开(公告)号：US09300185B2

公开(公告)日：2016-03-29

申请号：US13798565

申请日：2013-03-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshitaka Arihara ,  Teruyuki Ishizuki ,  Takahisa Kageyama

IPC: H02K7/02 ,  H02K7/18 ,  H02J15/00 ,  H02P9/00 ,  H01J3/30 ,  H02P3/00

CPC classification number: H02K7/025 ,  H01J3/30 ,  H02J3/30 ,  H02K7/18 ,  H02P3/00 ,  H02P9/00 ,  Y02E60/16

Abstract: In one embodiment, a flywheel power generating facility includes a flywheel power generator including a flywheel for storing rotational energy, and configured to convert the rotational energy into electric power to supply the electric power to a test facility. The generating facility further includes a driving motor configured to rotate the flywheel, and a power supply device configured to supply electric power to the driving motor. The generating facility further includes a detector configured to output a signal related to the rotation of the flywheel, and a controller configured to control operation of the driving motor, based on the outputted signal. The controller controls the operation of the driving motor so that the driving motor provides accelerating torque to the flywheel while the supply of the electric power to the test facility is stopped and while the electric power is supplied to the test facility.

Abstract translation: 在一个实施例中，飞轮发电设备包括飞轮发电机，其包括用于存储旋转能量的飞轮，并且被配置为将旋转能量转换成电力以将电力提供给测试设备。 发电设备还包括驱动电动机，其构造成使飞轮旋转;以及电源装置，其被配置为向驱动电动机供电。 发电设备还包括检测器，其被配置为输出与飞轮的旋转有关的信号;以及控制器，其被配置为基于输出的信号来控制驱动电动机的操作。 控制器控制驱动电动机的操作，使得驱动电机向飞轮提供加速转矩，同时停止向测试设备供电，同时向测试设备供电。

公开(公告)号：US20110186747A1

公开(公告)日：2011-08-04

申请号：US13028188

申请日：2011-02-15

Applicant: John Ruffell

Inventor： John Ruffell

IPC: H01J3/32 ,  H01J3/30 ,  H01J3/34

CPC classification number: H01L21/68764 ,  H01J37/1474 ,  H01J37/3171 ,  H01J2237/026 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/1503 ,  H01J2237/20207 ,  H01J2237/30472 ,  H01L21/68771

Abstract: Systems and methods of an ion implant apparatus include an ion source for producing an ion beam along an incident beam axis. The ion implant apparatus includes a beam deflecting assembly coupled to a rotation mechanism that rotates the beam deflecting assembly about the incident beam axis and deflects the ion beam. At least one wafer holder holds target wafers and the rotation mechanism operates to direct the ion beam at one of the at least one wafer holders which also rotates to maintain a constant implant angle.

Abstract translation: 离子注入装置的系统和方法包括用于沿入射束轴产生离子束的离子源。 离子注入装置包括耦合到旋转机构的光束偏转组件，其使射束偏转组件围绕入射光束轴线旋转并偏转离子束。 至少一个晶片保持器保持目标晶片，并且旋转机构操作以将离子束引导至至少一个晶片保持器中的一个，其也旋转以保持恒定的注入角度。