公开(公告)号：US09599510B2

公开(公告)日：2017-03-21

申请号：US14488684

申请日：2014-09-17

Applicant: Cymer, LLC ,  ASML Netherlands B.V.

Inventor： Thomas P. Duffey ,  Herman Philip Godfried

IPC: G03B27/32 ,  G03B27/54 ,  G03B27/74 ,  H01S3/10 ,  H01S3/13 ,  G01J3/28 ,  G03F7/20 ,  G01J11/00 ,  G01J9/00 ,  G01J3/14 ,  G01J3/26 ,  G01J3/02

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

Abstract: A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

公开(公告)号：US09488525B2

公开(公告)日：2016-11-08

申请号：US14466861

申请日：2014-08-22

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Jun Liu ,  Fangjia Li ,  Ruxin Li

IPC: G01J3/28 ,  G01J3/45 ,  G01J11/00 ,  G02B19/00 ,  G02B27/09 ,  G01J3/18

CPC classification number: G01J3/45 ,  G01J3/18 ,  G01J11/00 ,  G01J2003/1861 ,  G01J2003/451 ,  G02B19/0095 ,  G02B27/0988

Abstract: Apparatuses and method for real-time measuring ultrashort pulse shape and pulse width. Transient-grating effect on a transparent optical medium is used to generate a reference beam. A black plate with four equal-sized holes divides the incoming laser beam into four beams, one of which is attenuated and introduced an appropriate time delay relative to the other three. The four laser beams pass through a concave mirror and are focused onto a nonlinear transparent optical medium. The three beams without attenuation are used to generate a transient-grating light in the transparent medium. The transient-grating light is collinear and overlapped with the fourth attenuated beam. According to the third-order nonlinear effect, the transient-grating light has a broader spectral bandwidth and more smooth spectrum phase with respect to the incident laser. By measuring the spectral interference, the spectrum and spectral phase may be retrieved by spectral interferometry.

Abstract translation: 用于实时测量超短脉冲形状和脉冲宽度的装置和方法。 使用透明光学介质上的瞬态光栅效应来产生参考光束。 具有四个相等尺寸孔的黑色板将入射激光束分成四个光束，其中一个光束被衰减并且相对于其他三个光束引入适当的时间延迟。 四个激光束通过凹面镜并聚焦到非线性透明光学介质上。 不使用衰减的三个光束用于在透明介质中产生瞬时光栅光。 瞬态光栅光线与第四衰减光束共线并重叠。 根据三阶非线性效应，瞬态光栅光具有相对于入射激光器的更宽的光谱带宽和更平滑的光谱相位。 通过测量光谱干涉，光谱和光谱相位可以通过光谱干涉测量来检索。

公开(公告)号：US09410886B2

公开(公告)日：2016-08-09

申请号：US13882585

申请日：2011-10-28

Applicant: Calum John Macgregor ,  Desmond Robert Gibson

Inventor： Calum John Macgregor ,  Desmond Robert Gibson

IPC: G01N21/00 ,  G01N21/61 ,  G01N21/27 ,  G01N21/3504 ,  G01J11/00

CPC classification number: G01N21/61 ,  G01J11/00 ,  G01N21/274 ,  G01N21/3504 ,  G01N2201/0696 ,  G01N2201/1211 ,  G01N2201/127

Abstract: An optical absorption gas sensor for detecting an analyte gas comprises a gas sample receiving chamber, at least one light emitting diode (LED) and a photodiode or other photosensor. A plurality of light pulses are generated by passing pulses of current through the at least one LED. The current through the at least one LED is measured a plurality of times during each pulse and taken into account when generating a compensated output signal. The transfer ratio between LED current and photodiode output signal is calculated a plurality of times during each pulse. An ADC measures the LED and photodiode currents alternately. The LED pulses are generated by inductor discharge flyback and the period of time for which current is supplied to the inductor prior to each pulse is selected so that the photodiode output current is at an optimal region within the input range of the ADC. At least the temperature of the at least one LED is measured and taken into account when generating the compensated output signal. Thus, rather than providing especially careful control of the LED pulses, the pulses are measured, enabling a simpler, lower power circuit which is tolerant of variations in temperature to be provided.

Abstract translation: 用于检测分析气体的光吸收气体传感器包括气体样品接收室，至少一个发光二极管（LED）和光电二极管或其它光电传感器。 通过使电流的脉冲通过至少一个LED来产生多个光脉冲。 通过至少一个LED的电流在每个脉冲期间被测量多次，并且在产生补偿的输出信号时被考虑。 在每个脉冲期间多次计算LED电流和光电二极管输出信号之间的传输比。 ADC交替测量LED和光电二极管电流。 LED脉冲由电感放电回扫产生，并且选择在每个脉冲之前向电感器提供电流的时间段，使得光电二极管输出电流处于ADC的输入范围内的最佳区域。 当产生补偿的输出信号时，至少测量并考虑至少一个LED的温度。 因此，不是特别仔细地控制LED脉冲，而是测量脉冲，使得能够提供容忍温度变化的更简单的较低功率电路。

公开(公告)号：US09368315B2

公开(公告)日：2016-06-14

申请号：US14354942

申请日：2012-08-07

Applicant: Katsuyuki Kinoshita

Inventor： Katsuyuki Kinoshita

IPC: H01J31/42 ,  H01J29/08 ,  H01J31/50 ,  G01J11/00 ,  H01J29/74 ,  H01J29/92

CPC classification number: H01J31/42 ,  G01J11/00 ,  G01J2011/005 ,  H01J29/08 ,  H01J29/74 ,  H01J29/92 ,  H01J31/50

Abstract: A steak tube has a container with an entrance plate and an output plate, a photocathode disposed in the container and configured to emit electrons according to light to be measured, the light having been incident through the entrance plate, and a sweep electrode disposed in the container, having a pair of deflection plates for generating an electric field and a connection lead connected to each deflection plate, and configured to sweep the electrons in a sweep direction along the output plate. An opposing of edges of the deflection plate in a direction of the output plate are formed so as to extend in a direction from the entrance plate to the output plate, the connection lead has a first connection portion electrically connected to the deflection plate, and the first connection portion is connected to the opposing of edges.

Abstract translation: 牛排管具有容器，该容器具有入口板和输出板，光电阴极设置在容器中并且被配置为根据被测量的光发射电子，入射到入射板的光和设置在其中的扫掠电极 容器，具有用于产生电场的一对偏转板和连接到每个偏转板的连接引线，并且被配置为沿着输出板沿扫掠方向扫掠电子。 沿着输出板的方向偏转板的边缘相对地形成为从从入口板向输出板的方向延伸，连接引线具有电连接到偏转板的第一连接部分，并且 第一连接部分连接到边缘的相对侧。

公开(公告)号：US09337922B2

公开(公告)日：2016-05-10

申请号：US14379806

申请日：2013-02-06

Applicant: OSAKA UNIVERSITY

Inventor： Tsuyoshi Konishi ,  Koji Takahashi ,  Tomotaka Nagashima

IPC: H04B10/00 ,  H04B10/079 ,  G01J11/00 ,  H04B10/25

CPC classification number: H04B10/07955 ,  G01J11/00 ,  H04B10/25

Abstract: A waveform reconstruction device (140) includes: a phase-spectrum calculation unit (143) which (i) simulates, for each intensity of an input optical signal assumed to have a given phase spectrum, propagation of the input optical signal through an optical transmission medium, to calculate a power spectrum of an output optical signal, and (ii) performs iterations of simulating the propagation while changing the given phase spectrum to reduce differences between calculated power spectra and measured power spectra of the input optical signal having the intensities, to search for a phase spectrum of the input optical signal; and a waveform reconstruction unit (144) which reconstructs a time waveform of the input optical signal using the phase spectrum found through the search, wherein the phase-spectrum calculation unit (143) changes the given phase spectrum or simulates the propagation, based on a nonlinear optical effect or a dispersion effect.

Abstract translation: 波形重建装置（140）包括：相位谱计算单元（143），其对（假定具有给定相位谱的输入光信号的每个强度）模拟通过光传输的输入光信号的传播 介质，以计算输出光信号的功率谱，以及（ii）在改变给定相位频谱的同时进行模拟传播的迭代，以减少计算的功率谱与具有强度的输入光信号的测量功率谱之间的差异，以便 搜索输入光信号的相位谱; 以及波形重建单元（144），其使用通过搜索找到的相位频谱来重构输入光信号的时间波形，其中相位频谱计算单元（143）基于相位谱计算单元（143）改变给定的相位谱或模拟传播， 非线性光学效应或分散效应。

公开(公告)号：US09335220B2

公开(公告)日：2016-05-10

申请号：US14302447

申请日：2014-06-12

Applicant: PrimeSense Ltd.

Inventor： Alexander Shpunt ,  Raviv Erlich

IPC: G01J11/00 ,  G01S7/481 ,  G01S7/497 ,  G01S17/89 ,  G02B5/18 ,  G02B26/10

CPC classification number: G01J11/00 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/89 ,  G02B5/1814 ,  G02B26/101

Abstract: Sensing apparatus includes a transmitter, which emits a beam comprising optical pulses toward a scene, and a receiver, which receives reflections of the optical pulses and outputs electrical pulses in response thereto. Processing circuitry is coupled to the receiver so as to receive, in response to each of at least some of the optical pulses emitted by the transmitter, a first electrical pulse output by the receiver at a first time due to stray reflection within the apparatus and a second electrical pulse output by the receiver at a second time due to the beam reflected from the scene, and to generate a measure of a time of flight of the optical pulses to and from points in the scene by taking a difference between the respective first and second times of output of the first and second electrical pulses.

Abstract translation: 感测装置包括发射包含朝向场景的光脉冲的波束的发射器，以及接收器，其接收光脉冲的反射并响应于该脉冲输出电脉冲。 处理电路耦合到接收器，以便响应于由发射机发射的至少一些光脉冲中的每一个，由于设备内的杂散反射而在第一时间接收由接收器输出的第一电脉冲，以及 由于从场景反射的光束在第二时间由接收器输出的第二电脉冲，并且通过取各自的第一和第二和第 第二和第二电脉冲的第二次输出。

公开(公告)号：US09273994B2

公开(公告)日：2016-03-01

申请号：US14475434

申请日：2014-09-02

Applicant: BEIHANG UNIVERSITY

Inventor： Zheng Zheng ,  Xin Zhao ,  Lei Liu ,  Jiansheng Liu

IPC: G01J3/45 ,  G01J1/10 ,  G01J11/00

CPC classification number: G01J11/00 ,  G01J1/10 ,  G01J3/0224 ,  G01J3/0245 ,  G01J3/10 ,  G01J3/108 ,  G01J3/42 ,  G01J3/433 ,  G01J3/447 ,  G02F1/353 ,  G02F1/365 ,  G02F1/37 ,  G02F2203/13 ,  H01S3/0092 ,  H01S3/06791 ,  H01S3/0809 ,  H01S3/1106 ,  H01S3/1112 ,  H01S3/2391

Abstract: A method and a system for measuring an optical asynchronous sample signal. The system for measuring an optical asynchronous sampling signal comprises a pulsed optical source capable of emitting two optical pulse sequences with different repetition frequencies, a signal optical path, a reference optical path, and a detection device. Since the optical asynchronous sampling signal can be measured by merely using one pulsed optical source, the complexity and cost of the system are reduced. A multi-frequency optical comb system using the pulsed optical source and a method for implementing the multi-frequency optical comb are further disclosed.

Abstract translation: 一种用于测量光学异步采样信号的方法和系统。 用于测量光学异步采样信号的系统包括能够发射具有不同重复频率的两个光脉冲序列的脉冲光源，信号光路，参考光路和检测装置。 由于可以通过仅使用一个脉冲光源来测量光学异步采样信号，所以系统的复杂性和成本降低。 进一步公开了使用脉冲光源的多频光梳系统和实现多频光梳的方法。

公开(公告)号：US09268204B2

公开(公告)日：2016-02-23

申请号：US14332280

申请日：2014-07-15

Applicant: X-Laser LLC

Inventor： Daniel Goldsmith ,  Adam Raugh

IPC: G03B21/14 ,  G03B21/20 ,  G01J1/42 ,  G01J11/00 ,  G03B43/00 ,  G02B26/10 ,  G02B27/48 ,  H04N3/22 ,  H04N9/31 ,  H01S3/00

CPC classification number: G03B21/2033 ,  G01J1/0228 ,  G01J1/4257 ,  G01J11/00 ,  G02B26/10 ,  G02B26/101 ,  G02B27/48 ,  G03B21/14 ,  G03B43/00 ,  H01S3/00 ,  H04N3/22 ,  H04N9/3129

Abstract: In a general aspect, a method can include receiving a first projection pattern, where the first projection pattern is configured to violate a first parameter of a safety system of a laser projection system. The method can also include displaying the first projection pattern with the laser projection system and verifying proper implementation of the first parameter by the safety system based on visual appearance of the displayed first projection pattern. The method can further include receiving a second projection pattern, where the second projection pattern is configured to violate a second parameter of the safety system of the laser projection system and the second parameter is different than the first parameter. The method can further include displaying the second projection pattern with the laser projection system and verifying proper implementation of the second parameter by the safety system based on visual appearance of the displayed second projection pattern.

Abstract translation: 在一般方面，一种方法可以包括接收第一投影图案，其中第一投影图案被配置为违反激光投影系统的安全系统的第一参数。 该方法还可以包括用激光投影系统显示第一投影图案，并且基于所显示的第一投影图案的视觉外观来验证安全系统对第一参数的适当实现。 该方法还可以包括接收第二投影图案，其中第二投影图案被配置为违反激光投影系统的安全系统的第二参数，并且第二参数不同于第一参数。 该方法还可以包括利用激光投影系统显示第二投影图案，并且基于所显示的第二投影图案的视觉外观来验证安全系统对第二参数的适当实现。

公开(公告)号：US09239268B1

公开(公告)日：2016-01-19

申请号：US14330488

申请日：2014-07-14

Applicant: ASML Netherlands B.V.

Inventor： Rong Liu ,  Robert J. Rafac ,  David Wayne Myers ,  Robert A. Bergstedt ,  Paul Alexander McKenzie

IPC: G01J5/00 ,  G01J11/00 ,  H05G2/00 ,  H01S5/042

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0295 ,  G01J1/429 ,  G01J2001/4238 ,  G01J2001/4247 ,  H01S3/0014 ,  H01S3/2232 ,  H01S5/042 ,  H05G2/008

Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.

公开(公告)号：US20160011057A1

公开(公告)日：2016-01-14

申请号：US14330526

申请日：2014-07-14

Applicant: ASML Netherlands B.V.

Inventor： Rong Liu ,  Robert J. Rafac ,  David Wayne Myers ,  Robert A. Bergstedt ,  Paul Alexander McKenzie

IPC: G01J11/00 ,  G01J1/42 ,  H05G2/00

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0295 ,  G01J1/4257 ,  G01J1/429 ,  G01J2001/4238 ,  G02B27/0025 ,  H01S5/042 ,  H05G2/008

Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.

Abstract translation: 在激光产生的等离子体（LPP）极紫外（EUV）系统中，使用激光脉冲来产生EUV光。 为了确定单个激光脉冲的能量，使用校准系数将光电（PEM）检测器校准到功率计。 当测量包括单个波长的脉冲的单一激光束时，基于脉冲的脉冲串来计算校准系数。 组合的激光束具有与第二波长的预脉冲脉冲交替的第一波长的主脉冲。 为了计算组合激光束中主脉冲的能量，使用为主脉冲的单一激光束计算的校准系数。 为了计算组合激光束中预脉冲的能量，计算出新的校准系数。 当计算出的能量值漂移超过预先定义的阈值时，重新计算校准系数。