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公开(公告)号:US5596219A
公开(公告)日:1997-01-21
申请号:US442511
申请日:1995-05-16
Applicant: Christofer Hierold
Inventor: Christofer Hierold
IPC: H01L27/04 , B81B3/00 , B81C1/00 , G01F1/684 , G01F1/688 , G01K7/01 , G01P15/08 , H01L21/822 , H01L27/16 , H01L49/00 , H01L31/058 , H01L29/82
CPC classification number: H01L27/16 , B81B3/0081 , B81C1/00246 , B81C1/0069 , G01F1/6845 , G01F1/6888 , G01K7/015 , G01P15/0802 , B81B2201/0278 , B81B2203/0315 , B81C2201/053 , B81C2203/0136 , B81C2203/0735
Abstract: Semiconductor component with monolithically integrated electronic circuits and monolithically integrated sensor/acutator, whereby the sensor/actuator is manufactured with methods of surface micromachining in a sensor layer (3) of polysilicon that is structured, for example, with sensor webs (6), and these sensor webs (6) are thermally insulated from a silicon substrate (1) by a cavity (4) that is produced in a sacrificial layer (2) and is closed gas-tight toward the outside with a closure layer (5).
Abstract translation: 具有单片集成电子电路和单片集成传感器/辅助器的半导体部件,由此传感器/致动器由例如由传感器网(6)构成的多晶硅传感器层(3)中的表面微加工的方法制造,以及 这些传感器网(6)通过在牺牲层(2)中制造的空腔(4)与硅衬底(1)热绝缘,并且用封闭层(5)朝向外部气密地封闭。
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公开(公告)号:US11885689B2
公开(公告)日:2024-01-30
申请号:US17067718
申请日:2020-10-11
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Ming-Han Tsai
IPC: G01J5/02 , B81B7/02 , B81B7/00 , G01J5/14 , G01J5/04 , G01J5/00 , H04N23/56 , A61B5/01 , A61B5/00 , G01K13/20 , A61B5/024 , A61B5/1455
CPC classification number: G01J5/0265 , A61B5/01 , A61B5/681 , B81B7/0025 , B81B7/0061 , B81B7/02 , G01J5/0025 , G01J5/027 , G01J5/04 , G01J5/046 , G01J5/14 , G01K13/20 , H04N23/56 , A61B5/02416 , A61B5/14551 , A61B2562/0233 , B81B2201/0214 , B81B2201/0235 , B81B2201/0242 , B81B2201/0278 , H01L2224/48091 , H01L2924/16151 , H01L2924/16153 , H01L2924/16235 , H01L2224/48091 , H01L2924/00014
Abstract: The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on apart of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.
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公开(公告)号:US11884538B2
公开(公告)日:2024-01-30
申请号:US17487203
申请日:2021-09-28
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Marco Corsi , Barry Jon Male
CPC classification number: B81B7/008 , B81B7/007 , B81B7/02 , B81C1/00238 , B81B2201/0278
Abstract: A sensor device includes a first and second Micro-Electro-Mechanical (MEM) structures. The first MEM structure includes a first heating element on a first layer of the first MEM structure. The first heating element includes an input adapted to receive an input signal. The first MEM structure also includes a first temperature sensing element on a second layer of the first MEM structure. The second MEM structure includes a second heating element on a first layer of the second MEM structure and a second temperature sensing element on a second layer of the second MEM structure. An output circuit has a first input coupled to the first temperature sensing element and a second input coupled to the second temperature sensing element.
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公开(公告)号:US11834326B2
公开(公告)日:2023-12-05
申请号:US17461835
申请日:2021-08-30
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor: Kei Masunishi , Yasushi Tomizawa , Etsuji Ogawa , Ryunosuke Gando , Shiori Kaji , Hiroki Hiraga , Fumito Miyazaki , Daiki Ono
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B2201/0235 , B81B2201/0271 , B81B2201/0278 , B81B2203/04 , B81B2203/06
Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.
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公开(公告)号:US11828742B2
公开(公告)日:2023-11-28
申请号:US18170849
申请日:2023-02-17
Applicant: Brown University
Inventor: Jacob K. Rosenstein , Christopher Rose
CPC classification number: G01N33/0075 , B81B3/0018 , B81B2201/0264 , B81B2201/0278
Abstract: A system includes an array of chemical, pressure, and temperature sensors, and a temporal airflow modulator configured to provide sniffed vapors in a temporally-modulated sequence through a plurality of different air paths across multiple sensor locations.
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公开(公告)号:US11820650B2
公开(公告)日:2023-11-21
申请号:US16882039
申请日:2020-05-22
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Bor-Shiun Lee , Ming-Fa Chen , Yu-Wen Hsu , Chao-Ta Huang
CPC classification number: B81B7/02 , B81C1/00246 , G01K7/186 , G01L19/0092 , G01N27/223 , B81B2201/0264 , B81B2201/0278
Abstract: The disclosure relates to a microelectromechanical apparatus including a substrate, a stationary electrode, a movable electrode, and a heater. The substrate includes an upper surface, an inner bottom surface, and an inner side surface. The inner side surface surrounds and connects with the inner bottom surface. The inner side surface and the inner bottom surface define a recess. The stationary electrode is disposed on the inner bottom surface. The movable electrode covers the recess. The movable electrode, the inner bottom surface, and the inner side surface define a hermetic chamber. The heater is disposed on the movable electrode and located above the hermetic chamber.
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公开(公告)号:US11719579B2
公开(公告)日:2023-08-08
申请号:US17578691
申请日:2022-01-19
Applicant: PIXART IMAGING INC.
Inventor: Chih-Ming Sun , Ming-Han Tsai , Cheng-Nan Tsai
CPC classification number: G01J5/0265 , B81B7/0064 , B81B7/0067 , G01J5/041 , G01J5/045 , G01J5/06 , H04N5/33 , H04N23/57 , B81B2201/0278
Abstract: A wearable device includes a case and a far infrared temperature sensing device. The case has a first opening. The far infrared temperature sensing device is disposed inside the case of the wearable device. The far infrared temperature sensing device includes an assembly structure, a sensor chip, a filter structure, and a metal shielding structure. The assembly structure has an accommodating space and a top opening. The sensor chip is disposed in the accommodating space of the assembly structure. The filter structure is disposed above the sensor chip. The metal shielding structure is disposed above the sensor chip, and has a second opening to expose the filter structure. The first and second openings are communicated to cooperatively define a through hole.
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公开(公告)号:US11674132B2
公开(公告)日:2023-06-13
申请号:US16997614
申请日:2020-08-19
Applicant: Purigen Biosystems, Inc.
Inventor: Lewis A. Marshall , Amy L. Hiddessen , Nathan P. Hoverter , Klint A. Rose , Juan G. Santiago
IPC: G01N27/453 , C12N15/10 , G01N27/447 , B01L3/00 , C12Q1/6806 , B81B1/00 , B81B7/00
CPC classification number: C12N15/101 , B01L3/502753 , C12N15/10 , C12Q1/6806 , G01N27/4473 , G01N27/44739 , G01N27/44791 , G01N27/44795 , B01L3/502738 , B01L2300/0627 , B01L2300/0867 , B81B1/004 , B81B7/0087 , B81B2201/0278 , B81B2201/05 , B81B2203/0338 , G01N27/44704 , C12N15/101 , C12Q2565/125
Abstract: The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.
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公开(公告)号:US20180356255A1
公开(公告)日:2018-12-13
申请号:US15781352
申请日:2015-12-14
Applicant: Goertek Inc.
Inventor: Junkai ZHAN , Mengjin CAI
IPC: G01D5/241
CPC classification number: G01D5/2417 , B81B2201/0214 , B81B2201/0221 , B81B2201/0264 , B81B2201/0278 , B81B2207/053 , B81C1/00182 , B81C1/00214 , G01K7/34 , G01L9/0045 , G01L9/0047 , G01L9/0073
Abstract: An environmental sensor and manufacturing method thereof. The environmental sensor comprises: a substrate comprising at least one recess disposed at an upper portion of the substrate; and a sensitive film layer disposed above the substrate, comprising a fixed portion fixed on an end surface of the substrate and a bent portion configured to extend inside the recess. The bent portion and a side wall of the recess form a capacitor configured to detect a signal. The bent portion, fixed portion, and the recess form a closed cavity. A conventional capacitive structure configured on a substrate surface is changed to a capacitive structure of the environmental sensor vertically extending into the inside of the substrate, increasing a depth of the recess, and in turn, increasing a sensing area between two polar plates of the capacitor, significantly shrinking a coverage area of the capacitor on the substrate, and satisfying a requirement of a modern compact electronic component.
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公开(公告)号:US10017379B2
公开(公告)日:2018-07-10
申请号:US15492193
申请日:2017-04-20
Applicant: Infineon Technologies AG
Inventor: Vijaye Kumar Rajaraman , Yonsuang Arnanthigo , Alfons Dehe , Stefan Kolb
CPC classification number: B81B7/02 , B81B3/0018 , B81B2201/0214 , B81B2201/0257 , B81B2201/0278 , B81C1/00166 , B81C1/00182 , B81C1/00206 , G01N27/223 , H04R19/005 , H04R19/04 , H04R31/003 , H04R2201/003
Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.
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