公开(公告)号：US20120198891A1

公开(公告)日：2012-08-09

申请号：US13363652

申请日：2012-02-01

Applicant: Yoshiaki TAMURA ,  Masaaki HIRANO ,  Tetsuya HARUNA

Inventor： Yoshiaki TAMURA ,  Masaaki HIRANO ,  Tetsuya HARUNA

IPC: C03B37/075 ,  C03B37/012

CPC classification number: C03B37/01869 ,  C03B37/01228 ,  C03B37/01861 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50

Abstract: A method for producing an optical fiber preform according to the present invention includes a collapse step of collapsing a silica-based glass tube by heating with a heat source continuously traversed in the longitudinal direction of the glass tube to form a first glass rod to be formed into a core part or part of a core part of an optical fiber, the glass tube having an inner surface doped with an alkali metal, in which the glass tube has a maximum alkali metal concentration of 500 to 20,000 atomic ppm, a maximum chlorine concentration of 0 to 1000 atomic ppm, and a maximum fluorine concentration of 0 to 10,000 atomic ppm, and in which in the collapse step, the maximum temperature of the outer surface of the glass tube is 2000° C. to 2250° C., and the traverse speed of the heat source is 30 mm/min to 100 mm/min.

Abstract translation: 根据本发明的光纤预制件的制造方法包括：通过在沿着玻璃管的长度方向连续地横穿的热源进行加热使二氧化硅系玻璃管塌缩以形成第一玻璃棒的崩溃步骤 成为光纤的核心部分的核心部分或部分，玻璃管具有掺杂有碱金属的内表面，其中玻璃管具有最大的碱金属浓度为500至20,000原子ppm，最大氯浓度 0〜1000原子ppm，最大氟浓度为0〜10,000原子ppm，在塌陷工序中，玻璃管的外表面的最高温度为2000℃〜2250℃， 热源的横移速度为30mm / min〜100mm / min。

公开(公告)号：US20110203320A1

公开(公告)日：2011-08-25

申请号：US13099047

申请日：2011-05-02

Applicant: Eric EVA

Inventor： Eric EVA

IPC: C03B20/00 ,  C03C21/00 ,  C03C19/00

CPC classification number: C03C3/06 ,  C03B23/0013 ,  C03B23/0026 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54

Abstract: A method for manufacturing at least one lens of synthetic quartz glass with increased H2 content for an optical system with an operating wavelength of less than 250 nm. The method involves: (1) providing at least one precursor product of synthetic quartz glass with a first H2 content, the precursor product having a circumferential border surface and two mutually opposed base surfaces, wherein at least one partial surface of at least one of the base surfaces has a curvature; (2) determining at least one target value for at least one treatment parameter for treating the precursor product in an H2-containing inert gas atmosphere; (3) treating the precursor product in the H2-containing atmosphere in accordance with the target value of the treatment parameter, thereby producing at least one precursor product of synthetic quartz glass with a second H2 content that is greater than the first H2 content; and (4) working at least part of at least one of the base surfaces of the treated precursor product, thereby producing at least one final lens shape.

Abstract translation: 一种用于制造工作波长小于250nm的光学系统的具有增加的H 2含量的合成石英玻璃的至少一个透镜的方法。 该方法包括：（1）提供具有第一H 2含量的合成石英玻璃的至少一种前体产物，所述前体产物具有周向边界表面和两个彼此相对的基底表面，其中至少一个 基面具有曲率; （2）确定用于在含H2惰性气体气氛中处理前体产物的至少一个处理参数的至少一个目标值; （3）根据处理参数的目标值处理含H2气氛中的前体产物，从而产生具有大于第一H 2含量的第二H 2含量的合成石英玻璃的至少一种前体产物; 和（4）处理所处理的前体产品的至少一个基底表面的至少一部分，由此产生至少一个最终的透镜形状。

公开(公告)号：US07841211B2

公开(公告)日：2010-11-30

申请号：US10535935

申请日：2003-11-28

Applicant: Tatsuhiro Sato ,  Takahiro Kaitou ,  Akira Fujinoki ,  Toshiyuki Kato ,  Tohru Segawa ,  Nobumasa Yoshida

Inventor： Tatsuhiro Sato ,  Takahiro Kaitou ,  Akira Fujinoki ,  Toshiyuki Kato ,  Tohru Segawa ,  Nobumasa Yoshida

IPC: C03B20/00 ,  C03B19/14

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2201/24 ,  C03C2201/02 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26

Abstract: First of all, there is provided a production process of a synthetic quartz glass which has less impurity, has a high-temperature viscosity characteristic equal to or more than that of a natural quartz glass, and hardly deforms even in a high-temperature environment, and especially a production process of a highly heat resistant synthetic quartz glass which is free from the generation of bubbles and is dense. Secondly, there is provided a highly heat resistant synthetic quartz glass body which is easily obtained by the production process of the present invention, and especially a transparent or black quartz glass body which is free from the generation of bubbles, is dense, has high infrared absorption rate and emission rate, and has an extremely high effect for preventing diffusion of alkali metal. The process is a process of producing a highly heat resistant quartz glass body having an absorption coefficient at 245 nm of 0.05 cm−1 or more, and the silica porous body was subjected to a reduction treatment, followed by baking, thereby forming a dense glass body.

Abstract translation: 首先，提供了杂质少，具有等于或高于天然石英玻璃的高温粘度特性的合成石英玻璃的制造方法，即使在高温环境下也几乎不变形， 特别是高度耐热的合成石英玻璃的生产过程，其不产生气泡并且致密。 其次，提供了通过本发明的制造方法容易获得的高耐热性合成石英玻璃体，特别是不产生气泡的透明或黑色石英玻璃体，具有高红外 吸收率和排放率，对防止碱金属的扩散具有极高的效果。 该方法是制造吸收系数在245nm为0.05cm -1以上的高耐热性石英玻璃体的工序，对二氧化硅多孔体进行还原处理，然后进行烧成，由此形成致密的玻璃 身体。

公开(公告)号：US07631518B2

公开(公告)日：2009-12-15

申请号：US10904909

申请日：2004-12-03

Applicant: Toivo T. Kodas ,  Mark J. Hampden-Smith ,  James Caruso ,  Quint H. Powell ,  Audunn Ludviksson

Inventor： Toivo T. Kodas ,  Mark J. Hampden-Smith ,  James Caruso ,  Quint H. Powell ,  Audunn Ludviksson

IPC: C03B19/10

CPC classification number: B82Y30/00 ,  A61K6/0276 ,  A61K6/08 ,  A61K6/083 ,  B01J13/02 ,  B01J19/10 ,  B01J19/2405 ,  B01J2219/00112 ,  B01J2219/00155 ,  B01J2219/00159 ,  B01J2219/00162 ,  B01J2219/00166 ,  B01J2219/00171 ,  B01J2219/00186 ,  B24B37/044 ,  C01B13/18 ,  C01B13/185 ,  C01B17/20 ,  C01F17/0043 ,  C01G23/003 ,  C01P2002/60 ,  C01P2004/03 ,  C01P2004/32 ,  C01P2004/34 ,  C01P2004/50 ,  C01P2004/52 ,  C01P2004/61 ,  C01P2004/62 ,  C01P2006/22 ,  C03B19/106 ,  C03B2201/07 ,  C03C8/16 ,  C03C11/002 ,  C03C12/00 ,  C03C14/004 ,  C03C17/30 ,  C03C2214/08 ,  C09G1/02 ,  C09K3/1436 ,  C09K3/1463 ,  C09K11/584 ,  C09K11/595 ,  C09K11/623 ,  C09K11/642 ,  C09K11/643 ,  C09K11/644 ,  C09K11/662 ,  C09K11/666 ,  C09K11/672 ,  C09K11/7701 ,  C09K11/7708 ,  C09K11/7729 ,  C09K11/7769 ,  C09K11/7776 ,  C09K11/7784 ,  C09K11/7786 ,  C09K11/7787 ,  H01L21/3212 ,  Y02P40/57 ,  Y10T428/29 ,  Y10T428/2982 ,  Y10T428/2991 ,  Y10T428/2995 ,  Y10T428/2996 ,  C08L33/00

Abstract: Methods for producing glass powders are provided. The methods include generating an aerosol stream comprising droplets that include a liquid and a glass precursor. Glass particles are formed in the aerosol stream having a small average particle size. The powders can also have a small particle size, narrow size distribution, a high density and a spherical morphology. The invention also includes devices and products formed from the glass powders.

Abstract translation: 提供制造玻璃粉末的方法。 所述方法包括产生包括液滴和玻璃前体的液滴的气溶胶流。 在具有小平均粒度的气溶胶流中形成玻璃颗粒。 粉末也可以具有小的粒度，窄的分布尺寸，高密度和球形的形态。 本发明还包括由玻璃粉末形成的装置和产品。

公开(公告)号：US20090203512A1

公开(公告)日：2009-08-13

申请号：US12364083

申请日：2009-02-02

Applicant: Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko ,  Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko ,  Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03C3/06 ,  B05D5/06

CPC classification number: C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/22 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/70966

Abstract: A fused silica glass having a refractive index homogeneity of less or equal to about 5 ppm over an aperture area of at least about 50 cm2. The fused silica glass is also substantially free of halogens and has an adsorption edge of less than about 160 nm. The glass is dried by exposing a silica soot blank to carbon monoxide before consolidation, reducing the combined concentration of hydroxyl (i.e., OH, where H is protium (11H) and deuteroxyl (OD), where D is deuterium (12H)) of less than about 20 ppm by weight in one embodiment, less than about 5 ppm by weight in another embodiment, and less than about 1 ppm by weight in a third embodiment.

Abstract translation: 在至少约50cm 2的开口面积上具有小于或等于约5ppm的折射率均匀性的熔融石英玻璃。 熔融石英玻璃也基本上不含卤素并具有小于约160nm的吸附边。 玻璃通过在固化前将二氧化硅烟炱坯料暴露于一氧化碳而干燥，降低羟基（即OH，其中H为铑（11H）和氘氧基（OD），其中D为氘（12H））的组合浓度较小 在一个实施方案中约20重量ppm，在另一个实施方案中小于约5重量ppm，在第三个实施方案中小于约1重量ppm。

公开(公告)号：US20090163344A1

公开(公告)日：2009-06-25

申请号：US12226861

申请日：2007-09-04

Applicant: Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

Inventor： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC: C03C3/04 ,  C03B19/06 ,  C03B20/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

Abstract: The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

Abstract translation: 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US20090148627A1

公开(公告)日：2009-06-11

申请号：US12370693

申请日：2009-02-13

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

IPC: B05D1/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US20080053150A1

公开(公告)日：2008-03-06

申请号：US11891984

申请日：2007-08-14

Applicant: Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03B19/00 ,  C03C3/04

CPC classification number: C03B19/1461 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/061 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/40 ,  C03C2201/50 ,  Y02P40/57

Abstract: An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.

Abstract translation: F掺杂石英玻璃，制造玻璃的方法，包括玻璃的光学构件和包括这种光学构件的光学系统。 玻璃材料包含0.1-5000ppm重量的氟。 根据本发明的某些实施方案的玻璃材料在193nm处具有低偏振诱发双折射，低LIWFD和低诱导吸收。

公开(公告)号：US20070066477A1

公开(公告)日：2007-03-22

申请号：US11521683

申请日：2006-09-15

Applicant: Brian Harper ,  Kenneth Hrdina ,  John LaSala

Inventor： Brian Harper ,  Kenneth Hrdina ,  John LaSala

IPC: C03B19/06 ,  C03C3/06 ,  C03B32/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/708 ,  Y10S501/905

Abstract: Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the use of varying H2 partial pressure of H2 in the atmosphere. Both can result in expedited hydrogen loading process.

Abstract translation: 公开了用于氢气加载石英玻璃和包含加载H 2 N 2的二氧化硅玻璃的方法。 这些方法可导致玻璃材料中的H 2 2梯度。 或者，该方法可以涉及在气氛中使用H 2 H 2 H 2 H 2分压的变化。 两者都可以产生加速氢气加载过程。

公开(公告)号：US07184636B2

公开(公告)日：2007-02-27

申请号：US11074886

申请日：2005-03-07

Applicant: A. Joseph Antos ,  Dana C. Bookbinder ,  Richard M. Fiacco ,  Kevin B. Sparks

Inventor： A. Joseph Antos ,  Dana C. Bookbinder ,  Richard M. Fiacco ,  Kevin B. Sparks

IPC: G02B6/02 ,  C03B37/018 ,  C02C13/04

CPC classification number: G02B6/03694 ,  C03B37/01446 ,  C03B37/01853 ,  C03B2201/07 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/31 ,  C03B2203/22 ,  C03C13/045 ,  C03C13/047 ,  C03C2201/22 ,  G02B6/02 ,  G02B6/03622 ,  G02B6/2835 ,  Y02P40/57

Abstract: A method of manufacturing a glassy optical preform is disclosed that includes providing a preform having a silica soot layer and then sintering the soot layer into a glassy layer, and water is selectively added to the preform by exposing the soot layer to a gaseous water-containing atmosphere during the sintering step. The preform is controllably doped with water.

Abstract translation: 公开了一种制造玻璃状光学预型件的方法，其包括提供具有二氧化硅烟灰层的预制件，然后将烟灰层烧结成玻璃状层，并通过将烟灰层暴露于含气体的含水层 烧结过程中的气氛。 预制件可控制地掺入水中。