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    Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
    111.
    发明授权
    Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information 失效
    利用极化获得同相和正交信息的光学正交干涉测量

    公开(公告)号：US5883717A

    公开(公告)日：1999-03-16

    申请号：US658087

    申请日：1996-06-04

    Applicant: Charles A. DiMarzio ,  Anthony J. Devaney ,  Scott C. Lindberg

    Inventor： Charles A. DiMarzio ,  Anthony J. Devaney ,  Scott C. Lindberg

    IPC: G01J3/447 ,  G01J3/453 ,  G01J9/02 ,  G01N21/47 ,  G01B9/02

    CPC classification number: G01J3/447 ,  G01J3/453 ,  G01J9/02 ,  G01N21/4795

    Abstract: An optical quadrature interferometer is presented. The optical quadrature interferometer uses a different state of polarization in each of two arms of the interferometer. A light beam is split into two beams by a beamsplitter, each beam directed to a respective arm of the interferometer. In one arm, the measurement arm, the light beam is directed through a linear polarizer and a quarter wave plate to produce circularly polarized light, and then to a target being measured. In the other arm, the to reference arm, the light beam is not subject to any change in polarization. After the light beams have traversed their respective arms, the light beams are combined by a recombining beamsplitter. As such, upon the beams of each arm being recombined, a polarizing element is used to separate the combined light beam into two separate fields which are in quadrature with each other. An image processing algorithm can then obtain the in-phase and quadrature components of the signal in order to construct an image of the target based on the magnitude and phase of the recombined light beam.

    Abstract translation: 提出了一种光学正交干涉仪。 光学正交干涉仪在干涉仪的两个臂中的每一个中使用不同的偏振状态。 光束被分束器分成两束，每束光束指向干涉仪的相应臂。 在一个臂中，测量臂，光束被引导通过线性偏振器和四分之一波片以产生圆偏振光，然后到被测量的目标。 在另一个臂中，对于参考臂，光束不会发生极化的任何变化。 在光束穿过其各自的臂之后，光束通过重组分束器组合。 因此，在每个臂的光束被复合时，使用偏振元件将组合的光束分离成彼此成正交的两个分离的场。 然后，图像处理算法可以获得信号的同相和正交分量，以便基于重新组合的光束的大小和相位来构建目标的图像。

    Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry
    112.
    发明授权
    Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry 失效
    使用光谱椭偏仪测量和控制周期结构中的线宽

    公开(公告)号：US5739909A

    公开(公告)日：1998-04-14

    申请号：US543570

    申请日：1995-10-10

    Applicant: Nadine Blayo ,  Arnaud Grevoz ,  Tseng-Chung Lee

    Inventor： Nadine Blayo ,  Arnaud Grevoz ,  Tseng-Chung Lee

    IPC: G01B11/02 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21

    CPC classification number: G01B11/02 ,  G01J3/447 ,  G01J4/00 ,  G01N2021/213

    Abstract: A non destructive method of spectroscopic ellipsometry adapted to measure the width of features in periodic structures, particularly those features which are less than one micron wide. The method is also adapted to make comparisons between a known reference structure and a sample structure, and to control the fabrication of periodic structures in a plasma etching reactor. Peaks in functions DELTA and PSI versus wavelength are monitored and correlated against reference curves, permitting etching conditions to be modified. This technique avoids the need for use of scanning electron microscopy to measure the linewidth, which is a destructive method. It also posses an advantage over scatterometry which requires several detectors arrayed at different angles from an incident beam to measure the different diffracted orders.

    Abstract translation: 适用于测量周期结构中特征宽度的非破坏性方法，特别是那些小于1微米宽的特征。 该方法还适于在已知参考结构和样品结构之间进行比较，并且控制等离子体蚀刻反应器中周期性结构的制造。 监测功能DELTA和PSI对波长的峰值，并与参考曲线相关，允许修改蚀刻条件。 这种技术避免了使用扫描电子显微镜来测量线宽，这是一种破坏性的方法。 它还具有优于散射法的优点，其需要以与入射光束不同的角度排列的多个检测器来测量不同的衍射级。

    Flourescence spectrophotometer for measuring fluorescent light of a plurality of wavelength conditions
    114.
    发明授权
    Flourescence spectrophotometer for measuring fluorescent light of a plurality of wavelength conditions 失效
    荧光分光光度计，用于测量多种波长条件下的荧光

    公开(公告)号：US4946279A

    公开(公告)日：1990-08-07

    申请号：US298969

    申请日：1989-01-19

    Applicant: Kunihiko Ohkubo

    Inventor： Kunihiko Ohkubo

    IPC: G01J3/443 ,  G01J3/44 ,  G01J3/447 ,  G01N21/64

    CPC classification number: G01J3/4406

    Abstract: In a fluorescence spectrophotometer comprising a light source, an excitation monochromator, a sample cell, an emission monochromator, a photodetector and a signal processing device, an excitation light polarizer and an emission light polarizer are disposed in the excitation light path and the emission light path, respectively, and the excitation and emission light wavelengths of the two monochromators are changed simultaneously in accordance with each of a plurality of wavelength conditions, and in each of the wavelength conditions, the direction of polarization of the emission light polarizer is changed between two orthogonal directions, in each of which the output of the detector is sampled by the signal processor, and the processed data is stored so as to be used for calculation of the degree of polarization of the polarized fluorescent light from the sample.

    Abstract translation: 在包括光源，激发单色仪，样品池，发射单色仪，光电检测器和信号处理装置的荧光分光光度计中，激发光偏振器和发射光偏振器设置在激发光路和发射光路 ，并且根据多个波长条件中的每一个，两个单色仪的激发和发射光波长同时改变，并且在每个波长条件中，发射光偏振器的偏振方向在两个正交 方向，其中检测器的输出由信号处理器采样，并且处理的数据被存储以便用于计算来自样品的偏振荧光的偏振度。

    Double polarized light beam spectrophotometer of light source modulation type
    115.
    发明授权
    Double polarized light beam spectrophotometer of light source modulation type 失效
    双偏振光束分光光度计光源调制型

    公开(公告)号：US4645341A

    公开(公告)日：1987-02-24

    申请号：US604939

    申请日：1984-04-27

    Applicant: Masataka Koga ,  Masatoshi Kitagawa ,  Konosuke Oishi

    Inventor： Masataka Koga ,  Masatoshi Kitagawa ,  Konosuke Oishi

    IPC: G01J3/447 ,  G01J3/427 ,  G01N21/31 ,  G01N21/74 ,  G01J3/42

    CPC classification number: G01N21/3103 ,  G01J2003/4275 ,  G01N2021/3111 ,  G01N21/74

    Abstract: A double polarized light beam spectrophotometer of a light-source modulation type. A modulated light beam emitted by a light source is conducted through specimen atom vapor generated by a graphite atomizer. Wavelength of light undergone atom absorption is selected and spatially separated into a pair of linearly polarized light beams perpendicular to each other. The pair of the linearly polarized light beams separated are alternately passed through a chopper and received by a photoelectric conversion device to be converted into electric signals which are utilized for determining atomic absorption of the specimen. The phase of modulation of light radiated from the light source is synchronized with phase of a current supplied to the graphite atomizer for heating thereof and the switching timing of the chopper.

    Abstract translation: 一种光源调制型双偏振光束分光光度计。 由光源发射的调制光束通过由石墨雾化器产生的试样原子蒸气进行。 选择原子吸收的光的波长并在空间上分离为彼此垂直的一对线性偏振光束。 分离出的一对线偏振光交替地通过斩波器并由光电转换装置接收，以转换成用于确定样品的原子吸收的电信号。 从光源辐射的光的调制相位与提供给石墨雾化器的电流的相位同步，以加热它们以及斩波器的切换时序。

    Optical pumping enhancement of a two-photon spectrometer and a two-photon frequency standard
    117.
    发明授权
    Optical pumping enhancement of a two-photon spectrometer and a two-photon frequency standard 有权

    公开(公告)号：US12025495B2

    公开(公告)日：2024-07-02

    申请号：US17750264

    申请日：2022-05-20

    Applicant: Joseph Daniel Vance

    Inventor： Joseph Daniel Vance

    IPC: G01J3/10 ,  G01J3/447

    CPC classification number: G01J3/10 ,  G01J3/447

    Abstract: A light frequency standard for use as an optical clock is disclosed that is improved by optical pumping. Optical pumping is utilized to change the ground states of the atomic vapor from transition-forbidden to transition-allowed ground states involved in two-photon absorption process. Using an optical pump creates a stronger absorption line signal used for locking the laser to an absolute frequency. An optical spectrometer based upon two-photon absorption is disclosed that is improved by optical pumping, utilizing two optical pumps. The first optical pump provides photons that may combine with probe light for two-photon absorption, but it also depletes absorbing atoms that are in ground states. The second optical pump replenishes the supply of absorbing atoms into ground states allowing two-photon absorption between the first optical pump and the probe light. Two-photon absorption between the second pump light and the probe light is forbidden due to energy mismatch.

    HEAT ASSISTED DETECTION AND RANGING BASED ON SPECTROPOLARIMETRIC IMAGING
    119.
    发明公开
    HEAT ASSISTED DETECTION AND RANGING BASED ON SPECTROPOLARIMETRIC IMAGING 审中-公开

    公开(公告)号：US20230341265A1

    公开(公告)日：2023-10-26

    申请号：US17778842

    申请日：2020-12-06

    Applicant: Purdue Research Foundation

    Inventor： Zubin Jacob ,  Fanglin Bao ,  Xueji Wang

    IPC: G01J3/447 ,  G01J3/28 ,  G01J5/48 ,  G06V10/30 ,  G06V10/54 ,  G06V10/75

    CPC classification number: G01J3/447 ,  G01J3/2823 ,  G01J5/485 ,  G06V10/30 ,  G06V10/54 ,  G06V10/751 ,  G06V10/758 ,  G01J4/04

    Abstract: A method of generating object surface texture in thermal infrared images is disclosed which includes receiving heat radiation from a scene by a spectropolarimetric imaging system, generating a plurality of spectral frames associated with the scene, each frame having a plurality of pixels, for each pixel from the generated plurality of spectral frames, extracting spectral information associated with the scene, including pixel-specific temperature representing an objects temperature, and thermal texture factor representing the objects texture, for each of a plurality of materials having a specific emissivity in a library, generating reference spectral information as a function of temperature and thermal texture, matching the extracted spectral information for each pixel from the generated plurality of spectral frames to the generated reference spectral information using a statistical method to minimize the associated variation, and extracting spectral metadata from the matched reference spectral information for the associated material based on the match.

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