公开(公告)号：US20140368825A1

公开(公告)日：2014-12-18

申请号：US14306157

申请日：2014-06-16

Applicant: Teknologian tutkimuskeskus VTT

Inventor： Anna RISSANEN ,  Jarkko ANTILA

IPC: G01J3/45 ,  G02B27/14 ,  G02B27/10 ,  G01J3/02

CPC classification number: G02B27/142 ,  G01J3/26 ,  G02B5/0833 ,  G02B26/001 ,  G02B27/1013 ,  G02B27/141

Abstract: A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a base slab, which includes a substrate coated with a reflective multilayer coating, forming one or more intermediate layers on the base slab such that the lowermost intermediate layer substantially consists of silica, and such that the multilayer coating is at least partially covered by the lowermost intermediate layer, forming one or more capacitive sensor electrodes by depositing conductive material on top of the intermediate layers, and removing material of the lowermost intermediate layer by etching in order to form an exposed aperture portion of the multilayer coating.

Abstract translation: 用于制造法布里 - 珀罗干涉仪的镜板的方法包括提供基底板，其包括涂覆有反射多层涂层的基底，在基底板上形成一个或多个中间层，使得最下层中间层基本上由二氧化硅 并且使得多层涂层至少部分地被最下层中间层覆盖，通过在中间层顶部沉积导电材料形成一个或多个电容式传感器电极，以及通过蚀刻去除最下层中间层的材料以形成 多层涂层的暴露的孔部分。

公开(公告)号：US08913322B2

公开(公告)日：2014-12-16

申请号：US14124350

申请日：2012-05-29

Applicant: Mikko Tuohiniemi

Inventor： Mikko Tuohiniemi

IPC: G02B27/00 ,  G01B9/02 ,  G02B26/00 ,  G01J3/26

CPC classification number: G01B9/02049 ,  G01J3/26 ,  G02B26/001 ,  Y10T29/49117

Abstract: Electrically tunable Fabry-Perot interferometers produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution, there is a gap in the movable mirror, whereby mirror layers opposite to the gap are connected with anchoring. The anchoring is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.

Abstract translation: 使用微光机电（MOEMS）技术生产的电可调法布里 - 珀罗干涉仪。 现有技术的微机械干涉仪需要高的控制电压，其生产包括复杂的生产阶段，并且可移动反射镜的形式被限制为圆形几何形状。 在本发明的解决方案中，可移动反射镜中存在间隙，由此与间隙相对的镜面层与锚固相连。 这样的锚定使得镜面的刚度在光学区域比在周围区域高。 这样，即使控制电极延伸到光学区域，也可以保持反射镜的光学区域平坦。 由于电极较大，因此需要较低的控制电压。

公开(公告)号：US20140354999A1

公开(公告)日：2014-12-04

申请号：US14253250

申请日：2014-04-15

Applicant: The Trustees of Columbia University In The City of New York

Inventor： Dirk R. Englund ,  Chaitanya Rastogi

IPC: G01J3/45 ,  G01J3/28

CPC classification number: G01J3/45 ,  G01J3/0259 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/32 ,  G01J2003/2826 ,  G01J2003/452

Abstract: Techniques for hyperspectral imaging, including a device for hyperspectral imaging including at least one tunable interferometer including a thin layer of material disposed between two or more broadband mirrors. Electrodes placed on either side of the tunable interferometer can be coupled to a voltage control circuit, and upon application of a voltage across the tunable interferometer, the distance between the mirrors can be modulated by physically altering the dimensions of the thin layer of material, which can uniformly load the broadband mirrors. Physically altering the dimensions of the thin layer of material can include one or more of deformation of a soft material, piezostrictrive actuation of a piezostrictrive material, or electrostrictive actuation of an electrostrictive material.

Abstract translation: 用于高光谱成像的技术，包括用于高光谱成像的装置，包括至少一个可调谐干涉仪，其包括设置在两个或更多个宽带镜之间的薄层材料。 放置在可调谐干涉仪两侧的电极可以耦合到电压控制电路，并且在可调谐干涉仪上施加电压时，反射镜之间的距离可以通过物理地改变薄层材料的尺寸来调节， 可以均匀地加载宽带镜。 物理上改变材料薄层的尺寸可以包括柔软材料的变形，压电致动材料的压电致动器致动或电致伸缩材料的电致伸缩致动中的一个或多个。

公开(公告)号：US20140340733A1

公开(公告)日：2014-11-20

申请号：US14450835

申请日：2014-08-04

Applicant: Dimensional Photonics International, Inc.

Inventor： Robert F. Dillon ,  Neil H.K. Judell ,  Timothy I. Fillion ,  Gurpreet Singh ,  Nathan E. Wallace

IPC: G02B26/06 ,  G01B11/24

CPC classification number: G02B26/06 ,  G01B11/2441 ,  G01B11/2527 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/361 ,  G02B27/0068 ,  G02B27/0087 ,  G02B2207/117 ,  G06T2200/04 ,  G06T2200/08

Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

公开(公告)号：US20140340686A1

公开(公告)日：2014-11-20

申请号：US14450815

申请日：2014-08-04

Applicant: Seiko Epson Corporation

Inventor： Akira SANO ,  Nozomu HIROKUBO

IPC: G02B26/00 ,  G01J3/51 ,  H01L27/146

CPC classification number: G02B26/001 ,  G01J3/26 ,  G01J3/50 ,  G01J3/51 ,  G01N21/25 ,  H01L27/14621

Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

Abstract translation: 标准具设置有固定基板和与固定基板相对的可移动基板。 固定基板经由接合膜和第一电极表面设置有待结合到可动基板的第一接合表面，第一电极表面上形成有第一电极的一部分。 可动基板具有经由接合膜与第一接合面接合的第二接合面和形成有第二电极的一部分的第二电极面。 在固定基板和可动基板通过接合膜彼此接合的状态下，形成在第一电极表面上的第一电极和形成在第二电极表面上的第二电极彼此接触。

公开(公告)号：US08891073B2

公开(公告)日：2014-11-18

申请号：US13183228

申请日：2011-07-14

Applicant: Andrew J. Effenberger, Jr. ,  Jill R. Scott ,  Timothy R. McJunkin

Inventor： Andrew J. Effenberger, Jr. ,  Jill R. Scott ,  Timothy R. McJunkin

IPC: G01N21/00 ,  G01J3/30 ,  G01B9/02 ,  G01J3/443 ,  G01J3/26 ,  G01N21/71 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/26 ,  G01J3/443 ,  G01N21/718

Abstract: In laser-induced breakdown spectroscopy (LIBS), an apparatus includes a pulsed laser configured to generate a pulsed laser signal toward a sample, a constructive interference object and an optical element, each located in a path of light from the sample. The constructive interference object is configured to generate constructive interference patterns of the light. The optical element is configured to disperse the light. A LIBS system includes a first and a second optical element, and a data acquisition module. The data acquisition module is configured to determine an isotope measurement based, at least in part, on light received by an image sensor from the first and second optical elements. A method for performing LIBS includes generating a pulsed laser on a sample to generate light from a plasma, generating constructive interference patterns of the light, and dispersing the light into a plurality of wavelengths.

Abstract translation: 在激光诱发击穿光谱（LIBS）中，一种装置包括脉冲激光器，其经配置以产​​生朝向样品的脉冲激光信号，构造干涉物体和光学元件，每个位于来自样品的光的路径中。 构造性干扰对象被配置为产生光的建设性干涉图案。 光学元件构造成分散光。 LIBS系统包括第一和第二光学元件，以及数据采集模块。 数据采集​​模块被配置为至少部分地基于图像传感器从第一和第二光学元件接收的光来确定同位素测量。 用于执行LIBS的方法包括在样本上产生脉冲激光以产生来自等离子体的光，产生光的建设性干涉图案，以及将光分散成多个波长。

公开(公告)号：US20140327099A1

公开(公告)日：2014-11-06

申请号：US14269292

申请日：2014-05-05

Applicant: Andrew J. Boudreau ,  Michael K. Yetzbacher ,  Marc Christophersen ,  Bernard F. Phlips

Inventor： Andrew J. Boudreau ,  Michael K. Yetzbacher ,  Marc Christophersen ,  Bernard F. Phlips

IPC: H01L27/146

CPC classification number: H01L27/14629 ,  G01J3/26 ,  G02B6/136 ,  G02B6/29358 ,  H01L21/31144 ,  H01L27/14601 ,  H01L27/14625 ,  H01L27/14683 ,  H01L27/14685

Abstract: A ramped etalon cavity structure and a method of fabricating same. A bi-layer stack is deposited on a substrate. The bi-layer stack includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch stop layer and a bulk layer. A three dimensional photoresist structure is formed by using gray-tone lithography. The three dimensional photoresist is plasma etched into the bi-layer stack, thereby generating an etched bi-layer stack. The etched bi-layer stack is chemically etched with a first chemical etchant to generate a multiple-step structure on the substrate, wherein the first chemical etchant stops at the etch stop layer.

Abstract translation: 斜坡标准孔结构及其制造方法。 双层堆叠沉积在基板上。 双层堆叠包括多个双层。 多个双层的每个双层包括蚀刻停止层和体层。 通过使用灰度光刻法形成三维光致抗蚀剂结构。 将三维光致抗蚀剂等离子体蚀刻到双层堆叠中，从而产生蚀刻的双层堆叠。 蚀刻的双层堆叠用第一化学蚀刻剂化学蚀刻，以在衬底上产生多步结构，其中第一化学蚀刻剂在蚀刻停止层处停止。

公开(公告)号：US20140313514A1

公开(公告)日：2014-10-23

申请号：US14349080

申请日：2012-09-10

Applicant: Katsumi Shibayama ,  Takashi Kasahara

Inventor： Katsumi Shibayama ,  Takashi Kasahara

IPC: G01J3/02

CPC classification number: G01J3/0229 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/513 ,  G01J2003/1234 ,  G01J2003/2806

Abstract: A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and mirror layers 22, 23 opposing each other through the layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the layer 22 side, for transmitting therethrough light incident on the unit 20; and a light-detecting substrate 4, arranged on the layer 23 side, for detecting the light transmitted through the unit 20. The layer 21 has a filter region 24 held between the layers 22, 23; an annular surrounding region 25 surrounding the region 24 with a predetermined distance therefrom; and an annular connecting region 26 connecting an end part 24e on the substrate 4 side of the region 24 and an end part 25e on the substrate 4 side of the region 25 to each other.

Abstract translation: 光谱传感器1包括干涉滤光器单元20，其具有通过层21相对的空腔层21和反射镜层22,23，用于根据其入射位置选择性地透射预定波长范围的光; 布置在层22侧的用于透射入射在单元20上的光的透光基板3; 以及布置在层23侧的用于检测透过单元20的光的光检测基板4.层21具有保持在层22,23之间的过滤器区域24。 围绕区域24的环形周围区域25与预定距离; 以及将区域24的基板4侧的端部24e和区域25的基板4侧的端部25e彼此连接的环状连接区域26。

公开(公告)号：US20140312213A1

公开(公告)日：2014-10-23

申请号：US14320935

申请日：2014-07-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Takahiko YOSHIZAWA

IPC: G02B5/28 ,  G01J3/51

CPC classification number: G02B5/284 ,  B81B2201/0292 ,  B81C1/00126 ,  G01J3/0213 ,  G01J3/26 ,  G01J3/36 ,  G01J3/51 ,  G02B5/28 ,  G02B26/007 ,  Y10T428/24562 ,  Y10T428/24612

Abstract: A tilt structure includes a shaft section formed on a substrate section, a tilt structure film having one end formed on an upper surface of the shaft section, and the other end bonded to the substrate section, and a thin film section provided to the tilt structure film, located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section, and having a film thickness thinner than the tilt structure film, the tilt structure film is bent in the thin film section, and an acute angle is formed by the substrate section and the tilt structure film.

Abstract translation: 倾斜结构包括形成在基板部分上的轴部分，倾斜结构膜，其一端形成在轴部分的上表面上，另一端接合到基板部分;以及薄膜部分，设置在倾斜结构 薄膜，位于由所述轴部的上表面构成的角部和所述轴部的侧面之间，并且具有比所述倾斜结构膜更薄的膜厚，所述倾斜结构膜在所述薄膜部弯曲，并且 由基板部和倾斜结构膜形成锐角。

公开(公告)号：US20140285895A1

公开(公告)日：2014-09-25

申请号：US14222959

申请日：2014-03-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Daisuke Saito ,  Yasushi Matsuno

IPC: G02B5/28

CPC classification number: G02B5/28 ,  G01J3/26 ,  G01J3/51 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/65 ,  G01N2021/1704 ,  G01N2021/317 ,  G01N2021/3185

Abstract: An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view.

Abstract translation: 一种光学滤波器装置，包括：波长可变干涉滤光器，其设置有可移动基板，在该可移动基板上设置有各自的电极焊盘; 其上安装有波长可变干涉滤光器的基板，面向可移动基板; 以及固定构件，其设置在所述可移动基板和所述基底基板之间并固定所述可移动基板和所述基底基板。 在过滤器平面图中，固定构件设置在与各个电极焊盘重叠的位置。