Fluorescence dot area meter
    121.
    发明授权
    Fluorescence dot area meter 失效
    荧光点面积计

    公开(公告)号:US5729348A

    公开(公告)日:1998-03-17

    申请号:US701028

    申请日:1996-08-21

    Inventor: David J. Romano

    CPC classification number: G01N21/643 G01N21/645

    Abstract: A fluorescence dot area meter for accurately measuring halftone dot area on a printing plate having an emulsion containing one or more fluorescent compounds. The fluorescent dot area meter generally includes an illumination source for providing light having a first range of wavelengths, a system for exposing the printing plate to this light to cause the printing plate to emit light (fluoresce) within a second, higher range of wavelengths, and a system for determining halftone dot area based on a measurement of the light emitted by the printing plate.

    Abstract translation: 一种用于在具有含有一种或多种荧光化合物的乳液的印版上精确测量半色调点面积的荧光点面积计。 荧光点面积计通常包括用于提供具有第一波长范围的光的照明源,用于将印版暴露于该光以使印版在第二较高波长范围内发光(荧光)的系统, 以及基于由印版发出的光的测量来确定半色调点区域的系统。

    Apparatus for the detection and control of aromatic compounds in
combustion effluent
    122.
    发明授权
    Apparatus for the detection and control of aromatic compounds in combustion effluent 失效
    用于检测和控制燃烧流出物中芳香族化合物的装置

    公开(公告)号:US5425916A

    公开(公告)日:1995-06-20

    申请号:US164430

    申请日:1993-12-08

    Abstract: An apparatus for detecting the presence of polycyclic aromatic hydrocarbons in the effluent of a turbulent commercial combustion system for monitoring or controlling the composition of the effluent. The apparatus is a system for directyl selectively detecting the presence in the effluent high molecular weight polycyclic aromatic compounds having five or more rings by laser induced fluorescence. The system includes an illuminating source of select fluorescence excitation of wavelengths that induces substantial fluorescence by high molecular weight polycyclic aromatic hydrocarbons in the gas phase. Sampling structure is constructed to provide optical access to the effluent stream to sample the effluent stream at a select position where high molecular weight polycyclic aromatic compounds having five or more rings may be present in sufficient amounts that the fluorescence from the effluent at the select position at the excitation wavelength is predominantly from high molecular weight polycyclic aromatic compounds having five or more rings, when the high molecular weight polycyclic aromatic compounds are present in sufficient amounts. A detector detects the fluorescent signal from the illuminated effluent and an analyzer analyzes the signal to directly selectively determine the presence of the high molecular weight polycyclic aromatic hydrocarbons having five or more rings in the effluent.

    Abstract translation: 一种用于检测湍流商业燃烧系统的流出物中多环芳烃的存在的装置,用于监测或控制流出物的组成。 该装置是通过激光诱导的荧光来选择性地检测具有五个或更多个环的流出物高分子量多环芳族化合物中存在的装置。 该系统包括在气相中通过高分子量多环芳烃诱导基本荧光的波长的选择荧光激发的照明源。 采样结构被构造成提供对流出物流的光学访问以在选择位置对流出物流进行采样,其中具有五个或更多个环的高分子量多环芳族化合物可以以足够的量存在,以使来自选择位置处的流出物的荧光 当高分子量多环芳族化合物以足够的量存在时,激发波长主要来自具有五个或更多个环的高分子量多环芳族化合物。 检测器检测来自被照射流出物的荧光信号,并且分析仪分析信号以直接选择性地确定在流出物中具有五个或更多个环的高分子量多环芳烃的存在。

    Glow discharge analytical instrument for performing excitation and
analyzation on the same side of a sample
    123.
    发明授权
    Glow discharge analytical instrument for performing excitation and analyzation on the same side of a sample 失效
    用于在样品的同一侧进行激发和分析的辉光放电分析仪器

    公开(公告)号:US5408315A

    公开(公告)日:1995-04-18

    申请号:US99144

    申请日:1993-07-28

    CPC classification number: H01J49/105 G01N21/68

    Abstract: A non-conductive isolator for supporting a sample to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring for coupling a source of radio frequency energy to the same surface of a sample which is in direct contact with the induced glow discharge. An adapter kit for converting a direct current glow discharge analysis apparatus to a radio frequency energy induced flow discharge is also disclosed as well as the method of analyzing non-conductive and sample conductive using a source of RF energy coupled to the same sample surface being analyzed.

    Abstract translation: 用于通过射频能量感应辉光放电技术支持要分析的样品的非导电隔离器具有用于将射频能量源耦合到与感应辉光放电直接接触的样品的相同表面的导电环。 还公开了一种用于将直流辉光放电分析装置转换成射频能量感应流量放电的适配器套件,以及使用耦合到被分析的相同样品表面的RF能量源分析非导电和样品导电的方法 。

    Spectrometer
    124.
    发明授权
    Spectrometer 失效
    光谱仪

    公开(公告)号:US5311278A

    公开(公告)日:1994-05-10

    申请号:US957777

    申请日:1992-10-08

    CPC classification number: B82Y20/00 G01J3/28 G02F1/017

    Abstract: A light intensity modulator with a predefined range of modulation wavelengths (preferably a narrow range) can be adjusted by a control signal. This modulator receives a light beam and retransmits a modulated light beam in which any wavelength within the modulation range is modulated. A light intensity detector receives this modulated beam and outputs an electrical signal which is a function of the luminous intensity detected. Such a device finds particular application as a spectrophotometer.

    Abstract translation: 具有预定范围的调制波长(优选窄范围)的光强调制器可以通过控制信号来调节。 该调制器接收光束并重新调制其中调制范围内的任何波长的调制光束。 光强检测器接收该调制束并输出作为检测到的发光强度的函数的电信号。 这种装置发现特​​定的应用作为分光光度计。

    Method and apparatus for optical emission end point detection in plasma
etching processes
    125.
    发明授权
    Method and apparatus for optical emission end point detection in plasma etching processes 失效
    等离子体蚀刻工艺中的光发射端点检测方法和装置

    公开(公告)号:US5308414A

    公开(公告)日:1994-05-03

    申请号:US995727

    申请日:1992-12-23

    CPC classification number: H01J37/32935

    Abstract: An apparatus and method for determining the time at which a plasma etching process should be terminated. The process generates at least one etch product species and a continuum plasma emission. The apparatus monitors the optical emission intensity of the plasma in a narrow band centered about a predetermined spectral line and generates a first signal indicative of the spectral intensity of the etch product species. The apparatus further monitors the optical emission intensity of the plasma in a wide band and generates a second signal indicative of the spectral intensity of the continuum plasma emission. The apparatus further monitors the magnitudes of the first and second signals and generates a termination signal when the magnitudes diverge.

    Abstract translation: 一种用于确定等离子体蚀刻工艺应终止的时间的装置和方法。 该方法产生至少一种蚀刻产物物质和连续体等离子体发射。 该装置以围绕预定光谱线为中心的窄带监测等离子体的光发射强度,并产生指示蚀刻产物种类的光谱强度的第一信号。 该装置进一步监测宽带中的等离子体的光发射强度,并产生指示连续体等离子体发射的光谱强度的第二信号。 该装置还监视第一和第二信号的幅度,并且当幅度发散时产生终止信号。

    Method for determining concentrations by means of atomic emission
spectroscopy
    126.
    发明授权
    Method for determining concentrations by means of atomic emission spectroscopy 失效
    通过原子发射光谱测定浓度的方法

    公开(公告)号:US5218553A

    公开(公告)日:1993-06-08

    申请号:US569888

    申请日:1990-08-20

    CPC classification number: G01J3/28 G01N21/62

    Abstract: A method for determining concentrations by means of atomic emission spectroscopy which contains the method steps: (a) generating an atomic emission with a known concentration of a looked-for element, (b) scanning the obtained emission spectrum by means of a spectral photometer with a spectral slit width in a wavelength range which contains a spectral line of the looked-for element, (c) generating an atomic emission with an unknown sample which contains the looked-for element with the concentration of the looked-for element in the unknown sample to be determined, (d) scanning the obtained emission spectrum by means of the spectral photometer with the same spectral slit width and in the same wavelength range in which the scanning of the emission spectrum with the known concentration was made, (e) processing the spectral-representing signal, which is provided by the spectral photometer independent of the wavelength by means of a recursive Kalman filter, in order to generate an estimate for the concentration of the looked-for element.

    Abstract translation: 一种通过原子发射光谱测定浓度的方法,其包括以下步骤的方法步骤:(a)产生具有已知浓度的寻找元素的原子发射,(b)通过光谱光度计扫描获得的发射光谱, 在包含被寻找元素的谱线的波长范围内的光谱狭缝宽度,(c)产生具有未知样品的原子发射,所述未知样品包含未知样品的浓度的未知样品的浓度 (d)通过具有相同光谱狭缝宽度的光谱光度计扫描获得的发射光谱,并且在制作具有已知浓度的发射光谱的扫描的相同波长范围内,(e)处理 频谱表示信号,其由光谱光度计通过递归卡尔曼滤波器独立于波长提供,以便产生估计值fo r是被寻找元素的集中。

    Assembly for converting a spectrophotometer to a fluorometer
    127.
    发明授权
    Assembly for converting a spectrophotometer to a fluorometer 失效
    用于将分光光度计转换到荧光计的组件

    公开(公告)号:US5166743A

    公开(公告)日:1992-11-24

    申请号:US746855

    申请日:1991-08-19

    Inventor: Harold R. Garner

    Abstract: A conversion assembly for converting a spectrophotometer to a fluorometer which utilizes the light source and light detector of the spectrophotometer. The assembly has a conversion adaptor which is positionable in the spectrophotometer between the light source and the light detector. The adaptor is an enclosure having a receptacle for holding a sample container filled with the sample being analyzed and having openings formed therein to provide a light path for excitation light from the light source to the sample container and further to provide a light path for emitted luminescent light from the sample container to the light detector. In one embodiment the excitation light is centered on an optical shield on the front of the enclosure while light receiving openings at the edges of the front of the enclosure are positioned to receive off center excitation light. In another embodiment a light receiving opening is formed in the side of the enclosure and excitation light centered on the front of the enclosure is reflected around to the opening in the side of the enclosure by a plurality of reflectors.

    Abstract translation: 用于将分光光度计转换成利用分光光度计的光源和光检测器的荧光计的转换组件。 该组件具有可在光源和光检测器之间的分光光度计中定位的转换适配器。 适配器是具有用于容纳填充有待分析的样品的样品容器的容器的容器,并且具有形成在其中的开口,以提供用于从光源到样品容器的激发光的光路,并且还提供用于发射的发光的光路 从样品容器到光检测器的光。 在一个实施例中,激发光在外壳的前部上的光学屏蔽上居中,而外壳前部边缘的光接收开口定位成接收偏心的激发光。 在另一个实施例中,光接收开口形成在外壳的侧面,并且围绕外壳的前部的中心的激发光由多个反射器反射到外壳侧面的开口。

    Method of end point detection in a plasma etching process
    128.
    发明授权
    Method of end point detection in a plasma etching process 失效
    等离子体蚀刻工艺中终点检测的方法

    公开(公告)号:US5160576A

    公开(公告)日:1992-11-03

    申请号:US664826

    申请日:1991-03-05

    Inventor: Michael Robbins

    Abstract: A method of optically detecting a change in intensity of an emission peak in a plasma process, such as a plasma etching process, by reflecting an emission spectrum of radiation from the plasma reaction off of a pair of rugate filters. The reflected emission spectrum has increased in-band reflections and decreased out-of-band reflections which provides reduced noise and an easier-to-detect emission peak. The method can be used for end-point detection in a plasma etching process such as etching of SiO.sub.2.

    Abstract translation: 通过将来自等离子体反应的辐射的发射光谱反射离开一对贪婪滤光器,光电检测等离子体工艺中的发射峰值的变化的方法,例如等离子体蚀刻工艺。 反射的发射光谱具有增加的带内反射和减少的带外反射,其提供降低的噪声和更易于检测的发射峰。 该方法可用于诸如蚀刻SiO 2的等离子体蚀刻工艺中的端点检测。

    Device for analyzing fluorescent light signals
    129.
    发明授权
    Device for analyzing fluorescent light signals 失效
    荧光灯信号分析装置

    公开(公告)号:US5003977A

    公开(公告)日:1991-04-02

    申请号:US321296

    申请日:1989-03-09

    Abstract: A device for analyzing fluorescent light signals consists of memory means for storing as a reference spectrum a spectrum obtained under predetermined conditions, and extraction means for extracting a predetermined component spectrum based on the results of a conversion of the reference spectrum using a specific wavelength of a measured spectrum obtained during actual measurement and a specific wavelength of the reference spectrum. The arrangement of the invention allows the spectrum of a specific component to be extracted accurately from measured spectra.

    Abstract translation: 用于分析荧光信号的装置包括存储装置,用于存储在预定条件下获得的光谱作为参考光谱;以及提取装置,用于基于使用特定波长的参考光谱的转换结果来提取预定分量光谱 在实际测量期间获得的测量光谱和参考光谱的特定波长。 本发明的布置允许从测量的光谱中精确地提取特定成分的光谱。

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