Abstract:
A fluorescence dot area meter for accurately measuring halftone dot area on a printing plate having an emulsion containing one or more fluorescent compounds. The fluorescent dot area meter generally includes an illumination source for providing light having a first range of wavelengths, a system for exposing the printing plate to this light to cause the printing plate to emit light (fluoresce) within a second, higher range of wavelengths, and a system for determining halftone dot area based on a measurement of the light emitted by the printing plate.
Abstract:
An apparatus for detecting the presence of polycyclic aromatic hydrocarbons in the effluent of a turbulent commercial combustion system for monitoring or controlling the composition of the effluent. The apparatus is a system for directyl selectively detecting the presence in the effluent high molecular weight polycyclic aromatic compounds having five or more rings by laser induced fluorescence. The system includes an illuminating source of select fluorescence excitation of wavelengths that induces substantial fluorescence by high molecular weight polycyclic aromatic hydrocarbons in the gas phase. Sampling structure is constructed to provide optical access to the effluent stream to sample the effluent stream at a select position where high molecular weight polycyclic aromatic compounds having five or more rings may be present in sufficient amounts that the fluorescence from the effluent at the select position at the excitation wavelength is predominantly from high molecular weight polycyclic aromatic compounds having five or more rings, when the high molecular weight polycyclic aromatic compounds are present in sufficient amounts. A detector detects the fluorescent signal from the illuminated effluent and an analyzer analyzes the signal to directly selectively determine the presence of the high molecular weight polycyclic aromatic hydrocarbons having five or more rings in the effluent.
Abstract:
A non-conductive isolator for supporting a sample to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring for coupling a source of radio frequency energy to the same surface of a sample which is in direct contact with the induced glow discharge. An adapter kit for converting a direct current glow discharge analysis apparatus to a radio frequency energy induced flow discharge is also disclosed as well as the method of analyzing non-conductive and sample conductive using a source of RF energy coupled to the same sample surface being analyzed.
Abstract:
A light intensity modulator with a predefined range of modulation wavelengths (preferably a narrow range) can be adjusted by a control signal. This modulator receives a light beam and retransmits a modulated light beam in which any wavelength within the modulation range is modulated. A light intensity detector receives this modulated beam and outputs an electrical signal which is a function of the luminous intensity detected. Such a device finds particular application as a spectrophotometer.
Abstract:
An apparatus and method for determining the time at which a plasma etching process should be terminated. The process generates at least one etch product species and a continuum plasma emission. The apparatus monitors the optical emission intensity of the plasma in a narrow band centered about a predetermined spectral line and generates a first signal indicative of the spectral intensity of the etch product species. The apparatus further monitors the optical emission intensity of the plasma in a wide band and generates a second signal indicative of the spectral intensity of the continuum plasma emission. The apparatus further monitors the magnitudes of the first and second signals and generates a termination signal when the magnitudes diverge.
Abstract:
A method for determining concentrations by means of atomic emission spectroscopy which contains the method steps: (a) generating an atomic emission with a known concentration of a looked-for element, (b) scanning the obtained emission spectrum by means of a spectral photometer with a spectral slit width in a wavelength range which contains a spectral line of the looked-for element, (c) generating an atomic emission with an unknown sample which contains the looked-for element with the concentration of the looked-for element in the unknown sample to be determined, (d) scanning the obtained emission spectrum by means of the spectral photometer with the same spectral slit width and in the same wavelength range in which the scanning of the emission spectrum with the known concentration was made, (e) processing the spectral-representing signal, which is provided by the spectral photometer independent of the wavelength by means of a recursive Kalman filter, in order to generate an estimate for the concentration of the looked-for element.
Abstract:
A conversion assembly for converting a spectrophotometer to a fluorometer which utilizes the light source and light detector of the spectrophotometer. The assembly has a conversion adaptor which is positionable in the spectrophotometer between the light source and the light detector. The adaptor is an enclosure having a receptacle for holding a sample container filled with the sample being analyzed and having openings formed therein to provide a light path for excitation light from the light source to the sample container and further to provide a light path for emitted luminescent light from the sample container to the light detector. In one embodiment the excitation light is centered on an optical shield on the front of the enclosure while light receiving openings at the edges of the front of the enclosure are positioned to receive off center excitation light. In another embodiment a light receiving opening is formed in the side of the enclosure and excitation light centered on the front of the enclosure is reflected around to the opening in the side of the enclosure by a plurality of reflectors.
Abstract:
A method of optically detecting a change in intensity of an emission peak in a plasma process, such as a plasma etching process, by reflecting an emission spectrum of radiation from the plasma reaction off of a pair of rugate filters. The reflected emission spectrum has increased in-band reflections and decreased out-of-band reflections which provides reduced noise and an easier-to-detect emission peak. The method can be used for end-point detection in a plasma etching process such as etching of SiO.sub.2.
Abstract:
A device for analyzing fluorescent light signals consists of memory means for storing as a reference spectrum a spectrum obtained under predetermined conditions, and extraction means for extracting a predetermined component spectrum based on the results of a conversion of the reference spectrum using a specific wavelength of a measured spectrum obtained during actual measurement and a specific wavelength of the reference spectrum. The arrangement of the invention allows the spectrum of a specific component to be extracted accurately from measured spectra.
Abstract:
An optical system for a multidetector array spectrophotometer which includes multiple light sources for emitting light of selected wavelength ranges and means for selectively transmitting the selected wavelength ranges of light to respective slits of a multi-slit spectrogrpah for multiple wavelength range detection. The spectrograph has two or more slits which direct the selected wavelength ranges of the light spectra to fall upon a dispersive and focusing system which collects light from each slit, disperses the light by wavelength and refocuses the light at the positions of a single set of detectors.