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    MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    133.
    发明申请
    MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
    多速基板加工设备和基板处理方法

    公开(公告)号：US20090071940A1

    公开(公告)日：2009-03-19

    申请号：US12208992

    申请日：2008-09-11

    Applicant: Tadashi Miyagi ,  Masashi Kanaoka ,  Kazuhito Shigemori ,  Shuichi Yasuda ,  Masakazu Sanada

    Inventor： Tadashi Miyagi ,  Masashi Kanaoka ,  Kazuhito Shigemori ,  Shuichi Yasuda ,  Masakazu Sanada

    IPC: C23F1/00 ,  C23F1/08

    CPC classification number: H01L21/67034 ,  B05C11/08 ,  B05C13/02 ,  B05D3/0406 ,  G03F7/3028 ,  H01L21/67028 ,  H01L21/67051 ,  Y10S134/902

    Abstract: After a development liquid on a substrate is washed away with a rinse liquid, the rotational speed of the substrate is reduced, so that a liquid layer of the rinse liquid is formed over a top surface of the substrate. Thereafter, the rotational speed of the substrate is increased. The increase in the rotational speed of the substrate causes a centrifugal force to be slightly greater than tension, thereby causing the liquid layer to be held on the substrate with the thickness thereof in its peripheral portion increased and the thickness thereof at the center thereof decreased. Then, gas is discharged toward the center of the liquid layer from a gas supply nozzle, so that a hole is formed at the center of the liquid layer. This causes tension that is balanced with a centrifugal force exerted on the peripheral portion of the liquid layer to disappear. Furthermore, the rotational speed of the substrate is further increased while the gas is discharged. Thus, the liquid layer moves outward from the substrate.

    Abstract translation: 在用冲洗液冲洗衬底上的显影液后，减小基片的旋转速度，从而在衬底的顶表面上形成漂洗液体的液体层。 此后，基板的旋转速度增加。 基板的旋转速度的增加使离心力略大于张力，从而使液体层保持在基板的周边部分的厚度增加，其中心部的厚度减小。 然后，气体从气体供给喷嘴向液体中心排出，从而在液体层的中心形成有孔。 这导致张力被平衡，施加在液体层的周边部分上的离心力消失。 此外，在排出气体的同时，基板的旋转速度进一步提高。 因此，液体层从基板向外移动。

    Method and Installation For Coating a Metal Strip With a Coating Containing a Solvent and For Drying and/or Cross-Linking Said Coating
    134.
    发明申请
    Method and Installation For Coating a Metal Strip With a Coating Containing a Solvent and For Drying and/or Cross-Linking Said Coating 失效
    用于涂覆含有溶剂和用于干燥和/或交联所述涂层的涂层的金属带的方法和安装

    公开(公告)号：US20080206475A1

    公开(公告)日：2008-08-28

    申请号：US11792892

    申请日：2005-12-05

    Applicant: Andreas Dibon ,  Kai Baer

    Inventor： Andreas Dibon ,  Kai Baer

    IPC: B05D3/02

    CPC classification number: B05D7/16 ,  B05D3/0263 ,  B05D3/0406 ,  B05D2252/02 ,  F26B3/283 ,  F26B23/001 ,  Y02P70/405

    Abstract: The invention relates to a method for coating a metal strip with a coating containing a solvent and for drying and/or cross-linking said coating. Accordingly, the metal strip is provided with the coating in an inner chamber of a coating device. The coated metal strip is conducted through a drying unit and in an inner chamber of the latter is exposed to a form of energy by at least one radiation source that is cooled by a cooling gas, said form of energy being converted to heat in the coating and/or the metal strip. The cooling gas that is supplied to the radiation source flows through the latter, absorbs the waste heat from said source and is then conducted into the inner chamber of the drying unit, thus saving energy and gas. The invention also relates to an installation that is suitable for carrying out said method.

    Abstract translation: 本发明涉及一种用含有溶剂的涂层涂覆金属带并用于干燥和/或交联所述涂层的方法。 因此，金属带在涂覆装置的内腔中设置有涂层。 涂覆的金属带通过干燥单元传导，并且其中的内室通过由冷却气体冷却的至少一个辐射源而暴露于能量形式，所述能量形式在涂层中转化为热量 和/或金属条。 供给到辐射源的冷却气体流过其中，吸收来自所述源的废热，然后被传导到干燥单元的内腔中，从而节省能量和气体。 本发明还涉及一种适用于执行所述方法的装置。

    Information-recording medium and method for producing the same
    138.
    发明授权
    Information-recording medium and method for producing the same 失效
    信息记录介质及其制造方法

    公开(公告)号：US06821459B1

    公开(公告)日：2004-11-23

    申请号：US09684634

    申请日：2000-10-10

    Applicant: Yoshihisa Usami

    Inventor： Yoshihisa Usami

    IPC: B29D1100

    CPC classification number: G11B7/24 ,  B05C11/08 ,  B05D1/005 ,  B05D3/0406 ,  G11B7/26

    Abstract: Disclosed is a method for producing an information-recording medium comprising, on a substrate, a dye recording layer capable of recording information, the method comprising the step of drying the substrate formed with the dye recording layer by allowing clean air to flow while rotating the substrate at a high speed; wherein an intake for introducing the clean air is narrowed by arranging a lid having a circular opening at a central portion, at an opening disposed at an upper portion of an apparatus for rotating the substrate at the high speed.

    Abstract translation: 本发明公开了一种信息记录介质的制造方法，其特征在于，在基板上具有能够记录信息的染料记录层，所述方法包括以下步骤：使形成有染料记录层的基板通过允许清洁空气流动同时旋转 高速基板; 其中，用于引入清洁空气的入口通过在设置在用于高速旋转基板的设备的上部的开口处布置在中心部分处具有圆形开口的盖而变窄。

    Process for applying coatings
    139.
    发明授权
    Process for applying coatings 有权
    涂料应用方法

    公开(公告)号：US06805910B1

    公开(公告)日：2004-10-19

    申请号：US10232452

    申请日：2002-08-30

    Applicant: Richard N. Anderson

    Inventor： Richard N. Anderson

    IPC: B05D304

    CPC classification number: B05D7/06 ,  B05D3/0227 ,  B05D3/0406 ,  B05D3/101 ,  B05D3/104 ,  F26B21/004 ,  F26B2210/16

    Abstract: A process for applying a thermoplastic coating to a substrate wherein the gases and other volatiles in a boundary layer between the substrate and the coating are evacuated using a high volume, high velocity air stream which traverses the surface of the substrate to be coated (functioning as an air knife) such that, when the coating is applied, gases/volatiles do not disrupt the coating while:the coating cools and solidifies. The effect of the air knife may be enhanced by heating the substrate and/or by applying a solvent to the substrate. The air knife also cools down the boundary layer of the substrate so that, as the thermoplastic coating is applied, this cooled-down and gas-evacuated boundary layer provides a measure of insulation between the coating and any gases/volatiles which have not been evacuated from the substrate.

    Abstract translation: 将热塑性涂层施加到基底上的方法，其中基底和涂层之间的边界层中的气体和其它挥发物使用大体积的高速空气流进行抽吸，所述高速空气流穿过待涂覆的基底的表面（作为 一种气刀），使得当涂覆涂层时，气体/挥发物不会破坏涂层，同时：涂层冷却并固化。 可以通过加热基底和/或通过向基底施加溶剂来增强气刀的效果。 气刀还冷却基板的边界层，使得当涂覆热塑性涂层时，该冷却和气体抽真空的边界层提供了涂层与未被抽空的任何气体/挥发物之间的绝缘性的量度 从底物。

    Film-forming method, film-forming apparatus and liquid film drying apparatus
    140.
    发明申请
    Film-forming method, film-forming apparatus and liquid film drying apparatus 审中-公开
    成膜方法，成膜装置和液膜干燥装置

    公开(公告)号：US20040126501A1

    公开(公告)日：2004-07-01

    申请号：US10736580

    申请日：2003-12-17

    Applicant: Kabushiki Kaisha Toshiba

    Inventor： Tatsuhiko Ema ,  Shinichi Ito ,  Katsuya Okumura

    IPC: B05C005/00 ,  B05C015/00 ,  B05D001/02

    CPC classification number: H01L21/6715 ,  B05D1/265 ,  B05D3/0254 ,  B05D3/0406 ,  B05D3/0493 ,  H01L21/67034

    Abstract: Disclosed is a film-forming method, comprising dispensing from a dispenser nozzle a coating solution, which is prepared by adding a solid component to a solvent and controlled to be spread on the substrate in a predetermined range, onto a target substrate to be processed while relatively moving the dispenser nozzle and the target substrate so as to form a liquid film on the entire surface of the target substrate, and arranging a sucking nozzle above and apart from the target substrate such that the sucking nozzle is not in contact with the surface of the liquid film so as to permit the sucking nozzle to suck the solvent vapor right under the sucking nozzle while moving the sucking nozzle relative to the target substrate, thereby removing the solvent from the liquid film and, thus, forming a coated film.

    Abstract translation: 公开了一种成膜方法，包括从分配器喷嘴分配涂布溶液，所述涂布溶液通过将固体组分添加到溶剂中并控制在基板上以预定范围扩散到待处理的目标基板上而制备， 使分配器喷嘴和目标基板相对移动，以便在目标基板的整个表面上形成液膜，并且将吸嘴与目标基板上方并分开设置，使得吸嘴不与表面接触 液体膜，以允许吸嘴在吸引喷嘴相对于目标基板移动吸附嘴的同时吸附溶剂蒸气，从而从液膜中除去溶剂，从而形成涂膜。

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