公开(公告)号：US07916395B2

公开(公告)日：2011-03-29

申请号：US12037815

申请日：2008-02-26

Applicant: Barrett E. Cole

Inventor： Barrett E. Cole

IPC: G02B1/10

CPC classification number: G02B5/0833 ,  G01J3/02 ,  G01J3/021

Abstract: A cavity ring-down spectroscopy (CRDS) mirror is constructed to resist migration of a maximum reflectance peak during use where the CRDS mirror may become accreted with contamination that would otherwise cause the maximum reflectance peak to migrate. The mirror includes a mirror stack disposed on a mirror substrate and a plurality of alternating laminates including a first film with a first index of refraction and a second film with a second index of refraction. Each film is a one-quarter wavelength thickness of a given light energy that is to illuminate the mirror. A subsequent laminate is disposed on the plurality of alternating laminates. The subsequent laminate includes a quarter wavelength thickness first film and a second film with a wavelength thickness in a range from greater than 1.5 quarter wavelength and less than 2 quarter wavelength.

Abstract translation: 构造空腔衰落光谱（CRDS）镜，以抵抗在使用过程中最大反射峰的迁移，其中CRDS镜可能会被污染引起，否则会导致最大反射峰迁移。 反射镜包括设置在镜面基板上的反射镜叠层以及包括具有第一折射率的第一膜和具有第二折射率的第二膜的多个交替层压板。 每个胶片是照明镜子的给定光能的四分之一波长厚度。 随后的层压板设置在多个交替层压板上。 随后的层压板包括四分之一波长厚度的第一膜和波长厚度在大于1.5四分之一波长和小于二分之一波长的范围内的第二膜。

公开(公告)号：US07916300B2

公开(公告)日：2011-03-29

申请号：US12186986

申请日：2008-08-06

Applicant: Takeshi Misawa ,  Shuu Takahashi ,  Mitsuru Iwata ,  Kazuya Oda ,  Motoari Ota ,  Kazuyoshi Ito ,  Yasuyuki Ozeki ,  Yoshitaka Kobayashi

Inventor： Takeshi Misawa ,  Shuu Takahashi ,  Mitsuru Iwata ,  Kazuya Oda ,  Motoari Ota ,  Kazuyoshi Ito ,  Yasuyuki Ozeki ,  Yoshitaka Kobayashi

IPC: G01B9/02 ,  G01J3/45 ,  G01N21/00

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0259 ,  G01J3/04 ,  G02B5/008

Abstract: A spectroscopy device that separates input light into a plurality of wavelength ranges. A metal body has a hole or aperture which is open on the upper side. The hole or aperture is formed in a polygonal shape having at least a pair of opposite faces not parallel to each other in horizontal cross-section. Inner side faces of the hole or aperture are finished as mirror like reflection surfaces. Polarized input light inputted from the opening to the hole or aperture is reflected by the reflection surfaces and a standing wave is generated inside of the hole or aperture by self interference, whereby the input light is separated into a plurality of wavelength ranges.

Abstract translation: 一种将输入光分离为多个波长范围的光谱装置。 金属体具有在上侧开口的孔或孔。 孔或孔形成为具有在水平截面中彼此不平行的至少一对相对面的多边形形状。 孔或孔的内侧面被完成为镜像反射面。 从开口输入到孔或孔的极化输入光被反射面反射，并且通过自身干涉在孔或孔内产生驻波，由此将输入光分离成多个波长范围。

公开(公告)号：US07911605B2

公开(公告)日：2011-03-22

申请号：US12094471

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  Jonathan H. James ,  Ryan J. Priore ,  John C. Blackburn

Inventor： Michael L. Myrick ,  Robert P. Freese ,  Jonathan H. James ,  Ryan J. Priore ,  John C. Blackburn

IPC: G01J3/40 ,  G02B5/22

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08

Abstract: A method of developing a multivariate optical element for an optical analysis system includes forming an optically absorptive spectral element having an optically absorptive material, the optically absorptive material being absorbing in a predetermined spectral region; and utilizing the optically absorptive spectral element in the optical analysis system.

Abstract translation: 开发用于光学分析系统的多元光学元件的方法包括形成具有光学吸收材料的光吸收光谱元件，光学吸收材料在预定光谱区域中吸收; 并利用光学分析系统中的光吸收光谱元件。

公开(公告)号：US20110058180A1

公开(公告)日：2011-03-10

申请号：US12877888

申请日：2010-09-08

Applicant: Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

Inventor： Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

IPC: G01B9/02

CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

公开(公告)号：US07876434B2

公开(公告)日：2011-01-25

申请号：US11638036

申请日：2006-12-12

Applicant: Daniel W. Wilson ,  Gregory H. Bearman ,  William R. Johnson

Inventor： Daniel W. Wilson ,  Gregory H. Bearman ,  William R. Johnson

IPC: G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/51 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/065

Abstract: Computed tomography imaging spectrometers (“CTIS”s) having color focal plane array detectors are provided. The color FPA detector may comprise a digital color camera including a digital image sensor, such as a Foveon X3® digital image sensor or a Bayer color filter mosaic. In another embodiment, the CTIS includes a pattern imposed either directly on the object scene being imaged or at the field stop aperture. The use of a color FPA detector and the pattern improves the accuracy of the captured spatial and spectral information.

Abstract translation: 提供了具有彩色焦平面阵列检测器的计算机断层成像光谱仪（“CTIS”）。 彩色FPA检测器可以包括数字彩色照相机，其包括数字图像传感器，例如Foveon X3数字图像传感器或拜耳滤色器马赛克。 在另一个实施例中，CTIS包括直接施加在被成像的物体场景上或在场停止光圈处的图案。 使用彩色FPA检测器和图案提高了捕获的空间和光谱信息的准确性。

公开(公告)号：US07869040B1

公开(公告)日：2011-01-11

申请号：US12184419

申请日：2008-08-01

Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

公开(公告)号：US20100328659A1

公开(公告)日：2010-12-30

申请号：US11933253

申请日：2007-10-31

Applicant: Andrew Bodkin

Inventor： Andrew Bodkin

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36

Abstract: Hyperspectral imaging system and methods that may be used for imaging objects in three-dimensions are disclosed. A cylindrical lens array and/or a slit array may be used to re-image and divide a field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral data cube is collected simultaneously.

Abstract translation: 公开了可以用于三维成像对象的高光谱成像系统和方法。 可以使用柱面透镜阵列和/或狭缝阵列来将视场重新图像分割成多个通道。 将多个通道分散到多个光谱特征中，并在二维焦平面阵列上实时观察。 整个高光谱数据立方体被同时收集。

公开(公告)号：US20100308737A1

公开(公告)日：2010-12-09

申请号：US12676629

申请日：2008-09-08

Applicant: Achim Hilgers

Inventor： Achim Hilgers

IPC: H05B37/02

CPC classification number: G01J1/04 ,  G01J1/02 ,  G01J1/0214 ,  G01J1/0407 ,  G01J1/0474 ,  G01J1/4204 ,  G01J1/4228 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/50 ,  G01J3/505 ,  G01J2001/1636 ,  H05B33/0803 ,  H05B33/0869 ,  H05B33/0872

Abstract: The present invention relates to a solid-state based light source, a corresponding circuitry and a method of emitting light, including one or more light source elements for generating light, a first sensor for receiving light emitted by the light source elements and ambient light and for generating a first sensor signal (S1) representing the received light, a second sensor for only receiving ambient light and for generating a second sensor signal (S2) representing the received ambient light. Moreover, the solid-state based light source comprises a control unit for receiving the first and the second sensor signals (S1, S2) and for generating control signals (Sc) for controlling the light source elements, based on the difference between the first and the second sensor signals (S1, S2), to compensate for the influence of the ambient light.

Abstract translation: 本发明涉及一种基于固态的光源，包括用于产生光的一个或多个光源元件的发光的对应电路和方法，用于接收由光源元件发出的光和环境光的第一传感器， 用于产生表示所接收的光的第一传感器信号（S1），用于仅接收环境光并用于产生表示所接收的环境光的第二传感器信号（S2）的第二传感器。 此外，基于固态的光源包括控制单元，用于接收第一和第二传感器信号（S1，S2），并且用于产生用于控制光源元件的控制信号（Sc），基于第一和第二传感器信号 第二传感器信号（S1，S2），以补偿环境光的影响。

公开(公告)号：US20100277741A1

公开(公告)日：2010-11-04

申请号：US12834939

申请日：2010-07-13

Applicant: Phillip Walsh ,  Dale A. Harrison

Inventor： Phillip Walsh ,  Dale A. Harrison

IPC: G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步细化利用r-＆thetas; 阶段进一步减少占地面积。

公开(公告)号：US20100277728A1

公开(公告)日：2010-11-04

申请号：US12768206

申请日：2010-04-27

Applicant: Kenji Imura

Inventor： Kenji Imura

IPC: G01J3/28 ,  G01N21/55

CPC classification number: G01N21/55 ,  G01J3/02 ,  G01J3/021 ,  G01J3/28 ,  G01J3/524 ,  G01N21/25

Abstract: An illumination apparatus to illuminate a sample surface with excellent illumination efficiency and a reflective characteristics measuring apparatus using the illumination apparatus. The illumination apparatus includes a plane light source positioned on a normal at a center of the sample surface and a mirror having an internal reflective surface positioned between the plane light source and the sample surface. The internal reflective surface has a circular or polygonal shape in a section perpendicular to the normal and the circular or polygonal shape substantially corresponds to an imaginary circle centered on the normal and having a radius equal to half a distance between the plane light source and the sample surface. In place of the mirror, a plurality of reflective faces may be positioned.

Abstract translation: 照明装置，以照明效率优异的照明装置和使用该照明装置的反射特性测定装置。 照明装置包括位于样品表面的中心的法线上的平面光源和具有位于平面光源和样品表面之间的内部反射表面的反射镜。 内部反射表面在垂直于法线的部分中具有圆形或多边形形状，并且圆形或多边形形状基本上对应于以法线为中心的假想圆，其半径等于平面光源和样品之间的距离的一半 表面。 代替反射镜，可以定位多个反射面。