Abstract:
A cavity ring-down spectroscopy (CRDS) mirror is constructed to resist migration of a maximum reflectance peak during use where the CRDS mirror may become accreted with contamination that would otherwise cause the maximum reflectance peak to migrate. The mirror includes a mirror stack disposed on a mirror substrate and a plurality of alternating laminates including a first film with a first index of refraction and a second film with a second index of refraction. Each film is a one-quarter wavelength thickness of a given light energy that is to illuminate the mirror. A subsequent laminate is disposed on the plurality of alternating laminates. The subsequent laminate includes a quarter wavelength thickness first film and a second film with a wavelength thickness in a range from greater than 1.5 quarter wavelength and less than 2 quarter wavelength.
Abstract:
A spectroscopy device that separates input light into a plurality of wavelength ranges. A metal body has a hole or aperture which is open on the upper side. The hole or aperture is formed in a polygonal shape having at least a pair of opposite faces not parallel to each other in horizontal cross-section. Inner side faces of the hole or aperture are finished as mirror like reflection surfaces. Polarized input light inputted from the opening to the hole or aperture is reflected by the reflection surfaces and a standing wave is generated inside of the hole or aperture by self interference, whereby the input light is separated into a plurality of wavelength ranges.
Abstract:
A method of developing a multivariate optical element for an optical analysis system includes forming an optically absorptive spectral element having an optically absorptive material, the optically absorptive material being absorbing in a predetermined spectral region; and utilizing the optically absorptive spectral element in the optical analysis system.
Abstract:
A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.
Abstract:
Computed tomography imaging spectrometers (“CTIS”s) having color focal plane array detectors are provided. The color FPA detector may comprise a digital color camera including a digital image sensor, such as a Foveon X3® digital image sensor or a Bayer color filter mosaic. In another embodiment, the CTIS includes a pattern imposed either directly on the object scene being imaged or at the field stop aperture. The use of a color FPA detector and the pattern improves the accuracy of the captured spatial and spectral information.
Abstract:
An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.
Abstract:
Hyperspectral imaging system and methods that may be used for imaging objects in three-dimensions are disclosed. A cylindrical lens array and/or a slit array may be used to re-image and divide a field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral data cube is collected simultaneously.
Abstract:
The present invention relates to a solid-state based light source, a corresponding circuitry and a method of emitting light, including one or more light source elements for generating light, a first sensor for receiving light emitted by the light source elements and ambient light and for generating a first sensor signal (S1) representing the received light, a second sensor for only receiving ambient light and for generating a second sensor signal (S2) representing the received ambient light. Moreover, the solid-state based light source comprises a control unit for receiving the first and the second sensor signals (S1, S2) and for generating control signals (Sc) for controlling the light source elements, based on the difference between the first and the second sensor signals (S1, S2), to compensate for the influence of the ambient light.
Abstract:
A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.
Abstract:
An illumination apparatus to illuminate a sample surface with excellent illumination efficiency and a reflective characteristics measuring apparatus using the illumination apparatus. The illumination apparatus includes a plane light source positioned on a normal at a center of the sample surface and a mirror having an internal reflective surface positioned between the plane light source and the sample surface. The internal reflective surface has a circular or polygonal shape in a section perpendicular to the normal and the circular or polygonal shape substantially corresponds to an imaginary circle centered on the normal and having a radius equal to half a distance between the plane light source and the sample surface. In place of the mirror, a plurality of reflective faces may be positioned.