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    SPECTRAL MODULE
    131.
    发明申请
    SPECTRAL MODULE 有权
    光谱模块

    公开(公告)号：US20110164247A1

    公开(公告)日：2011-07-07

    申请号：US12992398

    申请日：2009-05-07

    Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Masaki Hirose ,  Masashi Ito

    Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Masaki Hirose ,  Masashi Ito

    IPC: G01J3/18 ,  G01J3/40

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0286 ,  G01J3/0297 ,  G01J2003/1213 ,  G02B5/1814 ,  G02B5/1852 ,  G02B5/1861 ,  G02B7/025 ,  G02B27/4244

    Abstract: A spectral module 1 comprises a substrate 2 for transmitting light L1 incident thereon from a front face 2a, a lens unit 3 for transmitting the light L1 incident on the substrate 2, a spectroscopic unit 4 for reflecting and spectrally resolving the light L1 incident on the lens unit 3, and a photodetector 5 for detecting light L2 reflected by the spectroscopic unit 4. The substrate 2 is provided with a recess 19 having a predetermined positional relationship with alignment marks 12a, 12b and the like serving as a reference unit for positioning the photodetector 5, while the lens unit 3 is mated with the recess 19. The spectral module 1 achieves passive alignment between the spectroscopic unit 4 and photodetector 5 when the lens unit 3 is simply mated with the recess 19.

    Abstract translation: 光谱模块1包括用于透射从前面2a入射的光L1的基板2，用于透射入射到基板2上的光L1的透镜单元3，用于反射和光谱分辨入射在基板2上的光L1的分光单元4 透镜单元3和用于检测由分光单元4反射的光L2的光检测器5.基板2设置有与作为用于定位的基准单元的对准标记12a，12b等具有预定位置关系的凹部19 光电检测器5，而透镜单元3与凹槽19配合。当透镜单元3简单地与凹部19配合时，光谱模块1实现分光单元4和光电检测器5之间的无源对准。

    SPECTRAL MODULE
    132.
    发明申请
    SPECTRAL MODULE 审中-公开
    光谱模块

    公开(公告)号：US20110116091A1

    公开(公告)日：2011-05-19

    申请号：US12992445

    申请日：2009-05-07

    Applicant: Katsumi Shibayama

    Inventor： Katsumi Shibayama

    IPC: G01J3/18

    CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/18 ,  G01J3/2803 ,  G02B5/1814 ,  G02B5/1861 ,  G02B7/008

    Abstract: In a spectral module 1, a photodetector 5 is mounted to an intermediate substrate 81, whereby an optical resin agent 63 interposed between a front face 2a of a substrate 2 and the intermediate substrate 81 is prevented from intruding into a light transmitting hole 50 of the photodetector 5. This can prevent refraction, scattering, and the like from occurring and make light Li appropriately enter a spectroscopic unit 4. In addition, the intermediate substrate 81 has a volume smaller than that of the substrate 2, whereby the intermediate substrate 81 expands/shrinks in a state more similar to the photodetector 5 than the substrate 2 when the temperature in the surroundings of the spectral module 1 changes. Hence, bump connections of the photodetector 5 can more reliably be prevented from breaking upon changes in the temperature in the surroundings of the spectral module 1 than when the photodetector 5 is mounted to the substrate 2.

    Abstract translation: 在光谱模块1中，将光电检测器5安装在中间基板81上，防止插入在基板2的正面2a和中间基板81之间的光学树脂试剂63侵入到 这可以防止发生折射，散射等，并使光Li适当地进入分光单元4.另外，中间基板81的体积小于基板2的体积，由此中间基板81膨胀 当光谱模块1的周围的温度变化时，以比基板2更为类似于光电检测器5的状态收缩。 因此，与将光检测器5安装在基板2上的情况相比，能够更可靠地防止光电检测器5的波峰连接在光谱模块1的周围温度变化时的断裂。

    SPECTROSCOPIC MODULE
    133.
    发明申请
    SPECTROSCOPIC MODULE 失效
    光谱模块

    公开(公告)号：US20100238439A1

    公开(公告)日：2010-09-23

    申请号：US12377314

    申请日：2008-06-05

    Applicant: Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

    Inventor： Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

    IPC: G01J3/02

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04

    Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a lisht detecting element 4 having a lisht detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the lisht detecting element 4 to transmit the light L1, L2. The lisht detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a raised portion 43 in a rectangular annular shape is formed on a rear plane 4a of the body portion 2 side in the lisht detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.

    Abstract translation: 光谱分析模块1设置有用于透射光L1，L2的主体部分2，用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a，具有检测由分光部3分散和反射的光L2的检测部分41的电极检测元件4，并且通过面朝下的接合电连接到形成在主体部分2的前面2a上的布线9 以及填充在检测元件4的主体部2侧的底部填充材料12，以透过光L1，L2。 所述检测元件4设有通向所述分光部3的光L1通过的通光孔42，并且在所述主体部2侧的背面4a上形成矩形环状的隆起部43 在检测元件4中，封闭光通过孔42的光出射口42b。

    SPECTROSCOPIC MODULE
    134.
    发明申请
    SPECTROSCOPIC MODULE 失效
    光谱模块

    公开(公告)号：US20100214563A1

    公开(公告)日：2010-08-26

    申请号：US12377343

    申请日：2008-06-05

    Applicant: Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

    Inventor： Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

    IPC: G01J3/02

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/04

    Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.

    Abstract translation: 光谱分析模块1设置有用于透射光L1，L2的主体部分2，用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a，光检测元件4，具有光检测部分41，用于检测由分光部分3分散和反射的光L2，并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充在光检测元件4的主体部分2侧的底部填充材料12以透射光L1，L2。 光检测元件4设置有通向分光部3的光L1通过的通光孔42，在光检测元件4的主体部2侧的背面4a上形成有储存部43 以便包围光通过孔42的光出射开口42b。

    SPECTROSCOPY MODULE
    137.
    发明申请
    SPECTROSCOPY MODULE 有权
    光谱模块

    公开(公告)号：US20090290155A1

    公开(公告)日：2009-11-26

    申请号：US12464273

    申请日：2009-05-12

    Applicant: Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masaki HIROSE

    Inventor： Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masaki HIROSE

    IPC: G01J3/28

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/18

    Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, on the light detecting element 5, a first convex portion 101 is formed so as to be located at least between the light detecting portion 5a and the light passing hole 50 when viewed from a direction substantially perpendicular to the front plane 2a. Thus, when the light detecting element 5 is attached to the substrate 2 via the optical resin adhesive 63, the optical resin adhesive 63 is dammed at the first convex portion 101. Thus, the optical resin adhesive 63 is prevented from penetrating into the light passing hole 50.

    Abstract translation: 在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与 光检测元件5的光检测部分5a偏离。 此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力 检测元件5和基板2.此外，在光检测元件5上，当从基本上垂直的方向观察时，形成至少位于光检测部分5a和光通过孔50之间的第一凸部101 到前平面2a。 因此，当光检测元件5经由光学树脂粘合剂63安装到基板2上时，光学树脂粘合剂63被阻挡在第一凸部101处。因此，防止光学树脂粘合剂63渗透到光通过 孔50。

    Spectroscopic ellipsometer and polarimeter systems
    138.
    发明授权
    Spectroscopic ellipsometer and polarimeter systems 有权
    光谱椭偏仪和偏光计系统

    公开(公告)号：US07616319B1

    公开(公告)日：2009-11-10

    申请号：US11890354

    申请日：2007-08-05

    Applicant: John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    Inventor： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    IPC: G01B9/02 ,  G01J3/45 ,  G01J4/00

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

    Abstract: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

    Abstract translation: 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

    Spectrophotometric optical system of microplate reader and filter wheel thereof
    139.
    发明授权
    Spectrophotometric optical system of microplate reader and filter wheel thereof 有权
    微孔板阅读器及其滤光轮的分光光度学系统

    公开(公告)号：US07382455B2

    公开(公告)日：2008-06-03

    申请号：US11564446

    申请日：2006-11-29

    Applicant: Lihua Zhou ,  Jinhong Qiu

    Inventor： Lihua Zhou ,  Jinhong Qiu

    IPC: G01N21/25

    CPC classification number: G01J3/51 ,  G01J3/0243 ,  G01J3/12 ,  G01J2003/1217 ,  G01N2201/0453

    Abstract: A spectrophotometric optical system of a microplate reader and a filter wheel thereof are disclosed. The filter wheel comprises a pivotable wheel body, at least one narrow-band filter with a relatively long central wavelength mounted to the wheel body, and at least one narrow-band filter with a relatively short central wavelength mounted to the wheel body. The narrow-band filter with a relatively long central wavelength is provided with a diaphragm on a front surface thereof The diaphragm is formed with a plurality of apertures. By the diaphragm attached to the front surface of the narrow-band filter with a relatively long central wavelength, an energy matching between light of longer wavelength and light of shorter wavelength may be achieved. Further, due to the uniformly distributed apertures in the diaphragm, an even light spot may be obtained.

    Abstract translation: 公开了微板读数器及其滤光轮的分光光度学系统。 所述滤光轮包括可枢转的轮体，至少一个安装在所述车轮主体上的具有较长的中心波长的窄带过滤器以及至少一个具有相对短的中心波长的窄带过滤器，安装在所述车轮主体上。 具有相对长的中心波长的窄带滤光片在其前表面上设置有隔膜。隔膜形成有多个孔。 通过附着在具有较长中心波长的窄带滤光片的前表面的光阑，可以实现较长波长的光与较短波长的光之间的能量匹配。 此外，由于隔膜中均匀分布的孔，可以获得均匀的光点。

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