公开(公告)号：US20100277731A1

公开(公告)日：2010-11-04

申请号：US12772621

申请日：2010-05-03

Applicant: Masayasu Teramura ,  Kazumi Kimura ,  Nobuyuki Tochigi ,  Tokuji Takizawa

Inventor： Masayasu Teramura ,  Kazumi Kimura ,  Nobuyuki Tochigi ,  Tokuji Takizawa

IPC: G01J3/28

CPC classification number: G01J3/0205 ,  G01J3/02 ,  G01J3/0262 ,  G01J3/18 ,  G01J3/20 ,  G01J3/50

Abstract: There is provided is a spectrometer having a concave reflection type diffraction element, wherein, among surfaces other than a diffraction surface of the diffraction element, non-diffraction surfaces which are located outside the diffraction surface at the same side as the diffraction surface are a glossy surface, the spectrometer includes a light detection unit which is located at an imaging position of a first-order diffracted light diffracted by the diffraction element to receive the first-order diffracted light, and the light detection unit is disposed inside optical paths of light beams regularly reflected on the non-diffraction surfaces outside the diffraction surface. Accordingly, it is possible to effectively suppress a stray light reflected on the surfaces other the diffraction surface from being incident into the light detection unit and to detect the light spectrally diffracted by the diffraction surface at high accuracy.

Abstract translation: 提供了具有凹面反射型衍射元件的光谱仪，其中除了衍射元件的衍射面以外的表面中，位于与衍射面同侧的衍射面外侧的非衍射面为光泽 光谱仪包括光检测单元，其位于由衍射元件衍射的一级衍射光的成像位置以接收一级衍射光，并且光检测单元设置在光束的光路内 经常在衍射表面外的非衍射表面反射。 因此，能够有效地抑制在其他衍射面的表面上反射的杂散光入射到光检测单元中，并以高精度检测由衍射面衍射的光。

公开(公告)号：US07791027B2

公开(公告)日：2010-09-07

申请号：US12631574

申请日：2009-12-04

Applicant: Abraham McAllister ,  Malcolm Smith ,  Kostas Zafiriou ,  David Day ,  Michael Butler

Inventor： Abraham McAllister ,  Malcolm Smith ,  Kostas Zafiriou ,  David Day ,  Michael Butler

IPC: G01J5/02

CPC classification number: G01J3/18 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/2846 ,  G01J3/32 ,  G01J2003/1213 ,  G01J2003/1286

Abstract: According to one aspect, an IR spectrometer includes a light source adapted to illuminate a sample, a grating adapted to spectrally disperse a light that has illuminated the sample, a MEMS array adapted to be electrostatically actuated by a controller to control a diffraction of the light, a detector configured to detect the light, and a power source adapted to supply power to the light source and to the MEMS array, wherein the controller is adapted to control the MEMS array so as to manage a power consumption of the IR spectrometer. In one embodiment, the IR spectrometer includes a housing sized and arranged to house the light source, the grating, the MEMS array, the controller, the detector, to and the power source in a hand-held device.

Abstract translation: 根据一个方面，一种IR光谱仪包括适于照射样品的光源，适于光谱分散已经照射样品的光的光栅，适于由控制器静电致动以控制光的衍射的MEMS阵列 ，被配置为检测光的检测器，以及适于向所述光源和所述MEMS阵列供电的电源，其中所述控制器适于控制所述MEMS阵列以便管理所述IR光谱仪的功率消耗。 在一个实施例中，IR光谱仪包括尺寸和布置成在手持式装置中容纳光源，光栅，MEMS阵列，控制器，检测器和电源的外壳。

公开(公告)号：US20100202055A1

公开(公告)日：2010-08-12

申请号：US12369905

申请日：2009-02-12

Applicant: Adam NORTON ,  Holger Tuitje ,  Fred Stanke

Inventor： Adam NORTON ,  Holger Tuitje ,  Fred Stanke

IPC: G02B27/44 ,  G02B27/42

CPC classification number: G01J3/28 ,  G01B2210/56 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0297 ,  G01J3/18 ,  G02B5/28 ,  G02B2207/117

Abstract: A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.

Abstract translation: 公开了一种用于半导体测量系统中的光谱仪的分区排序分选过滤器，其中在区域关节处的光散射减小。 订单分选过滤器包括沉积在下面的光学透明层，或者在分级过滤器区域的薄膜过滤器堆叠的顶部，其中调整光学透明层的厚度，使得在光 区域接头在邻近区域接头的区域中基本相等。 还公开了一种用于波长到检测器阵列像素位置校准的光谱仪的方法，其能够精确地表示在订单分选滤波器的区域接头附近的校准曲线的高度局部化的非线性。

公开(公告)号：US20100201963A1

公开(公告)日：2010-08-12

申请号：US12690221

申请日：2010-01-20

Applicant: Hugo Augustinus Joseph Cramer ,  Antoine Gaston Marie Kiers ,  Henricus Petrus Maria Pellemans

Inventor： Hugo Augustinus Joseph Cramer ,  Antoine Gaston Marie Kiers ,  Henricus Petrus Maria Pellemans

IPC: G03B27/54 ,  G03B27/32

CPC classification number: G01N21/956 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/4412 ,  G01N21/4788 ,  G01N21/9501 ,  G03F7/70191 ,  G03F7/70633 ,  G03F9/7049 ,  G03F9/7065 ,  G03F9/7088 ,  G03F9/7092

Abstract: For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.

Abstract translation: 对于角度分辨光谱法，使用具有具有四个象限的照明轮廓的辐射束。 第一和第三象限被照亮，而第二和第四象限不被照亮。 因此，所得到的光瞳面也被分成四个象限，仅在第一和第三象限中出现零级衍射图案，并且仅在第二和第三象限中出现一级衍射图案。

公开(公告)号：US07768641B2

公开(公告)日：2010-08-03

申请号：US11657936

申请日：2007-01-24

Applicant: Gregory H. Bearman ,  Daniel W. Wilson ,  William R. Johnson

Inventor： Gregory H. Bearman ,  Daniel W. Wilson ,  William R. Johnson

IPC: G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/18 ,  G01J3/28 ,  G01J3/2803 ,  G01N21/251

Abstract: Computed tomography imaging spectrometers (“CTIS”s) having patterns for imposing spatial structure are provided. The pattern may be imposed either directly on the object scene being imaged or at the field stop aperture. The use of the pattern improves the accuracy of the captured spatial and spectral information.

Abstract translation: 提供了具有强化空间结构图案的计算机断层扫描成像光谱仪（“CTIS”）。 该图案可以直接施加在被成像的对象场景上或者在场停止孔径处。 该图案的使用提高了捕获的空间和光谱信息的准确性。

公开(公告)号：US20100141941A1

公开(公告)日：2010-06-10

申请号：US12663619

申请日：2008-06-04

Applicant: Wolfram Bohle

Inventor： Wolfram Bohle

IPC: G01J3/00 ,  G01J3/30

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/18 ,  G01J3/443 ,  G01N21/66

Abstract: The invention relates to a spectrometer for analysing the optical emission of a sample, having an excitation source, an entrance gap and a dispersive element, which fans out the spectrum of the light generated in the excitation source in a plane, and having solid body sensors with one or more lines, which are arranged in the region of the focal curve of the beam path in order to evaluate the spectral information, wherein the sensors are arranged above or below the plane and the spectral emission is deflected onto the sensors by mirrors and focused, wherein the reflecting surface of the mirrors is aspherically formed in a direction of curvature.

Abstract translation: 本发明涉及一种用于分析具有激发源，入口间隙和分散元件的样品的光发射的光谱仪，其将平面内的激发源中产生的光的光谱散出，并具有固体感测器 具有布置在光束路径的焦点曲线的区域中的一条或多条线，以便评估光谱信息，其中传感器布置在平面的上方或下方，并且光谱发射通过反射镜偏转到传感器上，并且 聚焦，其中反射镜的反射表面在曲率方向上非球面地形成。

公开(公告)号：US07733492B1

公开(公告)日：2010-06-08

申请号：US11431936

申请日：2006-05-10

Applicant: Eric Szarmes ,  Huan Ma

Inventor： Eric Szarmes ,  Huan Ma

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/18 ,  G01J3/453

Abstract: Systems and methods are disclosed for a modified Sagnac interferometer having a plurality of gratings that can be reflective or transmissive. The gratings allow measurement of wavelength spectra in counter-circulating beams of the interferometer. In one embodiment, diffraction geometries at each pair of neighboring gratings are configured so that diffractive and angular contributions reinforce each other at the second of the pair of gratings. In one embodiment, diffraction geometries at the gratings are configured so that the exiting beams of the interferometer satisfy the crossing condition wherein the exiting beams are on the opposite sides of a reference beam axis for a design wavelength input beam. Also disclosed are techniques for restoring the reinforcement and/or crossing conditions when these conditions are not otherwise met.

Abstract translation: 公开了用于具有可以是反射或透射的多个光栅的经修改的Sagnac干涉仪的系统和方法。 光栅允许测量干涉仪的反循环光束中的波长光谱。 在一个实施例中，每对相邻光栅处的衍射几何形状被配置为使得衍射和角度贡献在所述一对光栅中的第二对处彼此加强。 在一个实施例中，光栅处的衍射几何形状被配置为使得干涉仪的出射光束满足交叉条件，其中出射光束在设计波长输入光束的参考光束轴线的相对侧上。 还公开了当不满足这些条件时恢复加强和/或交叉条件的技术。

公开(公告)号：US07688512B2

公开(公告)日：2010-03-30

申请号：US11901940

申请日：2007-09-19

Applicant: Shigeo Kittaka ,  Kentaro Yamada ,  Tatsuhiro Nakazawa ,  Keiji Tsunetomo

Inventor： Shigeo Kittaka ,  Kentaro Yamada ,  Tatsuhiro Nakazawa ,  Keiji Tsunetomo

IPC: G02B5/18

CPC classification number: G02B5/1871 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/18

Abstract: A transmissive diffraction grating includes a substrate and a plurality of ridges provided in a mutually parallel manner at constant periodicity p on the substrate. The ridges include a first layer, a second layer (refractive index n2: 2.0-2.5), and a third layer with non-continuous refractive indices, arranged in that order from the substrate outward. The first layer adjacent the substrate, in terms of its refractive index, exhibits a difference of 0.1 or less relative to the substrate. The second layer has a higher refractive index than the first layer and third layer and satisfies the following conditions. For a single ridge, the cross-sectional area S of a cross-section of the second layer perpendicular to the longitudinal direction of said ridge is in the range of 0.75p2k1θ2/(n2−1)

Abstract translation: 透射衍射光栅包括基板和以基板上的恒定周期性p彼此平行的方式设置的多个脊。 脊包括第一层，第二层（折射率n2：2.0-2.5）和具有非连续折射率的第三层，从衬底向外依次布置。 与基板相邻的第一层的折射率相对于基板的差为0.1以下。 第二层具有比第一层和第三层更高的折射率，并且满足以下条件。 对于单个脊，垂直于所述脊的纵向方向的第二层的横截面的横截面积S在0.75p2k1的范围内; 2 /（n2-1）