Method and system for wavelength-dependent imaging and detection using a hybrid filter
    141.
    发明授权
    Method and system for wavelength-dependent imaging and detection using a hybrid filter 有权
    使用混合滤波器进行波长依赖成像和检测的方法和系统

    公开(公告)号:US07391008B2

    公开(公告)日:2008-06-24

    申请号:US11695884

    申请日:2007-04-03

    Abstract: Apparatus and methods for wavelength-dependent detection are provided. A detector includes a hybrid filter having unpatterned and patterned filter layers and at least one light-detecting sensor that detects light in first and second wavelength bands from the patterned filter layer of the hybrid filter. The unpatterned filter layer passes light in two nonoverlapping wavelength bands relative to light in wavelength bands between or among the nonoverlapping wavelength bands. The patterned filter layer includes first and second regions configured respectively to pass light in the first and second wavelength bands of the nonoverlapping wavelength bands passed by the unpatterned filter layer.

    Abstract translation: 提供了用于波长相关检测的装置和方法。 检测器包括具有未图案化和图案化的滤波器层的混合滤波器和至少一个光检测传感器,其从混合滤波器的图案化滤波器层检测第一和第二波长带中的光。 未图案化的滤光层相对于非重叠波长带之间或之间的波长带中的光,在两个不重叠的波长带中通过光。 图案化的滤波器层包括分别配置为使由未图案化的滤波层传递的非重叠波长带的第一和第二波长带中的光通过的第一和第二区域。

    Light meter for detecting and measuring intensity of two or more wavelengths of light
    142.
    发明授权
    Light meter for detecting and measuring intensity of two or more wavelengths of light 失效
    用于检测和测量两个或多个波长光的强度的光度计

    公开(公告)号:US07267546B2

    公开(公告)日:2007-09-11

    申请号:US10914479

    申请日:2004-08-09

    Abstract: A light meter for detecting two or more different wavelengths of light and methods for determining whether a light source configured to emit light at two or more dominant wavelengths is working properly. The inventive light meter includes a housing, two or more receiving means for receiving light energy emitted by an external light source wherein each receiving means is configured to receive light energy of a desired wavelength, detecting means for detecting and measuring light energy received by the receiving means, and display means for providing a visual indication of the existence and intensity of one or more wavelengths of light energy received by the receiving means.

    Abstract translation: 用于检测两个或更多个不同波长的光的光度计和用于确定被配置为发射两个或更多个主波长的光的光源是否正常工作的方法。 本发明的光度计包括壳体,两个或更多个接收装置,用于接收由外部光源发射的光能,其中每个接收装置被配置为接收所需波长的光能;检测装置,用于检测和测量接收到的光能量 装置和显示装置,用于提供由接收装置接收的一个或多个波长的光能的存在和强度的视觉指示。

    MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR
    143.
    发明申请
    MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR 有权
    包含红外热敏探测器的监测系统

    公开(公告)号:US20070200065A1

    公开(公告)日:2007-08-30

    申请号:US11555094

    申请日:2006-10-31

    Applicant: Jose Arno

    Inventor: Jose Arno

    Abstract: The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. Specifically, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.

    Abstract translation: 本发明涉及一种采用基于红外线热电堆检测器进行过程控制的半导体处理系统,通过利用这种材料对特征波长的红外光的吸收来分析感兴趣的材料。 具体地说,将红外光束从红外光源通过包含感兴趣的材料的采样区域传送到热电堆检测器的线性传输路径。 线性传输路径降低了红外光传输期间信号丢失的风险。 红外光的传输路径可以包括高度平滑和反射的内表面,用于在传输期间最小化这种信号损失。

    Method and system for wavelength-dependent imaging and detection using a hybrid filter
    144.
    发明授权
    Method and system for wavelength-dependent imaging and detection using a hybrid filter 有权
    使用混合滤波器进行波长依赖成像和检测的方法和系统

    公开(公告)号:US07217913B2

    公开(公告)日:2007-05-15

    申请号:US10739831

    申请日:2003-12-18

    Abstract: An object to be imaged or detected is illuminated by a single broadband light source or multiple light sources emitting light at different wavelengths. The light is detected by a detector, which includes a light-detecting sensor covered by a hybrid filter. The hybrid filter includes a multi-band narrowband filter mounted over a patterned filter layer. The light strikes the narrowband filter, which passes light at or near the multiple wavelengths of interest while blocking light at all other wavelengths. The patterned filter layer alternately passes the light at one particular wavelength while blocking light at the other wavelengths of interest. This allows the sensor to determine either simultaneously or alternately the intensity of the light at the wavelengths of interest. Filters may also be mounted over the light sources to narrow the spectra of the light sources.

    Abstract translation: 要成像或检测的物体被单个宽带光源或发射不同波长的光的多个光源照射。 光被检测器检测,检测器包括由混合滤波器覆盖的光检测传感器。 混合滤波器包括安装在图案化滤波器层上的多频带窄带滤波器。 光照射窄带滤光片,该滤光片在所有其他波长处阻挡光线,使其处于感兴趣的多个波长处或附近的光线。 图案化的滤光层在一个特定波长处交替地传递光,同时阻挡在感兴趣的其它波长处的光。 这允许传感器同时或交替地确定感兴趣波长处的光的强度。 滤光片也可安装在光源上,以缩小光源的光谱。

    Tunable sensor
    145.
    发明授权
    Tunable sensor 失效
    可调谐传感器

    公开(公告)号:US07145143B2

    公开(公告)日:2006-12-05

    申请号:US10749710

    申请日:2003-12-31

    Abstract: A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.

    Abstract translation: 一种用于在特定频率和宽带模式下从目标检测红外光(IR)的可调式辐射热量计装置。 该装置可以具有其每个可控制的像素阵列,以对被选择和检测的特定波长的光敏感。 像素级别上的特定频率的检测可能导致目标的频谱分析。 此外,测辐射热计的每个像素通过相关联的标准具可被调谐以检测IR的不同频率或被切换到IR的宽带检测。 该器件可以封装在集成的真空封装中,其中标准具阵列变成顶盖,其结合到包含测辐射热计阵列的晶片。

    Light meter for detecting and measuring intensity of two or more wavelengths of light
    146.
    发明申请
    Light meter for detecting and measuring intensity of two or more wavelengths of light 失效
    用于检测和测量两个或多个波长光的强度的光度计

    公开(公告)号:US20060028639A1

    公开(公告)日:2006-02-09

    申请号:US10914479

    申请日:2004-08-09

    Abstract: 5A light meter for detecting two or more different wavelengths of light and methods for determining whether a light source configure to emit light at two or more dominant wavelengths is working properly. The inventive light meter includes a housing, two or more receiving means for receiving light energy emitted by an external light source wherein each receiving means is configured to receive light energy of a desired wavelength, detecting means for detecting and measuring light energy received by the receiving means, and display means for providing a visual indication of the existence and intensity of one or more wavelengths of light energy received by the receiving means.

    Abstract translation: 用于检测两个或更多个不同波长的光的5A光度计和用于确定光源被配置为发射两个或更多个主波长的光的方法是否正常工作。 本发明的光度计包括壳体,两个或更多个接收装置,用于接收由外部光源发射的光能,其中每个接收装置被配置为接收所需波长的光能;检测装置,用于检测和测量接收到的光能量 装置和显示装置,用于提供由接收装置接收的一个或多个波长的光能的存在和强度的视觉指示。

    Method and system for wavelength-dependent imaging and detection using a hybrid filter
    148.
    发明申请
    Method and system for wavelength-dependent imaging and detection using a hybrid filter 有权
    使用混合滤波器进行波长依赖成像和检测的方法和系统

    公开(公告)号:US20050133693A1

    公开(公告)日:2005-06-23

    申请号:US10739831

    申请日:2003-12-18

    Abstract: An object to be imaged or detected is illuminated by a single broadband light source or multiple light sources emitting light at different wavelengths. The light is detected by a detector, which includes a light-detecting sensor covered by a hybrid filter. The hybrid filter includes a multi-band narrowband filter mounted over a patterned filter layer. The light strikes the narrowband filter, which passes light at or near the multiple wavelengths of interest while blocking light at all other wavelengths. The patterned filter layer alternately passes the light at one particular wavelength while blocking light at the other wavelengths of interest. This allows the sensor to determine either simultaneously or alternately the intensity of the light at the wavelengths of interest. Filters may also be mounted over the light sources to narrow the spectra of the light sources.

    Abstract translation: 要成像或检测的物体被单个宽带光源或发射不同波长的光的多个光源照射。 光被检测器检测,检测器包括由混合滤波器覆盖的光检测传感器。 混合滤波器包括安装在图案化滤波器层上的多频带窄带滤波器。 光照射窄带滤光片,该滤光片在所有其他波长处阻挡光线,使其处于感兴趣的多个波长处或附近的光线。 图案化的滤光层在一个特定波长处交替地传递光,同时阻挡在感兴趣的其它波长处的光。 这允许传感器同时或交替地确定感兴趣波长处的光的强度。 滤光片也可安装在光源上,以缩小光源的光谱。

    Optical spectral reflectance sensor and controller
    149.
    发明申请
    Optical spectral reflectance sensor and controller 有权
    光谱反射率传感器和控制器

    公开(公告)号:US20040065834A1

    公开(公告)日:2004-04-08

    申请号:US10606563

    申请日:2003-06-26

    Abstract: A spectral reflectance sensor including: a light source for emitting a modulated beam of red light; a light source for emitting a modulated beam of near infrared light; a receiver for receiving reflected light produced by either the red source or the near infrared source; a receiver for receiving incident light from either the red source or the infrared source; a signal conditioner responsive to the modulation such that the signals produced by the receivers in response to reflected and incident light from the source can be discriminated from signals produced by ambient light; and a microprocessor having an input such that the microprocessor can determine the intensities of incident red light, reflected red light; incident near infrared light; and reflected near infrared light. From these intensities, and by knowing the growing days since emergence or planting, the sensor can calculate the mid-growing season nitrogen fertilizer requirements of a plant.

    Abstract translation: 一种光谱反射传感器,包括:用于发射调制的红光束的光源; 用于发射近红外光的调制束的光源; 用于接收由红色源或近红外光源产生的反射光的接收器; 用于从红色源或红外源接收入射光的接收器; 响应于调制的信号调节器,使得响应于来自源的反射和入射光的接收器产生的信号可以与由环境光产生的信号区分开; 以及具有输入的微处理器,使得微处理器可以确定入射的红光,反射红光的强度; 事件近红外光; 并反射近红外光。 通过这些强度,通过了解自出苗或种植以来日益增长的日子,传感器可以计算出一个植物的中期生长季节氮肥需求。

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