Selectively accelerated plating of metal features
    156.
    发明授权
    Selectively accelerated plating of metal features 失效
    选择性加速电镀金属功能

    公开(公告)号:US07449099B1

    公开(公告)日:2008-11-11

    申请号:US10947085

    申请日:2004-09-21

    Abstract: To make a metal feature, a non-plateable layer is applied to a workpiece surface and then patterned to form a first plating region and a first non-plating region. Then, metal is deposited on the workpiece to form a raised field region in said first plating region and a recessed region in said first non-plating region. Then, an accelerator film is applied globally on the workpiece. A portion of the accelerator film is selectively removed from the field region, and another portion of the accelerator film remains in the recessed acceleration region. Then, metal is deposited onto the workpiece, and the metal deposits at an accelerated rate in the acceleration region, resulting in a greater thickness of metal in the acceleration region compared to metal in the non-activated field region. Then, metal is completely removed from the field region, thereby forming the metal feature.

    Abstract translation: 为了制造金属特征,将不可镀层施加到工件表面,然后被图案化以形成第一镀层区域和第一非镀层区域。 然后,金属沉积在工件上,以在所述第一镀覆区域中形成凸起区域,并在所述第一非镀覆区域中形成凹陷区域。 然后,加工膜全部应用于工件上。 加速膜的一部分从场区域选择性地去除,并且加速膜的另一部分残留在凹入加速区域中。 然后,金属沉积在工件上,并且金属在加速区域中以加速的速率沉积,导致与非激活场区域中的金属相比,加速区域中的金属厚度更大。 然后,从场区域中完全去除金属,从而形成金属特征。

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