公开(公告)号：US20240125649A1

公开(公告)日：2024-04-18

申请号：US18365821

申请日：2023-08-04

Applicant: California Institute of Technology

Inventor： Seyedeh Sona Hosseini

IPC: G01J3/02 ,  G01J3/443

CPC classification number: G01J3/0256 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/443

Abstract: Ultra-miniature spatial heterodyne spectrometers (SHSs) are presented. Ultra-miniature SHSs in accordance with the invention, comprise a beam-splitter and gratings configured to generate a fringe pattern for spectroscopic detection. Many embodiments include input optics and a sensor and are configured in a way to omit collimating optics and imaging optics from the SHS. Compared to conventional SHSs known in the art, the present invention enables fewer parts, significantly smaller and lighter SHSs, are more efficient and robust, and require less maintenance. Many embodiments are field-deployable, in that such embodiments can be deployed for hand held use in real-world or remote activities outside of research or diagnostic facilities.

公开(公告)号：US11879850B2

公开(公告)日：2024-01-23

申请号：US17381939

申请日：2021-07-21

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Ross Coenen ,  Mark Casper

IPC: G01J3/44 ,  G01N21/71 ,  G01J3/443 ,  H01J49/10

CPC classification number: G01N21/718 ,  G01J3/443 ,  H01J49/105 ,  G01N2201/06113

Abstract: Systems and methods are described for providing a representative, homogeneous, and planarized target for solid sample laser ablation. A method embodiment includes, but is not limited to, removing portions of a solid sample with an abrasive sampling system, the abrasive sampling system including at least one of a plurality of abrasive particles configured to hold the portions of the solid sample on an abrasive substrate between the abrasive particles or a texturized surface configured to hold the portions of the solid sample on the texturized surface; transferring the abrasive sampling system holding the portions of the solid sample to a laser ablation system; and ablating the portions of the solid sample held by the abrasive sampling system with the laser ablation system.

公开(公告)号：US11862442B2

公开(公告)日：2024-01-02

申请号：US16412818

申请日：2019-05-15

Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY

Inventor： Il Gu Yun

IPC: H01J37/32 ,  H01L21/67 ,  G01J1/44 ,  G01J3/443

CPC classification number: H01J37/32944 ,  G01J1/44 ,  G01J3/443 ,  H01L21/67253 ,  H01J2237/24507

Abstract: A plasma process monitoring device capable of monitoring plasma light distributed in a certain area in a chamber includes a selection area light transmitter and a monitor. The selection area light transmitter is disposed to face a viewport formed in a chamber and includes a plurality of selective light blockers for selectively blocking plasma light emitted through the viewport. The monitor receives plasma light transmitted through at least one of a plurality of selective light blockers to acquire information on the plasma light, and monitors the uniformity of plasma generated in the chamber based on the information on the plasma light.

公开(公告)号：US20230317435A1

公开(公告)日：2023-10-05

申请号：US18113158

申请日：2023-02-23

Applicant: SEMES CO., LTD.

Inventor： Sunjoo PARK ,  Hyunjong SHIM ,  Sangmin MUN ,  Kyungseok MIN ,  Hwan JUNG ,  Nayeon LEE

IPC: H01J37/32 ,  G01J3/443

CPC classification number: H01J37/32807 ,  H01J37/32724 ,  G01J3/443 ,  H01J37/32862 ,  H01L21/3065

Abstract: Provided is a substrate processing apparatus including a chamber having a processing space therein, a supporting unit arranged in the processing space, having a substrate located thereon, and including a label material layer including a label material therein, a plasma source configured to generate plasma from a processing gas in the processing space, and a measurement apparatus configured to detect the label material, wherein, when the supporting unit is etched to a depth that is greater than or equal to a first depth, the label material layer is exposed.

公开(公告)号：US11692940B2

公开(公告)日：2023-07-04

申请号：US17259937

申请日：2019-07-31

Applicant: INESC TEC Instituto De Engenharia De Sistemas De Computadoras, Tecnología E Ciéncia

Inventor： Rui Miguel Da Costa Martins ,  Pedro Alberto Da Silva Jorge ,  Eduardo Alexander Pereira Silva ,  José Miguel Soares De Almeida ,  Alfredo Manuel De Oliveira Martins

IPC: G01N21/71 ,  G01J3/443

CPC classification number: G01N21/718 ,  G01J3/443

Abstract: The present invention is enclosed in the area of machine learning, in particular machine learning for the analysis of High or Super-resolution spectroscopic data, which typically comprises analysis of highly complex samples/mixtures of substances and/or data with low resolution, for instance Laser-Induced Breakdown Spectroscopy (LIBS). It is an object of the present invention a method of computational self-learning for characterization of one or more constituents in a sample, from electromagnetic spectral information of such sample, which changes the paradigm associated with prior art methods, by using only sub-optical spectral information, i.e., obtaining the resolution of the spectral information and thereby be able to extract spectral lines—thus determining a spectral line position—from such spectral information, hence avoiding all the uncertainty associated with pixel based methods. It is also an object of the present invention a computational apparatus configured to implement such method.

公开(公告)号：US11538672B2

公开(公告)日：2022-12-27

申请号：US17282381

申请日：2019-11-01

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Yoshiyuki Teramoto ,  Akihiro Wakisaka

IPC: H01J37/32 ,  G01N21/73 ,  G01J3/443

Abstract: Provided is an inductively coupled plasma spectrometric system for measuring an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system including: a spectrometer configured to resolve light emitted in a measurement region set in the plasma into a plurality of wavelength components; a detection device configured to detect a spatial distribution of the resolved light; and a measuring device configured to measure the detected spatial distribution at every measurement unit time, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region.

公开(公告)号：US20220381614A1

公开(公告)日：2022-12-01

申请号：US17883724

申请日：2022-08-09

Applicant: SPECLIPSE, INC.

Inventor： Sung Hyun PYUN ,  Wan Ki MIN

IPC: G01J3/443 ,  B63J2/14 ,  F02M21/02 ,  F17C6/00 ,  F17C9/02 ,  F17C9/04 ,  B63B25/16

Abstract: Disclosed herein are a method for diagnosing a disease of a body tissue by using LIBS (Laser-Induced Breakdown Spectroscopy) comprising: preparing a laser device including: a laser projection module, outputting the laser to a suspicious region of the body tissue, a light receiving module, receiving a plurality of light, a spectrum measurement module, and a guide unit; and projecting the laser to generate plasma by inducing tissue ablation in the suspicious region; wherein the laser projected to the suspicious region has a target area, and wherein the target area has smaller size than the suspicious region such that the target area is located inside the suspicious region.

公开(公告)号：US11513342B2

公开(公告)日：2022-11-29

申请号：US16861716

申请日：2020-04-29

Applicant: Hitachi High-Tech Analytical Science Finland Oy

Inventor： Esa Räikkönen

IPC: G01J3/443 ,  G02B26/08 ,  G01J3/02 ,  G02B19/00 ,  H01S3/00 ,  H01S3/094 ,  H01S3/11 ,  H01S3/06

Abstract: In accordance with an example embodiment, a laser arrangement is provided, the laser arrangement comprising a light source for generating light output; a collimator assembly for collimating the light output from the light source into a pump beam; an optical resonator assembly for generating pulsed output beam based on the pump beam directed thereat; and a beam displacement assembly for laterally shifting the pump beam to adjust the position at which the pump beam meets a surface of the optical resonator assembly.

公开(公告)号：US11499869B2

公开(公告)日：2022-11-15

申请号：US16682616

申请日：2019-11-13

Applicant: Applied Materials, Inc.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala

IPC: G01J3/443 ,  H01J37/32 ,  G01N21/31 ,  H01L21/66

Abstract: Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.

公开(公告)号：US20220299364A1

公开(公告)日：2022-09-22

申请号：US17698154

申请日：2022-03-18

Applicant: Hitachi High-Tech Analytical Science GmbH

Inventor： André PETERS

IPC: G01J3/02 ,  B62B3/02 ,  G01J3/443 ,  B62B3/10 ,  B62B3/04

Abstract: Disclosed is a mobile instrument assembly comprising: a housing for accommodating one or more components of an instrument; one or more wheels for mobility of the instrument assembly; and a mounting assembly comprising: a support plate that is moveable with respect to the housing between retracted position and one or more extracted positions and that comprises, in its distal end, a pair of protrusions projecting from a surface of the support plate, wherein in the retracted position the support plate is substantially unexposed from the housing, and in each of the one or more extracted positions the support plate extends from the housing to respective extent such that perimeter of the housing and the pair of protrusions define a circular area of respective predefined diameter to allow for mounting a pressure vessel of corresponding size on the support plate between the perimeter of the housing and the pair of protrusions.