公开(公告)号：US20110079710A1

公开(公告)日：2011-04-07

申请号：US12599339

申请日：2008-05-09

Applicant: John Damiano, JR. ,  Stephen E. Mick ,  David P. Nackashi

Inventor： John Damiano, JR. ,  Stephen E. Mick ,  David P. Nackashi

IPC: G06K9/48 ,  G21K1/04 ,  H01L29/66

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2602 ,  H01J2237/28 ,  H01J2237/2802

Abstract: Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.

Abstract translation: 电子显微镜支撑结构及其制作和使用方法。 支撑结构通常使用半导体材料和半导体制造工艺构造。 可以控制支撑结构的温度和/或气体或液体被限制在观察区域中用于反应和/或成像。

公开(公告)号：US20100237242A1

公开(公告)日：2010-09-23

申请号：US12738347

申请日：2008-10-29

Applicant: Robert Schwarzer

Inventor： Robert Schwarzer

IPC: G21K7/00

CPC classification number: G01N23/207 ,  G01N2223/104 ,  G01N2223/316 ,  H01J2237/2447 ,  H01J2237/24475 ,  H01J2237/2566 ,  H01J2237/28 ,  H01J2237/2805

Abstract: The invention relates to a device for crystal orientation measurement, comprising an ion source (42); means (44) for focusing ions emitted from the ion source into an ion probe; and means (18) for receiving a crystalline or multicrystalline sample (16), characterized by an imaging ion detector (12) for registering at least one ion blocking pattern (26) in digital form. The invention further relates to the use of a device according to one of the preceding claims for crystal orientation measurement. The invention further relates to a method for crystal orientation measurement, comprising the focusing of ions emitted from an ion source (42) into an ion probe; directing the ion probe onto a crystalline or multicrystalline sample (16); and registering at least one ion blocking pattern (26) in digital form with the aid of an imaging ion detector (12).

Abstract translation: 本发明涉及一种用于晶体取向测量的装置，包括离子源（42）; 用于将从离子源发射的离子聚焦到离子探针中的装置（44） 以及用于接收晶体或多晶体样品（16）的装置（18），其特征在于用于以数字形式记录至少一个离子阻挡图案（26）的成像离子检测器（12）。 本发明还涉及根据前述权利要求中任一项所述的装置用于晶体取向测量的用途。 本发明还涉及一种用于晶体取向测量的方法，包括将从离子源（42）发射的离子聚焦到离子探针中; 将离子探针引导到结晶或多晶样品（16）上; 以及借助于成像离子检测器（12）以数字形式记录至少一个离子阻挡图案（26）。

公开(公告)号：US07781742B2

公开(公告)日：2010-08-24

申请号：US12213493

申请日：2008-06-20

Applicant: Joachim Zach

Inventor： Joachim Zach

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/153 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

Abstract: The invention concerns a corrector (10) for chromatic and aperture aberration correction in a scanning electron microscope or a scanning transmission electron microscope, comprising four multipole elements (1, 2, 3, 4) which are consecutively disposed in the optical path (9), the first (1) and fourth (4) of which are used to generate quadrupole fields (5, 6) and the second (2) and third (3) of which are used to generate octupole fields (11, 12) and quadrupole fields (7, 7′, 8, 8′), wherein the latter are superposed magnetic (7, 8) and electric (7′, 8′) fields, and wherein the quadrupole fields (5, 6, 7, 8) of all four multipole elements (1, 2, 3, 4) are successively rotated with respect to one another through 90°. Elimination of errors up to fifth order can be realized with a corrector (10) of this type in that the second (2) and the third (3) multipole elements are designed as twelve-pole elements, and an additional twelve-pole element (13) is inserted between the second (2) and the third (3) multipole element, and is loaded with current and/or voltage, such that an octupole field (14) is generated that is superposed by a twelve-pole field (15).

Abstract translation: 本发明涉及一种用于扫描电子显微镜或扫描透射电子显微镜中的彩色和孔径像差校正的校正器（10），包括连续设置在光路（9）中的四个多极元件（1,2,3,4） ，其第一（1）和第四（4）用于产生四极场（5,6）和第二（2）和第三（3）用于产生八极场（11,12）和四极杆 （7,7'，8,8'），其中后者是重叠的磁（7,8）和电（7'，8'）场，并且其中四极场（5,6,7,8） 所有四个多极元件（1,2,3,4）相对于彼此依次旋转90°。 可以用这种校正器（10）来实现高达五级的误差的消除，因为第二（2）和第三（3）多极元件被设计为十二极元件和另外的十二极元件 13）插入在第二（2）和第三（3）多极元件之间，并且被加载电流和/或电压，使得产生由十二极场（15）叠加的八极场（14） ）。

公开(公告)号：US07781733B2

公开(公告)日：2010-08-24

申请号：US11749350

申请日：2007-05-16

Applicant: Steven B. Herschbein ,  Herschel M. Marchman ,  Narender Rana ,  Chad Rue

Inventor： Steven B. Herschbein ,  Herschel M. Marchman ,  Narender Rana ,  Chad Rue

IPC: H01J40/14 ,  G01N23/00 ,  G21K7/00

CPC classification number: H01J37/304 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/28 ,  H01J2237/31742 ,  H01J2237/31749

Abstract: An apparatus for simultaneous parallel processing of a sample using light energy for optical viewing or surface processing in parallel with a charged particle beam. A charged particle beam transmits a focused ion beam or an electron beam along a path to a sample. An optical microscope transmits light along a first path to the sample, and a prism aligned along the first light path reflects light into a second light path toward the sample. A portion of the prism and reflective surface is removed for passage of the charged particle beam. A lens is aligned along the second light path and has a portion removed for passage of the charged particle beam. The removed portions of the prism and lens are aligned along the charged particle beam path to permit parallel delivery of the charged particle beam and the light to substantially the same portion of the sample.

Abstract translation: 一种用于使用光能同时并行处理用于光学观察或与带电粒子束平行的表面处理的装置。 带电粒子束沿着路径将聚焦离子束或电子束透射到样品。 光学显微镜沿着第一路径将光透射到样品，并且沿着第一光路排列的棱镜将光反射到朝向样品的第二光路中。 去除棱镜和反射表面的一部分以通过带电粒子束。 透镜沿着第二光路对准，并且具有去除带电粒子束通过的部分。 棱镜和透镜的去除部分沿着带电粒子束路径排列，以允许将带电粒子束和光平行地传送到样品的基本上相同的部分。

公开(公告)号：US20100193398A1

公开(公告)日：2010-08-05

申请号：US12365698

申请日：2009-02-04

Applicant: CHARLES P. MARSH ,  ERIC OLSON ,  TODOR I. DONCHEV ,  IVAN PETROV ,  JIANGUO WEN ,  RYAN FRANKS ,  DONGXIANG LIAO

Inventor： CHARLES P. MARSH ,  ERIC OLSON ,  TODOR I. DONCHEV ,  IVAN PETROV ,  JIANGUO WEN ,  RYAN FRANKS ,  DONGXIANG LIAO

IPC: B65D85/00 ,  B23P11/00

CPC classification number: H01J37/26 ,  G02B21/34 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/28 ,  Y10T29/49826

Abstract: A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Abstract translation: 一种可重复使用的样品保持装置，用于容易地加载非常小的湿样品，以通过显微设备，特别是在真空环境中观察样品。 实施例可以用扫描电子显微镜（SEM），透射电子显微镜（TEM），X射线显微镜，光学显微镜等来使用。 为了观察样品，实施方案提供了在两个硅晶片的每一个的中心蚀刻的薄膜窗口，其邻接以将样品容纳在窗口之间形成的小的均匀间隙中。 该间隙可以通过使用间隔物来调节。 或者，通过其中包含样品的流体建立的膜的厚度确定了间隙而不需要间隔物。 为了优化分辨率，每个窗口可以具有大约50nm的厚度，并且间隙可以在50nm量级。

公开(公告)号：US20100187416A1

公开(公告)日：2010-07-29

申请号：US12725857

申请日：2010-03-17

Applicant: Toshihide AGEMURA ,  Mitsugu Sato

Inventor： Toshihide AGEMURA ,  Mitsugu Sato

IPC: H01J37/26 ,  G01N23/22

CPC classification number: G01R31/307 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/28 ,  H01J2237/2817

Abstract: In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.

Abstract translation: 在将包含精细电路线图案的样本的电特性的多个探针与带电粒子束装置组合的缺陷检查装置中，带电粒子束装置即使图像偏移为±75，也降低了分辨率的劣化 μm以上。 缺陷检查装置具有与图像移位功能相关联的CAD导航功能。 CAD导航功能在用于处理带电粒子束图像的图像处理单元和用于存储关于电路线图案的信息的存储器之间的通信中使用用于将图像移位移动量转换为DUT阶段移动量的坐标。 缺陷检查为用户提供了显着提高的可用性。

公开(公告)号：US20100148064A1

公开(公告)日：2010-06-17

申请号：US12494227

申请日：2009-06-29

Applicant: Hanno Sebastian von Harrach ,  Bert Freitag ,  Pleun Dona

Inventor： Hanno Sebastian von Harrach ,  Bert Freitag ,  Pleun Dona

IPC: G01N23/225 ,  G01T1/24

CPC classification number: H01J37/244 ,  G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/2442 ,  H01J2237/28 ,  H01J2237/2802

Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.

Abstract translation: 布置在样品室内的环中的多个检测器提供了大的立体收集角。 检测器优选地包括一个能够减少检测器上的冰的形成的快门和冷藏。 通过提供围绕样品的检测器，提供了大的立体角以用于改进的检测，并且检测X射线，而不管样品倾斜的方向如何。

公开(公告)号：US20100140473A1

公开(公告)日：2010-06-10

申请号：US12596707

申请日：2008-04-24

Applicant: Volker Klocke

Inventor： Volker Klocke

IPC: G01B21/30 ,  G01B21/20 ,  G01B5/28 ,  G01Q70/00

CPC classification number: G01Q10/02 ,  G01B21/04 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2025 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/28

Abstract: A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.

Abstract translation: 一种具有用于测量空间表面性质的测量装置的纳米机器人模块，其具有在厘米范围内的测量范围和在纳米范围内的分辨率，其可以布置在真空室中，例如显微镜的真空室中。 随着将纳米机器人模块集成到真空室中，本发明还涉及腔室系统中的模块的自动化，特别是通过提供纳米机器人系统的控制器与腔室系统之间的界面的连接 两个系统。 最后，本公开涉及一种用于在真空室内柔性固定纳米机架模块的机电一体式交换适配器，特别地，本公开涉及一种交换适配器，其优选地在一个过程中电连接纳米机架模块并机械地固定它，使得它是 引导精准，无间隙。

公开(公告)号：US07705303B2

公开(公告)日：2010-04-27

申请号：US12068789

申请日：2008-02-12

Applicant: Toshihide Agemura ,  Mitsugu Sato

Inventor： Toshihide Agemura ,  Mitsugu Sato

IPC: H01J37/304

CPC classification number: G01R31/307 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/28 ,  H01J2237/2817

Abstract: In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.

Abstract translation: 在将包含精细电路线图案的样本的电特性的多个探针与带电粒子束装置组合的缺陷检查装置中，带电粒子束装置即使图像偏移为±75，也降低了分辨率的劣化 μm以上。 缺陷检查装置具有与图像移位功能相关联的CAD导航功能。 CAD导航功能在用于处理带电粒子束图像的图像处理单元和用于存储关于电路线图案的信息的存储器之间的通信中使用用于将图像移位移动量转换为DUT阶段移动量的坐标。 缺陷检查为用户提供了显着提高的可用性。

公开(公告)号：US07700917B1

公开(公告)日：2010-04-20

申请号：US11867275

申请日：2007-10-04

Applicant: Simon Galloway ,  Richard Vince

Inventor： Simon Galloway ,  Richard Vince

IPC: H01J37/30

CPC classification number: H01J37/20 ,  H01J37/3053 ,  H01J2237/045 ,  H01J2237/206 ,  H01J2237/28 ,  H01J2237/3151 ,  H01J2237/31745

Abstract: An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.

Abstract translation: 在聚焦光束显微镜中保持待观察的样品的装置，其可以是电子显微镜或聚焦离子束显微镜。 该装置具有基座和具有第一平面中的试样安装表面和离子束筛子或刀片的试样托架。 离子束屏幕和样品托架之间的相对位置可远程调节，同时将设备安装在聚焦光束显微镜中。 在另一个实施例中，该装置可在离子束研磨装置和聚焦光束显微镜之间转移，同时铣削装置和显微镜共享共同的真空。