公开(公告)号：US20180356691A1

公开(公告)日：2018-12-13

申请号：US15562706

申请日：2017-04-01

Applicant: BOE TECHNOLOGY GROUP CO., LTD. ,  ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.

Inventor： Qiyang LI ,  Wenqiang WANG

IPC: G02F1/1337 ,  G01J4/04

CPC classification number: G02B7/00 ,  G02B27/28 ,  G02F1/1337

Abstract: A method and apparatus for adjusting polarizing plates in the preparing process of photo-alignment films are provided. The method for adjusting the polarizing plates in the preparing process of the photo-alignment films includes: allowing light emitted from a light source to travel through a first polarizing plate to form a polarized light, the first polarizing plate being a polarizing plate to be adjusted; allowing the polarized light to travel through a second polarizing plate; adjusting a direction of a transmission axis of the second polarizing plate, and measuring a light intensity of the transmitted light traveled through the second polarizing plate; and adjusting a direction of a transmission axis of the first polarizing plate according to the measured light intensity, so that the direction of the transmission axis of the first polarizing plate can be parallel to a predetermined direction

公开(公告)号：US20180351319A1

公开(公告)日：2018-12-06

申请号：US15870322

申请日：2018-01-12

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  INTERNATIONAL CENTER FOR QUANTUM OPTICS & QUANTUM TECHNOLOGIES LIMITED LIABILITY COMPANY

Inventor： Sergey Nikolaevich KOPTYAEV ,  Grigoriy Vasil'evich LIHACHEV ,  Nikolay Genad'evich PAVLOV ,  Alexey Andreevich SHCHEKIN ,  Igor Antonovich BILENKO ,  Maxim Vladimirovich RIABKO ,  Mikhael Leonidovich GORODETSKY ,  Stanislav Vladimirovich POLONSKY ,  Andrey Sergeevich VOLOSHIN ,  Alexey Dmitrievich LANTSOV ,  Anton Sergeevich MEDVEDEV ,  Valery Evgenievich LOBANOV

IPC: H01S3/108 ,  H01S3/105 ,  H01S3/083 ,  G01J3/453 ,  G01N21/21 ,  G01J4/04 ,  G02F1/35

CPC classification number: H01S3/108 ,  G01J3/453 ,  G01J4/04 ,  G01N21/21 ,  G02F1/35 ,  G02F2203/15 ,  G02F2203/56 ,  H01S3/005 ,  H01S3/083 ,  H01S3/105

Abstract: Provided is an optical source apparatus that may generate two different optical frequency combs. The optical source apparatus includes an optical resonator and a continuous wave laser emitting laser light having a spectrum component corresponding to a resonance frequency of the optical resonator, and the optical resonator is configured to generate a first frequency comb and a second frequency comb having different modes by interacting with the laser light emitted by the continuous wave laser.

公开(公告)号：US10145785B2

公开(公告)日：2018-12-04

申请号：US14906433

申请日：2014-05-13

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01N21/21 ,  G01J4/00 ,  G01J4/04

Abstract: Provided is an optical element rotation type Mueller-matrix ellipsometer for solving a problem of measurement accuracy and measurement precision occurring due to residual polarization of a light source, polarization dependence of a photo-detector, measurement values of Fourier coefficients of a high order term in dual optical element rotation type Mueller-matrix ellipsometers according to the related art capable of measuring some or all of components of a Mueller-matrix for any sample.

公开(公告)号：US10101265B1

公开(公告)日：2018-10-16

申请号：US14756345

申请日：2015-08-31

Applicant: Mathias M. Schubert ,  Tino Hofmann ,  David S. Hage ,  Erika Pfaunmiller ,  Craig M. Herzinger ,  John A. Woollam ,  Stefan Schoeche

Inventor： Mathias M. Schubert ,  Tino Hofmann ,  David S. Hage ,  Erika Pfaunmiller ,  Craig M. Herzinger ,  John A. Woollam ,  Stefan Schoeche

IPC: G01N21/21 ,  G01N21/23 ,  G01J4/04

Abstract: Ellipsometers and polarimeters or the like to investigate analyte containing fluids applied to a substrate-stage having a multiplicity of nano-structures that project non-normal to a surface thereof, including dynamics of interaction therewith, to the end of evaluating and presenting at least partial Jones or Mueller Matricies corresponding to a multiplicity of locations over an imaged area.

公开(公告)号：US20180143078A1

公开(公告)日：2018-05-24

申请号：US15873795

申请日：2018-01-17

Applicant: Apple Inc.

Inventor： Miikka M. KANGAS ,  Michael J. BISHOP ,  Robert CHEN ,  David I. SIMON ,  Harold L. SONTAG III ,  George Dee SKIDMORE

IPC: G01J5/08 ,  G01J5/20 ,  G01J4/04

CPC classification number: G01J5/0825 ,  G01J4/04 ,  G01J5/0225 ,  G01J5/0846 ,  G01J5/0853 ,  G01J5/20 ,  G01J2005/202

Abstract: This relates to sensor systems, detectors, imagers, and readout integrated circuits (ROICs) configured to selectively detect one or more frequencies or polarizations of light, capable of operating with a wide dynamic range, or any combination thereof. In some examples, the detector can include one or more light absorbers; the patterns and/or properties of a light absorber can be configured based on the desired measurement wavelength range and/or polarization direction. In some examples, the detector can comprise a plurality of at least partially overlapping light absorbers for enhanced dynamic range detection. In some examples, the detector can be capable of electrostatic tuning for one or more flux levels by varying the response time or sensitivity to account for various flux levels. In some examples, the ROIC can be capable of dynamically adjusting at least one of the frame rate integrating capacitance, and power of the illumination source.

公开(公告)号：US09976906B2

公开(公告)日：2018-05-22

申请号：US15202717

申请日：2016-07-06

Applicant: Graduate School at Shenzhen, Tsinghua University

Inventor： Hui Ma ,  Jintao Chang ,  Honghui He ,  Nan Zeng ,  Yonghong He ,  Ran Liao ,  Shuqing Sun ,  Zhenhua Chen

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04

Abstract: Disclosed are a light polarization state detection apparatus, a detection method and a light polarization state modulation method. The light polarization state detection apparatus comprises a lens with a variable birefringence feature as an optical phase modulator, a polarizer as a SOP analyzer, a plurality of common lenses and a CCD as imaging devices, and a data processing and displaying unit. The SOP detection apparatus uses wide special birefringence distribution of birefringence optical elements such as a GRIN lens to obtain the Stokes parameters of light to be measured by CCD single frame imaging, and can rapidly accurately measure the SOP. The SOP detection apparatus is simple in structure, lower in cost without containing any motion parts and electrical modulation devices, and is a fully static full Stokes parameters SOP detection apparatus.

公开(公告)号：US09952141B1

公开(公告)日：2018-04-24

申请号：US14999748

申请日：2016-06-22

Applicant: Jeffrey S. Hale ,  Craig M. Herzinger ,  Martin M. Liphardt

Inventor： Jeffrey S. Hale ,  Craig M. Herzinger ,  Martin M. Liphardt

IPC: G01N21/21 ,  G01J4/04

CPC classification number: G01N21/211 ,  G01N2201/127

Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.

公开(公告)号：US20180058934A1

公开(公告)日：2018-03-01

申请号：US15321148

申请日：2015-06-26

Applicant: University of Salford Enterprises Limited

Inventor： Tiehan SHEN ,  Paul Joseph COOK

IPC: G01J4/04 ,  G02F1/1335 ,  G02F1/01

CPC classification number: G01J4/04 ,  G01J2004/004 ,  G02F1/0136

Abstract: A method and apparatus are disclosed for measuring polarisation of electromagnetic illumination. The method includes the steps of modulating a polarisation state of illumination received from a target object to generate modulated intensity illumination, selectively measuring an intensity of the modulated intensity illumination by periodically gating an exposure of an imaging device to the modulated intensity illumination at a first gating frequency; responsive to the measured intensity, determining polarisation parameters of the received illumination, and generating image data corresponding to the target object with a plurality of the polarisation parameters, wherein the illumination from the target object is modulated in accordance with a first frequency and the first gating frequency is associated with and synchronised with at least the first frequency.

公开(公告)号：US09835495B2

公开(公告)日：2017-12-05

申请号：US14947335

申请日：2015-11-20

Applicant: Gigaphoton Inc.

Inventor： Masato Moriya ,  Osamu Wakabayashi ,  Yoshinobu Watabe

IPC: G01J11/00 ,  H01S3/134 ,  H01S3/00 ,  G01J1/42 ,  G01J1/04 ,  G01J4/04 ,  G02B5/30 ,  G02B27/14 ,  H01S3/23

CPC classification number: G01J11/00 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0477 ,  G01J1/4257 ,  G01J4/04 ,  G01J2001/4261 ,  G02B5/3066 ,  G02B27/148 ,  H01S3/0014 ,  H01S3/134 ,  H01S3/2366

Abstract: A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.

公开(公告)号：US09631979B2

公开(公告)日：2017-04-25

申请号：US14865903

申请日：2015-09-25

Applicant: Benchmark Technologies

Inventor： Yuqiang Tu ,  Patrick Reynolds

IPC: G01N21/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G03F1/44 ,  G03F7/70566 ,  G03F7/70641

Abstract: Methods and apparatus for characterizing a beam parameter associated with an electromagnetic beam of a light source. The light source exposes a phase-shifted target through a set of focal distances relative to a focal plane of a substrate. At each focal distance of the set, registration values are measured and used to determine one or more registration slopes as a function of focal distance. The registration slopes are compared with baseline registration slopes to characterize the current relative state of the beam parameter in question. Beam parameters that may be characterized in this manner include degree of polarization and polarization rotation relative to an initial polarization direction. Phase shift test patterns advantageously used for beam characterization are described.