公开(公告)号：US20180002162A1

公开(公告)日：2018-01-04

申请号：US15620619

申请日：2017-06-12

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B7/02 ,  B81B2201/014 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2207/012 ,  B81C2203/0792 ,  H01H1/0036

Abstract: A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).

公开(公告)号：US20160347605A1

公开(公告)日：2016-12-01

申请号：US14723927

申请日：2015-05-28

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B7/02 ,  B81B2201/014 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2207/012 ,  B81C2203/0792 ,  H01H1/0036

Abstract: A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).

Abstract translation: 一种利用MEMS开关技术来操作MEMS传感器的系统和/或方法。 作为非限制性示例，可以使用MEMS开关来控制施加到MEMS传感器结构的DC偏压和/或AC偏压。 也可以使用一个或多个MEMS开关来向MEMS传感器提供驱动信号（例如，向MEMS陀螺仪提供驱动信号）。

公开(公告)号：US11268976B2

公开(公告)日：2022-03-08

申请号：US15586497

申请日：2017-05-04

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: G01P15/125 ,  G01P15/08 ,  B81B3/00

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US10766764B2

公开(公告)日：2020-09-08

申请号：US16538166

申请日：2019-08-12

Applicant: INVENSENSE, INC.

Inventor： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC: B81B3/00 ,  G01P21/00 ,  G01P15/125 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/13 ,  B81C99/00

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US10571268B2

公开(公告)日：2020-02-25

申请号：US15828323

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/125 ,  G01C19/5783 ,  G01C19/5712 ,  B81B3/00

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

公开(公告)号：US10427930B2

公开(公告)日：2019-10-01

申请号：US15620619

申请日：2017-06-12

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00 ,  B81B7/02 ,  H01H1/00

Abstract: A system and/or method for utilizing microelectromechanical systems (MEMS) switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).

公开(公告)号：US20180238927A1

公开(公告)日：2018-08-23

申请号：US15586497

申请日：2017-05-04

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/0802

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US20170336205A1

公开(公告)日：2017-11-23

申请号：US15159655

申请日：2016-05-19

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5776 ,  G01P15/123 ,  G01P15/125

Abstract: A micro-electro-mechanical system includes a proof mass, an anchor, an amplifier, a sense element, a reference element, and a feedback element. The proof mass is configured to move in response to a stimulus. The anchor is coupled to the proof mass via a spring. The amplifier is configured to receive a proof mass signal from the proof mass via the spring and the anchor. The amplifier may be configured to amplify the received proof mass signal to generate an output signal. The sense element may be connected between the proof mass and a first input signal. The reference element may be connected between the anchor and a second input signal. The feedback element may be connected between the proof mass and the output signal. The feedback element and the sense element may change in response to proof mass displacement.

公开(公告)号：US09708176B2

公开(公告)日：2017-07-18

申请号：US14723927

申请日：2015-05-28

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B7/02 ,  B81B2201/014 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2207/012 ,  B81C2203/0792 ,  H01H1/0036

Abstract: A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).