Laser assembly
    16.
    发明授权

    公开(公告)号:US09705275B2

    公开(公告)日:2017-07-11

    申请号:US14237455

    申请日:2012-08-10

    Abstract: The invention relates to a laser assembly (100) having a laser (L) for generating primary laser pulses (1), beam splitting optics (15) for splitting a primary laser pulse into a plurality of temporally staggered sub-pulses, and having focusing optics (17-19) for focusing the sub-pulses in or on an object (20) so that every sub-pulse is focused in a separate focus volume (F). The invention is characterized in that the mutual spatial and/or temporal relationship of the focus volumes (F) of the sub-pulses originating from a common primary laser pulse is variably adjustable. The invention also relates to a corresponding method.

    ARRAY OF ENCODERS FOR ALIGNMENT MEASUREMENT
    17.
    发明申请

    公开(公告)号:US20170097574A1

    公开(公告)日:2017-04-06

    申请号:US15283669

    申请日:2016-10-03

    Abstract: System and method for accurately measuring alignment of every exposure field on a pre-patterned wafer without reducing wafer-exposure throughput. Diffraction grating disposed in scribe-lines of such wafer, used as alignment marks, and array of encoder-heads (each of which is configured to define positional phase(s) of at least one such alignment mark) are used. Determination of trajectory of a wafer-stage scanning during the wafer-exposure in the exposure tool employs determining in-plane coordinates of such spatially-periodic alignment marks by simultaneously measuring position-dependent phases of signals produced by these marks as a result of recombination of light corresponding to different diffraction orders produced by these marks. Measurements may be performed simultaneously at all areas corresponding to at least most of the exposure fields of the wafer, and/or with use of a homodyne light source, and/or in a wavelength-independent fashion, and/or with a pre-registration process allowing for accommodation of wafers with differently-dimensioned exposure fields.

    Solar simulator light-amount evaluation apparatus, solar simulator light-amount evaluation method, solar cell evaluation apparatus, and solar cell evaluation method
    18.
    发明授权
    Solar simulator light-amount evaluation apparatus, solar simulator light-amount evaluation method, solar cell evaluation apparatus, and solar cell evaluation method 有权
    太阳能模拟器光量评估装置,太阳能模拟器光量评估方法,太阳能电池评估装置和太阳能电池评估方法

    公开(公告)号:US09513159B2

    公开(公告)日:2016-12-06

    申请号:US13634272

    申请日:2011-02-18

    CPC classification number: G01J1/08 F21S8/006 G01J1/32 H02S50/10

    Abstract: The provided solar simulator light-intensity evaluation apparatus and method can evaluate the characteristics of a solar cell in an arbitrary place at an arbitrary time and date, using an existing solar simulator, as follows: an estimated spectral irradiance of the natural sunlight is calculated under a measurement condition including a place and/or a time and date where and when the solar cell is measured; and an target value of adjustment and estimated light amount value of the solar simulator are calculated under the measurement condition, on the basis of the estimated spectral irradiance having been calculated, the spectral irradiance of the solar simulator, and solar cell information including a spectral sensitivity of the solar cell.

    Abstract translation: 所提供的太阳模拟器光强度评估装置和方法可以使用现有的太阳模拟器在任意时间和日期任意地评估太阳能电池的特性,如下:计算自然阳光的估计光谱辐照度 包括测量太阳能电池的地点和/或时间和日期的测量条件; 并且在测量条件下,基于所计算的估计光谱辐照度,太阳模拟器的光谱辐照度和包括光谱灵敏度的太阳能电池信息,计算太阳模拟器的调整和估计光量值的目标值 的太阳能电池。

    Optical filtering system for solar cell testing
    19.
    发明授权
    Optical filtering system for solar cell testing 有权
    太阳能电池测试光滤波系统

    公开(公告)号:US09500341B2

    公开(公告)日:2016-11-22

    申请号:US14279423

    申请日:2014-05-16

    Abstract: A method and apparatus for simulating light. A first light from a first filterer is output to a solar cell. The first light output by the first filterer has a coarse spectrum that simulates the light in a selected environment. A second light from a second filterer is output to the solar cell while the first light is output by the first filterer. The second light output by the second filterer has a fine spectrum selected for a group of junctions in the solar cell.

    Abstract translation: 一种用于模拟光的方法和装置。 来自第一过滤器的第一光被输出到太阳能电池。 第一滤光器的第一个光输出具有模拟所选环境中的光的粗光谱。 来自第二过滤器的第二个光被输出到太阳能电池,而第一个光由第一个过滤器输出。 由第二滤光器输出的第二光具有为太阳能电池中的一组连接点选择的精细光谱。

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