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    Defect inspection device and defect inspection method
    11.
    发明授权
    Defect inspection device and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号：US09568439B2

    公开(公告)日：2017-02-14

    申请号：US15088673

    申请日：2016-04-01

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshifumi Honda ,  Yuta Urano ,  Takahiro Jingu ,  Akira Hamamatsu

    IPC: G01N21/00 ,  G01N21/95 ,  G01N21/956 ,  G01J1/04

    CPC classification number: G01N21/8806 ,  G01J1/0474 ,  G01J1/44 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/12

    Abstract: To detect an infinitesimal defect, highly precisely measure the dimensions of the detect, a detect inspection device is configured to comprise: a irradiation unit which irradiate light in a linear region on a surface of a sample; a detection unit which detect light from the linear region; and a signal processing unit which processes a signal obtained by detecting light and detecting a defect. The detection unit includes: an optical assembly which diffuses the light from the sample in one direction and forms an image in a direction orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the light diffused in the one direction and imaged in the direction orthogonal to the one direction, adds output signals of each of the detection pixels aligned in the direction in which the light is diffused, and outputs same.

    Abstract translation: 为了检测无限小的缺陷，高度精确地测量检测器的尺寸，检测检查装置被配置为包括：照射单元，其照射样品表面上的线性区域中的光; 检测单元，其检测来自所述线性区域的光; 以及处理通过检测光而获得的信号并检测缺陷的信号处理单元。 检测单元包括：光学组件，其在一个方向上扩散来自样品的光并在与该一个方向正交的方向上形成图像; 以及检测组件，其具有阵列传感器，其中检测像素被二维地定位，其检测沿与所述一个方向正交的方向成像的沿所述一个方向扩散的光，并将每个所述检测像素的输出信号相加 光漫射的方向，并输出。

    Monitoring laser processing of semiconductors by raman spectroscopy
    14.
    发明授权
    Monitoring laser processing of semiconductors by raman spectroscopy 有权
    通过拉曼光谱法监测半导体的激光加工

    公开(公告)号：US09508608B2

    公开(公告)日：2016-11-29

    申请号：US14305435

    申请日：2014-06-16

    Applicant: Applied Materials, Inc.

    Inventor： Jiping Li

    IPC: G01R31/26 ,  H01L21/66 ,  G01N21/65 ,  H01L21/67

    CPC classification number: H01L22/12 ,  G01N21/65 ,  G01N2201/0697 ,  H01L21/67115 ,  H01L21/67253 ,  H01L22/26

    Abstract: A Raman probe is used to detect crystal structure of a substrate undergoing thermal processing in a thermal processing system. The Raman probe may be coupled to a targeting system of a laser thermal processing system. The Raman probe includes a laser positioned to direct probe radiation through the targeting system to the substrate, a receiver attuned to Raman radiation emitted by the substrate, and a filter that blocks laser radiation reflected by the substrate. The Raman probe may include more than one laser, more than one receiver, and more than one filter. The Raman probe may provide more than one wavelength of incident radiation to probe the substrate at different depths.

    Abstract translation: 拉曼探头用于检测在热处理系统中进行热处理的衬底的晶体结构。 拉曼探针可以耦合到激光热处理系统的靶向系统。 拉曼探针包括激光器，其定位成将探针辐射通过靶向系统引导到衬底，接收器接合由衬底发射的拉曼辐射，以及滤光器，其阻挡由衬底反射的激光辐射。 拉曼探头可以包括多于一个的激光器，多于一个接收器和多于一个的滤光器。 拉曼探头可以提供多于一个的入射辐射波长来探测不同深度的基底。

    Pulsed laser induced plasma light source
    15.
    发明授权
    Pulsed laser induced plasma light source 有权
    脉冲激光诱导等离子体光源

    公开(公告)号：US09506871B1

    公开(公告)日：2016-11-29

    申请号：US14578949

    申请日：2014-12-22

    Applicant: KLA-Tencor Corporation

    Inventor： Klaus Flock

    IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  F21K99/00 ,  H05H1/46 ,  G02B27/09

    CPC classification number: G01N21/8806 ,  F21K99/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/0697 ,  G02B27/09 ,  H05H1/46

    Abstract: Methods and systems are described herein for producing high radiance illumination light suitable for semiconductor metrology. A cold gas is repeatedly ignited by a pulsed laser to periodically generate accessible, high brightness illumination light generated during each break-down event. The pulse duration and repetition period are set to ignite, but not sustain fully formed plasma. The central plasma core emits high color temperature light before a cooler plasma region forms around the central core. Thus, after ignition, the plasma is extinguished before the arrival of the next laser pulse. The repeated plasma ignition/extinction cycle generates illumination light at high color temperature that is accessible for illumination purposes in a metrology application. In one embodiment, a bulb filled with Xenon gas at 10 atmospheres is repeatedly ignited with a pulsed laser having pulse duration of 10 nanoseconds to generate illumination light with a color temperature of approximately 60,000 Kelvin.

    Abstract translation: 本文描述了用于生产适用于半导体计量学的高辐射照明光的方法和系统。 冷气通过脉冲激光反复点燃，以周期性地产生在每个故障事件期间产生的可接近的高亮度照明光。 脉冲持续时间和重复周期设置为点燃，但不能维持完全形成的等离子体。 中央等离子体核发射高色温，然后在中心芯周围形成较冷的等离子体区域。 因此，在点火之后，等离子体在下一个激光脉冲到达之前熄灭。 重复的等离子体点火/消光循环产生在高色温下的照明光，其在计量应用中可用于照明目的。 在一个实施例中，用脉冲持续时间为10纳秒的脉冲激光反复点燃在10个大气压下填充有氙气体的灯泡，以产生色温约为60,000开尔文的照明光。

    Handheld laser induced breakdown spectroscopy device
    16.
    发明授权
    Handheld laser induced breakdown spectroscopy device 有权
    手持激光诱导击穿光谱装置

    公开(公告)号：US09506869B2

    公开(公告)日：2016-11-29

    申请号：US14514294

    申请日：2014-10-14

    Applicant: TSI, Incorporated

    Inventor： Frederick Quant ,  Kenneth R. Farmer ,  Phillip V. Tan ,  Christopher B. Stipe ,  Steven G. Buckley ,  Erik Stockinger ,  Daniel Jensen

    IPC: G01N21/71 ,  G01J3/443 ,  G01J3/02 ,  G01J3/18

    CPC classification number: G01N21/718 ,  G01J3/0221 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/443 ,  G01J2003/1861 ,  G01N2201/0221 ,  G01N2201/0697

    Abstract: A novel device, method and systems disclosed managing the thermal challenges of LIBS laser components and a spectrometer in a handheld structure as well the use of simplified light signal collection which includes a bare fiber optic to collect the emitted light in close proximity to (or in contact with) the test material. In one example embodiment of the handheld LIBS device, a burst pulse frequency is 4 kHz is used resulting in a time between pulses of about 250 μs which is a factor of 10 above that of other devices in the prior art. In a related embodiment, an active Q-switched laser module is used along with a compact spectrometer module using a transmission grating to improve LIBS measurement while substantially reducing the size of the handheld analyzer.

    Abstract translation: 公开了一种新颖的装置，方法和系统，其管理LIBS激光组件和光谱仪在手持式结构中的热挑战，以及使用简化的光信号采集，其包括裸光纤以收集靠近（或 接触）测试材料。 在手持式LIBS装置的一个示例性实施例中，突发脉冲频率为4kHz，导致约250μs的脉冲之间的时间，这是现有技术中其他装置的10倍之多。 在相关实施例中，使用有源Q开关激光模块以及使用传输光栅的紧凑型光谱仪模块来改善LIBS测量，同时显着减小手持式分析仪的尺寸。

    Laser scanning type observation apparatus having a delay circuit unit, a multi-stage delay setting unit and a decision unit
    17.
    发明授权
    Laser scanning type observation apparatus having a delay circuit unit, a multi-stage delay setting unit and a decision unit 有权
    具有延迟电路单元，多级延迟设定单元和决定单元的激光扫描型观察装置

    公开(公告)号：US09347871B2

    公开(公告)日：2016-05-24

    申请号：US14458474

    申请日：2014-08-13

    Applicant: OLYMPUS CORPORATION

    Inventor： Ken Fujinuma ,  Shintaro Takahashi

    IPC: G02B21/00 ,  G01N21/17 ,  G02B23/24 ,  G02B21/16 ,  G01J1/44 ,  G01J1/42

    CPC classification number: G01N21/17 ,  G01J1/44 ,  G01J2001/4242 ,  G01N2201/06113 ,  G01N2201/0697 ,  G02B21/002 ,  G02B21/0084 ,  G02B21/16 ,  G02B23/24

    Abstract: A laser scanning type observation apparatus includes a pulsed-laser oscillation means irradiating pulsed laser to an object, a detector receiving light from the object to output a detection signal, a means detecting pulsed-laser oscillation to output a synchronous signal, a circuit delaying the synchronous signal for an optional amount of time to output a trigger signal, a means sampling the detection signal in synchronization with the trigger signal, a memory storing the sampled detection signal, a setting unit capable of setting delay time for delaying the synchronous signal in two or more stages within one period of the synchronous signal, and a decision unit determining an optimum delay stage for image formation using data on intensities of the detection signal at the respective delay stages, wherein the setting means fixes delay time for delaying the synchronous signal at delay time corresponding to the delay stage determined by the decision unit.

    Abstract translation: 激光扫描型观察装置包括将物体照射脉冲激光的脉冲激光振荡装置，从物体接收光以输出检测信号的检测器，检测脉冲激光振荡以输出同步信号的装置，延迟电路 同步信号，用于输出触发信号的可选择的时间量，与触发信号同步地对检测信号进行采样的装置;存储采样检测信号的存储器;能够设置用于延迟同步信号的延迟时间的设置单元 或同步信号的一个周期内的多个阶段，以及判定单元，使用关于各个延迟级的检测信号的强度的数据，确定用于图像形成的最佳延迟级，其中，所述设定单元固定用于将同步信号延迟的延迟时间 延迟时间对应于由判定单元确定的延迟级。

    Inspection Lamp Having Reduction of Speckle of Laser Light
    19.
    发明申请
    Inspection Lamp Having Reduction of Speckle of Laser Light 审中-公开
    检查灯减少了激光的斑点

    公开(公告)号：US20160123885A1

    公开(公告)日：2016-05-05

    申请号：US14930466

    申请日：2015-11-02

    Applicant: Brasscorp Limited

    Inventor： Donald L. Klipstein

    IPC: G01N21/64 ,  G01M3/20

    CPC classification number: G01N21/6447 ,  G01M3/20 ,  G01N2201/0612 ,  G01N2201/0697

    Abstract: An inspection lamp for detection of fluorescent materials, such as dyes often added to refrigerant fluids for the purpose of detecting leaks. Multiple aspects of reducing a distracting speckle effect are described. For example, at least two aspects are combined. One speckle reduction aspect uses a diffuser. A second speckle reduction aspect is achieved by a laser device such as a laser diode that simultaneously outputs a large number of individual wavelengths across a significant bandwidth. A third aspect of despeckling the laser light includes vibrating or rotating optical components. A fourth aspect of despeckling includes fluorescence and broadband radiation from the laser being more visible through suitable eyewear than the laser radiation.

    Abstract translation: 用于检测荧光材料的检查灯，例如常常添加到制冷剂流体中以用于检测泄漏的染料。 描述减少散焦斑点效应的多个方面。 例如，至少两个方面相结合。 一个散斑减少方面使用扩散器。 通过诸如激光二极管的激光器件实现第二散斑方面，其同时在显着带宽上输出大量单个波长。 去激光的第三方面包括振动或旋转的光学部件。 去斑的第四个方面包括来自激光的荧光和宽带辐射通过合适的眼镜比激光辐射更可见。

    Defect inspection device and defect inspection method
    20.
    发明授权
    Defect inspection device and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号：US09329136B2

    公开(公告)日：2016-05-03

    申请号：US14396908

    申请日：2013-04-24

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshifumi Honda ,  Yuta Urano ,  Takahiro Jingu ,  Akira Hamamatsu

    IPC: G01N21/00 ,  G01N21/95 ,  G01N21/956 ,  G01J1/04

    CPC classification number: G01N21/8806 ,  G01J1/0474 ,  G01J1/44 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/12

    Abstract: To detect an infinitesimal defect, highly precisely measure the dimensions of the detect, a detect inspection device is configured to comprise: a irradiation unit which irradiate light in a linear region on a surface of a sample; a detection unit which detect light from the linear region; and a signal processing unit which processes a signal obtained by detecting light and detecting a defect. The detection unit includes: an optical assembly which diffuses the light from the sample in one direction and forms an image in a direction orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the light diffused in the one direction and imaged in the direction orthogonal to the one direction, adds output signals of each of the detection pixels aligned in the direction in which the light is diffused, and outputs same.

    Abstract translation: 为了检测无限小的缺陷，高度精确地测量检测器的尺寸，检测检查装置被配置为包括：照射单元，其照射样品表面上的线性区域中的光; 检测单元，其检测来自所述线性区域的光; 以及处理通过检测光而获得的信号并检测缺陷的信号处理单元。 检测单元包括：光学组件，其在一个方向上扩散来自样品的光并在与该一个方向正交的方向上形成图像; 以及检测组件，其具有阵列传感器，其中检测像素被二维地定位，其检测沿与所述一个方向正交的方向成像的沿所述一个方向漫射的光，并将每个所述检测像素的输出信号相加， 光漫射的方向，并输出。

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