公开(公告)号：US06327339B1

公开(公告)日：2001-12-04

申请号：US09450477

申请日：1999-11-29

Applicant: Kie Hyung Chung ,  Kang Ok Lee ,  Hyeok Jung Kwon ,  Sang Ho Kim

Inventor： Kie Hyung Chung ,  Kang Ok Lee ,  Hyeok Jung Kwon ,  Sang Ho Kim

IPC: H05H1310

CPC classification number: G21K5/04 ,  H01J33/00 ,  H01J35/14 ,  H01J2235/083 ,  H01J2235/1006 ,  H05H7/18

Abstract: An industrial X-ray/electron beam source includes an accelerator having a) a coaxial cavity b) an electron gun for emitting an electron beam to be accelerated, c) at least one deflection magnet positioned outside of the cavity, and d) a radio frequency power supply means for supplying power of a radio frequency to the cavity to induce TM010 mode as an accelerating mode in the cavity; and a beam irradiator having a two-dimensional scanning magnet which deflects accelerated beam by the accelerator, an extracting window for extracting the deflected electron beam to be irradiated to an object, and means for guiding the deflected beam toward a center of the extracting window in a radial direction. The source is advantageous in that the electron beams do not intersect inside the cavity, which can reduce beam loss, and that beams or X-rays are irradiated to the object spatially uniformly.

Abstract translation: 工业X射线/电子束源包括加速器，该加速器具有a）同轴腔体b）用于发射加速电子束的电子枪，c）位于空腔外部的至少一个偏转磁体，以及d）无线电 高频电源装置，用于向空腔提供射频的功率，以引导TM010模式作为腔中的加速模式; 以及具有二维扫描磁体的光束照射器，其使由加速器偏转加速光束，用于提取被照射到物体的偏转电子束的提取窗口，以及用于将偏转光束朝向提取窗口的中心引导的装置 径向。 该源的优点在于电子束在空腔内不相交，这可以减少光束损耗，并且将光束或X射线在空间上均匀地照射到物体上。

公开(公告)号：US20180033579A1

公开(公告)日：2018-02-01

申请号：US15717364

申请日：2017-09-27

Applicant: NIKON METROLOGY NV

Inventor： Roger HADLAND

IPC: H01J35/02 ,  H01J29/48 ,  F16C35/04 ,  F16C33/76 ,  F16J15/16 ,  H05G1/12 ,  H02M7/10 ,  H01J35/10 ,  H01J35/04 ,  H01J35/16 ,  H02M1/32

CPC classification number: H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/087 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

公开(公告)号：US20170213686A1

公开(公告)日：2017-07-27

申请号：US15312948

申请日：2015-07-13

Applicant: CANON KABUSHIKI KAISHA

Inventor： YASUO OHASHI ,  KAZUYUKI UEDA

IPC: H01J35/08 ,  G01N23/04

CPC classification number: H01J35/08 ,  G01N23/04 ,  H01J35/116 ,  H01J35/186 ,  H01J2235/083

Abstract: A thickness of a bonding material (8) is varied in a radial direction orthogonal to a central axis (P) of the tubular anode member (6), the bonding material (8) being used for bonding a transmitting substrate (7) for supporting a target layer (9) and a tubular anode member (6) in a direction along the central axis (P). Thus, a region in which a circumferential tensile stress of the bonding material (8) is alleviated is formed in the direction along the central axis (P) to prevent a crack from developing in the bonding material (8).

公开(公告)号：US09589759B2

公开(公告)日：2017-03-07

申请号：US14614781

申请日：2015-02-05

Applicant: SHIMADZU CORPORATION

Inventor： Akihiro Miyaoka

IPC: H01J35/02 ,  H01J35/16 ,  H01J1/88 ,  H01J19/56 ,  H01J37/16 ,  H05G1/04 ,  A61B6/00 ,  H01J5/02 ,  H01J1/40 ,  H01J5/04 ,  H01J35/04 ,  H05G1/02 ,  H01J35/14 ,  H01J35/28

CPC classification number: H01J35/16 ,  A61B6/40 ,  A61B6/44 ,  A61B2560/0406 ,  H01J1/40 ,  H01J1/88 ,  H01J5/02 ,  H01J5/04 ,  H01J19/56 ,  H01J35/02 ,  H01J35/04 ,  H01J35/14 ,  H01J35/28 ,  H01J37/16 ,  H01J2235/083 ,  H01J2235/087 ,  H01J2235/16 ,  H01J2235/163 ,  H01J2235/186 ,  H05G1/02 ,  H05G1/04

Abstract: An X-ray generator is provided using a transmission type target having a long life span, where it is possible to change the point for generating X-rays on the surface of the target while maintaining the vacuum chamber in a high vacuum state. A portion of a vacuum chamber 1 that includes a target 2 is linked to a main body portion 1a of the chamber through a linking member 5 as a movable chamber portion 1b. A fixed anode 12 is provided between the target 2 and the electrode 10 at the final stage from among a group of electrodes 8, 9 and 10 for electrostatically accelerating and converging electrons from an electron source 7 and is fixed to the main body portion 1a of the chamber in order to prevent the form of the electrical field from changing when the movable chamber portion 1b is shifted.

Abstract translation: 使用寿命长的透射型靶设置X射线发生器，能够在将真空室保持在高真空状态的同时，改变在靶表面产生X射线的点。 包括目标2的真空室1的一部分通过作为可移动室部分1b的连接构件5连接到室的主体部分1a。 在一组电极8,9和10之间，在靶2和电极10之间设置固定阳极12，用于从电子源7静电加速和会聚电子，并固定到电极10的主体部分1a 该室为了防止当可动室部分1b移动时电场的形式改变。

公开(公告)号：US09263225B2

公开(公告)日：2016-02-16

申请号：US13054066

申请日：2009-07-15

Applicant: Edward James Morton ,  Russell David Luggar ,  Martin Hunt

Inventor： Edward James Morton ,  Russell David Luggar ,  Martin Hunt

IPC: H01J35/12 ,  H01J35/08

CPC classification number: H01J35/12 ,  H01J35/08 ,  H01J2235/081 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/1204 ,  H01J2235/1262

Abstract: An anode for an X-ray tube includes at least one thermally conductive anode segment in contact with a rigid support member and cooling means arranged to cool the anode. The anode may further include a plurality of anode segments aligned end to end, each in contact with the support member.

Abstract translation: 用于X射线管的阳极包括与刚性支撑构件接触的至少一个导热阳极段和布置成冷却阳极的冷却装置。 阳极可以进一步包括多个阳极段，其端对端排列，每个阳极段与支撑构件接触。

公开(公告)号：US09159524B2

公开(公告)日：2015-10-13

申请号：US14055453

申请日：2013-10-16

Applicant: RIGAKU CORPORATION

Inventor： Martin Horvarth ,  Jiri Marsik ,  Ladislav Pina ,  Vaclav Jelinek ,  Naohisa Osaka ,  Kazuhiko Omote ,  Makoto Kambe ,  Licai Jiang ,  Bonglea Kim

IPC: H01J35/14

CPC classification number: H01J35/14 ,  H01J2235/081 ,  H01J2235/083

Abstract: The X-ray generating apparatus 100 applies an electron beam e1 onto a target 150 to generate X-rays x1, and includes a permanent magnet lens 120 configured to focus the electron beam e1, a correction coil 130 provided on a side of the electron beam e1 with respect to the permanent magnet lens 120 and configured to correct a focus position formed by the permanent magnet lens 120 in a traveling direction of the electron beam e1, and a target 150 onto which the focused electron beam is applied. Accordingly, the apparatus configuration can be extremely compact and lightweight in comparison with general apparatuses. Furthermore, by the correction coil 130, the intensity of the magnetic field can be finely adjusted and the focus position in the traveling direction of the electron beam e1 can be finely adjusted.

Abstract translation: X射线产生装置100将电子束e1施加到靶150上以产生X射线x1，并且包括被配置为聚焦电子束e1的永磁体透镜120，设置在电子束侧的校正线圈130 e1相对于永磁体透镜120，并且被配置为在电子束e1的行进方向上校正由永久磁铁透镜120形成的聚焦位置，以及被施加聚焦电子束的目标150。 因此，与一般装置相比，装置结构可以非常紧凑和重量轻。 此外，通过校正线圈130，可以精细地调节磁场的强度，并且可以精细地调整电子束e1的行进方向上的聚焦位置。

公开(公告)号：US20140334606A1

公开(公告)日：2014-11-13

申请号：US14360706

申请日：2012-11-22

Applicant: PLANSEE SE

Inventor： Thomas Mueller ,  Klaus Ennemoser ,  Wolfgang Glatz ,  Andreas Menhard

IPC: H01J35/10 ,  H01J9/18

CPC classification number: H01J35/108 ,  B23K1/0008 ,  B23K1/19 ,  B23K35/005 ,  B23K35/32 ,  B23K35/325 ,  B23K2103/16 ,  C04B37/026 ,  C04B2235/6562 ,  C04B2235/6581 ,  C04B2235/661 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/36 ,  C04B2237/363 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/38 ,  C04B2237/385 ,  C04B2237/403 ,  C04B2237/52 ,  C04B2237/55 ,  C04B2237/62 ,  C04B2237/708 ,  C04B2237/72 ,  H01J1/36 ,  H01J1/44 ,  H01J35/10 ,  H01J2235/083

Abstract: A high-temperature-resistant composite body is formed by joining over an area of a first, nonmetallic section via a bonding solder layer to a second, metallic section composed of Mo, an Mo-based alloy, W or a W-based alloy. A first arrangement composed of the first section, a first Zr solder and an intermediate layer is firstly soldered together in a first soldering step. A second arrangement of the resulting partial composite body, a second solder adjoining the intermediate layer and the second section is subsequently soldered together in a second soldering step. The intermediate layer at least 90 atom % of at least one of the elements Ta, Nb, W. The second solder is formed by precisely one material selected from Ti, Ti-based solder combination, V-based solder combination, Zr or Zr-based solder combination and it melts at a lower temperature than the first Zr solder in the second arrangement.

Abstract translation: 通过接合焊料层将第一非金属部分的区域接合到由Mo，Mo基合金，W或W基合金构成的第二金属部分上，形成耐高温复合体。 在第一焊接步骤中首先将由第一部分，第一Zr焊料和中间层构成的第一布置在一起。 所得部分复合体的第二布置，邻接中间层和第二部分的第二焊料随后在第二焊接步骤中焊接在一起。 中间层至少为90原子％的元素Ta，Nb，W中的至少一种。第二焊料通过精确地选自Ti，Ti基焊料组合，V族焊料组合，Zr或Zr- 并且在第二配置中在比第一Zr焊料更低的温度下熔化。

公开(公告)号：US08699667B2

公开(公告)日：2014-04-15

申请号：US12640323

申请日：2009-12-17

Applicant: Gregory Alan Steinlage ,  Marshall Gordon Jones ,  Donald Robert Allen

Inventor： Gregory Alan Steinlage ,  Marshall Gordon Jones ,  Donald Robert Allen

IPC: H01J35/08 ,  H01J35/10 ,  G21G4/00 ,  H05G1/02

CPC classification number: H01J35/108 ,  C23C26/02 ,  H01J35/08 ,  H01J35/10 ,  H01J37/305 ,  H01J2235/081 ,  H01J2235/083 ,  H01J2235/085 ,  H01J2235/088

Abstract: A system for applying a target track material to an x-ray tube target includes a controller configured to direct a beam of energy toward an x-ray tube target, and direct a solid stock material toward the beam of energy to cause the solid stock material to melt and deposit as a melted material on the x-ray tube target.

Abstract translation: 用于将目标轨道材料施加到X射线管靶的系统包括：控制器，其被配置为将能量束引向X射线管靶，并将固体原料朝向能量束引导以使固体原料 以熔融材料的形式熔化和沉积在X射线管靶上。

公开(公告)号：US08654928B2

公开(公告)日：2014-02-18

申请号：US13353540

申请日：2012-01-19

Applicant: Gregory Alan Steinlage ,  Michael Scott Hebert

Inventor： Gregory Alan Steinlage ,  Michael Scott Hebert

IPC: H01J35/10 ,  H01J35/08

CPC classification number: H01J35/10 ,  H01J2235/083

Abstract: A target for generating x-rays includes a target substrate comprising molybdenum and having a beveled surface according to a desired track angle, a track comprising tungsten and configured to generate x-rays from high-energy electrons impinging thereon, wherein the track comprises a brazing surface having an area that is less than an area of the beveled surface of the target substrate, and a braze joint attaching the brazing surface of the track to the beveled surface of the target substrate.

Abstract translation: 用于产生x射线的目标包括包含钼并且具有根据期望轨道角度的倾斜表面的目标衬底，包括钨的轨道并且被配置为从其上撞击的高能电子产生x射线，其中轨道包括钎焊 表面具有小于目标基板的斜面的面积的面积，以及将导轨的钎焊表面附着到目标基板的斜面的钎焊接头。

公开(公告)号：US20130308754A1

公开(公告)日：2013-11-21

申请号：US13869666

申请日：2013-04-24

Applicant: CANON KABUSHIKI KAISHA

Inventor： Koji Yamazaki ,  Miki Tamura

IPC: H01J35/08 ,  G01N23/04

CPC classification number: H01J35/08 ,  G01N23/04 ,  H01J35/116 ,  H01J2235/08 ,  H01J2235/081 ,  H01J2235/083 ,  H01J2235/084 ,  H01J2235/088

Abstract: The present invention provides a transmission type radiation generating target which can suppress the exfoliation or the crack of a target layer in an interface between a supporting substrate and the target layer, even when the density of incident electrons has been enhanced or the potential of the target has been enhanced. The transmission type radiation generating target includes a supporting substrate, and a target layer which is arranged on the supporting substrate and generates radiation in response to irradiation with an electron beam, wherein the target layer has an opening through which the supporting substrate is exposed, and the opening overlaps with a position at which the density of the irradiation with the electron beam is maximum.

Abstract translation: 本发明提供一种能够抑制支撑基板与目标层之间的界面中的目标层的剥离或裂纹的透射型发射靶，即使当入射电子的密度增加或靶的电位 已得到加强。 透射型辐射产生靶包括支撑衬底和布置在支撑衬底上并且响应于电子束照射产生辐射的靶层，其中目标层具有支撑衬底暴露的开口，以及 开口与电子束的照射密度最大的位置重叠。