Prism-coupling stress meter with wide metrology process window

    公开(公告)号:US10732059B2

    公开(公告)日:2020-08-04

    申请号:US16371517

    申请日:2019-04-01

    Abstract: The prism-coupling systems and methods include using a prism-coupling system to collect initial TM and TE mode spectra of a chemically strengthened article having a refractive index profile with a near-surface spike region and a deep region. The initial TM and TE mode spectra are examined to see if they fall within a preferred measurement window that can produce an accurate estimate of the knee stress to within a select tolerance. If not, then measurement configuration of the prism-coupling system is changed and new TM and TE mode spectra are collected. This process is repeated until the new TM and TE mode spectra fall within the preferred measurement window. The new TM and TE mode spectra are then used to determine the knee stress. Changing the measurement configuration can include changing at least one of the measurement wavelength, interfacing fluid thickness and interfacing fluid refractive index.

    Method and apparatus for transforming uniformly or non-uniformly sampled interferograms to produce spectral data

    公开(公告)号:US10663346B2

    公开(公告)日:2020-05-26

    申请号:US15858338

    申请日:2017-12-29

    Inventor: Alex Hegyi

    Abstract: A reconstruction matrix used for calculating a hyperspectral data-cube includes rows of periodic functions. Each row of the reconstruction matrix corresponds to a selected wavelength and each column corresponds to a selected retardance of an interferometer. The periodic functions have as a parameter the selected wavelength of the corresponding row and are sampled at the selected retardances of each of the corresponding columns. An interferogram data-cube is obtained and includes an array of one or more simultaneously measured interferograms. Each row of the interferogram data-cube corresponds to one of the selected retardances and each column corresponds to a different interferogram from the simultaneously measured interferograms. A set of matrix-vector products for each of the interferograms is formed by multiplying the reconstruction matrix with a column of the interferogram data-cube to form the hyperspectral data-cube.

    PRISM-COUPLING STRESS METER WITH WIDE METROLOGY PROCESS WINDOW

    公开(公告)号:US20190301952A1

    公开(公告)日:2019-10-03

    申请号:US16371517

    申请日:2019-04-01

    Abstract: The prism-coupling systems and methods include using a prism-coupling system to collect initial TM and TE mode spectra of a chemically strengthened article having a refractive index profile with a near-surface spike region and a deep region. The initial TM and TE mode spectra are examined to see if they fall within a preferred measurement window that can produce an accurate estimate of the knee stress to within a select tolerance. If not, then measurement configuration of the prism-coupling system is changed and new TM and TE mode spectra are collected. This process is repeated until the new TM and TE mode spectra fall within the preferred measurement window. The new TM and TE mode spectra are then used to determine the knee stress. Changing the measurement configuration can include changing at least one of the measurement wavelength, interfacing fluid thickness and interfacing fluid refractive index.

    Pulsed light waveform measurement method and waveform measurement device

    公开(公告)号:US10378964B2

    公开(公告)日:2019-08-13

    申请号:US16088875

    申请日:2017-03-15

    Abstract: In a waveform measurement method, first, initial pulsed light is spatially dispersed for respective wavelengths. Next, the initial pulsed light is input to a polarization dependent type SLM in a state where a polarization plane is inclined with respect to a modulation axis direction, and a phase spectrum of a first polarization component of the initial pulsed light along the modulation axis direction is modulated, to cause a time difference between first pulsed light Lp1 including the first polarization component and second pulsed light Lp2 including a second polarization component orthogonal to the first polarization component. After combining the wavelength components, an object is irradiated with the pulsed light Lp1 and the pulsed light Lp2, and light generated in the object is detected. The above detection operation is performed while changing the time difference, and a temporal waveform of the pulsed light Lp1 is obtained.

    IMAGING DEVICE AND IMAGING METHOD
    20.
    发明申请

    公开(公告)号:US20190170586A1

    公开(公告)日:2019-06-06

    申请号:US16302400

    申请日:2017-08-09

    Abstract: There is provided an imaging device including: an imaging section including pixels that generate pixel signals on the basis of incident light, the pixels including a polarization pixel having a predetermined polarization direction and a non-polarization pixel; and a polarization rotating section provided on an incidence plane side of the imaging section, and configured to rotate a polarization direction of the incident light.

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