公开(公告)号：US20230019665A1

公开(公告)日：2023-01-19

申请号：US17865559

申请日：2022-07-15

Applicant: Infineon Technologies Austria AG

Inventor： Clemens Roessler ,  Thomas Ostermann ,  Norbert Rieser ,  Johanna Elisabeth Roessler ,  Siegfried Schmid ,  Walter Slamnig

IPC: G01R31/66 ,  H01J3/40 ,  G01R27/02

Abstract: A device for controlling trapped ions includes a substrate. An electrode structure is disposed on the substrate, the electrode structure including DC electrodes and RF electrodes of an ion trap configured to trap ions in a space above the substrate. A first device terminal is disposed on the substrate, the first device terminal being connected via a first electrode connection line to a specific DC electrode. Further, a second device terminal is disposed on the substrate, the second device terminal being connected via a second electrode connection line to the specific DC electrode.

公开(公告)号：US07982182B2

公开(公告)日：2011-07-19

申请号：US12472899

申请日：2009-05-27

Applicant: Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masayuki Sugiyama

Inventor： Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masayuki Sugiyama

IPC: H01J49/00 ,  H01J3/40

CPC classification number: H01J49/4295

Abstract: The present invention relates to an ion trap with a large trap capacity. A mass spectrometer comprises a first linear ion trap that performs mass selective ejection, and a second linear ion trap that accumulates and then mass selectively ejects ions ejected from the first linear ion trap. Directions of resonant excitation of ions of the first linear ion trap and of the second linear ion trap are orthogonal. Compared to conventional art, sensitivity is significantly improved.

Abstract translation: 本发明涉及具有大的捕集能力的离子阱。 质谱仪包括执行质量选择性喷射的第一线性离子阱和积累然后大量选择性地喷射从第一线性离子阱排出的离子的第二线性离子阱。 第一线性离子阱和第二线性离子阱的离子的共振激发方向是正交的。 与传统技术相比，灵敏度显着提高。

公开(公告)号：US5831380A

公开(公告)日：1998-11-03

申请号：US709405

申请日：1996-09-04

Applicant: Tom Van Zutphen ,  Frederik C. Gehring

Inventor： Tom Van Zutphen ,  Frederik C. Gehring

IPC: H01J3/02 ,  H01J1/30 ,  H01J1/308 ,  H01J1/46 ,  H01J3/40 ,  H01J29/04 ,  H01J29/48 ,  H01J29/50 ,  H01J29/84 ,  H01J29/20 ,  H01J29/70

CPC classification number: H01J29/488 ,  H01J29/04 ,  H01J2201/308

Abstract: An electron has an electron-emitting region, a longitudinal axis and an arrangement of apertured electron grids along the axis. A first grid has an aperture for passing electrons, which aperture is located further outwards with respect to the longitudinal axis than the emitting region. One of the other grids is provided with a shield so as to shield the edge wall of the aperture, if it is located within direct view of the electron-emitting region, from incidence of positive ions.

Abstract translation: 电子具有电子发射区域，纵向轴线和沿轴线的多孔电子栅极的布置。 第一栅格具有用于通过电子的孔，该孔比发射区相对于纵轴更向外定位。 其他栅格中的一个设置有屏蔽件，以便如果它位于电子发射区域的直视图内，则遮挡孔的边缘壁不会发生阳离子的入射。

公开(公告)号：US5028837A

公开(公告)日：1991-07-02

申请号：US524060

申请日：1990-05-16

Applicant: Hans J. Kolpin

Inventor： Hans J. Kolpin

IPC: H01J37/06 ,  H01J3/40 ,  H01J29/84 ,  H01J37/07

CPC classification number: H01J3/40 ,  H01J29/84

Abstract: An ion trap for an electron beam generator consists of at least two electrically conductive elements which are in the form of a sector of a cylinder the elements being spaced apart from each other and together form a cylindrical form. Each element has end plates and a number of fins extending inwardly to the center of the cylindrical form. A recess in the form of a sector of a circle is located in each end plate and each fin adjacent to the center of the cylindrical form. These recesses form a central bore through which an electron beam from an electron gun travels, the electron beam and central bore being essentially of the same diameter. Each elements is attached to an outer envelope by an insulating element and a conductive lead is electrically connected to each element to maintain that element at a predetermined potential which deflects positive ions travelling along the beam path.

Abstract translation: 用于电子束发生器的离子阱由至少两个导电元件组成，这些元件是圆柱体的形式，元件彼此间隔开并且一起形成圆柱形。 每个元件具有端板和向内延伸到圆柱形中心的多个翅片。 圆形扇形形式的凹槽位于每个端板中，并且每个翅片邻近圆柱形的中心。 这些凹槽形成中心孔，电子枪的电子束穿过该中心孔，电子束和中心孔基本上具有相同的直径。 每个元件通过绝缘元件附接到外包层，并且导电引线电连接到每个元件以将该元件保持在预定电位，该偏置使沿着光束路径行进的正离子偏转。

公开(公告)号：US20240038476A1

公开(公告)日：2024-02-01

申请号：US17877781

申请日：2022-07-29

Applicant: Thermo Finnigan LLC

Inventor： Michael W. Senko

IPC: H01J3/40

CPC classification number: H01J3/40

Abstract: An ion guide includes a first arrangement of electrodes on a first surface, a second arrangement of electrodes on a second surface, and an ion containment space in a gap therebetween. The first arrangement includes first electrodes and second electrodes. Each first electrode includes a first main portion and a first edge portion. The first edge portion is wider than the first main portion. The second arrangement includes third electrodes and fourth electrodes. Each fourth electrode includes a fourth main portion and a fourth edge portion. The fourth edge portion is wider than the fourth main portion. The first edge portions are positioned opposite the fourth edge portions. The first electrodes and the third electrodes are configured to receive first RF voltages and the second electrodes and the fourth electrodes are configured to receive second RF voltages that are phase-shifted with respect to the first RF voltages.

公开(公告)号：US10229822B2

公开(公告)日：2019-03-12

申请号：US15520112

申请日：2014-10-20

Applicant: SHIMADZU CORPORATION

Inventor： Shiro Mizutani

IPC: H01J49/10 ,  H01J49/06 ,  H01J49/02 ,  H02M7/10 ,  H01J49/00 ,  H01J3/40 ,  H01J49/42 ,  H01J49/16

Abstract: A high-voltage power source for applying high voltage to a nozzle of an ESI ion source includes a charge release assistant section including switch circuits and other elements for forcing electric charges accumulated at output terminals to be discharged in a polarity-switching operation, whereby the positive/negative switching of the polarity of the output voltage can be quickly performed. For example, when the voltage applied to the nozzle needs to be changed from V1 to V2 (where V1 and V2 are positive, and V1>V2), a voltage control section operates a positive voltage generation section and negative voltage generation section so as to temporarily provide a negative output voltage. After a predetermined period of time, the voltage control section operates the positive voltage generation section and negative voltage generation section so as to provide voltage V2.

公开(公告)号：US20170323773A1

公开(公告)日：2017-11-09

申请号：US15520112

申请日：2014-10-20

Applicant: SHIMADZU CORPORATION

Inventor： Shiro MIZUTANI

IPC: H01J49/10 ,  H01J49/06 ,  H01J49/00 ,  H01J49/42 ,  H01J3/40

CPC classification number: H01J49/10 ,  H01J3/40 ,  H01J49/0036 ,  H01J49/0095 ,  H01J49/022 ,  H01J49/063 ,  H01J49/165 ,  H01J49/4245 ,  H02M7/10 ,  H02M7/103

Abstract: A high-voltage power source for applying high voltage to a nozzle of an ESI ion source includes a charge release assistant section (26) including switch circuits (62 and 65) and other elements for forcing electric charges accumulated at output terminals to be discharged in a polarity-switching operation, whereby the positive/negative switching of the polarity of the output voltage can be quickly performed. In the mass spectrometer according to the present invention, for example, when the voltage applied to the nozzle needs to be changed from Vi to V2 (where V1 and V2 are positive, and V1>V2), a voltage control section (20) under the command of a main controller (9) operates a positive voltage generation section (21) and negative voltage generation section (23) so as to temporarily provide a negative output voltage. After a predetermined period of time, the voltage control section operates the positive voltage generation section (21) and negative voltage generation section (23) so as to provide voltage V2. If the voltage was simply changed from V1 to V2, the voltage would decrease slowly and require considerable time for the change. The positive/negative switching of the polarity induces the discharging of the electric charges accumulated at the output terminals, and consequently, the voltage-switching operation from V1 to V2 is quickly performed.

公开(公告)号：US20090020694A1

公开(公告)日：2009-01-22

申请号：US11780667

申请日：2007-07-20

Applicant: Curt Alan FLORY

Inventor： Curt Alan FLORY

IPC: H01J3/40

CPC classification number: H01J49/4245 ,  H01J49/027

Abstract: A linear ion trap traps a plurality of charged particles in a charged particle trap including first and second electrode mirrors arranged along an axis at opposite ends of the particle trap, the electrode mirrors being capable, when voltage is applied thereto, of creating respective electric fields configured to reflect charged particles causing oscillation of the particles between the mirrors. The method includes: (a) introducing into the charged particle trap the plurality of charged particles, the particles having a spread in the oscillation time of the particles per oscillation; (b) applying voltage to the electrode mirrors during step (a) to induce a relatively weak self-bunching of the charged particles; and (c) after the plurality of charged particles has been introduced into the charged particle trap, waiting for a time period ΔT and then changing the voltage so as to induce a relatively stronger self-bunching among the charged particles.

Abstract translation: 线性离子阱捕集带电粒子捕集阱中的多个带电粒子，包括沿粒子捕集器相对端的轴线布置的第一和第二电极反射镜，当施加电压时，电极反射镜能够产生各自的电场 被配置为反射带电粒子，引起颗粒在反射镜之间的振荡。 该方法包括：（a）向带电粒子中引入多个带电粒子，颗粒在每个振荡的颗粒的振荡时间内具有扩散; （b）在步骤（a）期间向电极镜施加电压以引起带电粒子的相对较弱的自聚束; 并且（c）在多个带电粒子已经被引入带电粒子阱中之后，等待一段时间ΔT，然后改变电压，以引起带电粒子之间相对较强的自聚束。

公开(公告)号：US5866974A

公开(公告)日：1999-02-02

申请号：US793358

申请日：1997-05-06

Applicant: Karl Heinz Herrmann ,  Roland Herb ,  Wilfried Hermann Nisch ,  Gerald Johannes Sermund

Inventor： Karl Heinz Herrmann ,  Roland Herb ,  Wilfried Hermann Nisch ,  Gerald Johannes Sermund

IPC: H01J3/40 ,  H01J29/84 ,  H01J37/06 ,  H01J37/30 ,  H01J1/50 ,  H01J23/10

CPC classification number: H01J37/06 ,  H01J29/84 ,  H01J3/40

Abstract: An electron beam generator includes: an electron emitting cathode (1); an anode (3) with an anode bore (4) for the passage of an electron beam (6); a Wehnelt electrode (2) between the cathode (1) and the anode (3) for controlling the electron beam; the cathode (1); the anode (3) and the Wehnelt electrode (2) disposed within a vacuum chamber (100); and a magnetic unit (7) disposed between the cathode (1) and the anode (3) for generating a static transverse magnetic field causing the electrons to be deflected along a curved path until the electrons enter the anode (3) such that ions follow an ionic path back to strike the Wehnelt electrode (2) and are kept from striking the cathode (1) by displacement caused by the ionic path. The present invention reduces the number of ions that impact the cathode and reduces the number of ions that are formed by the ionization of residual molecules, increasing the service life of the cathode.

Abstract translation: PCT No.PCT / DE95 / 01113 Sec。 371日期：1997年5月6日 102（e）日期1997年5月6日PCT提交1995年8月23日PCT公布。 出版物WO96 / 07195 日期：1996年3月7日电子束发生器包括：电子发射阴极（1）; 具有用于电子束（6）通过的阳极孔（4）的阳极（3）; 在阴极（1）和阳极（3）之间的用于控制电子束的Wehnelt电极（2） 阴极（1）; 设置在真空室（100）内的阳极（3）和Wehnelt电极（2）; 以及设置在阴极（1）和阳极（3）之间的磁性单元（7），用于产生静电横向磁场，导致电子沿着弯曲路径偏转，直到电子进入阳极（3），使得离子遵循 离开路径返回到Wehnelt电极（2），并通过由离子路径引起的位移而保持不会撞击阴极（1）。 本发明减少了冲击阴极的离子数量，并减少了通过残留分子电离而形成的离子数，从而增加了阴极的使用寿命。

公开(公告)号：US5336892A

公开(公告)日：1994-08-09

申请号：US882230

申请日：1992-05-13

Applicant: Elizabeth A. Dobisz ,  Christie R. K. Marrian ,  Martin C. Peckerar ,  Kee W. Rhee

Inventor： Elizabeth A. Dobisz ,  Christie R. K. Marrian ,  Martin C. Peckerar ,  Kee W. Rhee

IPC: G03F7/20 ,  H01J3/40

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2061 ,  H01J2237/31769 ,  H01J2237/31796

Abstract: Improvement of resolution in terms of reducing minimum feature sizes and ximity effects on bulk substrates in high voltage electron beam lithography as applied to manufacture of electronic circuits from coated semiconductors involves the use of a dielectric layer interposed between an electrically semiconducting substrate and a resist layer. The dielectric layer functions to reduce the resist exposure resulting from the backscattered electrons coming from the substrate into the resist layer.

Abstract translation: 在应用于从涂覆的半导体制造电子电路的高电压电子束光刻中减小最小特征尺寸和邻近效应方面的分辨率的改进涉及使用介于电半导体衬底和抗蚀剂层之间的电介质层。 介电层起到减少从衬底进入抗蚀剂层的后向散射电子产生的抗蚀剂曝光。