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公开(公告)号：US11251029B2
公开(公告)日：2022-02-15
申请号：US17255607
申请日：2019-08-15
Applicant: DH TECHNOLOGIES DEVELOPMENT PTE. LTD.
Inventor： Takashi Baba , Pavel Ryumin , William M. Loyd
Abstract: A dissociation device fragments a precursor ion, producing at least two different product ions with overlapping m/z values in the dissociation device. The dissociation device applies an AC voltage and a DC voltage creating a pseudopotential that traps ions below a threshold m/z including the at least two product ions. The dissociation device receives a charge reducing reagent that causes the trapped at least two product ions to be charge reduced until their m/z values increase above the threshold m/z set by the AC voltage. The increase in the m/z values of the at least two product ions decreases their overlap. The at least two product ions with increased m/z values are transmitted to another device for subsequent mass analysis by applying the DC voltage to the dissociation device relative to a DC voltage applied to the other device.
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公开(公告)号：US08803411B2
公开(公告)日：2014-08-12
申请号：US13812700
申请日：2011-06-15
Applicant: Shunichi Watanabe , Takashi Onishi , Minoru Kaneda , Hisaya Murakoshi
Inventor： Shunichi Watanabe , Takashi Onishi , Minoru Kaneda , Hisaya Murakoshi
CPC classification number: H01J29/484 , H01J3/02 , H01J3/027 , H01J3/40 , H01J29/488 , H01J37/026 , H01J37/073 , H01J37/248 , H01J2237/038 , H01J2237/06341 , H01J2237/0802
Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.
Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。
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3.发明申请TIME-OF-FLIGHT MASS SPECTROMETER AND A METHOD OF ANALYSING IONS IN A TIME-OF-FLIGHT MASS SPECTROMETER 有权飞行时间质谱仪和在飞行时间质谱仪中分析离子的方法公开(公告)号：US20100072362A1
公开(公告)日：2010-03-25
申请号：US12518236
申请日：2007-12-07
Applicant: Roger Giles , Michael Sudakov , Hermann Wollnik
Inventor： Roger Giles , Michael Sudakov , Hermann Wollnik
CPC classification number: H01J49/403 , H01J49/4295
Abstract: A time-of-flight mass spectrometer (1) comprises an ion source a segmented linear ion device (10) for receiving sample ions supplied by the ion source and a time-of-flight mass analyser for analysing ions ejected from the segmented device. A trapping voltage is applied to the segmented device to trap ions initially into a group of two or more adjacent segments and subsequently to trap them in a region of the segmented device shorter than the group of segments. The trapping voltage may also be effective to provide a uniform trapping field along the length of the device (10).
Abstract translation: 飞行时间质谱仪（1）包括离子源，用于接收由离子源提供的样品离子的分段线性离子装置（10）和用于分析从分段装置喷射的离子的飞行时间质量分析器。 捕获电压被施加到分段器件，以将离子初始化为两个或更多个相邻段的一组，并且随后将它们捕获在分段器件的比段组短的区域中。 捕获电压也可以有效地沿着装置（10）的长度提供均匀的捕获场。
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4.发明授权Electron beam control assembly for a scanning electron beam computed tomography scanner 失效用于扫描电子束计算机断层扫描仪的电子束控制组件
公开(公告)号：US4625150A
公开(公告)日：1986-11-25
申请号：US600464
申请日：1984-04-16
Applicant: Roy E. Rand
Inventor： Roy E. Rand
Abstract: An improved ion clearing electrode assembly for use in an electron beam production and control assembly which is especially suitable for use in a scanning electron beam computed tomography X-ray scanning system. The assembly uses a vacuum sealed housing chamber which is evacuated of internal gases and in which the electron beam is generated and propagated. Normally residual gas within the chamber interacts with the electrons of the beam to produce positive ions which have the affect of neutralizing the space charge of the electron beam and thereby causing focusing difficulties and destabilization of the beam. The ion collecting electrodes herein are an improvement of those disclosed in the co-pending Rand U.S. patent application Ser. No. 434,252, now U.S. Pat. No. 4,521,900. The electrodes are designed to extract the ions and reduce their neutralizing effect while maintaining a precisely uniform electric field and therefore beam optical aberrations are minimized. In addition, the electrode provides flexibility in the variation of parameters which effect ion extraction and the neutralization fraction.
Abstract translation: 一种用于电子束生产和控制组件的改进的离子清除电极组件，其特别适用于扫描电子束计算机断层摄影X射线扫描系统。 组件使用真空密封的容纳室，其被内部气体排空，并且其中电子束被产生和传播。 通常，室内的残余气体与光束的电子相互作用以产生具有中和电子束的空间电荷的影响的正离子，从而引起聚焦困难和光束的不稳定性。 本文中的离子收集电极是共同未决的兰德美国专利申请系列公开的那些的改进。 现在的美国专利第434,252号。 第4,521,900。 电极被设计成提取离子并降低它们的中和效应，同时保持精确均匀的电场，并且因此光束像差最小化。 此外，电极提供影响离子提取和中和分数的参数变化的灵活性。
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公开(公告)号：US20220375736A1
公开(公告)日：2022-11-24
申请号：US17650836
申请日：2022-02-11
Applicant: DH TECHNOLOGIES DEVELOPMENT PTE. LTD.
Inventor： Takashi Baba , Pavel Ryumin , William M. Loyd
Abstract: A dissociation device fragments a precursor ion, producing at least two different product ions with overlapping m/z values in the dissociation device. The dissociation device applies an AC voltage and a DC voltage creating a pseudopotential that traps ions below a threshold m/z including the at least two product ions. The dissociation device receives a charge reducing reagent that causes the trapped at least two product ions to be charge reduced until their m/z values increase above the threshold m/z set by the AC voltage. The increase in the m/z values of the at least two product ions decreases their overlap. The at least two product ions with increased m/z values are transmitted to another device for subsequent mass analysis by applying the DC voltage to the dissociation device relative to a DC voltage applied to the other device.
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Patent Agency Ranking
公开(公告)号：US10242859B2
公开(公告)日：2019-03-26
申请号：US15490250
申请日：2017-04-18
Applicant: ID Quantique SA.
Inventor： Taehyun Kim , Dongil Cho , Minjae Lee , Seokjun Hong , Hongjin Cheon
Abstract: An ion trap device is disclosed with a method of manufacturing thereof including a substrate, first and second RF electrode rails, first and second DC electrodes on either upper or lower side of substrate, and a laser penetration passage connected to ion trapping zone from outer side of the first or second side of substrate. The substrate includes ion trapping zone in space defined by first and second sides of substrate separated by a distance with reference to width direction of ion trap device. The first and second RF electrode rails are arranged in parallel longitudinally of ion trap device. The first RF electrode is arranged on upper side of first side, the second DC electrode is arranged on lower side of first side, the first DC electrode is arranged on upper side of second side, and the second RF electrode rail is arranged on lower side of second side.
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公开(公告)号：US20130180845A1
公开(公告)日：2013-07-18
申请号：US13876100
申请日：2011-09-30
CPC classification number: H01J3/40 , B01D45/04 , C23C4/134 , H01J37/32055 , H01J37/32422 , H01J37/32871 , H01J2237/15
Abstract: A filter for filtering macro-particles from a plasma beam, having a bended duct for carriage of the plasma beam, the bended duct comprising an intermediate portion connected at one end to an inlet portion having a longitudinal axis disposed on an inlet plane and at another opposite end to an outlet portion having a longitudinal axis disposed on an outlet plane. The inlet portion allows the plasma beam containing macro-particles to travel toward the intermediate portion in an incident direction and the outlet portion allows the plasma beam to travel from the intermediate portion in an emergent direction. The intermediate portion is configured to deviate the incident direction to the emergent direction at an angle of more than 90° and thereby remove macro-particles from the plasma beam as it passes through the intermediate portion. The inlet plane and outlet plane are disposed at an offset angle from each other.
Abstract translation: 一种用于从等离子体束过滤大粒子的过滤器，具有用于承载等离子体束的弯曲管道，弯曲管道包括在一端连接到入口部分的中间部分，入口部分具有设置在入口平面上的纵向轴线和另一端 出口部分的相对端具有设置在出口平面上的纵向轴线。 入口部分允许包含大颗粒的等离子体束在入射方向上朝向中间部分行进，并且出口部分允许等离子体束在出射方向上从中间部分行进。 中间部分被配置为以大于90°的角度将入射方向偏离出射方向，从而当等离子体束通过中间部分时从其去除大颗粒。 入口平面和出口平面以彼此偏移的角度设置。
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8.发明授权Ballistic charge transport device with integral active contaminant absorption means 失效具有积分有源污染物吸收手段的弹道电荷输送装置
公开(公告)号：US5502348A
公开(公告)日：1996-03-26
申请号：US169232
申请日：1993-12-20
Applicant: Curtis D. Moyer , Lawrence N. Dworsky , Robert C. Kane
Inventor： Curtis D. Moyer , Lawrence N. Dworsky , Robert C. Kane
CPC classification number: H01J21/105 , H01J3/40 , Y10S257/928
Abstract: A ballistic charge transport device including an edge electron emitter defining an elongated central opening therethrough with a receiving terminal (e.g. an anode) at one end of the opening and a getter at the other end. A suitable potential is applied between the emitter and the receiving terminal to attract emitted electrons to the receiving terminal and a different suitable potential is applied between the emitter and the getter so that contaminants, such as ions and other undesirable particles, are accelerated toward and absorbed by the getter.
Abstract translation: 一种弹道电荷传输装置，包括边缘电子发射体，其限定了在开口的一端处具有接收端子（例如阳极）的细长中心开口和另一端的吸气剂。 在发射极和接收端子之间施加合适的电位以将发射的电子吸引到接收端子，并且在发射极和吸气剂之间施加不同的合适电势，使得诸如离子和其它不期望的颗粒的污染物被加速并被吸收 由吸气者。
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公开(公告)号：US3955118A
公开(公告)日：1976-05-04
申请号：US551217
申请日：1975-02-19
Applicant: John Peter Wilfred Flemming
Inventor： John Peter Wilfred Flemming
Abstract: A cold-cathode ion source includes a specially shaped hollow anode and specially shaped anode-cathode insulators to preclude the buildup of short-circuiting bridges of sputtered cathode material. When used with solid feed material, the source can also include an oven-anode having cavities for vaporizing the solid feed material and passages connecting the cavities to the bore of the anode. The geometry of the oven-anode provides an increasing temperature gradient from the cavities to the bore that minimizes condensation of vaporized feed material that could block the ports.
Abstract translation: 冷阴极离子源包括特殊形状的中空阳极和特殊形状的阳极 - 阴极绝缘体，以排除溅射阴极材料短路桥的积聚。 当与固体进料一起使用时，源还可以包括具有用于蒸发固体进料的空腔的炉阳极和将空腔连接到阳极的孔的通道。 烤箱阳极的几何形状提供了从空腔到孔的增加的温度梯度，其最小化可阻塞端口的汽化进料的冷凝。
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10.发明申请公开(公告)号：US20240429015A1
公开(公告)日：2024-12-26
申请号：US18710419
申请日：2022-11-15
Applicant: DERKWOO SEMITECH CO., LTD.
Inventor： Ki Bum KIM
Abstract: The present invention relates to a device designed to prevent fine particles produced in a vacuum system from being adsorbed to a semiconductor substrate and a sample or prevent the fine particles from being adsorbed to a mask in a lithography device using the vacuum system and, more specifically, to an extreme ultraviolet lithography device not using a membrane type pellicle. An embodiment of a particle transfer blocking device according to the present invention comprises: a vacuum chamber in which an accommodation part is formed; and a barrier module which is provided in the vacuum chamber and divides the accommodation part of the chamber into a first region and a second region, wherein the barrier module is not a physical barrier but an electrical potential barrier serving to prevent predetermined particles located in the first region from transferring to the second region.
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