公开(公告)号：US07106441B2

公开(公告)日：2006-09-12

申请号：US10672207

申请日：2003-09-26

Applicant: Decai Sun ,  Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran ,  Patrick Y. Maeda

Inventor： Decai Sun ,  Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran ,  Patrick Y. Maeda

IPC: G01J3/20

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/20

Abstract: A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.

Abstract translation: 具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。

公开(公告)号：US07106440B2

公开(公告)日：2006-09-12

申请号：US11083895

申请日：2005-03-17

Applicant: Edward M. Granger

Inventor： Edward M. Granger

IPC: G01J3/28

CPC classification number: G02B6/29311 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/12 ,  G01J3/28 ,  G01J2003/123 ,  G02B6/29373

Abstract: A diffraction grating and a prism with the appropriate characteristics are employed to provide a combined dispersive characteristic that is substantially linear over the visible spectrum. Radiation from the grating and prism is collimated by a lens towards a detector array. The grating or a telecentric stop between the grating and prism is placed at a focal point of the lens in a telecentric arrangement so that equal magnification is achieved at the detector array. If the detector array is replaced by a plurality of optical channels, a multiplexer/demultiplexer is obtained.

公开(公告)号：US20060172452A1

公开(公告)日：2006-08-03

申请号：US11343022

申请日：2006-01-30

Applicant: Volker Seyfried ,  Frank Schreiber

Inventor： Volker Seyfried ,  Frank Schreiber

IPC: H01L21/00 ,  H01L21/82 ,  G02B21/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G02B3/0043 ,  G02B3/005 ,  H01L27/14625 ,  H01L27/14627 ,  H01L27/14806 ,  H01L27/14812

Abstract: A detector includes a CCD arrangement having at least one CCD, and a focusing device. The focusing device focuses spectrally separated light onto the CCD arrangement. The focusing device is located in an optical path before the CCD arrangement, and includes a microlens arrangement having at least one microlens.

Abstract translation: 检测器包括具有至少一个CCD的CCD装置和聚焦装置。 聚焦装置将光谱分离的光聚焦到CCD装置上。 聚焦装置位于CCD装置之前的光路中，并且包括具有至少一个微透镜的微透镜装置。

公开(公告)号：US20060169873A1

公开(公告)日：2006-08-03

申请号：US11344040

申请日：2006-01-31

Applicant: Volker Seyfried ,  Frank Schreiber

Inventor： Volker Seyfried ,  Frank Schreiber

IPC: H01L27/00 ,  H01J3/14

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/14 ,  H01L27/14627 ,  H01L27/14643 ,  H01L27/14654 ,  H01L27/148 ,  H01L27/14887

Abstract: A detector includes a photosensitive array including at least one photosensitive surface. A focusing device focuses spectrally split light onto the photosensitive array. The focusing device is located in an optical path upstream from the photosensitive array. The focusing device includes a microlens array including at least one microlens.

Abstract translation: 检测器包括包括至少一个感光表面的光敏阵列。 聚焦装置将光谱分裂的光聚焦到光敏阵列上。 聚焦装置位于光敏阵列上游的光路中。 聚焦装置包括包括至少一个微透镜的微透镜阵列。

公开(公告)号：US20060146315A1

公开(公告)日：2006-07-06

申请号：US11364180

申请日：2006-03-01

Applicant: Patrick Treado

Inventor： Patrick Treado

IPC: G01J3/44 ,  G01N21/64 ,  G01N21/65

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/10 ,  G01J3/44 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6471 ,  G01N2201/0221 ,  G01N2201/0627 ,  G02F1/133371 ,  G02F1/1347

Abstract: The disclosure generally relates to a method and apparatus for compact dispersive imaging spectrometer. More specifically, one embodiment of the disclosure relates to a portable system for obtaining a spatially accurate wavelength-resolved image of a sample having a first and a second spatial dimension. The portable system can include a photon emission source for sequentially illuminating a plurality of portions of said sample with a plurality of photons to produce photons scattered by the sample. The photon emission source can illuminate the sample along the first spatial dimension for each of plural predetermined positions of the second spatial dimension. The system may also include an optical lens for collecting the scattered photons to produce therefrom filtered photons, a dispersive spectrometer for determining a wavelength of ones of the filtered photons, a photon detector for receiving the filtered photons and obtaining therefrom plural spectra of said sample, and a processor for producing a two dimensional image of said sample from the plural spectra.

Abstract translation: 本发明一般涉及紧凑型分散成像光谱仪的方法和装置。 更具体地，本公开的一个实施例涉及用于获得具有第一和第二空间维度的样本的空间上准确的波长分辨图像的便携式系统。 便携式系统可以包括光子发射源，用于用多个光子顺序照射所述样品的多个部分，以产生由样品散射的光子。 光子发射源可以沿着第一空间维度对第二空间维度的多个预定位置中的每一个照射样本。 该系统还可以包括用于收集散射光子以产生滤光光子的光学透镜，用于确定滤光光子中波长的波长的色散光谱仪，用于接收经滤光的光子并由此获得所述样品的多个光谱的光子检测器， 以及用于从所述多个光谱产生所述样本的二维图像的处理器。

公开(公告)号：US07061618B2

公开(公告)日：2006-06-13

申请号：US10688690

申请日：2003-10-17

Applicant: Walid A. Atia ,  Dale C. Flanders ,  Petros Kotidis ,  Mark E. Kuznetsov

Inventor： Walid A. Atia ,  Dale C. Flanders ,  Petros Kotidis ,  Mark E. Kuznetsov

IPC: G01B9/02

CPC classification number: G01J3/36 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01N21/255

Abstract: Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.

公开(公告)号：US20060114458A1

公开(公告)日：2006-06-01

申请号：US11281536

申请日：2005-11-18

Applicant: Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

Inventor： Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

IPC: G01J3/28

CPC classification number: G02B27/286 ,  G01B9/04 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/18 ,  G01N21/21

Abstract: A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Abstract translation: 能够抑制衍射光栅的偏振依赖性引起的问题的能够抑制尺寸和成本的分光器。 分光镜包括：偏振分束板3，其将来自输入光纤1的光分成第一和第二光路，并且使具有不同偏振方向的每个光路的每个光彼此偏振;菲涅耳菱形半波片5 其将第一光路中的光的偏振方向排列成第二光路中的偏振方向，以及平面镜4，其使第二光路偏转，使得通过第一光路的光的至少一部分区域为 入射在衍射光栅6上的入射光和穿过第二光路的光入射到衍射光栅上的区域彼此重叠。

公开(公告)号：US20060092416A1

公开(公告)日：2006-05-04

申请号：US11146086

申请日：2005-06-07

Applicant: Jiann-Shiun Kao ,  Yi-Chiuen Hu ,  Tong-Long Fu ,  Han-Chang Pan ,  Hui-Hsiung Lin ,  Ping-Chung Chung

Inventor： Jiann-Shiun Kao ,  Yi-Chiuen Hu ,  Tong-Long Fu ,  Han-Chang Pan ,  Hui-Hsiung Lin ,  Ping-Chung Chung

IPC: G01J3/28

CPC classification number: G01N21/66 ,  G01J3/0256 ,  G01N21/68 ,  G01N2201/0221 ,  G01N2201/08

Abstract: The in-situ micro-spectro-sensor determines whether a leakage occurs during the plasma process by taking the advantage of detecting the target leak in gas specifically composed of 99% of nitrogen and oxygen which are four to one in ratio. Warning signals with light and sound are available. The main part is compact, small and set up is quite convenient. Non-invasive in-situ detection has no effect on in-line process, but can indeed breakthrough the in-situ leak detection barrier for plasma-based process facilities of high-tech industries such as semiconductors and opto-electronics.

Abstract translation: 原位微量子传感器确定在等离子体处理过程中是否发生泄漏，其优点在于检测特异性组成的比例为四比一的99％的氮和氧的气体中的目标泄漏。 带有灯光和声音的警告信号可用。 主要部分紧凑，体积小，设置方便。 非侵入性原位检测对在线工艺无影响，但确实可以突破高科技行业等半导体和光电子等离子体工艺设备的原位泄漏检测屏障。

公开(公告)号：US20060072109A1

公开(公告)日：2006-04-06

申请号：US11220016

申请日：2005-09-06

Applicant: Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

Inventor： Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01J5/061 ,  G02B3/0056 ,  G02B3/08 ,  G02B5/045 ,  G02B26/0883 ,  G02B27/1066 ,  G02B27/123 ,  G02B27/143

Abstract: Hyperspectral imaging systems that may be used for imaging objects in three-dimensions with no moving parts are disclosed. A lenslet array and/or a pinhole array may be used to reimage and divide the field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral datacube is collected simultaneously.

Abstract translation: 公开了可用于三维成像对象的高光谱成像系统，没有移动部件。 可以使用小透镜阵列和/或针孔阵列来重新成像并将视野划分成多个通道。 将多个通道分散到多个光谱特征中，并在二维焦平面阵列上实时观察。 同时收集整个高光谱数据库。

公开(公告)号：US07012695B2

公开(公告)日：2006-03-14

申请号：US10893332

申请日：2004-07-19

Applicant: John S. Maier ,  Patrick J. Treado ,  Chenhui Wang

Inventor： John S. Maier ,  Patrick J. Treado ,  Chenhui Wang

IPC: G01B9/02 ,  G02F1/1335

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/10 ,  G01J3/44 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6471 ,  G01N2201/0221 ,  G01N2201/0627 ,  G02F1/133371 ,  G02F1/1347

Abstract: The disclosure generally relates to a method and apparatus for multi-wavelength imaging spectrometer. More specifically, in one embodiment, the disclosure relates to an optical filter for passing photons therethrough. The filter includes a first filter stage and a second filter stage. The first filter stage may include a first retarder element and a first liquid crystal cell. The first element may include an input face and an output face. One of the first element faces is not oriented substantially normal to the trajectory of photons passing through the filter.

Abstract translation: 本公开一般涉及用于多波长成像光谱仪的方法和装置。 更具体地，在一个实施例中，本发明涉及一种用于使光子通过其的滤光器。 该滤波器包括第一滤波器级和第二滤波级。 第一滤波器级可以包括第一延迟元件和第一液晶单元。 第一元件可以包括输入面和输出面。 第一元件面之一不是基本上垂直于通过过滤器的光子的轨迹。