Metrology tool stage configurations and operation methods

    公开(公告)号:US09970886B2

    公开(公告)日:2018-05-15

    申请号:US14569043

    申请日:2014-12-12

    CPC classification number: G01N21/9501 G01N2201/02 H01L21/68764 Y10T29/49

    Abstract: Metrology tool stage configurations and respective methods are provided, which comprise a pivoted connection arranged to receive a wafer and enable rotation thereof about a pivot; a radial axis arranged to radially move the rotatable pivoted connection attached thereto; and optics having a stationary part configured to generate a collimated illumination beam. For example, the optics may be stationary and the radial axis may be centrally rotated to enable stage operation without requiring additional space for guiding systems. In another example, a part of the optics may be rotatable, when configured to receive illumination via a mechanically decoupled or empty region, receive power and control wirelessly and deliver data wirelessly. The disclosed configurations provide more compact and more robust stages which efficiently handle large wafers. Stage configurations may be horizontal or vertical, the latter further minimizing the tool's footprint.

    Microscope
    196.
    发明申请
    Microscope 审中-公开

    公开(公告)号:US20170131534A1

    公开(公告)日:2017-05-11

    申请号:US15414689

    申请日:2017-01-25

    Abstract: A microscope including a sample carrier configured to support a sample. Excitation light illuminates the sample via an excitation beam path. Detection light from the sample is guided to detection means via a detection beam path. Through an objective arranged along the optical axis, excitation light is guided in direction of the sample carrier and detection light coming from the sample is guided in direction of the detection means. Beam-splitting means separate excitation light and detection light. Also provided are means for generating a light sheet from excitation light, and means for illuminating the sample with this light sheet. The light sheet lies in a plane at a nonzero angle to the optical axis. The means for illuminating the sample include an optical-deflecting device arranged on or at the sample carrier, which deflects excitation light from the objective into the plane of the light sheet via an optically active surface.

    Apparatus and method for photographing glass in multiple layers
    200.
    发明授权
    Apparatus and method for photographing glass in multiple layers 有权
    用于拍摄多层玻璃的装置和方法

    公开(公告)号:US09575008B2

    公开(公告)日:2017-02-21

    申请号:US14178295

    申请日:2014-02-12

    Inventor: Liansheng Jiang

    Abstract: The invention teaches a new apparatus and method to photograph glasses in multiple layers for taking high quality photo images with scratch, crash, black/white defect, lack, crack, pin-hole, concave edge and raised edge, bubble and smudge defects on the surface-layer, backside-layer or/and mid-layer of the glasses. The invention also introduces flexible and expendable photographing hardware architecture that will meet various customers inspecting defects requirements and speed requirements.

    Abstract translation: 本发明教导了一种用于拍摄多层眼镜的新设备和方法,用于拍摄具有划痕,碰撞,黑/白缺陷,缺乏,裂纹,针孔,凹边缘和凸起边缘,气泡和污迹缺陷的高质量照片图像 眼镜的表面层,背面层或/和中间层。 本发明还引入了灵活和消耗性的拍摄硬件架构,可以满足各种客户检查缺陷要求和速度要求。

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