公开(公告)号：US10212798B2

公开(公告)日：2019-02-19

申请号：US15882415

申请日：2018-01-29

Applicant: Sina Alavi ,  Javad Mostaghimi

Inventor： Sina Alavi ,  Javad Mostaghimi

IPC: H01J7/24 ,  H05B31/26 ,  H05H1/30 ,  G01J3/443 ,  G01N21/73 ,  H01J49/10 ,  H05H1/46

Abstract: A torch for use in inductively coupled plasma is described. In the torch, a torch tube has an angular accelerator where a flow of gas experiences an increase in angular velocity. The torch tube also has a conical end where the increased angular velocity of the gas is encouraged to accelerate into a cavity that can support the plasma. In various examples, the conical end of the torch tube comprising a conical gap that accelerates the axial velocity component of the gas flow.

公开(公告)号：US10197445B2

公开(公告)日：2019-02-05

申请号：US15607829

申请日：2017-05-30

Applicant: Oxford Instruments Industrial Products Ltd.

Inventor： Jukka Hassi

IPC: G01J3/30 ,  G01J3/443 ,  G01J3/02 ,  G01N21/71 ,  G01N21/359 ,  G01N21/65

Abstract: According to an example embodiment, a detector assembly for use in analysis of elemental composition of a sample by using optical emission spectroscopy is provided, the detector assembly including a rotatable element that is rotatable about an axis and that has attached thereto a laser source for generating laser pulses for invoking optical emission on a surface of the sample, the laser source arranged to generate laser pulses focused at a predefined distance from said axis at a predefined distance from a front end of the detector assembly, and a detector element for capturing optical emission invoked by said laser pulses.

公开(公告)号：US20190033231A1

公开(公告)日：2019-01-31

申请号：US16050319

申请日：2018-07-31

Applicant: United States of America as represented by the Administrator of NASA

Inventor： John W. Connell ,  Frank L. Palmieri ,  William T. Yost ,  John W. Hopkins ,  Rodolfo I Ledesma

IPC: G01N21/94 ,  H05H1/00 ,  G01J3/443 ,  B23K26/50 ,  B23K26/12 ,  B23K26/08

CPC classification number: G01N21/94 ,  B08B7/0042 ,  B23K26/0622 ,  B23K26/0884 ,  B23K26/127 ,  B23K26/50 ,  G01J3/443 ,  G01N21/718 ,  H05H1/0037

Abstract: Systems, methods, and devices of the various embodiments may enable simultaneous preparation of a substrate for adhesive bonding and detection of minute contaminants on the substrate. Various embodiments may enable detection of contaminants on a surface of a substrate while the surface of the substrate is being prepared for adhesive bonding by laser ablation. Various embodiments may provide an integrated laser treatment and measurement system.

公开(公告)号：US20190011427A1

公开(公告)日：2019-01-10

申请号：US16025494

申请日：2018-07-02

Applicant: ARKRAY, Inc.

Inventor： Kentaro Kiriyama

IPC: G01N33/493 ,  G01N21/73 ,  G01N21/25 ,  G01N1/38 ,  G01J3/443

CPC classification number: G01N33/493 ,  G01J3/443 ,  G01N1/38 ,  G01N21/25 ,  G01N21/69 ,  G01N21/73

Abstract: The disclosure provides plasma spectroscopy analysis methods using a preparatory process of diluting a urine sample assumed to contain mercury or lead as an analyte metal species, and then adding a known concentration of thallium as a control metal species to the diluted urine sample; a concentration process of introducing the urine sample containing the control metal species to a measurement container, and applying an electric current across a pair of electrodes disposed in the measurement container to concentrate the analyte metal species and the control metal species present in the urine sample in a vicinity of at least one of the electrodes; a detection process; a correction process; and a quantification process.

公开(公告)号：US10107759B2

公开(公告)日：2018-10-23

申请号：US15535977

申请日：2014-12-15

Applicant: Spectro Analytical Instruments GmbH

Inventor： Manfred A. Bergsch

IPC: G01T3/00 ,  G01N21/68 ,  H01J49/10 ,  G01N21/73 ,  G01J3/443 ,  H01J49/34

Abstract: An optical emission spectrometry instrument may comprise an inductively coupled plasma generator (ICP) with an electromagnetic coil having input and ground connectors. The electromagnetic coil may be mounted to a mounting disk, and the input connector may be coupled to a power output of a radio frequency power source, and the ground connector may be connected to the mounting disk. A spectro-chemical source may be used for sample excitation. The spectro-chemical source and the ICP may have a longitudinal axis. An optical system may be included for viewing the spectro-chemical source with a fixed view axis. The electromagnetic coil may be mounted pivotably around one of its connectors so that the orientation of the ICP can be altered from a first orientation of its longitudinal axis to a second orientation of its longitudinal axis, and vice versa.

公开(公告)号：US10107681B2

公开(公告)日：2018-10-23

申请号：US15233595

申请日：2016-08-10

Applicant: Samsung Electronics Co., Ltd. ,  Industry-Academic Cooperation Foundation, Yonsei University

Inventor： In-joong Kim ,  Ilgu Yun

IPC: G01J3/44 ,  G01J3/02 ,  G02B7/02 ,  G02B5/20 ,  G01J3/443 ,  H01J37/32 ,  H01L21/67

Abstract: Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

公开(公告)号：US10101210B2

公开(公告)日：2018-10-16

申请号：US15359759

申请日：2016-11-23

Applicant: Oxford Instruments Industrial Products Ltd.

Inventor： Tuomas Pylkkanen

IPC: G01J3/443 ,  G01J3/02 ,  G01J3/45 ,  G01J3/10

Abstract: A portable analyzer determines composition of a sample and includes excitation means for invoking an optical emission from a surface of the sample, detector means for observing a selectable wavelength in said optical emission and for recording a detection signal that is descriptive of at least one characteristic of said optical emission at a selected wavelength, analysis means for determination of elemental composition of the sample on basis of one or more detection signals; and control means for carrying out a spectral analysis by operating the excitation means to generate the optical emission for recording respective detection signals at predefined wavelengths, operating the detector means to record the respective one or more detection signals at said one or more predefined wavelengths, and operating the analysis means to determine elemental composition of the sample on basis of said recorded detection signals.

公开(公告)号：US10094712B2

公开(公告)日：2018-10-09

申请号：US15807925

申请日：2017-11-09

Applicant: Spectro Analytical Instruments GmbH

Inventor： Lutz Neitsch ,  Markus Neienhuis

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/443

Abstract: A method for compensating spectrum drift in a spectrometer having a radiation source, optical apparatus to split up a spectrum into spectral lines according to wavelengths of radiation from the radiation source, a number of detectors to receive partial spectra, and which are provided with respective pluralities of pixels to measure radiation intensity, and a catalog of spectral lines of different chemical elements that may be used as correction lines. The method may include generating and recording an emission spectrum of a sample; determining pixels receiving the maximum of the peaks for respective partial spectra and identifying respective peak positions for the peak maxima; for the respective peak positions, determining if there is a correction line within a predetermined maximum distance from the peak position, and if so, calculating a distance between the peak position and the correction line; and calculating a correction function for assignment of peak positions.

公开(公告)号：US20180238807A1

公开(公告)日：2018-08-23

申请号：US15897684

申请日：2018-02-15

Applicant: Radom Corporation

Inventor： Ashok Menon ,  Velibor Pikelja ,  Jovan Jevtic

IPC: G01N21/73 ,  H01J37/32 ,  H01J37/244 ,  G01J3/443 ,  G01J3/02

CPC classification number: G01N21/73 ,  G01J3/0208 ,  G01J3/443 ,  G01N2201/0221 ,  H01J37/244 ,  H01J37/32201 ,  H01J37/32247 ,  H01J37/32449 ,  H01J49/0404 ,  H01J49/105

Abstract: A portable, modular plasma source allows the production of an emission spectrometer by combination with a common portable fiber optic spectrograph by channeling emitted light through a fiber optic coupling communicating light from the plasma source to the portable fiber optic spectrograph.

公开(公告)号：US20180238736A1

公开(公告)日：2018-08-23

申请号：US15903197

申请日：2018-02-23

Applicant: SHIMADZU CORPORATION

Inventor： TATSUYA KAIHATSU

IPC: G01J3/443 ,  G01N21/67

CPC classification number: G01J3/443 ,  G01J3/027 ,  G01J3/28 ,  G01J2003/2879 ,  G01N21/274 ,  G01N21/67

Abstract: An emission spectroscopy instrumentation is easily operated and includes a calculation element 154 that calculates a variation of the measurement values of every detector relative to a plurality of measurements of a standard; a determination element 155 that determines whether any an additional measurement is required when a variation relative to all detectors is within an acceptable value and an addition measurement is required when a variation relative to any one detector is out of an acceptable value; a notification element 156 that notifies to an operator a determination result according to the determination element 155, and a calculation-determination control element 153 that controls the calculation element 154 and the determination element 155 that calculates the variation and makes a determination at the timing when the measurement of the standard sample is executed at predetermined times, and calculates a variation and makes a determination at every one additional measurement when the additional measurement is needed.