Abstract:
A method for measuring the presence or concentration of an analyte in a sample by spectrophotometry: providing an open top cuvette having a sample with an analyte to be measured; providing a light source and a detector for detecting emitted light; taking at least two measurements that includes: (i) directing at least two beams of light from the light source to different locations on the cuvette; (ii) passing the at least two beams through the cuvette at their respective locations and through the sample to be measured; and (iii) measuring at least two respective emitted light beams with the detector; and comparing the at least two emitted light beams to determine if: all the emitted light beams should be disregarded; one or more of the emitted light beams should be disregarded; or the sample absorbances should be averaged. In a preferred embodiment, the method includes taking at least three measurements. In another preferred embodiment, the spectrophotometry is absorption spectrophotometry, and the method is performed on a diagnostic analyzer.
Abstract:
A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.
Abstract:
A fourth embodiment of the present invention is a method of generating a temperature compensated absorbance spectrum. The method includes the steps of: a. providing a sample spectrum and an estimated temperature of a backdrop object; b. from a set of known temperature spectra related to a known background temperature, selecting at least two known temperature spectra representing a background temperature above and below the estimated temperature; c. comparing the sample spectrum to the known temperature spectra in order to determine a sample background spectrum; and d. calculating an absorbance spectrum from the sample spectrum and the background spectrum.
Abstract:
A fourth embodiment of the present invention is a method of generating a temperature compensated absorbance spectrum. The method includes the steps of: a. providing a sample spectrum and an estimated temperature of a backdrop object; b. from a set of known temperature spectra related to a known background temperature, selecting at least two known temperature spectra representing a background temperature above and below the estimated temperature; c. comparing the sample spectrum to the known temperature spectra in order to determine a sample background spectrum; and d. calculating an absorbance spectrum from the sample spectrum and the background spectrum.
Abstract:
A dosimetry probe for monitoring light irradiation dosages and for providing irradiance measurements to monitor the application of light during a phototherapy procedure. The dosimetry probe includes a light delivery optical fiber operable to transmit optical radiation to target tissue and a plurality of dosimetry optical fibers substantially coextensive with the light delivery optical fiber, the distal ends of each of the dosimetry optical fibers arranged at a different axial distance from the light delivery optical fiber to provide irradiance measurements at a number of different axial distances. The dosimetry probe may include a safety feedback optical fiber to monitor the intensity of the treatment light independent of the influence of the optical properties of the target tissue. The dosimetry probe may also include a source dosimetry optical fiber for carrying a modulated dosimetry light signal, which can be selectively detected by means of frequency lock-in technology.
Abstract:
The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.
Abstract:
A method of calibrating a hyperspectral imaging spectrometer. A PTFE panel (26) having substantially 100% reflectance across a spectrum of interest is mechanically inserted into the spectrometer's field-of-view. The panel (26) is illuminated by a lamp (22, 24), such as a quartz Tungsten Halogen lamp, so that reflected radiation from the panel (26) floods the spectrometer's FOV. The image generated by the spectrometer is electronically stored. Next, the reflectance panel (26) is removed and replaced with a PTFE panel (40) that is doped with a rare earth element, such as holmium oxide, dysprosium oxide, erbium oxide or other dopants. The dopant serves the purpose of producing many distinct absorption features in the reflected spectra whose wavelengths spacings and absorption line widths are precisely known. The image obtained form the doped PTFE panel (40) is then electronically stored. The image obtained from the doped PTFE panel (40) is divided by the image obtained from the reflectance PTFE panel (26) on a pixel-by-pixel basis to obtain a measurement of the absorption spectra of the dopant. The measured spectra is compared to the known spectra as a function of spatial position across the focal plane of the spectrometer to obtain the spectral calibration. A center wavelength is then assigned to each pixel in the FPA based on the calibration.
Abstract:
The fiber-optic pipette (FOP) couples a glass capillary, common syringe and a single optical fiber together to provide for a facile means of achieving long-pathlength capillary spectroscopy. The FOP acquires rapid spectroscopic measurements of small-volume liquid samples, while simultaneously achieving signal enhancements of the collected spectroscopic signal.
Abstract:
A high temperature gas stream optical flame sensor for flame detection in gas turbine engines, and method for fabricating same is provided. The sensor generally comprises a silicon carbide photodiode and silicon carbide based amplification hardware for generating a signal indicative of the presence of the flame. In a preferred embodiment, the photodiode and amplification hardware are disposed within a sensor housing and the photodiode is situated within a fuel/air premixer.
Abstract:
A method for graphically forming a difference spectrum from a sample spectrum and a reference spectrum on a computer system includes displaying an initial difference spectrum on the display the initial difference spectrum being equal to the sample spectrum, selecting a data point in the initial difference spectrum, having an associated wave number, with a relative pointing device on the display, moving the data point a measurable amount on the display with the relative pointing device, determining a scaling factor in response to the measurable amount and to a data point in the reference spectrum having the same associated wave number, scaling each data point in the reference spectrum by the scaling factor to form a scaled reference spectrum, determining the difference spectrum between the sample spectrum and the scaled reference spectrum, and displaying at least a portion of the difference spectrum on the display.