METHOD AND SYSTEM FOR PLASMA-INDUCED TERAHERTZ SPECTROSCOPY
    231.
    发明申请
    METHOD AND SYSTEM FOR PLASMA-INDUCED TERAHERTZ SPECTROSCOPY 有权
    用于等离子体诱导的TERAHERTZ光谱的方法和系统

    公开(公告)号:US20080203306A1

    公开(公告)日:2008-08-28

    申请号:US11835152

    申请日:2007-08-07

    Abstract: A method of analyzing a remotely-located object includes the step of illuminating at least a portion of a targeted object with electromagnetic radiation to induce a phase transformation in the targeted object, wherein the phase transformation produces an emitter plasma, which emits terahertz radiation. The method also includes the step of ionizing a volume of an ambient gas to produce a sensor plasma by focusing an optical probe beam in the volume and the step of detecting an optical component of resultant radiation produced from an interaction of the focused optical probe beam and the terahertz radiation in the sensor plasma. Detecting an optical component of the resultant radiation emitted by the sensor plasma facilitates detection of a characteristic fingerprint of the targeted object imposed onto the terahertz radiation produced as a result of the induced phase transformation.

    Abstract translation: 分析遥远物体的方法包括用电磁辐射照射目标物体的至少一部分以引起目标物体中的相变的步骤,其中相变产生发射太赫兹辐射的发射体等离子体。 该方法还包括使体积的环境气体电离以通过将光学探针束聚焦在体积中来产生传感器等离子体的步骤,以及检测由聚焦的光学探针光束和 传感器等离子体中的太赫兹辐射。 检测由传感器等离子体发射的所得辐射的光学部件有助于检测施加在由感应相变所产生的太赫兹辐射上的目标物体的特征指纹。

    Method for Operating an Optical Emission Spectrometer
    232.
    发明申请
    Method for Operating an Optical Emission Spectrometer 有权
    操作光发射光谱仪的方法

    公开(公告)号:US20080198377A1

    公开(公告)日:2008-08-21

    申请号:US11814051

    申请日:2005-11-04

    CPC classification number: G01J3/28 G01J3/20 G01J3/443 G01N21/67

    Abstract: The invention relates to a method for the spectral analysis of metal samples with the following steps: a. Recording of a spectrum of an unknown sample with a number of preset excitation parameters, b. Comparison of the spectrum with stored spectra of a number of control samples, c. Determination of the control sample with the best concordance of spectra, d. Setting of the excitation parameters, which are stored for the best and closest control sample determined in step c, e. Recording of the spectrum of the unknown sample with the excitation parameters set in step d, f. Calculation of the intensity ratios of the analysis lines stored for the control sample and the internal standards of the spectrum recorded in step e.

    Abstract translation: 本发明涉及金属样品的光谱分析方法,具体步骤如下:a。 用多个预设的激励参数记录未知样品的光谱,b。 将光谱与多个对照样品的储存光谱进行比较,c。 用最好的光谱一致性测定对照样品,d。 为在步骤c中确定的最佳和最接近的对照样品存储的激发参数的设定, 用步骤d,f中设定的激发参数记录未知样品的光谱。 计算存储在对照样品中的分析线和步骤e记录的光谱的内部标准的强度比。

    Detecting minority gaseous species by light-emission spectroscopy
    233.
    发明授权
    Detecting minority gaseous species by light-emission spectroscopy 失效
    通过发光光谱法检测少数气态物质

    公开(公告)号:US07403283B2

    公开(公告)日:2008-07-22

    申请号:US11064484

    申请日:2005-02-24

    Abstract: A method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of the radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of the sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

    Abstract translation: 一种通过光谱仪(8)通过发光光谱检测混合物中的少数气态物质的方法和装置,其中使用由用于分析的气体混合物中存在的等离子体(4)发射的辐射,并且在 放射线的光谱确定出大多数气态物质,其呈现对少数物种的存在敏感的振幅,关于少数气态物质的浓度的信息从敏感线的幅度推导出 (s)。 这使得可以实时监测少数气态物质。

    Optical Sensor With Chemically Reactive Surface
    234.
    发明申请
    Optical Sensor With Chemically Reactive Surface 有权
    带有化学反应表面的光学传感器

    公开(公告)号:US20080094632A1

    公开(公告)日:2008-04-24

    申请号:US11551158

    申请日:2006-10-19

    Abstract: An improved optical sensor and methods for measuring the presence of various materials or constituents in a fluid sample uses reactive material(s) in a fluid environment. The reactive materials have optical properties that change in the presence of a target material that may be present in the environment. An optical emitter generates light that is directed to the reactive materials, and one or more optical detectors receive reflected light from one or more interfaces in the optical path between the emitter and the detector(s), one or more of the interfaces having a reactive material. The reactive material(s), emitter(s), and detector(s) are selected based on the desired target material to be sensed.

    Abstract translation: 用于测量流体样品中各种材料或组分的存在的改进的光学传感器和方法使用在流体环境中的反应性材料。 反应性材料具有在可能存在于环境中的目标材料存在下变化的光学性质。 光发射器产生指向反应材料的光,并且一个或多个光学检测器接收来自发射器和检测器之间的光路中的一个或多个界面的反射光,一个或多个界面具有反应性 材料。 反应性材料,发射器和检测器基于要感测的期望目标材料来选择。

    Optical Spark Mode Discriminator Methods and Systems
    235.
    发明申请
    Optical Spark Mode Discriminator Methods and Systems 有权
    光学火花模式鉴别器方法和系统

    公开(公告)号:US20070258090A1

    公开(公告)日:2007-11-08

    申请号:US11382192

    申请日:2006-05-08

    CPC classification number: G01J3/443 G01R31/1227

    Abstract: Methods and systems for discriminating among sparking modes are disclosed. In one embodiment, a method includes receiving light from a spark into a spectrometer, generating a light intensity spectrum using the spectrometer, and classifying the sparking mode based on an analysis of the light intensity spectrum. The light intensity spectrum may be analyzed for the presence of an atomic emission and a broad blackbody emission. In further embodiments, light emitted by the spark may be received into a photodetector, and the classification of the sparking mode may be based on an analysis of an intensity profile, including at least one of a rise-time phase, a peak intensity, and a drop-off phase.

    Abstract translation: 公开了用于区分火花模式的方法和系统。 在一个实施例中,一种方法包括将来自火花的光接收到光谱仪中,使用光谱仪产生光强度光谱,并且基于光强度光谱的分析对火花模式进行分类。 可以分析光强度谱的原子发射和宽黑体发射的存在。 在另外的实施例中,由火花发射的光可以被接收到光电检测器中,并且火花模式的分类可以基于对强度分布的分析,包括上升时间相位,峰值强度和 一个下降阶段。

    Spectroscopic feedback for high density data storage and micromachining
    236.
    发明申请
    Spectroscopic feedback for high density data storage and micromachining 失效
    高密度数据存储和微加工的光谱反馈

    公开(公告)号:US20070188752A1

    公开(公告)日:2007-08-16

    申请号:US11375882

    申请日:2006-03-14

    CPC classification number: G01J3/28 G01J3/443

    Abstract: Optical breakdown by predetermined laser pulses in transparent dielectrics produces an ionized region of dense plasma confined within the bulk of the material. Such an ionized region is responsible for broadband radiation that accompanies a desired breakdown process. Spectroscopic monitoring of the accompanying light in real-time is utilized to ascertain the morphology of the radiated interaction volume. Such a method and apparatus as presented herein, provides commercial realization of rapid prototyping of optoelectronic devices, optical three-dimensional data storage devices, and waveguide writing.

    Abstract translation: 在透明电介质中通过预定的激光脉冲进行的光学击穿产生在该材料的主体内限制的致密等离子体的电离区域。 这样的电离区域负责伴随着所需的击穿过程的宽带辐射。 利用对实时伴随光的光谱监测来确定辐射相互作用体积的形态。 这样的方法和装置提供了光电器件,光学三维数据存储器件和波导写入的快速原型的商业实现。

    Apparatus for non-invasive analysis of gas compositions in insulated glass panes
    237.
    发明申请
    Apparatus for non-invasive analysis of gas compositions in insulated glass panes 审中-公开
    用于绝缘玻璃板气体成分非侵入性分析的装置

    公开(公告)号:US20070103686A1

    公开(公告)日:2007-05-10

    申请号:US11272106

    申请日:2005-11-08

    CPC classification number: G01N21/67 G01J3/02 G01J3/0291 G01J3/36 G01J3/443

    Abstract: An apparatus for non-destructively measuring gas compositions in insulated glazing units has an integrated structure that houses circuitry to generate a localized high voltage discharge utilizing a floating ground plane. The localized high voltage discharge is discharged via an integrally arranged discharge head such that an optical emission from an insulated glazing unit in response to the localized high voltage discharge is sampled and analyzed by components housed by the structure

    Abstract translation: 用于非绝缘测量绝缘玻璃窗单元中的气体组成的装置具有集成结构,其容纳利用浮动接地平面产生局部高压放电的电路。 局部高压放电通过整体布置的放电头放电,使得响应于局部高压放电的来自绝缘玻璃单元的光发射被采用由结构容纳的部件进行采样和分析

    Microplasma emission spectrometer
    238.
    发明授权
    Microplasma emission spectrometer 有权
    微量发射光谱仪

    公开(公告)号:US07123361B1

    公开(公告)日:2006-10-17

    申请号:US10708450

    申请日:2004-03-04

    Inventor: Frank C. Doughty

    CPC classification number: G01J3/443 G01J3/02 G01J3/027 G01N21/68 H05H1/30

    Abstract: A microplasma emission spectrometer is described that includes a chamber for confining a sample volume of gas. A microplasma source that includes a resonant antenna structure generates a microplasma in the chamber from the sample volume of gas. A RF power supply provides power to the resonant antenna structure that generates the microplasma from the sample volume of gas. A spectrally sensitive detector is optically coupled to the microplasma. The entrance of the spectrally sensitive detector has dimensions and is positioned so that emissions from at least one-tenth of a total volume of the microplasma are transmitted through the entrance of the spectrally sensitive detector.

    Abstract translation: 描述了一种微血浆发射光谱仪,其包括用于限制样品体积的气体的室。 包括谐振天线结构的微血浆源从气体的样品体积产生腔室中的微血管。 RF电源为谐振天线结构提供电力,其从气体的样品体积产生微量等离子体。 光谱敏感检测器光学耦合到微质体。 光谱敏感检测器的入口具有尺寸并且被定位成使得来自微量体积的至少十分之一的发射通过光谱敏感检测器的入口传输。

    Method and apparatus for etch endpoint detection
    239.
    发明授权
    Method and apparatus for etch endpoint detection 有权
    用于蚀刻端点检测的方法和设备

    公开(公告)号:US07053994B2

    公开(公告)日:2006-05-30

    申请号:US10696628

    申请日:2003-10-28

    CPC classification number: G01N21/68 G01J3/02 G01J3/0229 G01J3/443 H01J37/32963

    Abstract: Broadly speaking, an invention is provided for monitoring a plasma optical emission. More specifically, the present invention provides a method for monitoring the plasma optical emission through a variable aperture to detect an endpoint of a plasma etching process without interferences that could lead to false endpoint calls. The method includes collecting optical emission data from a plasma through an aperture defined by moveable members. The moveable members are capable of varying a configuration of the aperture. The method also includes holding the moveable members at a particular time to cause the aperture to maintain a fixed configuration. The method further includes detecting a specific perturbation in the plasma optical emission while holding the moveable members.

    Abstract translation: 概括地说,提供了一种用于监测等离子体光发射的发明。 更具体地,本发明提供了一种用于通过可变孔径监测等离子体光发射以检测等离子体蚀刻过程的端点的方法,而不会导致虚假端点呼叫的干扰。 该方法包括通过由可移动构件限定的孔收集来自等离子体的光发射数据。 可移动构件能够改变孔径的构造。 该方法还包括在特定时间保持可移动构件以使孔保持固定构型。 该方法还包括在保持可移动构件的同时检测等离子体光发射中的特定扰动。

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