公开(公告)号：US6077386A

公开(公告)日：2000-06-20

申请号：US65680

申请日：1998-04-23

Applicant: Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

Inventor： Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

IPC: G01J3/00 ,  G01J3/28 ,  G01J3/443 ,  C23F1/02

CPC classification number: G01J3/443 ,  G01J3/28 ,  G01J2003/2866

Abstract: The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

公开(公告)号：US5751416A

公开(公告)日：1998-05-12

申请号：US705267

申请日：1996-08-29

Applicant: Jagdish P. Singh ,  Fang-Yu Yueh ,  Robert L. Cook ,  Hansheng Zhang

Inventor： Jagdish P. Singh ,  Fang-Yu Yueh ,  Robert L. Cook ,  Hansheng Zhang

IPC: G01J3/30 ,  G01N21/71 ,  E01J3/30

CPC classification number: G01N21/718 ,  G01J3/30 ,  G01J3/443

Abstract: The invention relates to an analytical method using laser-induced breakdown spectroscopy.

Abstract translation: 本发明涉及使用激光诱导击穿光谱的分析方法。

公开(公告)号：US5160576A

公开(公告)日：1992-11-03

申请号：US664826

申请日：1991-03-05

Applicant: Michael Robbins

Inventor： Michael Robbins

IPC: G01B11/06 ,  G01J3/12 ,  G01J3/443 ,  G01N21/67 ,  G02B5/28

CPC classification number: G02B5/289 ,  G01B11/0683 ,  G01N21/67 ,  G01J2003/1213 ,  G01J3/443

Abstract: A method of optically detecting a change in intensity of an emission peak in a plasma process, such as a plasma etching process, by reflecting an emission spectrum of radiation from the plasma reaction off of a pair of rugate filters. The reflected emission spectrum has increased in-band reflections and decreased out-of-band reflections which provides reduced noise and an easier-to-detect emission peak. The method can be used for end-point detection in a plasma etching process such as etching of SiO.sub.2.

Abstract translation: 通过将来自等离子体反应的辐射的发射光谱反射离开一对贪婪滤光器，光电检测等离子体工艺中的发射峰值的变化的方法，例如等离子体蚀刻工艺。 反射的发射光谱具有增加的带内反射和减少的带外反射，其提供降低的噪声和更易于检测的发射峰。 该方法可用于诸如蚀刻SiO 2的等离子体蚀刻工艺中的端点检测。

公开(公告)号：US4966458A

公开(公告)日：1990-10-30

申请号：US357980

申请日：1989-05-26

Applicant: Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

Inventor： Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

IPC: G01J3/04 ,  G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/42 ,  G01J3/44 ,  G01J3/443 ,  G01N21/31

CPC classification number: G01J3/04 ,  G01J3/12 ,  G01J3/2803 ,  G01J2003/045 ,  G01J2003/102 ,  G01J2003/1204 ,  G01J2003/1295 ,  G01J2003/1828 ,  G01J2003/425 ,  G01J3/1838 ,  G01J3/42 ,  G01J3/4406 ,  G01J3/443 ,  G01N2021/174 ,  G01N2021/3129

Abstract: An optical system for a multidetector array spectrophotometer which includes multiple light sources for emitting light of selected wavelength ranges and means for selectively transmitting the selected wavelength ranges of light to respective slits of a multi-slit spectrogrpah for multiple wavelength range detection. The spectrograph has two or more slits which direct the selected wavelength ranges of the light spectra to fall upon a dispersive and focusing system which collects light from each slit, disperses the light by wavelength and refocuses the light at the positions of a single set of detectors.

Abstract translation: 一种多检测器阵列分光光度计的光学系统，其包括用于发射所选波长范围的光的多个光源和用于选择性地将所选择的波长范围的光传输到用于多波长范围检测的多狭缝光谱仪的相应狭缝的装置。 光谱仪具有两个或更多个狭缝，其将所选择的光谱波长范围引导到分散和聚焦系统上，色散和聚焦系统收集来自每个狭缝的光，通过波长分散光并将光重新聚焦在单组检测器的位置 。

公开(公告)号：US4925307A

公开(公告)日：1990-05-15

申请号：US606037

申请日：1984-05-01

Applicant: David A. Cremers ,  Leon J. Radziemski ,  Thomas R. Loree

Inventor： David A. Cremers ,  Leon J. Radziemski ,  Thomas R. Loree

IPC: G01J3/443 ,  G01N21/63 ,  G01N21/71

CPC classification number: G01N21/718 ,  G01J3/443 ,  G01N21/63

Abstract: A method and apparatus for the qualitative and quantitative spectroscopic investigation of elements present in a liquid sample using the laser spark. A series of temporally closely spaced spark pairs is induced in the liquid sample utilizing pulsed electromagnetic radiation from a pair of lasers. The light pulses are not significantly absorbed by the sample so that the sparks occur inside of the liquid. The emitted light from the breakdown events is spectrally and temporally resolved, and the time period between the two laser pulses in each spark pair is adjusted to maximize the signal-to-noise ratio of the emitted signals. In comparison with the single pulse technique, a substantial reduction in the limits of detectability for many elements has been demonstrated. Narrowing of spectral features results in improved discrimination against interfering species.

Abstract translation: 一种用于使用激光火花对存在于液体样品中的元素进行定性和定量光谱研究的方法和装置。 利用来自一对激光器的脉冲电磁辐射，在液体样品中诱发了一系列时间上紧密的间隔的火花对。 光脉冲不被样品显着吸收，使得火花发生在液体内部。 来自击穿事件的发射光被光谱和时间分辨，并且调整每个火花对中的两个激光脉冲之间的时间周期以最大化发射信号的信噪比。 与单脉冲技术相比，已经证明了许多元件的可检测限度的显着降低。 光谱特征的缩小导致改善对干扰物种的歧视。

公开(公告)号：US4893259A

公开(公告)日：1990-01-09

申请号：US201510

申请日：1988-06-02

Applicant: Zoe A. Grosser ,  John B. Collins ,  Ewa M. Pruszkowski

Inventor： Zoe A. Grosser ,  John B. Collins ,  Ewa M. Pruszkowski

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/443 ,  G01N21/71

CPC classification number: G01J3/28 ,  G01J2003/2866 ,  G01J2003/2869 ,  G01J3/443

Abstract: A method and apparatus for standardizing spectral line intensities in a spectral monochromator separate an input beam into a sample spectral line characteristic of a sample element, a reference spectral line, a standard spectral line and a background spectral band. At a first point in time an intensity I.sub.A of the sample line, a first intensity I.sub.R1 of the reference line and a first intensity I.sub.B1 of the background band are measured. At a second point in time an intensity I.sub.S of the standard line, a second intensity I.sub.R2 of the reference line and a second intensity I.sub.B2 of the background band are measured. An intensity ratio IR defined by the formula ##EQU1## is computed wherein the intensity ratio IR represents a standardized intensity of the sample line compensated for source fluctuations.

公开(公告)号：US4824249A

公开(公告)日：1989-04-25

申请号：US165261

申请日：1987-12-01

Applicant: Michael A. Lucas ,  Terry C. Hughes

Inventor： Michael A. Lucas ,  Terry C. Hughes

IPC: G01J3/28 ,  G01J3/443 ,  G01N21/67 ,  G01J3/30

CPC classification number: G01N21/67 ,  G01J2003/283 ,  G01J3/443

Abstract: An analysis system for directly analyzing solid samples by atomic emission spectroscopy wherein the system includes an atomic spectral lamp (1) of the type which enables a solid sample to be analyzed to be demountably located as a cathode of the lamp (1), means (2) for producing a primary electric discharge by cathodic sputtering from the sample via connection (8) and a secondary boosted discharge for analytical emission via connection (9), spectral wave length analysis device (4) being arranged to receive and determine the intensity of spectral lines emitted by the lamp (1), and control means (3) for controlling the system, the current level of the sample cathode and the operation of the spectral wave length analysis device (4) being controlled on the basis of output from the photomultiplier tube (7) such that the intensity of the spectral lines is maximized and the relationship between spectral line intensity and concentration of the corresponding element in the sample is maintained in a region which is substantially linear.

Abstract translation: PCT No.PCT / AU87 / 00101 Sec。 371 1987年12月1日第 102（e）1987年12月1日PCT PCT 1987年4月15日PCT公布。 公开号WO87 / 06341 日本1987年10月22日。用于通过原子发射光谱直接分析固体样品的分析系统，其中所述系统包括能够使固体样品被分析的类型的原子光谱灯（1）可拆卸地定位为 灯（1），用于通过连接（8）从样品通过阴极溅射产生一次放电的装置（2）和经由连接（9）进行分析发射的次级升压放电，光谱波长分析装置（4）被布置 接收和确定由灯（1）发射的光谱线的强度，以及用于控制系统的控制装置（3），样品阴极的电流水平和光谱波长分析装置（4）的操作被控制 基于光电倍增管（7）的输出，使得光谱线的强度最大化，并且光谱线强度与sa中相应元素的浓度之间的关系 mple保持在基本上线性的区域中。

公开(公告)号：US4692630A

公开(公告)日：1987-09-08

申请号：US867093

申请日：1986-05-27

Applicant: Carl A. Gogol

Inventor： Carl A. Gogol

IPC: G01J3/36 ,  G01J3/443 ,  G01N21/62 ,  H01J27/00

CPC classification number: G01N21/62 ,  G01J3/36 ,  G01J3/443

Abstract: An optical partial pressure gas analyzer employs an electron beam to excite the outer electrons of gas atoms or molecules, and one or more photomultiplier tubes or other similar detectors to detect wavelengths of photons characteristic of the decay of the outer electrons of one or more species of gas molecules. The photomultiplier tubes have a viewing direction substantially at right angles to the electron beam. A Faraday trap or similar device is employed to avoid secondary electron generation. Thin-film interference filters are favorably employed to pass a specific characteristic wavelength of the desired species, and to reject other wavelengths. An electromechanical filter changer permits each photomultiplier tube to analyze two or more gasses alternately.

Abstract translation: 光学分压气体分析仪采用电子束来激发气体原子或分子的外部电子，以及一个或多个光电倍增管或其它类似的检测器，以检测一种或多种物质的外部电子的衰变特性的光子的波长 气体分子。 光电倍增管具有基本上与电子束成直角的观察方向。 采用法拉第陷阱或类似装置避免二次电子产生。 有利地使用薄膜干涉滤光片来传递所需物质的特定波长并抑制其它波长。 机电过滤器更换器允许每个光电倍增管交替分析两个或更多个气体。

公开(公告)号：US4586820A

公开(公告)日：1986-05-06

申请号：US594482

申请日：1984-03-27

Applicant: Issei Yokoyama ,  Kiyoaki Hara

Inventor： Issei Yokoyama ,  Kiyoaki Hara

IPC: G01N21/21 ,  G01J3/443 ,  G01N21/64

CPC classification number: G01N21/6445 ,  G01J3/443

Abstract: An apparatus for measuring anisotropy of light emitted from the sample, in which photodetectors are each disposed by either side of the sample and TACs are connected to the abovesaid apparatus each correspondingly to one photodetector so that a vertical polarized component and a horizontal one of light emitted from the sample can be measured at the same time for enabling analysis operation in a short period of time and measurement in high precision.

Abstract translation: 用于测量从样品发射的光的各向异性的装置，其中光电检测器各自由样品的两侧设置，并且TAC相应于一个光电检测器连接到上述装置，使得垂直偏振分量和水平的光发射 可以同时测量样品在短时间内进行分析操作，并以高精度进行测量。

公开(公告)号：US3818197A

公开(公告)日：1974-06-18

申请号：US25915272

申请日：1972-06-02

Applicant: BAIRD ATOMIC INC

Inventor： PICCOLO A ,  TURNER A

IPC: G06F17/00 ,  G06F15/06 ,  G01J3/36 ,  G06F15/20

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/027

Abstract: A system for calculating, analyzing and presenting a chemical analysis of a specimen is comprised of a spectrometer, a converter-control, a computer, programmers, a keyboard, and a display. The format of the presented data the calculation of the specimen data and the analysis of the calculated data are specified by a combination of interrogating signals from the programmers and responsive signals from the keyboard.

Abstract translation: 用于计算，分析和呈现试样的化学分析的系统由光谱仪，转换器控制，计算机，程序员，键盘和显示器组成。 所呈现的数据的格式，样本数据的计算和计算数据的分析由来自编程器的询问信号和来自键盘的响应信号的组合指定。