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公开(公告)号：US20190179131A1
公开(公告)日：2019-06-13
申请号：US16322161
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B26/00
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.
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公开(公告)号：US20180224330A1
公开(公告)日：2018-08-09
申请号：US15749205
申请日：2016-08-04
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA , Katsuhiko KATO
CPC classification number: G01J3/18 , G01J3/0205 , G01J3/0208 , G01J3/021 , G01J3/0256 , G01J3/0262 , G01J3/0264 , G01J3/0286 , G01J3/0291 , G01J3/36 , G02B5/1861
Abstract: A spectrometer includes a support having a bottom wall part in which a depression and a peripheral part are provided, and a side wall part, a light detection element supported by the side wall part while opposing the depression, and a dispersive part disposed on an inner surface of the depression. A length of the depression in a second direction in which a plurality of grating grooves included in the dispersive part is aligned is larger than a length of the depression in a third direction orthogonal to the second direction when viewed in a first direction in which the depression and the light detection element oppose each other. An area of the peripheral part adjacent to the depression in the second direction is larger than an area of the peripheral part adjacent to the depression in the third direction when viewed in the first direction.
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公开(公告)号：US20180108625A1
公开(公告)日：2018-04-19
申请号：US15562004
申请日：2016-03-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Noburo HOSOKAWA , Nao INOUE , Katsumi SHIBAYAMA
IPC: H01L23/00 , H01L23/48 , H01L21/768
CPC classification number: H01L27/14687 , H01L21/3205 , H01L21/768 , H01L21/76898 , H01L23/481 , H01L23/522 , H01L23/532 , H01L24/02 , H01L24/05 , H01L24/13 , H01L27/14632 , H01L27/14636 , H01L27/14643 , H01L31/02005 , H01L31/0203 , H01L31/02161 , H01L31/022408 , H01L31/103 , H01L31/107 , H01L2224/02313 , H01L2224/0233 , H01L2224/0235 , H01L2224/0236 , H01L2224/02371 , H01L2224/02372 , H01L2224/02381 , H01L2224/0345 , H01L2224/05558 , H01L2224/05567 , H01L2224/0557 , H01L2224/10126 , H01L2224/11 , H01L2224/12105 , H01L2224/13007 , H01L2224/13009 , H01L2224/13021 , H01L2224/13022 , H01L2224/13024 , H01L2224/13025 , H01L2924/10253 , H01L2924/12043 , H01L2924/351 , H01L2924/00014
Abstract: A semiconductor device includes a semiconductor substrate in which a through hole is formed, a first wiring that is provided on a first surface of the semiconductor substrate, an insulating layer provided on an inner surface of the through hole and a second surface of the semiconductor substrate, and a second wiring that is provided on a surface of the insulating layer and electrically connected to the first wiring in an opening. The surface of the insulating layer includes a first region, a second region, a third region, a fourth region that is curved to continuously connect the first and the second regions, and a fifth region that is curved to continuously connect the second and the third regions. An average inclination angle of the second region is smaller than that of the first region and is smaller than that of the inner surface.
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公开(公告)号：US20170227468A1
公开(公告)日：2017-08-10
申请号：US15499244
申请日：2017-04-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Masashi ITO , Takafumi YOKINO , Masaki HIROSE , Anna YOSHIDA , Kazuto OFUJI , Yoshihiro MARUYAMA
CPC classification number: G01N21/658 , B82Y40/00 , G01J3/02 , G01J3/0205 , G01J3/12 , G01J3/44 , G01J3/4412 , G01N2201/02 , G01N2201/0227 , G01N2201/06113
Abstract: A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.
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公开(公告)号：US20170010152A1
公开(公告)日：2017-01-12
申请号：US15116232
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA
CPC classification number: G01J3/0208 , G01J3/021 , G01J3/0224 , G01J3/0256 , G01J3/0291 , G01J3/0294 , G01J3/18 , G01J3/1838 , G01J3/24 , G01J3/2803
Abstract: A spectrometer includes a first spectroscopic unit and a second spectroscopic unit. A light passing part, a reflection part, a common reflection part, a dispersive part, and a light detection part included in the first spectroscopic unit are arranged along a first reference line when viewed in a Z-axis direction. A light passing part, a reflection part, the common reflection part, a dispersive part, and a light detection part included in the second spectroscopic unit are arranged along a second reference line when viewed in the Z-axis direction. The first reference line and the second reference line intersect with one another.
Abstract translation: 光谱仪包括第一分光单元和第二分光单元。 沿Z轴方向观察时，沿着第一基准线配置第一分光单元中包括的光通过部分，反射部分，共同反射部分，分散部分和光检测部分。 沿Z轴方向观察时，沿着第二基准线配置第二分光单元中包括的光通过部分，反射部分，共同反射部分，色散部分和光检测部分。 第一参考线和第二参考线彼此相交。
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Patent Agency Ranking
公开(公告)号：US20160161334A1
公开(公告)日：2016-06-09
申请号：US15042356
申请日：2016-02-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takafumi YOKINO
IPC: G01J3/02
CPC classification number: G01J3/021 , G01J3/02 , G01J3/0202 , G01J3/0256 , G01J3/0262 , G01J3/0291 , G01J3/18 , G01J3/36
Abstract: A spectroscopic module 1 is provided with a spectroscopic unit 8 and a photodetector 9 in addition to a spectroscopic unit 7 and a photodetector 4 and thus can enhance its detection sensitivity for light in a wide wavelength range or different wavelength regions of light. A light-transmitting hole 4b is disposed between light detecting portions 4a, 9a, while a reflection unit 6 is provided so as to oppose a region R in a light-absorbing substrate 2, whereby the size can be kept from becoming larger. Ambient light La is absorbed by the region R in the substrate 2. Any part of the light La transmitted through the region R in the substrate 2 is reflected to the region R by the unit 6 formed so as to oppose the region R, whereby stray light can be inhibited from being caused by the incidence of the light La.
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公开(公告)号：US20240377255A1
公开(公告)日：2024-11-14
申请号：US18779491
申请日：2024-07-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：US20220341780A1
公开(公告)日：2022-10-27
申请号：US17634280
申请日：2020-10-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Kei TABATA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US20210159255A1
公开(公告)日：2021-05-27
申请号：US17046888
申请日：2019-04-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoya TAGUCHI , Yuki YOSHIDA , Katsumi SHIBAYAMA
IPC: H01L27/144 , H01L23/00
Abstract: A semiconductor substrate includes a first main surface and a second main surface opposing each other. The semiconductor substrate includes a plurality of second semiconductor regions in a side of the second main surface. Each of the second semiconductor regions includes a first region including a textured surface, and a second region where a bump electrode is disposed. An insulating film includes a first insulating film covering surfaces of the second semiconductor regions, and a second insulating film covering peripheries of pad electrodes. The pad electrodes include a first electrode region in contact with the second region, and a second electrode region continuous with the first electrode region. The second electrode region is disposed on at least a part of a region included in the first insulating film and corresponding to the first region. The first main surface is a light incident surface of the semiconductor substrate.
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公开(公告)号：US20200310105A1
公开(公告)日：2020-10-01
申请号：US16765547
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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