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    Pyrometer background elimination
    23.
    发明授权
    Pyrometer background elimination 有权

    公开(公告)号：US09759615B2

    公开(公告)日：2017-09-12

    申请号：US14522858

    申请日：2014-10-24

    Applicant: Applied Materials, Inc.

    Inventor： Wolfgang R. Aderhold

    IPC: G01J5/06 ,  G01J5/00 ,  H01L21/67

    CPC classification number: G01J5/06 ,  G01J5/0007 ,  G01J2005/0085 ,  G01J2005/065 ,  H01L21/67115

    Abstract: Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.

    MICROSCOPE WITH DETECTOR STOP MATCHING
    25.
    发明申请
    MICROSCOPE WITH DETECTOR STOP MATCHING 审中-公开
    显微镜与检测器停止匹配

    公开(公告)号：US20150153232A1

    公开(公告)日：2015-06-04

    申请号：US14094547

    申请日：2013-12-02

    Applicant: Checkpoint Technologies LLC

    Inventor： Guoqing Xiao

    IPC: G01J5/02 ,  G02B21/36 ,  G02B21/02 ,  G01J5/10 ,  G01N21/88

    CPC classification number: G02B21/361 ,  G01J5/0096 ,  G01J5/0825 ,  G01J2005/065 ,  G01N21/6445 ,  G01N21/6489 ,  G01N21/956 ,  G01N2021/646 ,  G01N2021/8848 ,  G02B21/0096 ,  G02B21/082

    Abstract: A microscope includes a detector device having an enclosure and an infrared sensitive detector array disposed within the enclosure. The enclosure may be cryogenically cooled and have an aperture which defines an aperture stop for an optical path extending to the detector array. The microscope may have a microscope objective with an objective exit pupil, and the microscope may include one or more intermediate optical elements which are configured to image at least a portion of the objective exit pupil at the aperture stop while simultaneously focusing light from an object transmitted through the objective at the detector array.

    Abstract translation: 显微镜包括具有外壳的检测器装置和设置在外壳内的红外敏感检测器阵列。 外壳可以被低温冷却并且具有限定用于延伸到检测器阵列的光路的孔径光阑的孔。 显微镜可以具有目标出射光瞳的显微镜物镜，并且显微镜可以包括一个或多个中间光学元件，其被配置成在孔径光阑处成像目标出射光瞳的至少一部分，同时聚焦来自被发射物体的光 通过探测器阵列的目标。

    Shielding of an IR detector
    26.
    发明授权
    Shielding of an IR detector 有权
    屏蔽红外探测器

    公开(公告)号：US08963086B2

    公开(公告)日：2015-02-24

    申请号：US13490567

    申请日：2012-06-07

    Applicant: Guiseppe Antonio Gelonese ,  Riccardo Angelo Leo Gatto

    Inventor： Guiseppe Antonio Gelonese ,  Riccardo Angelo Leo Gatto

    IPC: G01J5/06 ,  G01J5/00 ,  G01J5/02 ,  G01J5/08

    CPC classification number: G01J5/0025 ,  G01J5/025 ,  G01J5/06 ,  G01J5/0806 ,  G01J2005/065

    Abstract: In an electrical device controlled by infrared signals from a remote control, a power saving device has an infrared detection module and a processor. The infrared detection module includes an infrared sensor configured to monitor the output of the remote control device, and a shield which is at least substantially impervious to infrared radiation, and which at least partially shields the infrared sensor from infrared radiation which does not emanate from the remote control device. The processor is coupled to the infrared detection module, and supplies power to the electrical device at least substantially only when the electrical device is in active use by a nearby user, and based at least in part upon input from the infrared sensor.

    Abstract translation: 在由遥控器的红外线信号控制的电气设备中，省电装置具有红外线检测模块和处理器。 红外线检测模块包括被配置为监测遥控装置的输出的红外传感器以及至少基本上不透过红外辐射的屏蔽，并且至少部分地屏蔽红外传感器免受不从 遥控装置。 处理器耦合到红外线检测模块，并且至少基本上仅在电气设备被附近用户主动使用时，至少部分地基于来自红外传感器的输入而向电气设备供电。

    INFRA-RED IMAGER
    27.
    发明申请
    INFRA-RED IMAGER 有权
    红外成像仪

    公开(公告)号：US20120105646A1

    公开(公告)日：2012-05-03

    申请号：US13291411

    申请日：2011-11-08

    Applicant: Dov OSTER ,  Michael SINGER ,  Alina KOIFMAN ,  Tuvy MARKOVITZ

    Inventor： Dov OSTER ,  Michael SINGER ,  Alina KOIFMAN ,  Tuvy MARKOVITZ

    IPC: H04N5/33 ,  H04N5/225

    CPC classification number: G01J5/06 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0806 ,  G01J2005/0077 ,  G01J2005/065 ,  G01J2005/607

    Abstract: An infrared (IR) imaging system is presented. The system includes a cooling chamber associated with a cooler generating a certain temperature condition inside the chamber. The cooling chamber has an optical window, and includes thereinside an IR detection unit including one or more detectors thermally coupled to the cooler and at least two cold shields thermally coupled to the cooler and carrying at least two imaging optical assemblies. The at least two imaging optical assemblies are enclosed by the cold shields in between the detection unit and the optical window and thereby define at least two different optical channels for imaging light from the optical window onto the one or more detectors of the detection unit.

    Abstract translation: 介绍了红外（IR）成像系统。 该系统包括与冷却器相关联的冷却室，其在室内产生一定温度条件。 冷却室具有光学窗口，并且包括IR检测单元，其包括热耦合到冷却器的一个或多个检测器和与冷却器热耦合并携带至少两个成像光学组件的至少两个冷屏蔽件。 所述至少两个成像光学组件被所述检测单元和所述光学窗口之间的冷屏蔽包围，从而限定至少两个不同的光学通道，用于将来自所述光学窗口的光成像到所述检测单元的所述一个或多个检测器。

    Uncooled reflective shield for cryogenically-cooled radiation detectors
    29.
    发明授权
    Uncooled reflective shield for cryogenically-cooled radiation detectors 失效
    用于低温冷却辐射探测器的未冷却反射罩

    公开(公告)号：US4820923A

    公开(公告)日：1989-04-11

    申请号：US876024

    申请日：1986-06-19

    Applicant: William H. Wellman

    Inventor： William H. Wellman

    IPC: G01J5/06 ,  G01J5/08

    CPC classification number: G01J5/06 ,  G01J2005/065 ,  G01J5/061

    Abstract: A warmshield reflector for a cryogenically cooled radiation detector has a reflective surface of toroidal shape. The surface has geometric properties which cause a ray emanating from the detector to be reflected such that a ray is imaged as a defocused ring outside of and surrounding the active detector area. Several such segments are located in front of a small, cryogenically cooled detector shield, to provide an overall detector shielding effect similar to that of a larger, cryogenically cooled shield.

    Abstract translation: 用于低温冷却辐射探测器的温度场反射器具有环形形状的反射表面。 该表面具有导致从检测器发出的射线被反射的几何特性，使得射线被成像为在主动检测器区域外部和周围的散焦环。 几个这样的片段位于小的低温冷却检测器屏蔽件的前面，以提供与更大的低温冷却屏蔽件相似的总体检测器屏蔽效果。

    CRYOGENIC CAMERA ASSEMBLY WITH NON-CRYOGENIC ELECTRICAL CONNECTION SUBPLATFORM
    30.
    发明公开
    CRYOGENIC CAMERA ASSEMBLY WITH NON-CRYOGENIC ELECTRICAL CONNECTION SUBPLATFORM 审中-公开

    公开(公告)号：US20240019308A1

    公开(公告)日：2024-01-18

    申请号：US17812751

    申请日：2022-07-15

    Applicant: Raytheon Company

    Inventor： Stephen Marinsek

    IPC: G01J5/061 ,  F25D19/00 ,  G01J5/04

    CPC classification number: G01J5/061 ,  F25D19/006 ,  G01J5/045 ,  G01J2005/065

    Abstract: A camera assembly includes a housing inside of which components are maintained at a cryogenic temperature. The components maintained at cryogenic temperature include a detector that is mounted on an integrated circuit, which in turn is mounted on a platform, such as a ceramic platform, which includes electrical connections for the integrated circuit. The camera assembly also includes one or more subplatforms, maintained above the cryogenic temperature, such as ambient temperature, that receive electrical inputs from outside the housing, and make electrical connections to the platform. The connections may be made from the one or more subplatforms, through openings in the platform and/or outside one or more outer edges of the platform. The assembly may include covers of exposed parts of the one or more subplatforms, to facilitate thermal isolation between the interior of the assembly (at cryogenic temperature) and the one or more subplatforms (above cryogenic temperature).

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