IMAGING SENSOR
    24.
    发明申请
    IMAGING SENSOR 审中-公开

    公开(公告)号:US20180182798A1

    公开(公告)日:2018-06-28

    申请号:US15846584

    申请日:2017-12-19

    Applicant: IMEC VZW

    Abstract: An imaging sensor comprises: an array of light-detecting elements, wherein each light-detecting element in the array of light-detecting elements is arranged in the imaging sensor so as to detect a respective wavelength interval, wherein the respective wavelength interval differs for different light-detecting elements; a pattern arranged on the array of light-detecting elements, wherein the pattern defines a plurality of transparent areas, each transparent area being associated with a corresponding light-detecting element in the array of light-detecting elements, wherein a size of a transparent area among the plurality of transparent areas is dependent of the corresponding light-detecting element with which the transparent area is associated.

    Multi-Angle Colorimeter
    25.
    发明申请

    公开(公告)号:US20180180480A1

    公开(公告)日:2018-06-28

    申请号:US15738265

    申请日:2016-06-14

    Abstract: First and second measurement operations are performed according to each of a plurality of geometric conditions while keeping the geometric condition. In the first measurement operation, illumination light is radiated from a first light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a first light receiving position. In the second measurement operation, illumination light is radiated from a second light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a second light receiving position. The two spectroscopic measurement results are averaged. The second light radiating position and the second light receiving position are respectively disposed symmetrical to the first light radiating position and the first light receiving position with respect to a reference axis.

    WAVELENGTH TUNABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

    公开(公告)号:US20180157027A1

    公开(公告)日:2018-06-07

    申请号:US15888374

    申请日:2018-02-05

    Inventor: Koji KITAHARA

    CPC classification number: G02B26/001 G01J3/26 G01J3/51

    Abstract: A wavelength tunable interference filter includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, a first wiring electrode provided on the fixed substrate, and a first conductive member provided on the fixed substrate. The fixed reflective film is connected to the first wiring electrode through the first conductive member, and the thickness of the first conductive member is less than the thickness of the first wiring electrode.

    CALIBRATION OF A SPECTRAL ANALYSIS MODULE

    公开(公告)号:US20180149522A1

    公开(公告)日:2018-05-31

    申请号:US15362033

    申请日:2016-11-28

    Applicant: Cymer, LLC

    Inventor: Zhongquan Zhao

    Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.

    Calibration of a spectral analysis module

    公开(公告)号:US09983060B1

    公开(公告)日:2018-05-29

    申请号:US15362033

    申请日:2016-11-28

    Applicant: Cymer, LLC

    Inventor: Zhongquan Zhao

    Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.

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