-
公开(公告)号:US10060791B2
公开(公告)日:2018-08-28
申请号:US15623961
申请日:2017-06-15
Applicant: Si-Ware Systems
Inventor: Yasser M. Sabry , Diaa Abdel Maged Khalil , Mostafa Medhat , Hisham Haddara , Bassam Saadany , Khaled Hassan
CPC classification number: G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0256 , G01J3/0259 , G01J3/0291 , G01J3/26 , G01J3/45 , G01J3/4532
Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
-
公开(公告)号:US20180195902A1
公开(公告)日:2018-07-12
申请号:US15865446
申请日:2018-01-09
Applicant: Michigan Aerospace Corporation
Inventor: Paul Bryon HAYS
CPC classification number: G01J3/0229 , G01J3/0208 , G01J3/021 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J3/4406 , G01J2003/1213 , G01J2003/1221 , G01J2003/1239 , G01J2003/1243 , G01J2003/2826 , G01N21/6456 , G01N2021/635 , G01N2021/6417 , G01N2021/6471 , G01N2201/0616
Abstract: A Tilted Filter Imaging Spectrometer (TFIS) is designed to be a very small optical spectrometer having very high sensitivity and spectral resolution. These properties suggest the use of the device as a Fraunhofer Line discriminator (FLD) to detect objects that fluoresce in sunlight. According to at least one embodiment of the present invention, the tilted filter imaging spectrometer incorporates at least one dielectric filter, at least one imaging lens structure; and an imaging detector operatively positioned at a focal length of the imaging lens structure, wherein the dielectric filter is operatively positioned at an angle relative to an optical axis of the imaging lens structure. In at least a second embodiment, the tilted filter imaging spectrometer further incorporates at least one Fabry-Perot Etalon, wherein the Fabry Perot Etalon and the dielectric filter are operatively positioned at angles relative to an optical axis of the imaging lens structure.
-
公开(公告)号:US20180192879A1
公开(公告)日:2018-07-12
申请号:US15738116
申请日:2016-06-20
Inventor: Jae Youn HWANG , Se Hyo YOUN
CPC classification number: A61B5/0075 , A61B5/0082 , A61B5/441 , A61B5/6898 , A61B2017/00061 , G01J3/0218 , G01J3/0229 , G01J3/0272 , G01J3/12 , G01J3/26 , G01J3/28 , G01J3/32 , G01J2003/1213 , G01J2003/1221
Abstract: The present invention provides a mobile-based spectrum imaging device and a method for controlling the same. A mobile-based spectrum imaging device according to an embodiment of the present invention may comprise: an optical fiber for emitting, in a beam form, light which has been collected from a light source; a linear filter which is movably installed, divides the light emitted from the optical fiber into particular wavelength bands, and makes the divided light have a wavelength band changing according to the incidence location of the light; and a control unit for controlling the location of the linear filter such that the location of incident light is changed on the linear filter.
-
公开(公告)号:US20180182798A1
公开(公告)日:2018-06-28
申请号:US15846584
申请日:2017-12-19
Applicant: IMEC VZW
Inventor: Nicolaas TACK , Bert GEELEN , Bart VEREECKE
IPC: H01L27/146 , G01J1/42
CPC classification number: H01L27/14623 , G01J1/4228 , G01J3/0229 , G01J3/26 , G01J3/2803 , H01L27/14607 , H01L27/14621 , H01L27/1464 , H01L27/14643
Abstract: An imaging sensor comprises: an array of light-detecting elements, wherein each light-detecting element in the array of light-detecting elements is arranged in the imaging sensor so as to detect a respective wavelength interval, wherein the respective wavelength interval differs for different light-detecting elements; a pattern arranged on the array of light-detecting elements, wherein the pattern defines a plurality of transparent areas, each transparent area being associated with a corresponding light-detecting element in the array of light-detecting elements, wherein a size of a transparent area among the plurality of transparent areas is dependent of the corresponding light-detecting element with which the transparent area is associated.
-
公开(公告)号:US20180180480A1
公开(公告)日:2018-06-28
申请号:US15738265
申请日:2016-06-14
Applicant: Konica Minolta, Inc.
Inventor: Shinichi IIDA , Yoshitaka TERAOKA
CPC classification number: G01J3/10 , G01J3/08 , G01J3/26 , G01J3/50 , G01J3/501 , G01J3/504 , G01J2003/102
Abstract: First and second measurement operations are performed according to each of a plurality of geometric conditions while keeping the geometric condition. In the first measurement operation, illumination light is radiated from a first light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a first light receiving position. In the second measurement operation, illumination light is radiated from a second light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a second light receiving position. The two spectroscopic measurement results are averaged. The second light radiating position and the second light receiving position are respectively disposed symmetrical to the first light radiating position and the first light receiving position with respect to a reference axis.
-
26.
公开(公告)号:US20180157027A1
公开(公告)日:2018-06-07
申请号:US15888374
申请日:2018-02-05
Applicant: Seiko Epson Corporation
Inventor: Koji KITAHARA
CPC classification number: G02B26/001 , G01J3/26 , G01J3/51
Abstract: A wavelength tunable interference filter includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, a first wiring electrode provided on the fixed substrate, and a first conductive member provided on the fixed substrate. The fixed reflective film is connected to the first wiring electrode through the first conductive member, and the thickness of the first conductive member is less than the thickness of the first wiring electrode.
-
公开(公告)号:US20180149522A1
公开(公告)日:2018-05-31
申请号:US15362033
申请日:2016-11-28
Applicant: Cymer, LLC
Inventor: Zhongquan Zhao
CPC classification number: G03F7/70575 , G01J3/0205 , G01J3/027 , G01J3/26 , G01J3/28 , G01J2003/2866 , G01J2003/2879 , G01N21/3103 , G01N21/33 , G03F7/70516 , G03F7/7085 , H01S5/0687
Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.
-
公开(公告)号:US09983060B1
公开(公告)日:2018-05-29
申请号:US15362033
申请日:2016-11-28
Applicant: Cymer, LLC
Inventor: Zhongquan Zhao
CPC classification number: G03F7/70575 , G01J3/0205 , G01J3/027 , G01J3/26 , G01J3/28 , G01J2003/2866 , G01J2003/2879 , G01N21/3103 , G01N21/33 , G03F7/70516 , G03F7/7085 , H01S5/0687
Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.
-
公开(公告)号:US20180129035A1
公开(公告)日:2018-05-10
申请号:US15867099
申请日:2018-01-10
Applicant: Seiko Epson Corporation
Inventor: Akira SANO , Yasushi MATSUNO , Koji KITAHARA
CPC classification number: G02B26/001 , G01J3/26 , G01J3/50 , G02B5/284
Abstract: An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror.
-
公开(公告)号:US09939321B2
公开(公告)日:2018-04-10
申请号:US15262801
申请日:2016-09-12
Inventor: Michael Bartosewcz , Tristan Van Hoorebeke , Phillip Michael Henry , Anthony William Sarto
IPC: G01J3/28 , G01J3/26 , H01L27/146 , G01J3/12
CPC classification number: G01J3/26 , B28B21/42 , G01J3/12 , G01J3/28 , G01J3/2823 , G01J2003/123 , G01J2003/2826 , G02B5/201 , G02B5/28 , H01L27/14621 , H01L27/14625 , H01L27/14634 , H01L27/14649
Abstract: A hyperspectral optical element for monolithic detectors is provided. In one embodiment, for example a hyperspectral optical element includes a faceplate layer adapted to be mounted on top of a monolithic detector. The faceplate layer comprises a reflective inner surface. A notched layer includes a plurality of notched surfaces and is mounted to the faceplate layer. The notched surfaces oppose the reflective inner surface of the faceplate and define a plurality of variable depth cavities between the reflective inner surface of the faceplate layer and the plurality of notched surfaces of the notched layer. The faceplate layer and the notched layer are substantially transparent to a received signal and the plurality of variable depth cavities provides resonant cavities for one or more wavelengths of the received signal.
-
-
-
-
-
-
-
-
-