公开(公告)号：US06240932B1

公开(公告)日：2001-06-05

申请号：US09503658

申请日：2000-02-14

Applicant: Michael J. Patterson ,  Timothy R. R. Verhey ,  George C. Soulas

Inventor： Michael J. Patterson ,  Timothy R. R. Verhey ,  George C. Soulas

IPC: B08B312

CPC classification number: H01J37/32596 ,  H01J1/025

Abstract: “The present invention is a process for cleaning a cathode tube and other subassemblies in a hollow cathode assembly. In the disclosed process, hand covering elastomer gloves are used for handling all cathode assembly parts. The cathode tube and other subassemblies are cleaned with a lint-free cloth damped with acetone, then wiped with alcohol, immersed in ethyl alcohol or acetone, and ultrasonic agitation is applied, heating to 60° C. for ethyl alcohol or 56° C. for acetone. The cathode tube and other sub assemblies are dried by blowing with nitrogen gas.”

Abstract translation: “本发明是用于清洁中空阴极组件中的阴极管和其它子组件的方法，在所公开的方法中，手用弹性手套用于处理所有阴极组件，阴极管和其它子组件用棉绒 无纺布用丙酮阻尼，然后用酒精擦拭，浸于乙醇或丙酮中，超声波搅拌，加热至乙醇为60℃，丙酮为56℃，阴极管和其他副组件为 通过吹氮气干燥“。

公开(公告)号：US5007373A

公开(公告)日：1991-04-16

申请号：US356433

申请日：1989-05-24

Applicant: Keith O. Legg ,  Yonhua Tzeng

Inventor： Keith O. Legg ,  Yonhua Tzeng

IPC: C23C16/27 ,  C23C16/503 ,  H01J1/02

CPC classification number: C23C16/272 ,  C23C16/277 ,  C23C16/503 ,  H01J1/025

Abstract: A spiral hollow cathode having adjacent layers which are equivalent to a two-dimensional array of small hollow cathodes. The cathode may be used for producing large area electron beams and for plasma-assisted deposition of films such as diamond over a large area without requiring heating external to the plasma itself.

Abstract translation: 具有相当于小空心阴极的二维阵列的相邻层的螺旋空心阴极。 阴极可以用于制造大面积电子束，并且用于在大面积上等离子体辅助沉积诸如金刚石的膜，而不需要在等离子体本身之外加热。

公开(公告)号：US4863581A

公开(公告)日：1989-09-05

申请号：US152043

申请日：1988-02-04

Applicant: Yukio Inokuti ,  Osamu Ohkubo

Inventor： Yukio Inokuti ,  Osamu Ohkubo

IPC: C23C14/28 ,  H01J1/02 ,  H01J37/305

CPC classification number: C23C14/28 ,  H01J1/025 ,  H01J37/3053

Abstract: A hollow cathode gun used in ion plating through the HCD process comprises a hollow cathode consisting of an outer graphite layer and an inner Ta, W or LaB.sub.6 layer. The deposition device hollow comprises at least one crucible housing an evaporation material, a substrate and a reaction gas inlet, and is provided with a focusing coil surronding the outer layer of the hollow cathode and another focusing coil surrounding the crucible.

公开(公告)号：US2810090A

公开(公告)日：1957-10-15

申请号：US36166353

申请日：1953-06-15

Applicant: BELL TELEPHONE LABOR INC

Inventor： DONALD MACNAIR

IPC: H01J1/02 ,  H01J3/02

CPC classification number: H01J3/02 ,  H01J1/025

公开(公告)号：US09552952B2

公开(公告)日：2017-01-24

申请号：US15091433

申请日：2016-04-05

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J27/14 ,  H01J27/08 ,  H01J1/02 ,  H01J1/14

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US09516733B1

公开(公告)日：2016-12-06

申请号：US14814636

申请日：2015-07-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H01J1/02 ,  H05H1/24 ,  H01J61/09 ,  H01J23/033

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.

Abstract translation: 一种通过将至少一个激光引入气体体积并点燃产生光的等离子体来产生激光持续等离子体光的方法。 从等离子体中除去气体体积的加热部分并冷却。 气体体积的冷却部分以层流返回到等离子体。 光被反射器收集并提供到期望的位置。

公开(公告)号：US20160217961A1

公开(公告)日：2016-07-28

申请号：US15091433

申请日：2016-04-05

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J1/02 ,  H01J1/14

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US20140354138A1

公开(公告)日：2014-12-04

申请号：US14263970

申请日：2014-04-28

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J1/02

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US08143788B2

公开(公告)日：2012-03-27

申请号：US12202252

申请日：2008-08-30

Applicant: Richard R. Hofer ,  Dan M. Goebel ,  Ronnie M. Watkins

Inventor： Richard R. Hofer ,  Dan M. Goebel ,  Ronnie M. Watkins

IPC: H01J17/06

CPC classification number: H01J1/025 ,  B64G1/405 ,  F03H1/0025 ,  H01J3/027

Abstract: An apparatus and method for achieving an efficient central cathode in a Hall effect thruster is disclosed. A hollow insert disposed inside the end of a hollow conductive cathode comprises a rare-earth element and energized to emit electrons from an inner surface. The cathode employs an end opening having an area at least as large as the internal cross sectional area of the rare earth insert to enhance throughput from the cathode end. In addition, the cathode employs a high aspect ratio geometry based on the cathode length to width which mitigates heat transfer from the end. A gas flow through the cathode and insert may be impinged by the emitted electrons to yield a plasma. One or more optional auxiliary gas feeds may also be employed between the cathode and keeper wall and external to the keeper near the outlet.

Abstract translation: 公开了一种在霍尔效应推进器中实现高效中心阴极的装置和方法。 设置在中空导电阴极的端部内部的中空插入件包括稀土元素并被激发以从内表面发射电子。 阴极采用具有至少与稀土插入件的内部横截面积相同的面积的端部开口，以增加从阴极端部的通过量。 此外，阴极采用基于阴极长度至宽度的高纵横比几何形状，其减小了端部的热传递。 通过阴极和插入件的气体流可以被发射的电子撞击以产生等离子体。 还可以在阴极和保持器壁之间使用一个或多个可选的辅助气体进料并且在出口附近的保持器的外部。

公开(公告)号：US20080290799A1

公开(公告)日：2008-11-27

申请号：US11042228

申请日：2005-01-25

Applicant: J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

Inventor： J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

IPC: H01J17/49

CPC classification number: H01J61/09 ,  H01J1/025 ,  H01J9/02 ,  H01J17/066 ,  H01J37/32018 ,  H01J37/32596 ,  H01J65/046

Abstract: A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric on a first conducting layer. A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time-varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.

Abstract translation: 一种制造微腔放电装置和器件阵列的方法。 通过在第一导电层上层叠电介质来制造器件。 第二导电层或结构覆盖在电介质层上。 在一些装置中，产生穿过第二导电层或结构和电介质层的微腔。 在其他装置中，微腔穿透到第一导电层。 第二导电层或结构与微腔的内表面一起覆盖有第二介电层。 然后用放电气体填充微腔。 当在导体之间施加适当幅度的时变电位时，在微腔中产生微等离子体放电。 由于导体被封装，因此这些器件可以延长使用寿命，从而屏蔽导体不受暴露于等离子体的退化。 一些装置是柔性的，并且电介质可以选择用作反射镜。