公开(公告)号：US09000395B2

公开(公告)日：2015-04-07

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/12 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US20150056366A1

公开(公告)日：2015-02-26

申请号：US14463041

申请日：2014-08-19

Applicant: SEN Corporation

Inventor： Hiroyuki Kariya

IPC: H01J37/24 ,  H01J37/147 ,  C23C14/48 ,  H01J37/317 ,  G01R33/07 ,  C23C14/54

CPC classification number: H01J37/243 ,  G01R33/07 ,  G01R33/072 ,  H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/24514 ,  H01J2237/248 ,  H01J2237/3045

Abstract: An ion implanter includes an energy analyzer electromagnet provided between an ion source and a processing chamber. The energy analyzer electromagnet includes a Hall probe configured to generate a measurement output in response to a deflecting magnetic field and an NMR probe configured to generate an NMR output. A control unit of the ion implanter includes a magnetic field measurement unit configured to measure the deflecting magnetic field in accordance with a known correspondence between the deflecting magnetic field and the measurement output, a magnetic field determination unit configured to determine the deflecting magnetic field from the NMR output, and a Hall probe calibration unit configured to update the known correspondence by using the deflecting magnetic field determined from the NMR output and a new measurement output of the Hall probe corresponding to the determined deflecting magnetic field.

Abstract translation: 离子注入机包括设置在离子源和处理室之间的能量分析仪电磁体。 能量分析仪电磁体包括霍尔探针，其被配置为响应于偏转磁场产生测量输出，并且NMR探针被配置为产生NMR输出。 离子注入机的控制单元包括磁场测量单元，其被配置为根据偏转磁场和测量输出之间的已知对应度来测量偏转磁场;磁场确定单元，被配置为确定偏转磁场的偏转磁场， NMR输出以及霍尔探头校准单元，其被配置为通过使用从NMR输出确定的偏转磁场和对应于所确定的偏转磁场的霍尔探头的新测量输出来更新已知对应关系。

公开(公告)号：US08963081B2

公开(公告)日：2015-02-24

申请号：US14190289

申请日：2014-02-26

Applicant: Canon Kabushiki Kaisha

Inventor： Kota Iwasaki

IPC: H01J49/40 ,  H01J49/06

CPC classification number: H01J49/061 ,  H01J37/05 ,  H01J49/40 ,  H01J2237/043 ,  H01J2237/057

Abstract: When a time-of-flight mass selector having a chopper using a deflector selects the masses of the ions, an ion beam is deflected. As a result, at least a part of the ion beams diagonally pass through an aperture electrode with respect to the axis. Accordingly, there has been a problem that a position on an object irradiated with a cluster ion beam, results in moving. This mass selector includes: a flight tube having an equipotential space that makes a charged substance fly therein; a deflector that is installed in a downstream side with respect to the flight tube in a direction in which the charged substance flies; a first aperture electrode that is installed in a downstream side with respect to the deflector in a direction in which the charged substance flies; and a second aperture electrode that is installed in between the deflector and the first aperture electrode.

Abstract translation: 当具有使用偏转器的斩波器的飞行时间质量选择器选择离子的质量时，离子束被偏转。 结果，至少一部分离子束相对于轴线对角地穿过孔电极。 因此，存在用聚簇离子束照射的物体上的位置导致移动的问题。 该质量选择器包括：具有使带电物质在其中飞行的等电位空间的飞行管; 偏转器，其安装在相对于所述飞行管的下游侧，所述偏转器沿所述带电物质飞行的方向; 第一孔电极，其安装在相对于所述偏转器的下游侧，所述第一孔电极沿所述带电物质飞行的方向; 以及安装在偏转器和第一孔径电极之间的第二孔径电极。

公开(公告)号：US08952340B2

公开(公告)日：2015-02-10

申请号：US14313128

申请日：2014-06-24

Applicant: SEN Corporation

Inventor： Mitsuaki Kabasawa ,  Tatsuo Nishihara ,  Kazuhiro Watanabe ,  Yuuji Takahashi ,  Tatsuya Yamada

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC classification number: H01J37/05 ,  H01J37/3171 ,  H01J2237/0473 ,  H01J2237/057 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/30472

Abstract: A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with respect to set beam energy and includes an energy analysis deflection electromagnet and a horizontal beam focusing element. In the ion acceleration and transportation apparatus, a double slit that is configured by an energy spread confining slit and an energy analysis slit is additionally disposed at a position at which energy dispersion and a beam size are to be appropriate. The position is determined based on a condition of the energy analysis deflection electromagnet and the horizontal beam focusing element, and the double slit performs energy separation and energy definition and decreases the energy spread of the ion beam by performing adjustment for a smaller energy spread while suppressing a decrease in the amount of a beam current.

Abstract translation: 高频加速型离子加速和输送装置是通过具有相对于设定束能量的能量扩散的高频加速系统加速离子束之后的束线，并且包括能量分析偏转电磁体和水平束聚焦元件 。 在离子加速输送装置中，在能量分散和光束尺寸适当的位置处，另外设置由能量扩散限制狭缝和能量分析狭缝构成的双狭缝。 基于能量分析偏转电磁体和水平光束聚焦元件的条件确定位置，并且双缝执行能量分离和能量定义，并且通过在抑制时能够进行更小的能量扩展的调整来减小离子束的能量扩展 光束电流量的减少。

公开(公告)号：US20140284476A1

公开(公告)日：2014-09-25

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍物上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US08800483B2

公开(公告)日：2014-08-12

申请号：US12776132

申请日：2010-05-07

Applicant: Peter F. Vandermeulen

Inventor： Peter F. Vandermeulen

IPC: C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC classification number: H01J37/32229 ,  C23C16/511 ,  C23C16/513 ,  H01J37/05 ,  H01J37/08 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/3244 ,  H01J37/32669 ,  H01J2237/057 ,  H01J2237/0817 ,  H01J2237/3323 ,  H01P3/12 ,  H01P3/127 ,  H01Q21/0043

Abstract: A plasma deposition apparatus includes a waveguide conduit having a plurality of slots therein. The waveguide conduit is coupled to a microwave source for transmitting microwaves from the microwave source through the plurality of slots. One or more pipes have an outlet end positioned at each of the plurality of slots for transporting material from one or more material sources to the plurality of slots. The apparatus also includes a plasma chamber in communication with the waveguide tube through the plurality of slots. The plasma chamber receives through said plurality of slots microwaves from the waveguide tube and material to be melted or evaporated from the one or more pipes. The plasma chamber includes a plurality of magnets disposed in an outer wall of the plasma chamber for forming a magnetic field in the plasma chamber. The plasma chamber further includes one or more outlet openings for discharging plasma containing material to be deposited on a substrate.

Abstract translation: 等离子体沉积设备包括其中具有多个狭槽的波导管道。 波导管道耦合到微波源，用于从微波源通过多个狭槽传送微波。 一个或多个管道具有位于多个狭槽中的每一个的出口端，用于将材料从一个或多个材料源输送到多个狭槽。 该装置还包括通过多个狭槽与波导管连通的等离子体室。 等离子体腔室通过所述多个槽从波导管接收微波，并且从一个或多个管道熔化或蒸发的材料。 等离子体室包括设置在等离子体室的外壁中的多个磁体，用于在等离子体室中形成磁场。 等离子体室还包括一个或多个出口开口，用于排放待沉积在衬底上的等离子体材料。

公开(公告)号：US08710452B2

公开(公告)日：2014-04-29

申请号：US13294067

申请日：2011-11-10

Applicant: Alexander Henstra

Inventor： Alexander Henstra

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/22

CPC classification number: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/31713

Abstract: A charged particle filter with an integrated energy filter, in which the charged particle emitter, the focusing electrodes, and the deflection electrodes are arranged round a straight axis. Where most energy filters used have a highly curved optical axis, and thus use parts with forms that are difficult to manufacture, the source according the invention uses electrodes surrounding a straight optical axis. A beam of charged particles can be deflected quite far from the axis showing respectable energy dispersion at an energy selecting slit without introducing coma or astigmatism that cannot be corrected, provided that some of the are formed as 120°/60°/120°/60°. Such electrodes can be attached to each other by gluing or brazing of ceramic, and then series of a highly concentric bores can be formed by, e.g., spark erosion.

Abstract translation: 具有集成能量滤波器的带电粒子滤波器，其中带电粒子发射器，聚焦电极和偏转电极绕直线布置。 在使用大多数能量过滤器具有高度弯曲的光轴的情况下，因此使用具有难以制造的形式的部件，根据本发明的源使用围绕直线光轴的电极。 带电粒子的束可以在能量选择狭缝处偏离显示出可观的能量分散的轴线，而不引入无法校正的彗差或像散，只要其中一些形成为120°/ 60°/ 120°/ 60° °。 这样的电极可以通过陶瓷的胶合或钎焊而彼此附接，然后可以通过例如火花腐蚀形成一系列高度同心的孔。

公开(公告)号：US08669517B2

公开(公告)日：2014-03-11

申请号：US13474186

申请日：2012-05-17

Applicant: William O. Hamby ,  Joseph Valinski

Inventor： William O. Hamby ,  Joseph Valinski

IPC: H01J37/30 ,  H01J49/00

CPC classification number: H01J37/3171 ,  H01J37/023 ,  H01J37/05 ,  H01J49/30 ,  H01J2237/0455 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/24514

Abstract: A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that selectively reduces the size of an exit aperture as seen by an ion beam. In one embodiment, the variable mass analysis exit aperture is located within a mass analyzer at a position upstream of a resolving aperture and effectively limits the size of an exit aperture so as to allow passage of desired implantation isotope(s) while blocking the passage of unwanted implantation isotopes. In one particular embodiment, the mass analysis variable exit aperture has a mechanical drive mechanism that enables a blocking structure to be moved into the path of an ion beam in a graduated fashion as guided by a control unit that operates based upon one or more characteristics of the ion beam.

Abstract translation: 提供了一种用于从离子束线减少离子注入物质的不想要的同位素的方法和装置。 本文公开的装置是质量分析可变出口孔，其选择性地减小出口孔的尺寸，如离子束所见。 在一个实施例中，可变质量分析出口孔位于质量分析器内的分辨孔径上游的位置处，并且有效地限制出口孔的尺寸，以允许期望的注入同位素通过，同时阻止 不想要的植入同位素。 在一个具体实施例中，质量分析可变出口孔具有机械驱动机构，其使阻挡结构能够以分级方式移动到离子束的路径中，该控制单元基于一个或多个 离子束。

公开(公告)号：US20130112890A1

公开(公告)日：2013-05-09

申请号：US13601818

申请日：2012-08-31

Applicant: N. William Parker ,  Wesley Hughes

Inventor： N. William Parker ,  Wesley Hughes

IPC: H01J3/18

CPC classification number: H01J37/05 ,  H01J37/3056 ,  H01J2237/043 ,  H01J2237/057 ,  H01J2237/1534

Abstract: A multi-element electrostatic chicane energy filter, with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements. A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam.

Abstract translation: 多元素静电智能能量滤波器，向偶极子元件添加静电四极和六极激发。 根据本发明的具有能够在孔处产生线焦点的偶极子，四极和六极元件的组合的带电粒子能量过滤器减少了空间电荷效应和孔径损伤。 优选的实施方案允许过滤器充当共轭体消隐系统。 能量过滤器能够使能量扩展变窄，导致较小的光束。

公开(公告)号：US08410457B2

公开(公告)日：2013-04-02

申请号：US13015115

申请日：2011-01-27

Applicant: Shohei Terada ,  Tatsumi Hirano ,  Koichi Watanabe ,  Yasuichiro Watanabe ,  Hiromitsu Seino

Inventor： Shohei Terada ,  Tatsumi Hirano ,  Koichi Watanabe ,  Yasuichiro Watanabe ,  Hiromitsu Seino

IPC: G01N21/00

CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/2802

Abstract: A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.

Abstract translation: 提供了一种样品转移装置，其可以在带电粒子束的照射下插入到带电粒子束装置中的待观察和分析的样品，同时抑制将样品暴露于大气环境的时间最小化。 用于通过照射带电粒子束来传送待观察和分析的样品的样品转移装置包括能够容纳安装样品的样品架的可膨胀中空构件，用于将样品架固定在可膨胀中空构件内的固定构件，以及 密封构件与可膨胀中空构件的内部连通以打开/关闭样品保持器通过的开口。