Beam combining apparatus
    21.
    发明授权
    Beam combining apparatus 失效
    光束组合装置

    公开(公告)号:US4135820A

    公开(公告)日:1979-01-23

    申请号:US846509

    申请日:1977-10-28

    Abstract: A pair of optical beams of radiant energy from separate paths in a spectrophotometer are coaxially merged into a single composite beam with an optical member which resembles a coarse echelette grating. A reflective surface which includes the surfaces of sidewalls within a plurality of parallel grooves is disposed on the optical member. The grooves are arranged in a lateral array and are generally V-shaped cross-sectionally. The beams to be combined are directed upon the sidewalls and the composite beam is emitted therefrom in accordance with the law of reflection. When the beams to be combined include non-collimated rays, shadowing is provided by the portion of the optical member between adjoining sidewalls of adjacent grooves to reduce flare. Furthermore, image aberrations as caused by off-axis operation due to use of a spherical mirror in the beam combining arrangement, are substantially corrected by the optical member.

    Abstract translation: 在分光光度计中的来自分离路径的一对辐射能量的光束被同轴地合并成单个复合束,其具有类似于粗小行星光栅的光学构件。 包括在多个平行凹槽内的侧壁表面的反射表面设置在光学构件上。 凹槽布置成横向阵列,并且横截面通常为V形。 要组合的光束被引导到侧壁上,并且根据反射定律从其发射合成光束。 当待组合的光束包括非准直射线时,光学构件的部分在相邻凹槽的相邻侧壁之间提供阴影以减少耀斑。 此外,由于在光束组合装置中使用球面镜由离轴操作引起的图像像差被光学构件基本上校正。

    Spectral scan air monitor
    22.
    发明授权
    Spectral scan air monitor 失效
    光谱扫描空气监测器

    公开(公告)号:US3805074A

    公开(公告)日:1974-04-16

    申请号:US32040173

    申请日:1973-01-02

    Inventor: MC CORMACK K

    CPC classification number: G01N21/3504 G01N21/39

    Abstract: An apparatus for monitoring air pollution sources, such as, for example nitrous oxide (NO), sulphur dioxide (SO2), or sulphur trioxide (SO3) is disclosed. The apparatus includes a tunable diode laser as a transmitter of infrared energy. The diode laser is tuned in a periodic fashion such that the laser light emission wavelength is scanned through an absorption line of a pollutant gas. The tuning effect is produced by driving the diode laser with a current which is the sum of a d.c. and an a.c. current. The laser energy is transmitted to a beamsplitter. The beamsplitter divides the energy between a sample path and a reference path. The sample path may be an open air path or include a sample cell; the reference path contains a cell having a known concentration of the pollutant gas being monitored. A chopper is provided to alternately sample the radiation passing the sample and reference cells to a detector which produces an a.c. signal whose peak to peak difference value contains the information of the difference in concentration levels of the contaminant in the reference and sample paths. A feedback circuit is provided to feed-back a d.c. current, equivalent to the time difference between the offset in the center point of the diode emission and the center of the contaminant absorption line, to the laser drive circuit to provide automatic lock onto the center of the contaminant absorption line.

    Abstract translation: 公开了一种用于监测空气污染源的装置,例如一氧化二氮(NO),二氧化硫(SO2)或三氧化硫(SO3)。 该装置包括可调二极管激光器作为红外能量的发射器。 二极管激光器以周期性方式调谐,使得激光发射波长通过污染气体的吸收线扫描。 调谐效应是通过以二次电流的总和驱动二极管激光器产生的。 和a.c. 当前。 激光能量传输到分束器。 分束器在采样路径和参考路径之间划分能量。 样品路径可以是露天路径或包括样品池; 参考路径包含具有被监测的已知浓度的污染气体的电池。 提供斩波器以将通过样品和参考细胞的辐射交替地采样到产生等离子体的检测器。 峰值差峰值包含参考和样品路径中污染物浓度水平差的信息。 提供反馈电路以反馈直流。 电流,相当于二极管发射的中心点的偏移与污染物吸收线的中心之间的时间差,提供给激光驱动电路,以提供自动锁定到污染物吸收线的中心。

    Spectrometric instrument with transposition of ray paths
    23.
    发明授权
    Spectrometric instrument with transposition of ray paths 失效
    具有RAP PATHS传输的光谱仪器

    公开(公告)号:US3639062A

    公开(公告)日:1972-02-01

    申请号:US3639062D

    申请日:1969-12-03

    CPC classification number: G01J3/08 G01J3/02 G01J3/021 G01J3/2846

    Abstract: Spectrometer for the analysis of a polychromatic radiation flux which comprises, in a plane, a single radiation-conveying window having two multiplicities of alternating zones with different conveying characters for the radiation flux to be analyzed and such that the pattern of the zone boundaries has an axis of symmetry in that plane and a center of symmetry, the spectrometer also comprising an image-forming apparatus made up of a dispersive system having a spectrum-scanning movement and a collimating system, a receiver for the radiation flux, and means to modulate the radiation flux. The pattern of the zone boundaries and the image-forming apparatus are such that this apparatus casts, in the plane of the single window, a plurality of monochromatic enantiomorphous images of the window provided respectively by the monochromatic radiations constituting the flux to be analyzed, the center of one of these images being, for each position of the dispersive system, coincident with the center of the window.

    Abstract translation: 用于分析多色辐射通量的光谱仪,其在平面中包括具有两个具有不同输送特性的交替区域的单个辐射传送窗口用于待分析的辐射通量,并且使得区域边界的图案具有 该平面中的对称轴和对称中心,光谱仪还包括由具有光谱扫描运动的分散系统和准直系统构成的图像形成装置,用于辐射通量的接收器,以及用于调制 辐射通量。

    Two-channel infrared spectrometer with pivoting collimator
    24.
    发明授权
    Two-channel infrared spectrometer with pivoting collimator 失效
    双通道红外光谱仪,带有放映机

    公开(公告)号:US3630626A

    公开(公告)日:1971-12-28

    申请号:US3630626D

    申请日:1970-07-09

    Applicant: CAMECA

    CPC classification number: G01J3/42

    Abstract: In an infrared spectrometer with two channels preceded by a device for producing monochromatic radiation and constituted by a collimator, a diffraction grating and a focusing element, the collimator can adopt two angular rest positions by pivoting about an axis perpendicular to the lines of the grating; in these two positions of the collimator, the focusing element directs a monochromatic beam whose wavelength depends solely upon the position of the grating, either onto a first slot or onto a second slot, those slots being respectively coupled to the two channels.

    Systems and methods for copper etch rate monitoring and control

    公开(公告)号:US11099131B2

    公开(公告)日:2021-08-24

    申请号:US16465238

    申请日:2017-12-06

    Abstract: Systems and methods for copper etch monitoring and control are described. Certain embodiments include utilizing thin-film cells to measure the absorbance of a copper etch solution to determine the etch rate of the solution. In another embodiment, a method of controlling etch rate of a copper etch solution includes detecting characteristics of the copper etch solution utilizing a sensor device, e.g., flow cell and/or attenuated total reflection probe, calculating, based on the detected characteristics of the copper etch solution, the etch rate of the copper etch solution, and adjusting the etch rate of the copper etch solution in response to the calculated etch rate deviating from a specified value.

    COMPACT MULTI-PASS GAS CELL FOR MULTI-GAS SPECTRAL SENSORS

    公开(公告)号:US20200284654A1

    公开(公告)日:2020-09-10

    申请号:US16808238

    申请日:2020-03-03

    Abstract: Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.

    Microspectroscope
    30.
    发明授权

    公开(公告)号:US10295470B2

    公开(公告)日:2019-05-21

    申请号:US15560256

    申请日:2016-03-22

    Abstract: To provide a microspectroscope that can perform a wide range mapping measurement with high sensitivity, at high speed, and with high wavelength resolution.The Raman spectroscope comprises: a unit for linearly irradiating excitation light; a movable stage for a sample; an objective lens for focusing Raman light from the linear irradiation region; an incident slit provided at the imaging position of Raman light; a spectrometer for diffusing the passing light; a CCD detector for detecting Raman spectral image; and a control device for controlling the mapping measurement by synchronizing the movable stage and the CCD detector. The control device controls the movable stage to move in the direction orthogonal to the longitudinal direction of the linear irradiation light and obtain one average spectrum. At the same time, the control device is configured to perform the cycle of the CCD detector while the stage is moving to obtain one average spectrum of the moving region of the linear irradiation region in one light detection cycle.

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