Systems and methods of adaptive two-wavelength single-camera imaging thermography (ATSIT) for accurate and smart in-situ process temperature measurement during metal additive manufacturing

    公开(公告)号:US11874176B2

    公开(公告)日:2024-01-16

    申请号:US17015062

    申请日:2020-09-08

    Abstract: A two-wavelength, single-camera imaging thermography system for in-situ temperature measurement of a target, comprising: a target light path inlet conduit for receiving a target light beam reflected from the target; a beam splitter installed in a splitter housing at a distal end of the target light path conduit, wherein the beam splitter divides the target light beam into a first light beam and a second light beam; a first light path conduit emanating from the splitter housing comprising a first aperture iris installed within the first light path conduit for aligning the first light beam; a first band pass filter installed within the first light path conduit for regulating the first light beam to a first wavelength λ1 and an optional half waveplate installed within the first light path conduit to modulate a polarization ratio of the first light beam of λ1 wavelength; a second light path conduit emanating from the splitter housing comprising a second aperture iris installed within the second light path conduit for aligning the second light beam; a second band pass filter installed within the second light path conduit for regulating the second light beam to a second wavelength λ2; a junction housing, wherein distal ends of each of the first and second light path conduits are connected to the junction housing; a polarizing beam splitter installed in the junction housing, wherein the polarizing beam splitter reflects the first light beam of λ1 wavelength along the same path or a parallel path of the second light beam of λ2 wavelength that passes directly through the polarizing beam splitter unreflected to create a merged light beam comprising light of λ1 and λ2 wavelengths; and a light path outlet conduit connected to the junction for directing the merged beam to a high-speed camera for imaging.

    Bolometer-type detector and method for manufacturing the same

    公开(公告)号:US11733102B2

    公开(公告)日:2023-08-22

    申请号:US17713483

    申请日:2022-04-05

    Inventor: Tomo Tanaka

    CPC classification number: G01J5/0853 G01J5/22 G01J2005/202

    Abstract: An example object of the present invention is to provide a bolometer-type detector capable of reducing heat transfer between pixels. A bolometer-type detector according to an example aspect of the present invention includes a plurality of pixels, and at least includes: a substrate, a heat insulating layer provided on the substrate, bolometer films provided on individual pixels on the heat insulating layer, and a wiring for signal output connected to contact electrodes provided in contact with the bolometer films, wherein the wiring for signal output is disposed in a layer different from the bolometer films, and the heat insulating layer between adjacent pixels is removed at least partially in the depth direction and in a region of a length of 50% or longer and a width of 100 nm or wider of a closed curve that surrounds each bolometer film.

    INFRARED IMAGING MICROBOLOMETER AND ASSOCIATED PRODUCTION METHODS

    公开(公告)号:US20230236065A1

    公开(公告)日:2023-07-27

    申请号:US18010901

    申请日:2021-07-27

    Applicant: LYNRED

    CPC classification number: G01J5/0853 G01J5/024 G01J5/20

    Abstract: An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.

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