Inspection apparatus and inspection method
    31.
    发明授权
    Inspection apparatus and inspection method 有权
    检验仪器和检验方法

    公开(公告)号:US09383321B2

    公开(公告)日:2016-07-05

    申请号:US14465435

    申请日:2014-08-21

    CPC classification number: G01N21/6489 G01N21/6456 G01N2021/6417 G01N2201/10

    Abstract: An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.

    Abstract translation: 检查装置是用于检查太阳能电池面板的装置。 所述检查装置包括:激发光照射部,其对所述太阳能电池面板照射脉冲光,使所述太阳能电池面板照射电磁波脉冲; 检测部,其响应于所述脉冲光的照射,检测从所述太阳能电池面板辐射的电磁波脉冲; 以及温度变化部,用于改变在被脉冲光照射的部分处的太阳能电池面板的温度。

    FILM EDGE DETECTING METHOD AND FILM EDGE DETECTING DEVICE
    37.
    发明申请
    FILM EDGE DETECTING METHOD AND FILM EDGE DETECTING DEVICE 有权
    薄膜边缘检测方法和薄膜边缘检测装置

    公开(公告)号:US20150369748A1

    公开(公告)日:2015-12-24

    申请号:US14548997

    申请日:2014-11-20

    Abstract: The present invention provides a film edge detecting method and a film edge detecting device. The film edge detecting method is used for detecting a film edge of a film layer formed on a substrate, the film layer comprises a patterned film layer, the method includes: forming at least one scale pattern in the patterned film layer, a film edge of the patterned film layer corresponding to an edge of the scale pattern; obtaining a patterned film edge indication value of the edge of the scale pattern; and obtaining a second distance, which is a distance between the film edge of the non-patterned film layer and a corresponding edge of the substrate, based on the non-patterned film edge indication value and a preset reference value of the corresponding edge of the substrate.

    Abstract translation: 本发明提供一种胶片边缘检测方法和胶片边缘检测装置。 膜边缘检测方法用于检测在基板上形成的膜层的膜边缘,该膜层包括图案化膜层,该方法包括:在图案化膜层中形成至少一个标尺图案, 所述图案化膜层对应于所述标尺图案的边缘; 获得刻度图案的边缘的图案化胶片边缘指示值; 并且基于未图案化的膜边缘指示值和相对于所述基板的相应边缘的预设参考值,获得作为所述非图案化膜层的膜边缘与所述基板的相应边缘之间的距离的第二距离 基质。

    SCANNING OBSERVATION APPARATUS
    38.
    发明申请
    SCANNING OBSERVATION APPARATUS 有权
    扫描观察装置

    公开(公告)号:US20150355094A1

    公开(公告)日:2015-12-10

    申请号:US14829983

    申请日:2015-08-19

    Inventor: Hiroya FUKUYAMA

    Abstract: A high-resolution fluorescence image in which an afterimage is suppressed is obtained, even when a fluorescence detection interval is shortened. Provided is a scanning observation apparatus including a scanning unit that spatially scans pulsed excitation light emitted from a light source at prescribed time intervals on a specimen; a fluorescence detecting unit that detects fluorescence generated by exciting a fluorescent substance inside the specimen with the excitation light scanned by the scanning unit, in synchronization with the emission of the excitation light; and a fluorescence correcting unit that subtracts, from a fluorescence intensity detected by the fluorescence detecting unit, an afterimage fluorescence component calculated on the basis of time-sequential fluorescence detected by the fluorescence detecting unit prior thereto, at each scanning position, to correct the fluorescence intensity at the scanning position.

    Abstract translation: 即使在荧光检测间隔缩短的情况下也能够得到抑制残像的高分辨率的荧光图像。 本发明提供一种扫描观察装置,其具备:扫描单元,其以规定的时间间隔在样本上空间扫描从光源发出的脉冲激发光; 荧光检测单元,其与通过所述激发光的发射同步地检测利用所述扫描单元扫描的激发光来激发所述样本内的荧光物质而产生的荧光; 以及荧光校正单元,从荧光检测单元检测出的荧光强度,在每个扫描位置根据荧光检测单元检测到的时间序列荧光计算的余像荧光成分,从而校正荧光 在扫描位置的强度。

    Interferometer having multiple scan carriages
    39.
    发明授权
    Interferometer having multiple scan carriages 有权
    干涉仪具有多个扫描架

    公开(公告)号:US09200885B2

    公开(公告)日:2015-12-01

    申请号:US14561425

    申请日:2014-12-05

    Abstract: An interferometer includes a first assembly having a base, a beam splitter assembly to split light into first and second portions, and a fixed mirror for reflecting the first portion of light; and a second assembly movable with respect to the first assembly, and having first and second scan carriages, and a movable mirror connected to the second scan carriage for reflecting the second portion of light. The beam splitter assembly combines the reflected first and second portions of light into a recombined radiation beam. Inner bearing flexures enable movement of the first scan carriage relative to the base, and outer bearing flexures enable movement of the second scan carriage relative to the first scan carriage, such that a plane containing the movable mirror is maintained parallel to multiple planes containing the movable mirror at respective distances between the second and first assemblies during scan movement of the movable mirror.

    Abstract translation: 干涉仪包括具有底座的第一组件,将光分成第一和第二部分的分束器组件以及用于反射第一部分光的固定镜; 以及第二组件,其可相对于所述第一组件移动,并且具有第一和第二扫描支架,以及连接到所述第二扫描托架的用于反射所述第二部分光的可移动反射镜。 分束器组件将反射的第一和第二部分光合并成复合辐射束。 内部轴承挠曲能够使第一扫描滑架相对于基座移动,而外轴承挠曲使第二扫描滑架相对于第一扫描滑架能够移动,使得包含可移动反射镜的平面保持平行于包含可移动的多个平面的多个平面 在可移动镜的扫描运动期间在第二组件和第一组件之间的相应距离处的镜子。

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