ULTRA HIGH PRECISION MEASUREMENT TOOL
    32.
    发明申请
    ULTRA HIGH PRECISION MEASUREMENT TOOL 有权
    超高精度测量工具

    公开(公告)号:US20090289185A1

    公开(公告)日:2009-11-26

    申请号:US12133298

    申请日:2008-06-04

    Abstract: A focused ion beam device is described comprising a gas field ion source with an analyzer for analyzing and classifying the structure of a specimen, a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip, the emitter tip has a base tip comprising a first material and a supertip comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission centre of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.

    Abstract translation: 描述了一种聚焦离子束装置,其包括气体离子源,其具有用于分析和分类样品结构的分析器,用于根据分析仪的分析来控制和/或改变样品的结构的控制器,发射器尖端 发射极尖端具有包括第一材料和超高压头的基座尖端,所述第一材料和第一材料包括不同于所述第一材料的材料,其中所述超高压是单个原子尖端,并且所述基座尖端是单晶基底尖端。 此外,聚焦离子束装置具有探针电流控制和样品充电控制。 提供了一种操作聚焦离子束装置的方法,包括在超高压的单个发射中心和电极之间施加电压,向发射极尖端供应气体,分析和分类样品的结构,以及控制样品的结构 。

    CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION
    36.
    发明申请
    CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION 有权
    充电颗粒源自动提示形成

    公开(公告)号:US20090121160A1

    公开(公告)日:2009-05-14

    申请号:US12253042

    申请日:2008-10-16

    Abstract: A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.

    Abstract translation: 描述带电粒子束装置。 该装置包括发射器单元,其包括发射极尖端; 电压供应单元,适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件,其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元,适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

    ARRANGEMENT AND METHOD FOR COMPENSATING EMITTER TIP VIBRATIONS
    39.
    发明申请
    ARRANGEMENT AND METHOD FOR COMPENSATING EMITTER TIP VIBRATIONS 有权
    用于补偿发射器提示振动的装置和方法

    公开(公告)号:US20090001266A1

    公开(公告)日:2009-01-01

    申请号:US12209079

    申请日:2008-09-11

    Inventor: JUERGEN FROSIEN

    Abstract: The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for repeatedly measuring the location of the emitter; and a deflector system for compensating variations in the location of the emitter.

    Abstract translation: 本发明提供带电粒子束装置,带电粒子束源包括具有发射极尖端的发射极; 以及用于支撑发射器的支撑构件。 此外,该装置包括用于反复测量发射器的位置的发射器位置测量装置; 以及用于补偿发射器位置变化的偏转器系统。

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