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公开(公告)号:US20200258940A1
公开(公告)日:2020-08-13
申请号:US16735394
申请日:2020-01-06
Applicant: Unity Semiconductor Corporation
Inventor: Lidia Vereen , Bruce Lynn Bateman , David Alan Eggleston , Louis C. Parrillo
IPC: H01L27/24 , H01L45/00 , H01L23/528
Abstract: A method of manufacturing a memory structure includes forming a plurality of vertically-stacked horizontal line layers, interleaving a plurality of electrically conductive vertical lines with the electrically conductive horizontal lines, and forming a memory film at and between intersections of the electrically conductive vertical lines and the horizontal lines. In one embodiment of the invention, the electrically conductive vertical lines are interleaved with the horizontal lines such that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines in each horizontal line layer. By configuring the electrically conductive vertical lines and electrically conductive horizontal lines so that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines, a unit memory cell footprint of just 2F2 may be realized.
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公开(公告)号:US10684233B2
公开(公告)日:2020-06-16
申请号:US16319455
申请日:2017-06-01
Applicant: UNITY SEMICONDUCTOR
Inventor: Sylvain Petitgrand
IPC: G01B11/00 , G01N21/95 , H01L21/673 , G01R31/28 , G01B11/06
Abstract: A device for positioning an integrated circuit wafer includes: a base, called upper, and a base, called lower, arranged at a distance from one another in a direction, called vertical, so as to leave a free space between the bases; a support, provided to be mobile between the upper and lower bases, and including a location for receiving the wafer to be inspected; at least one first means apparatus for positioning the support in the vertical direction against, or by cooperation with, the upper base; and at least one second means apparatus for positioning the support in the vertical direction against, or by cooperation with, the lower base. Also provided is an inspection equipment for an integrated circuit wafer implementing such a positioning device.
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公开(公告)号:US20190371396A1
公开(公告)日:2019-12-05
申请号:US16429411
申请日:2019-06-03
Applicant: Unity Semiconductor Corporation
Inventor: Lawrence Schloss , Julie Casperson Brewer , Wayne Kinney , Rene Meyer
Abstract: A memory cell including a memory element comprising an electrolytic insulator in contact with a conductive metal oxide (CMO) is disclosed. The CMO includes a crystalline structure and can comprise a pyrochlore oxide, a conductive binary oxide, a multiple B-site perovskite, and a Ruddlesden-Popper structure. The CMO includes mobile ions that can be transported to/from the electrolytic insulator in response to an electric field of appropriate magnitude and direction generated by a write voltage applied across the electrolytic insulator and CMO. The memory cell can include a non-ohmic device (NOD) that is electrically in series with the memory element. The memory cell can be positioned between a cross-point of conductive array lines in a two-terminal cross-point memory array in a single layer of memory or multiple vertically stacked layers of memory that are fabricated over a substrate that includes active circuitry for data operations on the array layer(s).
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公开(公告)号:US10347332B2
公开(公告)日:2019-07-09
申请号:US16004705
申请日:2018-06-11
Applicant: Unity Semiconductor Corporation
Inventor: Christophe Chevallier , Chang Hua Siau
Abstract: A system includes a cross-point memory array and a decoder circuit coupled to the cross-point memory array. The decoder circuit includes a predecoder having predecode logic to generate a control signal and a level shifter circuit to generate a voltage signal. The decoder circuit further includes a post-decoder coupled to the predecoder, the post-decoder including a first stage and a second stage coupled to the first stage, the control signal to control the first stage and the second stage to route the voltage signal through the first stage and the second stage to a selected conductive array line of a plurality of conductive array lines coupled to a memory array.
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45.
公开(公告)号:US20180364931A1
公开(公告)日:2018-12-20
申请号:US16018837
申请日:2018-06-26
Applicant: UNITY SEMICONDUCTOR CORPORATION
Inventor: Chang Hua Siau
IPC: G06F3/06 , G11C11/419 , G11C13/00 , G11C5/06 , G11C8/08
CPC classification number: G06F3/0625 , G06F3/061 , G06F3/0655 , G06F3/0688 , G11C5/06 , G11C8/08 , G11C11/419 , G11C13/0002 , G11C13/0004 , G11C13/0007 , G11C13/0011 , G11C13/0021 , G11C13/0023 , G11C13/003 , G11C13/0038 , G11C13/0069 , G11C13/0097 , G11C2213/72
Abstract: Embodiments of the invention relate generally to semiconductors and memory technology, and more particularly, to systems, integrated circuits, and methods to preserve states of memory elements in association with data operations using variable access signal magnitudes for other memory elements, such as implemented in third dimensional memory technology. In some embodiments, a memory device can include a cross-point array with resistive memory elements. An access signal generator can modify a magnitude of a signal to generate a modified magnitude for the signal to access a resistive memory element associated with a word line and a subset of bit lines. A tracking signal generator is configured to track the modified magnitude of the signal and to apply a tracking signal to other resistive memory elements associated with other subsets of bit lines, the tracking signal having a magnitude at a differential amount from the modified magnitude of the signal.
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公开(公告)号:US10082425B2
公开(公告)日:2018-09-25
申请号:US15282305
申请日:2016-09-30
Applicant: UNITY SEMICONDUCTOR
Inventor: Philippe Gastaldo
CPC classification number: G01J3/0208 , G01B11/022 , G01B11/0608 , G01B11/22 , G01B11/245 , G01B2210/50 , G01B2210/56 , G01J3/0218 , G01J3/18 , G01J3/453 , G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2201/063 , G01N2201/0833 , G01N2201/105 , G02B21/0064 , H01L22/12
Abstract: A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.
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47.
公开(公告)号:US20180226110A1
公开(公告)日:2018-08-09
申请号:US15868280
申请日:2018-01-11
Applicant: Unity Semiconductor Corporation
Inventor: Christophe Chevallier , Seow Fong Lim , Chang Hua Siau
CPC classification number: G11C7/22 , B82Y30/00 , G11C5/02 , G11C7/04 , G11C8/10 , G11C8/12 , G11C11/21 , G11C13/0021
Abstract: Embodiments of the invention relate generally to semiconductors and memory technology, and more particularly, to systems, integrated circuits, and methods to implement circuits configured to compensate for parameter variations in layers of memory by adjusting access signals during memory operations. In some embodiments, memory cells are based on third dimensional memory technology. In at least some embodiments, an integrated circuit includes multiple layers of memory, a layer including sub-layers of semiconductor material. The integrated circuit also includes an access signal generator configured to generate an access signal to facilitate an access operation, and a characteristic adjuster configured to adjust the access signal for each layer in the multiple layers of memory.
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公开(公告)号:US20180130850A1
公开(公告)日:2018-05-10
申请号:US15811179
申请日:2017-11-13
Applicant: Unity Semiconductor Corporation
Inventor: Jian Wu , Rene Meyer
CPC classification number: H01L27/2463 , H01L27/2418 , H01L27/2481 , H01L45/08 , H01L45/085 , H01L45/12 , H01L45/1233 , H01L45/1246 , H01L45/1253 , H01L45/146 , H01L45/147 , H01L45/1616 , H01L45/165
Abstract: A memory cell including a two-terminal re-writeable non-volatile memory element having at least two layers of conductive metal oxide (CMO), which, in turn, can include a first layer of CMO including mobile oxygen ions, and a second layer of CMO formed in contact with the first layer of CMO to cooperate with the first layer of CMO to form an ion obstruction barrier. The ion obstruction barrier is configured to inhibit transport or diffusion of a subset of mobile ion to enhance, among other things, memory effects and cycling endurance of memory cells. At least one layer of an insulating metal oxide that is an electrolyte to the mobile oxygen ions and configured as a tunnel barrier is formed in contact with the second layer of CMO.
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公开(公告)号:US20180114573A1
公开(公告)日:2018-04-26
申请号:US15706356
申请日:2017-09-15
Applicant: Unity Semiconductor Corporation
Inventor: Lawrence Schloss , Julie Casperson Brewer , Wayne Kinney , Rene Meyer
CPC classification number: G11C13/0026 , G11C11/5685 , G11C13/0002 , G11C13/0004 , G11C13/0007 , G11C13/0028 , G11C13/003 , G11C13/004 , G11C2013/0045 , G11C2013/0073 , G11C2213/31 , G11C2213/32 , G11C2213/56 , G11C2213/71 , G11C2213/72 , G11C2213/74 , G11C2213/76 , H01L27/24 , H01L27/2463 , H01L27/2481 , H01L45/08 , H01L45/085 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/147
Abstract: A memory cell including a memory element comprising an electrolytic insulator in contact with a conductive metal oxide (CMO) is disclosed. The CMO includes a crystalline structure and can comprise a pyrochlore oxide, a conductive binary oxide, a multiple B-site perovskite, and a Ruddlesden-Popper structure. The CMO includes mobile ions that can be transported to/from the electrolytic insulator in response to an electric field of appropriate magnitude and direction generated by a write voltage applied across the electrolytic insulator and CMO. The memory cell can include a non-ohmic device (NOD) that is electrically in series with the memory element. The memory cell can be positioned between a cross-point of conductive array lines in a two-terminal cross-point memory array in a single layer of memory or multiple vertically stacked layers of memory that are fabricated over a substrate that includes active circuitry for data operations on the array layer(s).
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公开(公告)号:US20180012934A1
公开(公告)日:2018-01-11
申请号:US15633050
申请日:2017-06-26
Applicant: Unity Semiconductor Corporation
Inventor: Bruce Lynn Bateman
Abstract: An ultra-high-density vertical cross-point array comprises a plurality of horizontal line layers having horizontal lines interleaved with a plurality of vertical lines arranged in rows and columns. The vertical lines are interleaved with the horizontal lines such that a row of vertical lines is positioned between each consecutive pair of horizontal lines in each horizontal line layer. Each vertical line comprises a center conductor surrounded by a single or multi-layered memory film. Accordingly, when interleaved with the horizontal lines, two-terminal memory cells are integrally formed between the center conductor of each vertical line and each crossing horizontal line. By configuring the vertical and horizontal lines so that a row of vertical lines is positioned between each consecutive pair of horizontal lines, a unit memory cell footprint of just 2 F2 may be realized.
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