Abstract:
Passive detector structures for imaging systems are provided which implement unpowered, passive front-end detector structures with direct-to-digital measurement data output for detecting incident photonic radiation in various portions (e.g., thermal (IR), near IR, UV and visible light) of the electromagnetic spectrum.
Abstract:
A thermal absorption structure of a radiation thermal detector element may include an optically transitioning material configured such that optical conductivity of the thermal absorption structure is temperature sensitive and such that the detector element absorbs radiation less efficiently as its temperature increases, thus reducing its ultimate maximum temperature.
Abstract:
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
Abstract:
An infrared (IR) imaging system is presented. The system comprises a cooling chamber associated with a cooler generating a certain temperature condition inside the chamber. The cooling chamber has an optical window, and comprises thereinside an IR detector and a cold shield both thermally coupled to said cooler, and an imaging optical assembly comprising one or more imaging lenses defining a certain fixed focus of the imaging assembly and being enclosed by the cold shield in between the detector and the optical window. The imaging optical assembly and the detector are therefore under the same cooling temperature thereby reducing thermal noise in the detected image.
Abstract:
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
Abstract:
A thermal or infrared imaging system having an optical barrel, an external stop formed by a mirror, a dewar, a cold shield, a focal plane array, and multiple retroreflectors. The cold shield and focal plane array are located inside the dewar. The mirror directs desired light bundles at the focal plane array. The retroreflectors are attached to the inside of the optical barrel. The retroreflectors are arranged such that the retroreflectors exist in all lines of sight of the focal plane array, except those lines of sight associated with the external stop. Consequently, the retroreflectors do not interfere with the desired light bundles which are focused onto the focal plane array. However, all light outside of that which is focused is prevented from reaching the focal plane array by the retroreflectors. The retroreflectors are infrared retroreflectors arranged in a matrix. Each of the retroreflectors is a "concave" corner cube having low emissivity reflecting facets. The corner cubes reflect incoming rays by 180 degrees relative to input angles of the incoming rays. Thus, the focal plane array sees only cold outside of the desired light bundles.
Abstract:
A low temperature infrared detector for use in a cryostat having a cold finger. A cold plane is mounted upon the cold finger in heat transfer relationship therewith. A read circuit board is mounted upon the cold plane and a detector circuit board is placed over the read circuit and is connected thereto both electrically and thermally. A screen is fitted over the detector circuit board. The screen has a shoulder formed in its bottom wall into which the detection board is press-fitted and a window that frames the detecting circuitry through which the circuitry can be viewed by an IR source. Preferably, the screen is produced using electroforming techniques.
Abstract:
A totally integrated thermal imaging system has a dewar housing including imaging optics, a scanning mirror and a curved detector array. The imaging optics constitute a meniscus lens and a spherical focusing mirror. The scanning mirror scans the image, and the spherical mirror focuses the scanned image onto the detector array. The meniscus lens advantageously corrects aberrations. A detector support provides access for cryogenic cooling of the detector, and individual cold shielding of the detector elements is made possible by the telecentricity of the optics. Processing electronics, at least a portion of which may also be disposed on the detector support, process the detector signals to display an image. The integrated structure advantageously eliminates any need for separate scanner, imager, detector dewar and electronics modules.
Abstract:
The light shielding member of the present disclosure includes an aluminum oxide ceramics including an oxide of titanium whose composition formula is shown as TiO2-x (1≤x
Abstract:
A line of sight blocker including a cover defining a duct bounded by the cover and a heated surface when the cover is fastened over the heated surface. The cover blocks transmission of infrared radiation emitted from the heated surface; the cover comprises a material having a lower thermal conductivity than the heated surface; and the duct comprises a vent and a path for latent heat from the heated surface to escape through the vent.