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公开(公告)号：US20140055974A1
公开(公告)日：2014-02-27
申请号：US14114528
申请日：2012-04-20
Applicant: Uwe Hansen
Inventor： Uwe Hansen
IPC: H05K1/14
CPC classification number: H05K1/148 , G01L19/06 , G01P15/0802 , G01P15/09 , G01P15/125 , G01P2015/0882 , H05K1/0271 , H05K1/14 , H05K1/141 , H05K1/142 , H05K1/144 , H05K1/145 , H05K3/0064 , H05K3/4611 , H05K5/0056 , H05K2201/0133 , H05K2201/041 , H05K2201/09063 , H05K2201/09081 , H05K2201/10083 , H05K2201/10151
Abstract: The invention relates to a printed circuit board arrangement, more particularly a multilayer printed circuit board. The printed circuit board arrangement comprises at least two printed circuit boards which are arranged parallel to one another and connected to one another. According to the invention, in the case of the printed circuit board arrangement of the type mentioned initially, at least one surface region of one printed circuit board is connected to another printed circuit board of the printed circuit board arrangement by means of an element embodied in an elastic and/or damping fashion in such a way that an oscillatory system, more particularly a spring-mass system, an oscillatory bending strip or a flexurally oscillatory board is formed by means of the surface region of the printed circuit board and the element.
Abstract translation: 本发明涉及一种印刷电路板装置，更具体地说涉及一种多层印刷电路板。 印刷电路板布置包括彼此平行布置并彼此连接的至少两个印刷电路板。 根据本发明，在最初提及的类型的印刷电路板布置的情况下，一个印刷电路板的至少一个表面区域通过实施在印刷电路板装置中的元件连接到印刷电路板装置的另一个印刷电路板 弹性和/或阻尼方式，使得通过印刷电路板和元件的表面区域形成振荡系统，特别是弹簧质量系统，振荡弯曲带或弯曲振荡板。
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42.发明申请SYSTEMS AND METHODS FOR DETECTING OUT-OF-PLANE LINEAR ACCELERATION WITH A CLOSED LOOP LINEAR DRIVE ACCELEROMETER 有权用闭环线性驱动加速度计检测平面外线性加速度的系统和方法公开(公告)号：US20100024552A1
公开(公告)日：2010-02-04
申请号：US12183678
申请日：2008-07-31
Applicant: Michael J. Foster
Inventor： Michael J. Foster
IPC: G01P15/10 , G01P15/125
CPC classification number: G01P15/125 , G01P15/131 , G01P2015/0831 , G01P2015/0834 , G01P2015/0882
Abstract: Systems and methods sense out-of-plane linear accelerations. In an exemplary embodiment, the out-of plane linear accelerometer is accelerated in an out-of-plane direction, wherein the acceleration generates a rotational torque to an unbalanced proof mass. A rebalancing force is applied to at least one plurality of interleaved rotor comb tines and stator comb tines, wherein the rebalancing force opposes the rotational torque, wherein the rotor comb tines are disposed at an end of the unbalanced proof mass, and wherein the stator comb tines are disposed on a stator adjacent to the end of the unbalanced proof mass. An amount of acceleration is then determined based upon the applied rebalancing force.
Abstract translation: 系统和方法感知到平面外的线性加速度。 在示例性实施例中，面外线性加速度计在面外方向加速，其中加速度产生到不平衡证明质量块的旋转扭矩。 重新平衡力被施加到至少一个交错的转子梳齿和定子梳齿上，其中重新平衡力与旋转扭矩相反，其中转子梳齿设置在不平衡证明块的端部，并且其中定子梳 尖齿设置在与不平衡证明块的端部相邻的定子上。 然后基于所应用的重新平衡力来确定加速度。
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公开(公告)号：US20240053378A1
公开(公告)日：2024-02-15
申请号：US18446537
申请日：2023-08-09
Applicant: SEIKO EPSON CORPORATION
Inventor： Koichiro KOMIZO
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P2015/0882
Abstract: According to a physical quantity sensor, a first movable electrode group, a second movable electrode group, a third movable electrode group, and a fourth movable electrode group are arranged in this order along a first direction. In a third direction, a thickness of a second movable electrode in the second movable electrode group and a thickness of a third movable electrode in the third movable electrode group are different from a thickness of a first movable electrode in the first movable electrode group and a thickness of a fourth movable electrode in the fourth movable electrode group. When an imaginary line extending in a second direction from a center of a fixed portion is an axis of symmetry, the first movable electrode is disposed line-symmetrically with the fourth movable electrode, and the second movable electrode is disposed line-symmetrically with the third movable electrode.
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公开(公告)号：US20190023563A1
公开(公告)日：2019-01-24
申请号：US15757672
申请日：2016-09-09
Applicant: DENSO CORPORATION
Inventor： Akira OGAWA , Yoshitaka NODA , Tetsuo YOSHIOKA , Yuhei SHIMIZU
IPC: B81C1/00
CPC classification number: B81C1/00579 , B81B2201/033 , B81C2201/0112 , B81C2201/0132 , B81C2201/0139 , B81C2201/0142 , G01P15/0802 , G01P15/125 , G01P2015/0814 , G01P2015/0882
Abstract: A semiconductor device production method includes performing trench etching to form a trench in a thickness direction of a semiconductor layer so that both of a first pattern portion and a second pattern portion whose side walls face each other across the trench are formed. In the trench etching, the semiconductor layer is etched and removed while a protective film is formed on a surface of the semiconductor layer, and the trench etching is performed so that the first pattern portion and the second pattern portion are configured to have a same potential or a same temperature during the trench etching.
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公开(公告)号：US20180364274A1
公开(公告)日：2018-12-20
申请号：US16103651
申请日：2018-08-14
Applicant: Sonion Nederland B.V.
Inventor： Eddy Dubbeldeman , Raymond Mögelin
CPC classification number: G01P15/0802 , G01H3/06 , G01H11/00 , G01P2015/0882 , G10K11/002 , G10K11/16 , H04R7/04 , H04R7/26 , H04R17/02 , H04R17/10 , H04R19/005 , H04R19/016 , H04R2201/003
Abstract: A vibration sensor having a moveable mass being suspended in a suspension member and being adapted to move in response to vibrations or accelerations. The moveable mass and the suspension member are rigidly connected across one or more gaps formed by respective opposing surfaces of the moveable mass and the suspension member. The vibration sensor includes a damping arrangement having a damping substance. The moveable mass is arranged to interact directly or indirectly with the damping substance in order to reduce a mechanical resonance peak of the vibration sensor.
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Patent Agency Ranking
公开(公告)号：US09964562B2
公开(公告)日：2018-05-08
申请号：US14405177
申请日：2013-06-06
Applicant: DENSO CORPORATION
Inventor： Akira Ogawa
IPC: G01P15/135 , G01P15/13 , G01P15/125 , G01P15/08 , G01P15/18 , G01C19/5747
CPC classification number: G01P15/135 , G01C19/5747 , G01P15/0802 , G01P15/125 , G01P15/13 , G01P15/18 , G01P2015/0882
Abstract: A capacitance type physical quantity sensor including a movable electrode formed in a weight part, and a fixed electrode facing the movable electrode is provided. A first movable sensing electrode and a first fixed sensing electrode face each other in a first y direction. A second movable sensing electrode and a second fixed sensing electrode face each other in a second y direction. A first movable damping electrode is located in the middle between two first fixed damping electrodes, faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight part or line-symmetrically with respect to a center line passing the center in the y direction.
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公开(公告)号：US09945968B2
公开(公告)日：2018-04-17
申请号：US14295080
申请日：2014-06-03
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
CPC classification number: G01V1/18 , G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0862 , G01P2015/0882 , G01V1/09 , G01V1/38
Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
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公开(公告)号：US20180024160A1
公开(公告)日：2018-01-25
申请号：US15547312
申请日：2016-01-27
Applicant: NORTHROP GRUMMAN LITEF GMBH
Inventor： STEFAN KOENIG , PETER LEINFELDER
IPC: G01P15/125 , B81B3/00
CPC classification number: G01P15/125 , B81B3/0054 , B81B3/0059 , B81B2201/0235 , B81B2203/0163 , B81B2203/04 , B81B2203/051 , G01P15/131 , G01P2015/0814 , G01P2015/0862 , G01P2015/0882
Abstract: The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).
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公开(公告)号：US20170350916A1
公开(公告)日：2017-12-07
申请号：US15611411
申请日：2017-06-01
Applicant: Sonion Nederland B.V.
Inventor： Eddy Dubbeldeman , Raymond Mögelin
CPC classification number: G01P15/0802 , G01H3/06 , G01H11/00 , G01P2015/0882 , G10K11/002 , G10K11/16 , H04R7/04 , H04R7/26 , H04R17/02 , H04R17/10 , H04R19/005 , H04R19/016 , H04R2201/003
Abstract: A vibration sensor having a moveable mass being suspended in a suspension member and being adapted to move in response to vibrations or accelerations. The moveable mass and the suspension member are rigidly connected across one or more gaps formed by respective opposing surfaces of the moveable mass and the suspension member. The vibration sensor includes a damping arrangement having a damping substance. The moveable mass is arranged to interact directly or indirectly with the damping substance in order to reduce a mechanical resonance peak of the vibration sensor.
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公开(公告)号：US09835647B2
公开(公告)日：2017-12-05
申请号：US14661426
申请日：2015-03-18
Applicant: Fairchild Semiconductor Corporation
Inventor： Ion Opris , Justin Seng , Shanthi Pavan , Marwan Ashkar , Michelle Lee
CPC classification number: G01P15/125 , G01P2015/0882
Abstract: Apparatus and methods for interfacing with a micro-electromechanical system (MEMS) sensor are provided. In an example, an apparatus can interface circuit including an integrator circuit, a sample switch circuit, a saturation detector and a controller. The saturation detector can be configured to receive a signal indicative of an integration of charge of the sensor, to compare the signal indicative of the integration of charge to an integrator saturation threshold and to modulate a divide parameter using the comparison of the signal indicative of the integration of charge and the integrator saturation threshold. The controller can be configured to receive a clock signal and to control the sample switch circuit based on a phase of the clock signal and the divide parameter.
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