公开(公告)号：US4439680A

公开(公告)日：1984-03-27

申请号：US393031

申请日：1982-06-28

Applicant: John H. Broadhurst

Inventor： John H. Broadhurst

IPC: H01J37/24 ,  H01J37/256 ,  H01J37/00

CPC classification number: H01J37/24 ,  H01J37/256

Abstract: A particle beam, such as that generated by a scanning electron microscope, impinges upon the specimen to be analyzed. The beam produces X-rays, the energy of which enables the various elements contained in the specimen to be identified. The detected X-ray energy is converted to rectangular electrical pulses, the height of which is proportional to the detected X-ray energy and hence characteristic of the element or elements present in the specimen. The pulse signals are coded so as to trigger or energize the several guns of a conventional color cathode ray tube, such as that used in a color televison receiver. The resulting multicolor map displayed on the screen of the cathode ray tube thus visually indicates to the observer the presence of certain elements and their relative position in the specimen being investigated.

Abstract translation: 诸如由扫描电子显微镜产生的粒子束撞击待分析的样品。 光束产生X射线，其能量能够识别包含在样本中的各种元素。 检测到的X射线能量转换成矩形电脉冲，其高度与检测到的X射线能量成比例，因此与样品中存在的元素或元素的特征成比例。 脉冲信号被编码以便触发或激励常规彩色阴极射线管的几个枪，例如在彩色电视接收机中所使用的枪。 因此，显示在阴极射线管的屏幕上的所得到的多色地图由此目视地向观察者指示某些元件的存在及其在所研究样品中的相对位置。

公开(公告)号：US4352985A

公开(公告)日：1982-10-05

申请号：US76573

申请日：1979-09-18

Applicant: Frederick W. Martin

Inventor： Frederick W. Martin

IPC: H01J37/256 ,  H01J37/26

CPC classification number: H01J37/256

Abstract: A scanning ion microscope is described in which the prior arts of scanning microscopy and achromatic quadrupole lens design as perfected for electrons are utilized for massive high-energy positive ions. Because the DeBroglie wavelength of the massive ions is smaller than the wavelength of electrons, diffraction in the objective lens is reduced. In principle resolution better than one Angstrom can be achieved. Because of the copious production of X-rays and Auger electrons in the specimen by such ions, specimens of atomic dimensions can be examined with a minimum of radiation damage by the ions. The specifically new, novel, and useful feature of this invention is the use of properly focused high-energy heavy-ion beams and the detection of single atomic events in the specimen, which together enable much greater sensitivity and resolution than attainable by other means.

Abstract translation: 描述了扫描离子显微镜，其中用于电子的完美扫描显微镜和消色差四极透镜设计的现有技术用于大量高能正离子。 由于大离子的DeBroglie波长小于电子的波长，物镜中的衍射减小。 原则上分辨率可以超过一埃即可实现。 由于通过这种离子在样品中产生X射线和俄歇电子，因此可以用离子的最小辐射损伤来检查原子尺寸的标本。 本发明的具体新颖，新颖和有用的特征是使用适当聚焦的高能重离子束和检测样品中的单一原子事件，这些可以使得比通过其他方法可以获得更大的灵敏度和分辨率。

公开(公告)号：US4132892A

公开(公告)日：1979-01-02

申请号：US701683

申请日：1976-07-01

Applicant: Klaus Wittmaack

Inventor： Klaus Wittmaack

IPC: G01Q30/02 ,  G01Q30/04 ,  H01J37/12 ,  H01J37/256 ,  G01N23/00 ,  H01J37/26

CPC classification number: H01J37/256 ,  H01J37/12

Abstract: A raster scanning ion microscope for determining, with a large field of view, the lateral distribution of elements, isotopes and compounds at the surface and in the bulk of solid specimens and for displaying the surface topography of the sample. The scanning ion microscope consists of an ion gun to produce a primary ion beam, a means to focus and raster scan the primary ion beam over the surface of the specimen, a means to form a beam of secondary ions out of all particles sputtered from the specimen, an energy analyzer and a mass spectrometer for secondary ion analysis and a means for optimum transport of the secondary ions from the specimen to the mass spectrometer. Use of a quadrupole mass filter as a mass analyzer reduces restrictions usually faced with magnetic type mass analyzer and allows imaging of the specimen with a large field of view. Moreover non-normal secondary ion extraction and/or non-normal primary ion incidence in combination with low secondary ion extraction voltages result in the capability of the instrument of displaying the surface topography of the specimen.

Abstract translation: 一种光栅扫描离子显微镜，用于在大视野下确定表面和大部分固体样品中元素，同位素和化合物的横向分布，并显示样品的表面形貌。 扫描离子显微镜由离子枪组成，用于产生一次离子束，用于聚焦和光栅扫描一次离子束在试样表面上的手段，一种从所有样品中溅出的所有颗粒形成二次离子束的手段 样品，能量分析仪和用于二次离子分析的质谱仪，以及用于将二次离子从样品最佳输送到质谱仪的手段。 使用四极质量过滤器作为质量分析仪可以减少磁性质量分析仪通常面临的限制，并允许以大视野对样品进行成像。 此外，非正常二次离子提取和/或非正常初级离子入射与低二次离子提取电压的组合导致显示样品的表面形貌的仪器的能力。

公开(公告)号：US3813545A

公开(公告)日：1974-05-28

申请号：US35061673

申请日：1973-04-12

Applicant: EDAX INT INC

Inventor： BARNHART M ,  RUSS J

IPC: H01J37/256 ,  H01J37/26

CPC classification number: H01J37/256

Abstract: An X-ray scan area mapping system for a scanning electron microscope provides a spacial area map display of X-ray events emitted from a specimen within at least one energy range as the specimen is scanned at scanning electron microscope rates by an electron beam. A background X-ray noise reduction circuit enables intensification of the scanning electron microscope cathode-ray tube display upon the occurrence of an X-ray event within the energy range and disables intensification when the time between consecutive X-ray events within the energy range exceeds a predetermined time period. Background X-ray events occur at much slower rates than the X-ray events emitted from the specimen within the energy range, and therefor, a substantial reduction in background noise on the scanning electron microscope display is obtained.

Abstract translation: 用于扫描电子显微镜的X射线扫描区域映射系统提供了当以扫描电子显微镜速率通过电子束扫描样本时，在至少一个能量范围内从样本发射的X射线事件的空间区域图显示。 背景X射线降噪电路能够在能量范围内发生X射线事件时强化扫描电子显微镜阴极射线管显示，并且当能量范围内的连续X射线事件之间的时间超过 预定时间段。 背景技术X射线事件发生在比能量范围内从样本发射的X射线事件慢得多的速度，因此获得扫描电子显微镜显示器上的背景噪声的显着降低。

公开(公告)号：US3760180A

公开(公告)日：1973-09-18

申请号：US3760180D

申请日：1972-10-12

Applicant: SIEMENS AG

Inventor： WEBER U

IPC: G01N23/227 ,  G01Q30/08 ,  G01Q30/16 ,  H01J37/073 ,  H01J37/252 ,  H01J37/256 ,  H01J49/48 ,  G01N23/20 ,  G01T1/36

CPC classification number: G01N23/227 ,  H01J37/073 ,  H01J37/252 ,  H01J37/256 ,  H01J49/488

Abstract: An electron-beam micro-analyzer for investigating solid test specimens and radiation penetrable test specimens is disclosed. The micro-analyzer has an electron-beam generator for directing a focussed electron beam unto the test specimen to release Auger electrons therefrom. An electron spectrometer then separates the released Auger electrons according to the respective kinetic energies thereof and an electron detector detects the Auger electrons of specified energy separated in the spectrometer. The electron-beam generator has a field-emission point cathode having a small radius of curvature and an anode having an opening for passing the electron beam therethrough. A voltage supply applys a voltage to develop an electric field between the anode and the point cathode of sufficient strength to excite the cathode to electron field emission. A deceleration lens disposed intermediate the anode and the test specimen reduces the velocity of the electrons of the electron beam passing from the opening of the anode.

Abstract translation: 公开了一种用于研究固体试样和辐射穿透试样的电子束微分析仪。 微分析仪具有电子束发生器，用于将聚焦的电子束引导到测试样品以从其中释放俄歇电子。 然后电子光谱仪根据其分别的动能分离释放的俄歇电子，电子检测器检测在光谱仪中分离出的特定能量的俄歇电子。 电子束发生器具有具有小的曲率半径的场发射点阴极和具有用于使电子束通过的开口的阳极。 电压源施加电压以在阳极和点阴极之间产生足够强度的电场，以激发阴极到电子场发射。 设置在阳极和测试样本之间的减速透镜降低了从阳极的开口通过的电子束的电子的速度。

公开(公告)号：US3733484A

公开(公告)日：1973-05-15

申请号：US3733484D

申请日：1969-10-29

Applicant: WALTER C MC CRONE ASSOCIATES I

Inventor： BAYARD M

IPC: G05B19/39 ,  G05D3/20 ,  H01J37/256 ,  G01N23/22

CPC classification number: G05D3/20 ,  G05B19/39 ,  G05B2219/42251 ,  H01J37/256

Abstract: An electron microprobe has a holder for a sample to be analyzed. The holder is movable along an X-axis and a Y-axis, each at right angles to the electron beam directed at the sample. Drives, each including an electric motor, are operatively connected to the holder to adjust the position of the holder along the respective axis. There are also electron beam position controls for positioning the beam in a path oriented as desired with respect to the X and Y axes. An electron beam current control enables the quantity of electrons in the beam to be adjusted. A third drive includes an electric motor, and is connected to a reflector to position the reflector with respect to the X-rays emitted from the sample, and with respect to X-ray detectors. The controls and drives are connected to a control matrix through which signals are supplied to the respective controls and drives, as dictated by a computer. Each of the controls and drives produces an analogue feedback signal indicative of the setting thereof. These feedback signals are sent to a selector matrix from which a specific signal is selected, as dictated by the computer, with the selected signal being delivered to the computer through an analogue to digital converter. The X-ray detectors also produce signals which are ultimately delivered to the computer either directly or through the analogue to digital converter. By appropriately programming the computer, the apparatus automatically analyzes the sample for constituents as desired.

Abstract translation: 电子探针具有用于待分析样品的支架。 保持器可沿X轴和Y轴移动，每个与指向样品的电子束成直角。 每个包括电动机的驱动器可操作地连接到保持器以调节保持器沿着相应轴线的位置。 还存在用于将光束定位在相对于X和Y轴根据需要定向的路径中的电子束位置控制。 电子束电流控制使得能够调节光束中的电子量。 第三驱动器包括电动机，并且连接到反射器以相对于从样品发射的X射线以及相对于X射线检测器定位反射器。 控制和驱动器连接到控制矩阵，根据计算机的要求，通过该矩阵将信号提供给相应的控制和驱动。 每个控制和驱动器产生指示其设置的模拟反馈信号。 这些反馈信号被发送到选择器矩阵，根据计算机的要求，选择器矩阵被选择为特定信号，所选择的信号通过模数转换器传送到计算机。 X射线检测器还产生最终直接或通过模数转换器传送到计算机的信号。 通过对计算机进行适当编程，设备根据需要自动分析样品的成分。

公开(公告)号：US3660655A

公开(公告)日：1972-05-02

申请号：US3660655D

申请日：1969-09-08

Applicant: ASS ELECT IND

Inventor： WARDELL IAN ROBERT MICHAEL

IPC: G01Q60/44 ,  H01J37/256 ,  H01J49/14 ,  H01J37/26 ,  B01D59/44 ,  H01J39/34

CPC classification number: H01J37/256 ,  H01J49/14

Abstract: In micro-analyzer apparatus of the kind in which material to be analyzed is arranged as a target of an ion probe and ionized particles obtained from the target are analyzed in a mass spectrometer, accuracy of analysis is improved by analyzing not secondary ions sputtered from the target but neutral atoms which are collected and passed to the mass spectrometer through an ionizer. Several possible forms of ionizer for ionizing the sputtered neutrals are also disclosed.

Abstract translation: 在质谱仪中分析将待分析材料配置为离子探针的目标物和从目标物获得的离子化粒子的微分析装置，通过分析不分散的二次离子来提高分析精度 目标但中性原子被收集并通过离子发生器传递到质谱仪。 还公开了用于电离溅射中性粒子的几种可能形式的离子发生器。

公开(公告)号：US3191028A

公开(公告)日：1965-06-22

申请号：US27487863

申请日：1963-04-22

Applicant: CREWE ALBERT V

Inventor： CREWE ALBERT V

IPC: G01Q30/04 ,  H01J37/141 ,  H01J37/15 ,  H01J37/256

CPC classification number: H01J37/256 ,  H01J37/141 ,  H01J37/15

公开(公告)号：US09966220B2

公开(公告)日：2018-05-08

申请号：US15411194

申请日：2017-01-20

Applicant: Gatan, Inc.

Inventor： Colin Trevor ,  Matthew Lent ,  Alexander Jozef Gubbens ,  Edward James ,  Ray Dudley Twesten ,  Roice Joseph ,  SanJay Parekh ,  Thomas Sha

IPC: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J47/00 ,  G21K7/00 ,  G01N23/00 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28

CPC classification number: H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/05 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.

公开(公告)号：US09018596B2

公开(公告)日：2015-04-28

申请号：US14366564

申请日：2012-12-19

Applicant: Universiteit Antwerpen

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256

CPC classification number: H01J37/04 ,  H01J3/02 ,  H01J3/021 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256 ,  H01J37/261 ,  H01J2237/06383 ,  H01J2237/2614

Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.

Abstract translation: 描述了一种用于对带电粒子束产生装置中沿着光束轴传播的带电粒子波进行轨道角动量的装置。 该装置包括支撑元件，该支撑元件具有适于传输沿着光束轴传播的带电粒子波的目标区域和用于沿着具有位于目标区域中的自由端部分的细长轮廓感应磁通量的感应装置，并且感应装置是 适于在细长轮廓中提供磁通量，以便当透射通过目标区域时引起带电粒子波相位相对于光束轴的角度梯度。 还公开了相应的方法，以及其在电子显微镜中的应用。