Test interconnect for bumped semiconductor components and method of fabrication
    44.
    发明授权
    Test interconnect for bumped semiconductor components and method of fabrication 失效
    凸起半导体元件的测试互连和制造方法

    公开(公告)号:US06980017B1

    公开(公告)日:2005-12-27

    申请号:US09266237

    申请日:1999-03-10

    Abstract: An interconnect for testing semiconductor components includes a substrate, and contacts on the substrate for making temporary electrical connections with bumped contacts on the components. Each contact includes a recess and a pattern of leads cantilevered over the recess configured to electrically engage a bumped contact. The leads are adapted to move in a z-direction within the recess to accommodate variations in the height and planarity of the bumped contacts. In addition, the leads can include projections for penetrating the bumped contacts, a non-bonding outer layer for preventing bonding to the bumped contacts, and a curved shape which matches a topography of the bumped contacts. The leads can be formed by forming a patterned metal layer on the substrate, by attaching a polymer substrate with the leads thereon to the substrate, or be etching the substrate to form conductive beams.

    Abstract translation: 用于测试半导体部件的互连件包括基板和基板上的触点,用于与部件上的凸起触点进行临时电连接。 每个接触件包括一个凹部和悬在该凹部上的引线图案,其构造成电接合凸起的触点。 引线适于在凹部内在z方向上移动以适应凸起接触件的高度和平面度的变化。 此外,引线可以包括用于穿透凸起的触点的突起,用于防止与凸起的触点接合的非结合外层以及与凸起的触点的形状相匹配的弯曲形状。 可以通过在基板上形成图案化的金属层,通过将聚合物基板与其上的引线附接到基板上,或者蚀刻基板以形成导电梁来形成引线。

    Apparatuses configured to engage a conductive pad
    48.
    发明申请
    Apparatuses configured to engage a conductive pad 失效
    被配置为接合导电垫的装置

    公开(公告)号:US20040095158A1

    公开(公告)日:2004-05-20

    申请号:US10703763

    申请日:2003-11-07

    Abstract: A method of engaging electrically conductive test pads on a semiconductor substrate having integrated circuitry for operability testing thereof includes: a) providing an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate; b) engaging the grouping of apexes with the single test pad on the semiconductor substrate; and c) sending an electric signal between the grouping of apexes and test pad to evaluate operability of integrated circuitry on the semiconductor substrate. Constructions and methods are disclosed for forming testing apparatus comprising an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate.

    Abstract translation: 一种在具有用于其可操作性测试的集成电路的半导体衬底上接合导电测试焊盘的方法包括:a)提供具有外表面的接合探针,该外表面包括彼此靠近定位的多个导电突出顶点的组, 半导体衬底上的单个测试焊盘; b)使顶点的分组与半导体衬底上的单个测试焊盘接合; 以及c)在顶点组和测试垫之间发送电信号,以评估半导体衬底上的集成电路的可操作性。 公开了用于形成测试装置的结构和方法,所述测试装置包括具有外表面的接合探针,所述外表面包括彼此靠近地定位的多个导电突出顶点的组,以接合半导体衬底上的单个测试焊盘。

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